Patent application number | Description | Published |
20080237746 | Gated diode with non-planar source region - A gated-diode semiconductor device or similar component and a method of fabricating the device. The device features a gate structure disposed on a substrate over a channel and adjacent a source and a drain. The top of the source or drain region, or both, are formed so as to be at a higher elevation, in whole or in part, than the bottom of the gate structure. This configuration may be achieved by overlaying the gate structure and substrate with a profile layer that guides a subsequent etch process to create a sloped profile. The source and drain, if both are present, may be symmetrical or asymmetrical. This configuration significantly reduces dopant encroachment and, as a consequence, reduces junction leakage. | 10-02-2008 |
20080237750 | Silicided metal gate for multi-threshold voltage configuration - A PMOS (p-channel metal oxide semiconductor) device having at low voltage threshold MOSFET (MOS field effect transistor) with an improved work function and favorable DIBL (drain-induced barrier lowering) and SCE (short channel effect) characteristics, and a method for making such a device. The PMOS device includes a gate structure that is disposed on a substrate and includes a silicided gate electrode. The silicide is preferably nickel-rich and includes a peak platinum concentration at or near the interface between the gate electrode and a dielectric layer that separates the gate electrode from the substrate. The platinum peak region is produced by a multi-step rapid thermal annealing or similar process. The PMOS device may also include two such MOSFETs, one of which is boron-doped and one of which is not. | 10-02-2008 |
20080258185 | Semiconductor structure with dielectric-sealed doped region - Leakage current can be substantially reduced by the formation of a seal dielectric in place of the conventional junction between source/drain region(s) and the substrate material. Trenches are formed in the substrate and lined with a seal dielectric prior to filling the trenches with semiconductor material. Preferably, the trenches are overfilled and a CMP process planarizes the overfill material. An epitaxial layer can be grown atop the trenches after planarization, if desired. | 10-23-2008 |
20080283894 | Forming floating body RAM using bulk silicon substrate - A method for forming Z-RAM cells and the resulting semiconductor structure are provided. The semiconductor structure includes a semiconductor substrate; a dielectric layer on the semiconductor substrate; an opening in the dielectric layer, wherein the semiconductor substrate is exposed through the opening; a semiconductor strip on the dielectric layer and adjacent the opening; a gate dielectric over a surface of the semiconductor strip; a gate electrode over the gate dielectric; and a source/drain region in the semiconductor strip and adjacent the gate electrode. | 11-20-2008 |
20100052063 | METHOD TO IMPROVE DIELECTRIC QUALITY IN HIGH-K METAL GATE TECHNOLOGY - The present disclosure provides a method of fabricating a semiconductor device. The method includes providing a semiconductor substrate having a first active region and a second active region, providing a semiconductor substrate having a first region and a second region, forming a high-k dielectric layer over the semiconductor substrate, forming a first capping layer and a second capping layer over the high-k dielectric layer, the first capping layer overlying the first region and the second capping layer overlying the second region, forming a layer containing silicon (Si) over the first and second capping layers, forming a metal layer over the layer containing Si, and forming a first gate stack over the first region and a second gate stack over the second active region. The first gate stack includes the high-k dielectric layer, the first capping layer, the layer containing Si, and the metal layer and the second gate stack includes the high-k dielectric layer, the second capping layer, the layer containing Si, and the metal layer. | 03-04-2010 |
20100052065 | NEW METHOD FOR MECHANICAL STRESS ENHANCEMENT IN SEMICONDUCTOR DEVICES - The present disclosure provides an integrated circuit. The integrated circuit includes a semiconductor substrate having an active region; at least one operational device on the active region, wherein the operational device include a strained channel; and at least one first dummy gate disposed at a side of the operational device and on the active region. | 03-04-2010 |
20100059737 | Tunnel Field-Effect Transistors with Superlattice Channels - A semiconductor device includes a channel region; a gate dielectric over the channel region; a gate electrode over the gate dielectric; and a first source/drain region adjacent the gate dielectric. The first source/drain region is of a first conductivity type. At least one of the channel region and the first source/drain region includes a superlattice structure. The semiconductor device further includes a second source/drain region on an opposite side of the channel region than the first source/drain region. The second source/drain region is of a second conductivity type opposite the first conductivity type. At most, one of the first source/drain region and the second source/drain region comprises an additional superlattice structure. | 03-11-2010 |
