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| 20080248403 | METHOD AND SYSTEM FOR IMPROVING CRITICAL DIMENSION UNIFORMITY - A method for improving critical dimension uniformity of a wafer includes exposing a plurality of mask patterns on a first plurality of substrates at predetermined locations with common splits conditions of focus and exposure dose for each of the first plurality of substrates to form a plurality of perturbed wafers; measuring a critical dimension of the plurality of mask patterns at each of the predetermined locations for each of the plurality of perturbed wafers; averaging the critical dimension measured at each of the predetermined locations over the plurality of perturbed wafers to form a perturbed critical dimension map; measuring a sidewall angle of the plurality of mask patterns; averaging the sidewall angle measured to form a perturbed sidewall angle map; and providing the perturbed critical dimension map and the perturbed sidewall angle map to an exposure tool. | 10-09-2008 |
| 20090142701 | DOUBLE PATTERNING STRATEGY FOR CONTACT HOLE AND TRENCH - A method of lithography patterning includes forming a first resist pattern on a substrate, the first resist pattern including at least one opening therein on the substrate; curing the first resist pattern; forming a second resist pattern on the substrate; forming a material layer on the substrate; and removing the first and second resist patterns to expose the substrate. | 06-04-2009 |
| 20100201961 | System For Improving Critical Dimension Uniformity - A system for improving substrate critical dimension uniformity is described. The system includes an exposing means for exposing a plurality of mask patterns on a first plurality of substrates at predetermined locations with common splits of focus ({F | 08-12-2010 |
| 20110193202 | METHODS TO ACHIEVE 22 NANOMETER AND BEYOND WITH SINGLE EXPOSURE - Apparatus and methods are disclosed herein for fabricating semiconductor device features with a half-pitch node of 22 nm and beyond using single exposure and single etch (1P1E) photolithography techniques. The method includes exposing in a single exposure a photoresist layer to the exposure source through a photolithography mask where the photolithography mask has on it an island pattern of a material having high percentage transmission. The photoresist layer is developed using a negative tone developer to form a hole pattern in the photoresist layer. The 1P1E does not require the second photo exposure of the double patterning method. Furthermore, the method circumvents the island pattern collapsing issues and the need for strong illumination associated with exiting single 1P1E processes. | 08-11-2011 |
| 20110212403 | METHOD AND APPARATUS FOR ENHANCED DIPOLE LITHOGRAPHY - Provided is a lithography system that includes a source for providing energy, an imaging system configured to direct the energy onto a substrate to form an image thereon, and a diffractive optical element (DOE) incorporated with the imaging system, the DOE having a first dipole located in a first direction and a second dipole located in the first direction or a second direction perpendicular the first direction. The first dipole includes a first energy-transmitting region spaced a first distance from a center of the DOE. The second dipole includes a second energy-transmitting region spaced a second distance from the center of the DOE. The first distance is greater than the second distance. | 09-01-2011 |
| 20110284966 | Structure and Method for Alignment Marks - The alignment mark and method for making the same are described. In one embodiment, a semiconductor structure includes a plurality of gate stacks formed on the semiconductor substrate and configured as an alignment mark; doped features formed in the semiconductor substrate and disposed on sides of each of the plurality of gate stacks; and channel regions underlying the plurality of gate stacks and free of channel dopant. | 11-24-2011 |
| 20110285036 | OVERLAY MARK ASSISTANT FEATURE - A method and apparatus for alignment are disclosed. An exemplary apparatus includes a substrate having an alignment region; an alignment feature in the alignment region of the substrate; and a dummy feature disposed within the alignment feature. A dimension of the dummy feature is less than a resolution of an alignment mark detector. | 11-24-2011 |
| 20110294286 | REVERSE PLANARIZATION METHOD - A method for fabricating an integrated circuit device is disclosed. The method includes providing a substrate; forming a semiconductor feature over the substrate; forming a first photoresist layer over the substrate; performing a lithography process on the first photoresist layer, such the first photoresist layer includes an opening therein that exposes the semiconductor feature; performing a stabilization process on the first photoresist layer; forming a second photoresist layer over the first photoresist layer, wherein the second photoresist layer fills the opening; and etching back the first and second photoresist layers until the semiconductor feature is exposed. | 12-01-2011 |
