| Patent application number | Description | Published |
|---|
| 20100171037 | COMPACT SCANNING ELECTRON MICROSCOPE - A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder. | 07-08-2010 |
| 20100230590 | Compact Scanning Electron Microscope - A compact electron microscope is robust, simple to operate, and preferably requires no special utilities. Imaging can begin shortly after a sample is inserted. A preferred simplified design includes permanent magnets for focusing, lack a vacuum controller and vacuum gauge, and uses a backscattered electron detector and no secondary electron detector. | 09-16-2010 |
| 20100258721 | DARK FIELD DETECTOR FOR USE IN AN ELECTRON MICROSCOPE - The invention relates to a dark-field detector for an electron microscope. The detector comprises a photodiode for detecting the scattered electrons, with an inner electrode and an outer electrode. As a result of the resistive behaviour of the surface layer the current induced by a scattered electron, e.g. holes, are divided over the electrodes, so that a current I | 10-14-2010 |
| 20110049382 | PATTERN MODIFICATION SCHEMES FOR IMPROVED FIB PATTERNING - An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated. | 03-03-2011 |
| 20110133083 | COMPACT SCANNING ELECTRON MICROSCOPE - A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder. | 06-09-2011 |
| 20110169116 | Radiation Detector - The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope. The detector is a PIN photodiode with a thin layer of pure boron connected to the p | 07-14-2011 |
| 20110266440 | SEM Imaging Method - A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps:
| 11-03-2011 |
| 20130015351 | CLUSTERING OF MULTI-MODAL DATA - Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence. | 01-17-2013 |
| 20130037714 | Charged-Particle Microscopy Imaging Method - Charged-particle microscopy includes
| 02-14-2013 |
| 20130037715 | CHARGED-PARTICLE MICROSCOPE PROVIDING DEPTH-RESOLVED IMAGERY - A method of examining a sample using a charged-particle microscope, comprising the following steps:
| 02-14-2013 |
| 20130099114 | DETECTOR FOR USE IN A CHARGED PARTICLE APPARATUS - A detector with a Silicon Diode and an amplifier, and a feedback element in the form of, for example, a resistor or a diode, switchably connected to the output of the amplifier. When the feedback element is selected via a switch, the detector operates in a Current Measurement Mode for determining electron current, and when the element is not selected the detector operates in its well-known Pulse Height Measurement Mode for determining the energy of X-ray quanta. | 04-25-2013 |
| 20130254948 | Scanning Method for Scanning a Sample with a Probe - The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa. | 09-26-2013 |
| 20130277555 | Method for Analyzing an EDS Signal - The invention relates to a method for analyzing the output signal of a silicon drift detector (SDD). A SDD is used for detecting X-rays emitted by a sample as a result of impinging radiation. | 10-24-2013 |