20100123203 | Tunnel Field-Effect Transistor with Metal Source - A semiconductor device includes a channel region; a gate dielectric over the channel region; and a gate electrode over the gate dielectric. A first source/drain region is adjacent the gate dielectric, wherein the first source/drain region is a semiconductor region and of a first conductivity type. A second source/drain region is on an opposite side of the channel region than the first source/drain region, wherein the second source/drain region is a metal region. A pocket region of a second conductivity type opposite the first conductivity type is horizontally between the channel region and the second source/drain region. | 05-20-2010 |
20100127333 | NOVEL LAYOUT ARCHITECTURE FOR PERFORMANCE ENHANCEMENT - The present disclosure provides an integrated circuit. The integrated circuit includes an active region in a semiconductor substrate; a first field effect transistor (FET) disposed in the active region; and an isolation structure disposed in the active region. The FET includes a first gate; a first source formed in the active region and disposed on a first region adjacent the first gate from a first side; and a first drain formed in the active region and disposed on a second region adjacent the first gate from a second side. The isolation structure includes an isolation gate disposed adjacent the first drain; and an isolation source formed in the active region and disposed adjacent the isolation gate such that the isolation source and the first drain are on different sides of the isolation gate. | 05-27-2010 |
20100144102 | Forming Floating Body RAM Using Bulk Silicon Substrate - A method for forming a semiconductor device is provided. The method comprises providing a semiconductor structure comprising a semiconductor substrate and a dielectric layer on the semiconductor substrate, wherein the dielectric layer has an opening through which the semiconductor substrate is exposed; forming a semiconductor strip on the dielectric layer and adjacent the opening, wherein the semiconductor strip is electrically isolated from the semiconductor substrate; forming a gate dielectric over a portion of the semiconductor strip that is over the dielectric layer; forming a gate electrode over the gate dielectric; and forming a source/drain region in the semiconductor strip. | 06-10-2010 |
20110027959 | Tunnel Field-Effect Transistors with Superlattice Channels - A semiconductor device includes a channel region; a gate dielectric over the channel region; a gate electrode over the gate dielectric; and a first source/drain region adjacent the gate dielectric. The first source/drain region is of a first conductivity type. At least one of the channel region and the first source/drain region includes a superlattice structure. The semiconductor device further includes a second source/drain region on an opposite side of the channel region than the first source/drain region. The second source/drain region is of a second conductivity type opposite the first conductivity type. At most, one of the first source/drain region and the second source/drain region comprises an additional superlattice structure. | 02-03-2011 |
20140131812 | Source and Drain Dislocation Fabrication in FinFETs - A device includes a semiconductor fin over a substrate, a gate dielectric on sidewalls of the semiconductor fin, and a gate electrode over the gate dielectric. A source/drain region is on a side of the gate electrode. A dislocation plane is in the source/drain region. | 05-15-2014 |
20140252426 | Semiconductor Structure with Dielectric-Sealed Doped Region - Leakage current can be substantially reduced by the formation of a seal dielectric in place of the conventional junction between source/drain region(s) and the substrate material. Trenches are formed in the substrate and lined with a seal dielectric prior to filling the trenches with semiconductor material. Preferably, the trenches are overfilled and a CMP process planarizes the overfill material. An epitaxial layer can be grown atop the trenches after planarization, if desired. | 09-11-2014 |
20140312432 | SEMICONDUCTOR ARRANGEMENT WITH SUBSTRATE ISOLATION - One or more semiconductor arrangements and techniques for forming such semiconductor arrangements are provided. A semiconductor arrangement comprises a channel, such as an un-doped channel, over a substrate. The semiconductor arrangement comprises a gate, such as a gate-all-around structure gate, around the channel. The semiconductor arrangement comprises an isolation structure, such as a silicon germanium oxide structure, between the gate and the substrate. The isolation structure blocks current leakage into the substrate. Because the semiconductor arrangement comprises the isolation structure, the channel can be left un-doped, which improves electron mobility and decreases gate capacitance. | 10-23-2014 |
20140332859 | Self-Aligned Wrapped-Around Structure - An embodiment vertical wrapped-around structure and method of making. An embodiment method of making a self-aligned vertical structure-all-around device including forming a spacer around an exposed portion of a semiconductor column projecting from a structure layer, forming a photoresist over a protected portion of the structure layer and a first portion of the spacer, etching away an unprotected portion of the structure layer disposed outside a periphery collectively defined by the spacer and the photoresist to form a structure having a footer portion and a non-footer portion, the non-footer portion and the footer portion collectively encircling the semiconductor column, and removing the photoresist and the spacer. | 11-13-2014 |