| 20130330904 | OVERLAY MARK ASSISTANT FEATURE - A method and apparatus for alignment are disclosed. An exemplary apparatus includes a substrate having an alignment region; an alignment feature in the alignment region of the substrate; and a dummy feature disposed within the alignment feature. A dimension of the dummy feature is less than a resolution of an alignment mark detector. | 12-12-2013 |
| 20140272714 | DOUBLE PATTERNING STRATEGY FOR CONTACT HOLE AND TRENCH IN PHOTOLITHOGRAPHY - A method of lithography patterning includes forming a first resist pattern on a substrate, wherein the first resist pattern including a plurality of openings. A second resist pattern is formed on the substrate and within the plurality of openings of the first resist pattern, wherein the second resist pattern includes at least one opening therein on the substrate. The first resist pattern is removed to uncover the substrate underlying the first resist pattern. | 09-18-2014 |
| 20150248068 | Method and Structure for Lithography Processes with Focus Monitoring and Control - A method for lithography exposing process is provided. The method includes performing a first lithography exposing process to a resist layer using a mask having a focus-sensitive pattern and an energy-sensitive pattern; measuring critical dimensions (CDs) of transferred focus-sensitive pattern and transferred energy-sensitive pattern on the resist layer; extracting Bossung curves from the CDs; and determining slops of the Bossung curves. | 09-03-2015 |
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| 20110059407 | DOUBLE PATTERNING STRATEGY FOR FORMING FINE PATTERNS IN PHOTOLITHOGRAPHY - A method of lithography patterning includes forming a first resist pattern over a substrate, baking the first resist features, hardening the first resist features, forming a second resist layer within the hardened first resist features, and patterning the second resist layer to form at least one second resist feature between the hardened first features. | 03-10-2011 |
| 20120044679 | POINT LIGHT SOURCE AND LIGHT SOURCE MODULE USING THE SAME - A point light source includes a light-emitting portion, a first lead and a second lead. The first lead and the second lead are electrically connected to the light-emitting portion. The first lead and the second lead respectively have a wedging portion. The wedging portions can be matched with each other. A light source module using the point light source is also provided. The light source module includes at least one light source assembly. Each light source assembly includes a plurality of the point light sources connected in series. Adjacent two point light sources are wedged to each other in series by a combination of the wedging portions of the adjacent first lead and second lead. | 02-23-2012 |
| 20120146159 | STRUCTURE AND METHOD FOR OVERLAY MARKS - The overlay mark and method for making the same are described. In one embodiment, a semiconductor overlay structure includes gate stack structures formed on the semiconductor substrate and configured as an overlay mark, and a doped semiconductor substrate disposed on both sides of the gate stack structure that includes at least as much dopant as the semiconductor substrate adjacent to the gate stack structure in a device region. The doped semiconductor substrate is formed by at least three ion implantation steps. | 06-14-2012 |
| 20130271031 | COLOR TEMPERATURE AND ILLUMINATION ADJUSTING SYSTEM, AND METHOD THEREOF - A temperature and illumination adjusting system, including: a temperature and illumination adjusting device, including a CPU, receiving a temperature value and an illumination value, and generating a first PWM value and a second PWM value according to a first formula and a second formula; and a communication unit, outputting the first PWM value and the second PWM value; and a lamp device, including a lamp communication unit, receiving the first PWM value and the second PWM value; a first light module; a second light module; a first PWM driving unit, driving the first light module with the first PWM value; a second PWM driving unit, driving the second light module with the second PWM value, wherein the outputs of the first light module and the second light module have different color temperature. | 10-17-2013 |
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| 20130093331 | LAMPS - An embodiment of the invention provides a lamp comprising a control circuit and a light emitting device. The light emitting device comprises a plurality of light emitting units with different wavelengths. The control circuit calibrates a control signal according to an environment light to adjust a light spectrum of the light emitting device by controlling the luminance of each light emitting unit. | 04-18-2013 |
