Patent application number | Description | Published |
20090222785 | METHOD FOR SHAPE AND TIMING EQUIVALENT DIMENSION EXTRACTION - An integrated circuit (IC) design method includes providing an IC layout contour based on an IC design layout of an IC device and IC manufacturing data; generating an effective rectangle layout to represent the IC layout contour; and simulating the IC device using the effective rectangular layout. | 09-03-2009 |
20100095253 | TABLE-BASED DFM FOR ACCURATE POST-LAYOUT ANALYSIS - Disclosed is a system and method for integrated circuit designs and post layout analysis. The integrated circuit design method includes providing a plurality of IC devices with various design dimensions; collecting electrical performance data of the IC devices; extracting equivalent dimensions of the IC devices; generating a shape related model to relate the equivalent dimensions to the electrical performance data of the IC devices; and creating a data refinement table using the equivalent dimensions and the electrical performance data. | 04-15-2010 |
20110124193 | CUSTOMIZED PATTERNING MODULATION AND OPTIMIZATION - The present disclosure provides one embodiment of an integrated circuit (IC) design method. The method includes providing an IC design layout of a circuit; applying an electrical patterning (ePatterning) modification to the IC design layout according to an electrical parameter of the circuit and an optical parameter of IC design layout; and thereafter fabricating a mask according to the IC design layout. | 05-26-2011 |
20110230998 | MODEL IMPORT FOR ELECTRONIC DESIGN AUTOMATION - Methods and systems for providing processing parameters in a secure format are disclosed. In one aspect, a method for providing semiconductor fabrication processing parameters to a design facility is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a model from the set of processing parameters; converting the model into a corresponding set of kernels; converting the set of kernels into a corresponding set of matrices; and communicating the set of matrices to the design facility. In another aspect, a method for providing semiconductor fabrication processing parameters is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a processing model from the set of processing parameters; encrypting the processing model into a format for use with a plurality of EDA tools; and communicating the encrypted processing model format to a design facility. | 09-22-2011 |
20110231804 | MODEL IMPORT FOR ELECTRONIC DESIGN AUTOMATION - Methods and systems for providing processing parameters in a secure format are disclosed. In one aspect, a method for providing semiconductor fabrication processing parameters to a design facility is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a model from the set of processing parameters; converting the model into a corresponding set of kernels; converting the set of kernels into a corresponding set of matrices; and communicating the set of matrices to the design facility. In another aspect, a method for providing semiconductor fabrication processing parameters is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a processing model from the set of processing parameters; encrypting the processing model into a format for use with a plurality of EDA tools; and communicating the encrypted processing model format to a design facility. | 09-22-2011 |
20110243424 | METHOD AND APPARATUS FOR MONITORING MASK PROCESS IMPACT ON LITHOGRAPHY PERFORMANCE - The present disclosure is directed generally to a method and apparatus for monitoring mask process impact on lithography performance. A method including receiving a physical wafer pattern according to a mask, extracting a mask contour from the mask, and extracting a deconvolution pattern based on the mask contour. A lithography process is simulated to create a virtual wafer pattern based on the deconvolution pattern. The virtual wafer pattern is then compared to the physical wafer pattern. | 10-06-2011 |
20110289466 | Table-Based DFM for Accurate Post-Layout Analysis - Disclosed is a system and method for integrated circuit designs and post layout analysis. The integrated circuit design method includes providing a plurality of IC devices with various design dimensions; collecting electrical performance data of the IC devices; extracting equivalent dimensions of the IC devices; generating a shape related model to relate the equivalent dimensions to the electrical performance data of the IC devices; and creating a data refinement table using the equivalent dimensions and the electrical performance data. | 11-24-2011 |
20130290912 | METHOD AND APPARATUS FOR MONITORING MASK PROCESS IMPACT ON LITHOGRAPHY PERFORMANCE - The present disclosure is directed generally to a method and apparatus for monitoring mask process impact on lithography performance. A method including receiving a physical wafer pattern according to a mask, extracting a mask contour from the mask, and extracting a deconvolution pattern based on the mask contour. A lithography process is simulated to create a virtual wafer pattern based on the deconvolution pattern. The virtual wafer pattern is then compared to the physical wafer pattern. | 10-31-2013 |
20130292841 | SEMICONDUCTOR INTERCONNECT STRUCTURE - The present disclosure provides an interconnect structure for a semiconductor device. The interconnect structure includes a first metal layer that contains a first metal line. The interconnect structure includes a dielectric layer located over the first metal layer. The dielectric layer contains a first sub-via electrically coupled to the first metal line and a second sub-via electrically coupled to the first sub-via. The second sub-via is different from the first sub-via. The interconnect structure includes a second metal layer located over the dielectric layer. The second metal layer contains a second metal line electrically coupled to the second sub-via. No other metal layer is located between the first metal layer and the second metal layer. | 11-07-2013 |
20140189611 | Method Of Decomposable Checking Approach For Mask Alignment In Multiple Patterning - The present disclosure provides one embodiment of an integrated circuit (IC) design method. The method includes receiving an IC design layout having a first plurality of features defined in a first layer and a second plurality of features defined in a second layer; converting the IC design layout to a topological diagram having nodes, chains and arrows; and identifying alignment conflict based on the topological diagram using rules associated with loop and path count. | 07-03-2014 |