20140349458 | Source and Drain Dislocation Fabrication in FinFETs - A device includes a semiconductor fin over a substrate, a gate dielectric on sidewalls of the semiconductor fin, and a gate electrode over the gate dielectric. A source/drain region is on a side of the gate electrode. A dislocation plane is in the source/drain region. | 11-27-2014 |
20140353731 | Tuning Strain in Semiconductor Devices - A Fin Field-Effect Transistor (FinFET) includes a semiconductor layer over a substrate, wherein the semiconductor layer forms a channel of the FinFET. A first silicon germanium oxide layer is over the substrate, wherein the first silicon germanium oxide layer has a first germanium percentage. A second silicon germanium oxide layer is over the first silicon germanium oxide layer. The second silicon germanium oxide layer has a second germanium percentage greater than the first germanium percentage. A gate dielectric is on sidewalls and a top surface of the semiconductor layer. A gate electrode is over the gate dielectric. | 12-04-2014 |
20150021697 | Thermally Tuning Strain in Semiconductor Devices - A method includes performing a first epitaxy to grow a silicon germanium layer over a semiconductor substrate, performing a second epitaxy to grow a silicon layer over the silicon germanium layer, and performing a first oxidation to oxidize the silicon germanium layer, wherein first silicon germanium oxide regions are generated. A strain releasing operation is performed to release a strain caused by the first silicon germanium oxide regions. A gate dielectric is formed on a top surface and a sidewall of the silicon layer. A gate electrode is formed over the gate dielectric. | 01-22-2015 |
20150048441 | SEMICONDUCTOR ARRANGEMENT WITH ONE OR MORE SEMICONDUCTOR COLUMNS - A semiconductor arrangement comprises a substrate region and a first semiconductor column projecting from the substrate region. The semiconductor arrangement comprises a second semiconductor column projecting from the substrate region. The second semiconductor column is separated a first distance from the first semiconductor column. The first distance is between about 10 nm to about 30 nm. | 02-19-2015 |
20150053928 | SILICON AND SILICON GERMANIUM NANOWIRE FORMATION - Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. For example, one or more silicon and silicon germanium stacks are utilized to form PMOS transistors comprising germanium nanowire channels and NMOS transistors comprising silicon nanowire channels. In an example, a first silicon and silicon germanium stack is oxidized to transform silicon to silicon oxide regions, which are removed to form germanium nanowire channels for PMOS transistors. In another example, silicon and germanium layers within a second silicon and silicon germanium stack are removed to form silicon nanowire channels for NMOS transistors. PMOS transistors having germanium nanowire channels and NMOS transistors having silicon nanowire channels are formed as part of a single fabrication process. | 02-26-2015 |
20150060996 | SEMICONDUCTOR DEVICE WITH SILICIDE - A semiconductor device includes a first type region including a first conductivity type. The semiconductor device includes a second type region including a second conductivity type. The semiconductor device includes a channel region extending between the first type region and the second type region. The semiconductor device includes a first silicide region on a first type surface region of the first type region. The first silicide region is separated at least one of a first distance from a first type diffusion region of the first type region or a second distance from the channel region. | 03-05-2015 |
20150069475 | SEMICONDUCTOR DEVICE WITH REDUCED ELECTRICAL RESISTANCE AND CAPACITANCE - A semiconductor device includes a first type region including a first conductivity type. The semiconductor device includes a second type region including a second conductivity type. The semiconductor device includes a channel region extending between the first type region and the second type region. The channel region is separated a first distance from a first portion of the first type region. The semiconductor device includes a gate region surrounding the channel region. A first portion of the gate region is separated a second distance from the first portion of the first type region. The second distance is greater than the first distance. | 03-12-2015 |
20150076596 | ASYMMETRIC SEMICONDUCTOR DEVICE - A semiconductor device includes a first type region including a first conductivity type and a second type region including a second conductivity type. The semiconductor device includes a channel region extending between the first type region and the second type region. The semiconductor device includes a gate electrode surrounding at least some of the channel region. A first gate edge of the gate electrode is separated a first distance from a first type region edge of the first type region and a second gate edge of the gate electrode is separated a second distance from a second type region edge of the second type region. The first distance is less than the second distance. | 03-19-2015 |