| 20130093334 | LAMPS AND ILLUMINATING SYSTEM - A lamp comprising a light emitting device and a controller is disclosed. The controller receives a control signal from a handheld device and switches the light emitting device according to the control signal such that the light emitting device operates in a light emitting mode corresponding to the control signal, in which the control signal is generated by the handheld device according to real-time information. | 04-18-2013 |
| 20130093344 | LAMPS AND CONTROL CIRCUIT - An embodiment of the invention provides a lamp comprising a first emitting device, a second emitting device, and a control signal generation device. The control signal generation device generates a first control signal and a second control signal to control the first emitting device and the second emitting device, so that a first light flux generated by the first emitting device is equivalent to a second light flux generated by the second emitting device, wherein the second control signal is generated according to the first control signal. | 04-18-2013 |
| 20130093349 | DRIVING CIRCUIT AND LAMPS - The invention relates to a driving circuit comprising a first bridge circuit, a second bridge circuit, a first protection device and a second protection device. The first bridge circuit comprising a first positive input terminal, a first negative input terminal, a first positive output terminal and a first negative output terminal is coupled to an AC voltage source to output a first voltage. The second bridge circuit comprising a second positive input terminal, a second negative input terminal, a second positive output terminal and a second negative output terminal is coupled to the AC voltage source to output a second voltage. The second and the first negative output terminals are both coupled to the ground potential. The first protection device is coupled between the second positive input terminal and the AC voltage source. The second protection device is coupled between the second negative input terminal and the AC voltage source. | 04-18-2013 |
| 20130135333 | LIGHT ADJUSTMENT DEVICE AND LIGHT SYSTEM INCLUDING THE SAME - A light system includes a lamp, a user operation interface, a control unit and a communication unit. The user operation interface is adapted to be used by a user to select a brightness value or a color temperature value, wherein the user operation interface includes a display unit and a touch control unit. The display unit is used to output a graphical interface. The touch control unit is used to detect a touch action upon the graphical interface of the display unit. The control unit is electrically connected to the user operation interface for receiving and processing a selection of the brightness value or the color temperature value from the user operation interface. The communication unit is electrically connected to the control unit for transmitting the selection of the brightness value or the color temperature value to the lamp via a wireless protocol. | 05-30-2013 |
| 20130147354 | ILLUMINATION CONTROLLING CIRCUIT AND ILLUMINATION SYSTEM - The invention discloses an illumination controlling circuit coupled between a household electricity input and an illumination lamp. The illumination controlling circuit includes a dimmer module, a sampling-and-holding circuit, a differential circuit, an integrator circuit and a clamping circuit. The dimmer circuit is used for generating a dimming signal which includes a plurality of waveform pulses. The sampling-and-holding circuit samples from the dimming signal, so as to obtain an average waveform pulse. The differential circuit is used for extracting a voltage difference of the average waveform pulse. The integrator circuit performs integration on the average waveform pulse according to the voltage difference, so as to generate a direct current voltage signal. When a level of the direct current voltage signal exceeds a threshold voltage level of the clamping circuit, the direct current voltage signal is used for driving the illumination lamp. | 06-13-2013 |
| 20130169183 | ILLUMINATION CONTROL CIRCUIT AND ILLUMINATION CONTROL METHOD - The invention discloses an illumination control circuit and an illumination control method. The illumination control method includes modulating an alternating current input signal and accordingly generating a dimming signal, which includes several waveform pulses each with an adjustable conduction angles; continuously sampling the waveform pulses of the dimming signal and forming an average waveform pulse from the sampled waveform pulses; extracting the average waveform pulse, which has an average conduction angle corresponding to the conduction angles of the waveform pulses; performing an integration on the sampled average waveform pulse and accordingly generating a current-controlling signal; and driving an illumination lamp according to the current-controlling signal. | 07-04-2013 |