20140193981 | PHOTO RESIST TRIMMED LINE END SPACE - One or more techniques or systems for forming a line end space structure are provided herein. In some embodiments, a first patterned second hard mask (HM) region is formed above a first HM region. Additionally, at least some of the first patterned second HM region is removed. In some embodiments, a first sacrificial HM region and a second sacrificial HM region are formed above at least one of the first patterned second HM region or the first HM region. Photo resist (PR) is patterned above the second sacrificial HM region, and a spacer region is deposited above the patterned PR and second sacrificial HM region. In some embodiments, at least some of at least one of the spacer region, the PR, or the respective sacrificial HMs is removed. In this way, a line end space structure associated with an end-to-end space is formed. | 07-10-2014 |
20140220493 | Self Aligned Patterning With Multiple Resist Layers - A method for using self aligned multiple patterning with multiple resist layers includes forming a first patterned resist layer onto a substrate, forming a spacer layer on top of the first patterned resist layer such that spacer forms on side walls of features of the first resist layer, and forming a second patterned resist layer over the spacer layer and depositing a masking layer. The method further includes performing a planarizing process to expose the first patterned resist layer, removing the first resist layer, removing the second resist layer, and exposing the substrate. | 08-07-2014 |
20140248768 | Mask Assignment Optimization - A method for optimizing mask assignment for multiple pattern processes includes, through a computing system, defining which of a number of vias to be formed between two metal layers are critical based on metal lines interacting with the vias, determining overlay control errors for an alignment tree that defines mask alignment for formation of the two metal layers and the vias, and setting both the alignment tree and mask assignment for the vias so as to maximize the placement of critical vias on masks that have less overlay control error to the masks forming the relevant metal lines. | 09-04-2014 |
20140252433 | Multi-Layer Metal Contacts - A method for forming metal contacts within a semiconductor device includes forming a first-layer contact into a first dielectric layer that surrounds at least one gate electrode, the first-layer contact extending to a doped region of an underlying substrate. The method further includes forming a second dielectric layer over the first dielectric layer and forming a second-layer contact extending through the second dielectric layer to the first-layer contact. | 09-11-2014 |
20140273363 | METHOD OF PATTERNING FEATURES OF A SEMICONDUCTOR DEVICE - The present disclosure provides a method of semiconductor device fabrication including forming a mandrel on a semiconductor substrate is provided. The method continues to include oxidizing a region the mandrel to form an oxidized region, wherein the oxidized region abuts a sidewall of the mandrel. The mandrel is then removed from the semiconductor substrate. After removing the mandrel, the oxidized region is used to pattern an underlying layer formed on the semiconductor substrate. | 09-18-2014 |
20140273442 | Spacer Etching Process For Integrated Circuit Design - A method of forming a target pattern includes forming a first material layer on a substrate; performing a first patterning process using a first layout to form a first plurality of trenches in the first material layer; performing a second patterning process using a second layout to form a second plurality of trenches in the first material layer; forming spacer features on sidewalls of both the first plurality of trenches and the second plurality of trenches, the spacer features having a thickness; removing the first material layer; etching the substrate using the spacer features as an etch mask; and thereafter removing the spacer features. The target pattern is to be formed with the first layout and the second layout. | 09-18-2014 |
20140273446 | Method of Patterning a Feature of a Semiconductor Device - A method including forming a first pattern having a first and second feature is described. A masking layer is formed over the first and second features. An opening is patterned in the masking layer. The opening can extend over at least one of the first and second features. The patterned opening is then used to form a third feature (filled trench) between the first and second features. A second pattern is then formed that includes a fourth feature and fifth feature each having an edge defined by the third feature. The first, second, fourth and fifth features may then be used to pattern an underlying layer over the semiconductor substrate. | 09-18-2014 |
20140273468 | PATTERNING METHOD FOR SEMICONDUCTOR DEVICE FABRICATION - A method includes forming a first pattern having a first opening on a semiconductor substrate. The first opening is then filled. A second pattern of a first and second feature, interposed by the filled opening, is formed on the semiconductor substrate. Spacer elements then are formed on sidewalls of the filled opening, the first feature and the second feature. After forming the spacer elements, the material comprising first and second features is removed to form a second opening and a third opening. The filled opening, the second opening and the third opening are used as a masking element to etch a target layer of the substrate. | 09-18-2014 |
20140377962 | PHOTO RESIST TRIMMED LINE END SPACE - One or more techniques or systems for forming a line end space structure are provided herein. In some embodiments, a first patterned second hard mask (HM) region is formed above a first HM region. Additionally, at least some of the first patterned second HM region is removed. In some embodiments, a first sacrificial HM region and a second sacrificial HM region are formed above at least one of the first patterned second HM region or the first HM region. Photo resist (PR) is patterned above the second sacrificial HM region, and a spacer region is deposited above the patterned PR and second sacrificial HM region. In some embodiments, at least some of at least one of the spacer region, the PR, or the respective sacrificial HMs is removed. In this way, a line end space structure associated with an end-to-end space is formed. | 12-25-2014 |