Patent application number | Description | Published |
20080231455 | ANTENNA FOR RADIO FREQUENCY IDENTIFICATION RFID TAGS - An antenna configured for a radio frequency identification (RFID) device, the antenna comprising a first conductive element over a substrate, the first conductive element extending between a first end and a second end, and a second conductive element over the substrate, the second conductive element including a first path extending between a third end and a fourth end, a second path extending from the third end to a fifth end, and a third path extending from the third end to a sixth end, wherein the first end of the first conductive element is separated from but near one of the fifth end of the second path and the sixth end of the third path of the second conductive element. | 09-25-2008 |
20090090616 | SYSTEM AND METHOD FOR PLASMA ENHANCED THIN FILM DEPOSITION - A system and a method for plasma enhanced thin film deposition are disclosed, in which the system comprises a plasma enhanced thin film deposition apparatus and a plasma process monitoring device. The plasma enhanced thin film deposition apparatus receives pulsed power and a reactive gas, whereby plasma discharging occurs to ionize the reactive gas into a plurality of radicals for thin film deposition. The plasma process monitoring device comprises an optical emission spectroscopy (OES) and a pulsed plasma modulation device, in which the OES detects spectrum intensities of the radicals and the pulsed plasma modulation device calculates a spectrum intensity ratio of the radicals so as to modulate the plasma duty time of pulsed power, thereby high deposition rate as well as real-time monitoring on thin film deposition quality can be achieved. | 04-09-2009 |
20090151637 | MICROWAVE-EXCITED PLASMA SOURCE USING RIDGED WAVE-GUIDE LINE-TYPE MICROWAVE PLASMA REACTOR - A microwave-excited plasma source using a ridged wave-guide line-type microwave plasma reactor is disclosed. The microwave-excited plasma source comprises a reaction chamber, a ridged wave-guide and a separation plate. The ridged wave-guide is disposed on the reaction chamber, and comprises a frame portion, a ridge portion and a line-shaped slot. The line-shaped slot is disposed on a first side of the frame portion, and the ridge portion facing the line-shaped slot is disposed on a second side of the frame portion. The separation plate is disposed on the line-shaped slot. Moreover, the ridged wave-guide is suitable for concentrating microwave power, which is transmitted to the reaction chamber through the line-shaped slot in order to excite plasma. | 06-18-2009 |
20100141147 | CAPACITIVELY COUPLED PLASMA (CCP) GENERATOR WITH TWO INPUT PORTS - A capacitively coupled plasma (CCP) generator with two input ports, which is especially used as a large-area capacitively coupled plasma (CCP) generator. In the inventive CCP generator, only a RF power supply is required to provide the two input ports with RF power. The input impedance at each of the input ports is adjustable so that the standing wave between two rectangular electrodes can be eliminated to achieve plasma uniformity. | 06-10-2010 |
20100164381 | LONG LINEAR-TYPE MICROWAVE PLASMA SOURCE USING VARIABLY-REDUCED-HEIGHT RECTANGULAR WAVEGUIDE AS PLASMA REACTOR - A long linear-type microwave plasma source using a variably-reduced-height rectangular waveguide as the plasma reactor has been developed. Microwave power is fed from the both sides of the waveguide and is coupled into plasma through a long slot cut on the broad side of the waveguide. The reduced height of the waveguide is variable in order to control the coupling between microwave and plasma so that the plasma uniformity can remain a high quality when extending the length of the linear-type plasma source. | 07-01-2010 |
20110115685 | RFID TAG ANTENNA USING DOUBLE-OPEN ENDS COUPLER STRUCTURE - The present disclosure relates to an RFID tag, more particularly to, a UHF band RFID tag antenna using a double-open ends coupler; wherein the structure thereof is using a half wavelength dipole antenna with a double-open ends coupler mutually coupled to each other, and the RFID chip is disposed upon the coupler, and the coupler is designed to be double-open ends structure so as to, rather than prior arts, enhance the radiation without compromising the impedance match between the antenna and the chip. | 05-19-2011 |
20110271908 | LINEAR-TYPE MICROWAVE-EXCITED PLASMA SOURCE USING A SLOTTED RECTANGULAR WAVEGUIDE AS THE PLASMA EXCITER - A linear-type microwave-excited plasma source mainly comprises a reacting chamber, a rectangular waveguide and a linear biased slot in between. A linear quartz plate with an o-ring embedded in the biased slot is required so as to keep the reaction chamber in low pressure condition. Plasma will be excited in the reacting chamber by microwave powers radiating from the biased slot. A linear-type movable dielectric material can be disposed in the waveguide to control the radiation intensity of microwave, such that the length of the linear-type plasma source is able be extended without increasing input microwave powers and thus large-area low-cost plasma-processing applications can be implemented. | 11-10-2011 |
20110305846 | APPARATUS AND METHOD FOR SURFACE PROCESSING - The present disclosure provides a surface processing apparatus, comprising a reaction chamber provided to form a deposition layer on a substrate, a carrying chamber connected to the reaction chamber and comprising a slot, and a plasma generator installed in the slot and providing plasma to process the substrate surface. Whereby the disclosure further provides a surface processing method, which flatten surface of a deposition layer on the substrate when the substrate is carried form the reaction chamber to the carrying chamber after the deposition process in the reaction chamber. | 12-15-2011 |
20120001550 | MAGNETIC MODUE OF ELECTRON CYCLOTRON RESONANCE AND ELECTRON CYCLOTRON RESONANCE APPARATUS USING THE SAME - The present invention provides a magnetic module for electron cyclotron resonance (ECR) and ECR apparatus using the magnetic module, wherein the magnetic module comprises a plurality of layers of supporting ring and a plurality of magnetic pillars. Each of the supporting rings has an outer surface and an inner surface and has a plurality of through holes radially disposed inside the supporting ring. The plurality of pillars are respectively embedded into the plurality of through holes of each supporting ring and magnetic fields of the magnetic pillars in each two adjacent supporting ring are respectively opposite to each other. The ECR apparatus of the present invention is capable of being operated under lower pressure environment for forming a single atom layer on a substrate. | 01-05-2012 |