| 20130200814 | LED LIGHTING APPARATUS AND DIMMING METHOD THEREOF - An LED lighting apparatus and a dimming method thereof are disclosed. The LED lighting apparatus is coupled to a power source through a power switch. The method includes providing a first lighting unit and a second lighting unit; detecting whether or not the power switch has been turned on; and gradually adjusting a light mixing ratio between the first lighting unit and the second lighting unit according to a turn-on duration of the power switch and storing a color temperature value, accordingly. | 08-08-2013 |
| 20130242570 | LIGHT-EMITTING DEVICE - A light-emitting device includes a lower housing, a supporting frame, a light-emitting component, and an upper housing. The lower housing has a capacious recess and a pair of first fastening parts. The capacious recess is located between the first fastening parts. The supporting frame is disposed in the capacious recess. The light-emitting component is disposed on the supporting frame. The upper housing has a pair of second fastening parts. The second fastening parts and the first fastening parts are fastened each other, so that the upper housing covering the supporting frame and the light-emitting component is combined with the lower housing. | 09-19-2013 |
| 20130307433 | CONTROL METHOD OF LAMP - The control method comprises the following steps. Firstly, whether a touch event occurs in a control device is determined. Then, responding to a color temperature set and a brightness set from the control device, a first PWM and a second PWM is generated. Then, whether the lamp connects with to the control device is determined. Then, the first PWM and the second PWM is packaged in a color control package if the lamp connects with to the control device. Then, the color control package is transmitted to the lamp in wireless. | 11-21-2013 |
| 20140063820 | LAMP TUBE - A lamp tube includes a light transmission tube, a heat dissipation structure, a die bonding substrate and at least one light source. The light transmission tube includes first guiding rails disposed on opposite positions of the inner wall thereof. The first guising rails and the inner wall of the light transmission tube form first grooves. The heat dissipation structure inserts into the light transmission tube, and includes a die bonding area, extending arms downwardly extended from opposite sides of the heat dissipation structure, and connecting arms connected to the extending arms. Each of the extending arms includes second guiding rails and second grooves. The second guiding rail is engaged with the first groove, and the first guiding rail is engaged with the second groove. The die bonding substrate is placed on the die bonding area. The light source is placed on the die bonding substrate. | 03-06-2014 |
| 20140078771 | LIGHT DEVICE - A light device includes a light transmission tube, a heat sink, a light bar, and two end caps. The light transmission tube has two securing parts. Each of the securing parts includes a first rib and a second rib, and a guide-track groove is formed between the first and second ribs. The heat sink includes a first plate body and a second plate body. The first plate body is curved and abutted on an inner wall of the light transmission tube, and the second plate body is curved toward the first plate body. Two terminals of the first plate body are connected to two terminals of the second plate body to form two connecting parts for coupling with the guide-track grooves. The light bar is disposed on the second plate body. The end caps are respectively connected to two terminals of the light transmission tube. | 03-20-2014 |
| 20140103824 | LAMP - A lamp includes a lamp tube, a carrier, a light bar circuit board, a driver circuit board, a plurality of first luminous elements and a parallel-connected type luminous unit. The carrier is accommodated in the lamp tube. The light bar circuit board is disposed on the carrier. The driver circuit board is disposed on the carrier and adjoins the light bar circuit board. The first luminous elements are disposed on the light bar circuit board. The parallel-connected type luminous unit is disposed on the driver circuit board, and includes a plurality of luminous element groups connected in parallel. | 04-17-2014 |
| 20140111105 | DIMMER CIRCUIT AND LIGHTING APPARATUS USING THE SAME - A dimmer circuit and a lighting apparatus using the same are provided. The dimmer circuit comprises a dimmer, a rectifier, a sample-and-hold unit, an integral unit and a current holding circuit. The dimmer is coupled to an AC for modulating the AC into an alternating signal. The rectifier couples the dimmer and the AC for rectifying the alternating signal into a DC signal. The sample-and-hold unit is coupled to the rectifier for sampling the DC signal to obtain an average positive wave pulse. The integral unit is coupled to the sample-and-hold unit for integrating the average positive wave pulse to generate a DC voltage. The current holding circuit comprises a switch and a bleeder. The current holding circuit determines the on/off state of the switch according to a comparison between the DC voltage and a reference voltage, such that the DC signal passes through the bleeder or the switch. | 04-24-2014 |
