Patent application number | Description | Published |
20090166181 | SPUTTER DEPOSITION OF METAL ALLOY TARGETS CONTAINING A HIGH VAPOR PRESSURE COMPONENT - Compositions and methods for enabling sputter deposition from targets containing high vapor pressure compounds are describe. An element or compound with a high vapor pressure may be combined with an element or compound with a lower vapor pressure to form a low vapor pressure compound. An alloy sputtering target may then be formed by combining the low vapor pressure compound with a metal that serves as the main material of the sputter target. In some instances, the low vapor pressure compound may comprise MgB | 07-02-2009 |
20100155887 | Common plate capacitor array connections, and processes of making same - A process of forming a semiconductive capacitor device for a memory circuit includes forming a first capacitor cell recess and a second capacitor cell recess that are spaced apart by a capacitor cell boundary of a first height. The process includes lowering the first height of the capacitor cell boundary to a second height. A common plate capacitor bridges between the first recess and the second recess over the boundary above the second height and below the first height. | 06-24-2010 |
20100244252 | Self Forming Metal Fluoride Barriers for Fluorinated Low-K Dielectrics - A device and method of forming fluoride metal barriers at an interface of a fluorinated low-K dielectric and Cu or Cu alloy interconnects is disclosed. The fluoride metal barriers may prevent interconnects from reacting with the fluorinated low-K dielectric. The method may include depositing a thin film of metal or metal alloy on the fluorinated low-K dielectric. The thin film may include a metal or metal alloying element that reacts with free fluorine and/or fluorine compounds from the fluorinated low-K dielectric to form fluoride metal barriers. | 09-30-2010 |
20110147888 | METHODS TO FORM MEMORY DEVICES HAVING A CAPACITOR WITH A RECESSED ELECTRODE - Methods to form memory devices having a MIM capacitor with a recessed electrode are described. In one embodiment, a method of forming a MIM capacitor with a recessed electrode includes forming an excavated feature defined by a lower portion that forms a bottom and an upper portion that forms sidewalls of the excavated feature. The method includes depositing a lower electrode layer in the feature, depositing an electrically insulating layer on the lower electrode layer, and depositing an upper electrode layer on the electrically insulating layer to form the MIM capacitor. The method includes removing an upper portion of the MIM capacitor to expose an upper surface of the electrode layers and then selectively etching one of the electrode layers to recess one of the electrode layers. This recess isolates the electrodes from each other and reduces the likelihood of a current leakage path between the electrodes. | 06-23-2011 |
20120077053 | BARRIER LAYERS - Methods for fabricating integrated circuit electrical interconnects and electrical interconnects are provided. Methods include providing a substrate having a surface, the surface having a feature formed therein wherein the feature is a trench or via, depositing a metal layer, the metal of the metal layer being selected from the group consisting of Ru, Co, Pt, Ir, Pd, Re, and Rh, onto surfaces of the feature, depositing a copper seed layer wherein the copper seed layer comprises a dopant and the dopant is selected from the group consisting of Mn, Mg, MgB | 03-29-2012 |
20120258588 | SELF FORMING METAL FLUORIDE BARRIERS FOR FLUORINATED LOW-K DIELECTRICS - A device and method of forming fluoride metal barriers at an interface of a fluorinated low-K dielectric and Cu or Cu alloy interconnects is disclosed. The fluoride metal barriers may prevent interconnects from reacting with the fluorinated low-K dielectric. The method may include depositing a thin film of metal or metal alloy on the fluorinated low-K dielectric. The thin film may include a metal or metal alloying element that reacts with free fluorine and/or fluorine compounds from the fluorinated low-K dielectric to form fluoride metal barriers. | 10-11-2012 |
20140019716 | PLATEABLE DIFFUSION BARRIER TECHNIQUES - Techniques are disclosed for forming a directly plateable diffusion barrier within an interconnect structure to prevent diffusion of interconnect fill metal into surrounding dielectric material and lower metal layers. The barrier can be used in back-end interconnect metallization processes and, in an embodiment, renders a seed layer unnecessary. In accordance with various example embodiments, the barrier can be implemented, for instance, as: (1) a single layer of ruthenium silicide (RuSi | 01-16-2014 |
20140084414 | VERTICAL MEANDER INDUCTOR FOR SMALL CORE VOLTAGE REGULATORS - Vertical meander inductors for small core voltage regulators and approaches to fabricating vertical meander inductors for small core voltage regulators are described. For example, a semiconductor die includes a substrate. An integrated circuit is disposed on an active surface of the substrate. An inductor is coupled to the integrated circuit. The inductor is disposed conformal with an insulating layer disposed on an essentially planar surface of the substrate. The insulating layer has an undulating topography. | 03-27-2014 |
20140091467 | FORMING BARRIER WALLS, CAPPING, OR ALLOYS /COMPOUNDS WITHIN METAL LINES - Described herein are techniques structures related to forming barrier walls, capping, or alloys/compounds such as treating copper so that an alloy or compound is formed, to reduce electromigration (EM) and strengthen metal reliability which degrades as the length of the lines increases in integrated circuits. | 04-03-2014 |
20140138713 | PASSIVATION LAYER FOR FLEXIBLE DISPLAY - Embodiments of the present disclosure are directed towards passivation techniques and configurations for a flexible display. In one embodiment, a flexible display includes a flexible substrate, an array of display elements configured to emit or modulate light disposed on the flexible substrate, and a passivation layer including molecules of silicon (Si) bonded with oxygen (O) or nitrogen (N), the passivation layer being disposed on the array of display elements to protect the array of display elements from environmental hazards. | 05-22-2014 |
20140153720 | QUANTUM KEY DISTRIBUTION (QSD) SCHEME USING PHOTONIC INTEGRATED CIRCUIT (PIC) - Described herein are techniques related to implementation of a quantum key distribution (QKD) scheme by a photonic integrated circuit (PIC). For example, the PIC is a component in a wireless device that is used for quantum communications in a quantum communications system. | 06-05-2014 |
20140168355 | WEARABLE IMAGING SENSOR FOR COMMUNICATIONS - A wearable image sensor is described. In one example, an apparatus includes a camera to capture images with a wide field of view, a data interface to send camera images to an external device, and a power supply to power the camera and the data interface. The camera, data interface, and power supply are attached to a garment that is wearable. | 06-19-2014 |
20140176182 | SHUT-OFF MECHANISM IN AN INTEGRATED CIRCUIT DEVICE - Described herein are technologies related to self-disabling feature of a integrated circuit device to avoid unauthorized access to stored data information | 06-26-2014 |
20140210098 | TECHNIQUES FOR ENHANCING FRACTURE RESISTANCE OF INTERCONNECTS - Techniques and structure are disclosed for enhancing fracture resistance of back-end interconnects and other such interconnect structures by increasing via density. Increased via density can be provided, for example, within the filler/dummified portion(s) of adjacent circuit layers within a die. In some cases, an electrically isolated (floating) filler line of an upper circuit layer may include a via which lands on a floating filler line of a lower circuit layer in a region corresponding to where the filler lines cross/intersect. In some such cases, the floating filler line of the upper circuit layer may be formed as a dual-damascene structure including such a via. In some embodiments, a via similarly may be provided between a floating filler line of the upper circuit layer and a sufficiently electrically isolated interconnect line of the lower circuit layer. The techniques/structure can be used to provide mechanical integrity for the die. | 07-31-2014 |