| 20140117851 | ILLUMINATION SYSTEM - An illumination system includes a lighting unit, a rectifier circuit, a drive circuit and a time control circuit. The rectifier circuit rectifies an AC power from an external power source to a DC power. The drive circuit is configured for receiving the DC power and generating a first driving current. The control circuit includes a resistive element and an energy storage element. The energy storage element is electrically coupled to the resistive element, and the energy storage element is configured for charging while the external power source is supplying the power to the illumination system and generating a second driving current to the lighting unit. When the external power source turns off, the energy storage element generates a discharging current to the lighting unit with the resistive element to extend the time duration which a bright state of the lighting unit goes to a dark state. | 05-01-2014 |
| 20140191679 | DIMMING CIRCUIT AND LIGHTING DEVICE USING THE SAME - A dimming circuit and a lighting device using the same are provided. The dimming circuit comprises an interface trigger unit, an average duty cycle calculating unit, a control voltage calculating unit and a comparing unit. The interface trigger unit receives an on-time of each pulse width from each period in a PWM signal. The average duty cycle calculating unit is coupled to the interface trigger unit and calculates a ratio of the on-time to the period. The control voltage calculating unit is coupled to the average duty cycle calculating unit, and calculates a desired voltage according to the ratio. The comparing unit is coupled to the control voltage calculating unit, and sends the desired voltage and a differential voltage to a driving circuit. | 07-10-2014 |
| 20140214362 | METHOD AND SYSTEM OF DETECTING FLICKERING FREQUENCY OF AMBIENT LIGHT SOURCE - A method of detecting a flickering frequency of an ambient light source includes the following steps. First, a light intensity of the light source is sensed in a predetermined time period according to a sampling frequency to obtain a plurality of sample values. Then, the sample values are calculated to obtain a median value. Next, the sample values are binarized according to a result of a comparison between the sample values and the median value to obtain a first sequence. The first sequence is differentiated to obtain a second sequence, and the second sequence includes numbers −1, 0, and 1. Then, a distance between the same numbers in the second sequence is calculated, and the sampling frequency is divided by the distance to obtain the flickering frequency of the ambient light source. A system of detecting a flickering frequency of an ambient light source is also disclosed herein. | 07-31-2014 |
| 20140346964 | APPLICATION CIRCUIT AND CONTROL METHOD THEREOF - An application circuit includes a dynamic load circuit and a control circuit. The dynamic load circuit is electrically connected to a light source. The control circuit is electrically connected to the dynamic load circuit and a TRIAC. The control circuit controls the load status of the dynamic load circuit based on output current from the TRIAC, so as to turn on the light source. | 11-27-2014 |
| 20150015154 | LIGHT-EMITTING DIODE LIGHT TUBE DRIVING CIRCUIT - A light-emitting diode (LED) light tube driving circuit includes a LED driver and a rectifier unit. The LED driver is configured for receiving an operating voltage to drive at least one LED. The rectifier unit has a first input/output terminal and a second input/output terminal and is electrically coupled to an external alternating-current power source selectively by the first input/output terminal and the second input/output terminal. The rectifier unit is configured for providing the operating voltage to the LED driver. The rectifier unit further includes a first rectifier diode and a second rectifier diode. | 01-15-2015 |
| 20150102727 | LED DRIVER CIRCUIT CAPABLE OF EXTENDING A LIFESPAN OF THE LED DRIVER AND REDUCING MANUFACTURING COST - An LED driver circuit includes a first driver, a second driver, a switch, a first detection module, a second detection module and a control module. The first driver provides a first driving current according to a supply voltage. The second driver provides a second driving current according to the supply voltage. The switch is selectively coupled to the first or second driver. An LED emits light according to the first or second driving current. When the switch is coupled to the first driver, the first detection module keeps detecting the first driving current and outputting a first sensing signal. When the switch is coupled to the second driver, the second detection module keeps detecting the second driving current and outputting a second sensing signal. The control module outputs a first or second control signal according to the first or second sensing signal for controlling the switch. | 04-16-2015 |
