Patent application number | Description | Published |
20110102753 | Apparatus and Method of Measuring a Property of a Substrate - The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate. | 05-05-2011 |
20110134419 | Inspection Method and Apparatus, and Corresponding Lithographic Apparatus - A method and associated apparatus determine an overlay error on a substrate. A beam is projected onto three or more targets. Each target includes first and second overlapping patterns with predetermined overlay offsets on the substrate. The asymmetry of the radiation reflected from each target on the substrate is measured. The overlay error not resultant from the predetermined overlay offsets is determined. The function that enables calculation of overlay from asymmetry for other points on the wafer is determined by limiting the effect of linearity error when determining the overlay error from the function. | 06-09-2011 |
20110141444 | Inspection Apparatus for Lithography - A scatterometer configured to measure a property of a substrate, includes a radiation source configured to provide a radiation beam; and a detector configured to detect a spectrum of the radiation beam reflected from a target ( | 06-16-2011 |
20110255066 | Apparatus and Method for Inspecting a Substrate - An apparatus measures properties, such as overlay error, of a substrate divided into a plurality of fields. The apparatus includes a radiation source configured to direct radiation onto a first target of each field of the substrate. Each first target (T4G) has at least a first grating and a second grating having respective predetermined offsets, the predetermined offset (+d) of the first grating being in a direction opposite the predetermined offset (−d) of the second grating. A detector is configured to detect the radiation reflected from each first target and to obtain an asymmetry value for each first target from the detected radiation. Further, a module is configured to determine an overlay value for each first target based on at least the obtained asymmetry value and the predetermined offsets and determine a polynomial fit across a plurality of first targets of a corresponding plurality of fields of the substrate for a relationship between the obtained asymmetry value and determined overlay value of each first target. | 10-20-2011 |
20120013881 | Method and Apparatus for Determining an Overlay Error - A method of determining an overlay error. Measuring an overlay target having process-induced asymmetry. Constructing a model of the target. Modifying the model, e.g., by moving one of the structures to compensate for the asymmetry. Calculating an asymmetry-induced overlay error using the modified model. Determining an overlay error in a production target by subtracting the asymmetry-induced overlay error from a measured overlay error. In one example, the model is modified by varying asymmetry p | 01-19-2012 |
20120033193 | Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell - An inspection apparatus measures a property of a substrate including a periodic structure. An illumination system provides a beam of radiation with an illumination profile including a plurality of illuminated portions. A radiation projector projects the beam of radiation onto the substrate. A detector detects radiation scattered from the periodic structure and separately detects first order diffracted radiation and at least one higher order of diffracted radiation of each of the illuminated portions. A processor determines the property of the substrate from the detected radiation. The plurality of illuminated portions are arranged such that first order diffracted radiation arising from one or more of the illuminated portions are not overlapped by zeroth order or first order diffracted radiation arising from any other of the illuminated portions. Furthermore, the plurality of illuminated portions are arranged such that first order diffracted radiation arising from the one or more of the illuminated portions are overlapped by at least one of the higher orders of diffracted radiation arising from any other of the illuminated portions. | 02-09-2012 |
20140176955 | Inspection Methods, Inspection Apparatuses, and Lithographic Apparatuses - A method for determining overlay error includes measuring asymmetry of radiation reflected from each of a plurality of targets on a substrate. The plurality of targets include a predetermined overlay offset. The method also includes comparing the measured asymmetry of the radiation reflected from each of the plurality of targets to the corresponding predetermined overlay offset of the respective target. Additionally, the method includes determining the overlay error of a point on the substrate as a function of measured asymmetry reflected from the point. The function is determined by fitting a polynomial or a Fourier series to a comparison of the measured asymmetry of the radiation reflected from each of the plurality of targets to the corresponding predetermined overlay offset of the respective target. The function limits an effect of linearity error. | 06-26-2014 |
20140327908 | Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method - The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate. | 11-06-2014 |
Patent application number | Description | Published |
20110063438 | PROCESSING METHOD USING AN ELECTRIC TOOL - The invention relates to a method and an apparatus for processing a workpiece, such as a wall, a ceiling, a floor or the like in a building, by means of an appliance which can be moved, in particular an electric tool, wherein the appliance can be moved to at least one predeterminable nominal position. Essentially continuous position identification, in particular by means of optical methods, is carried out for the respective actual position of the appliance and/or of an object which can be moved corresponding to the appliance. The position information, such as the coordinates of the respective determined actual position and/or information relating to any, discrepancy between the nominal position and the actual position, is transmitted wirelessly to the appliance. The respective position information is indicated to the user on the appliance, for manual position control. | 03-17-2011 |
20120013205 | ADJUSTING DEVICE FOR AN ELECTRIC MOTOR - A device for reversing the direction of rotation and/or for adjusting the carbon brushes for a reversible electric motor, in particular for an electric hand tool, with a base and with a mount, which is mounted pivotably on the base and on which brushholders for the carbon brushes wiping over the collector of the electric motor are arranged. The electric motor can be driven by means of power electronics, such as a pulse width controller, a phase gating controller, a phase chopping controller or the like. The power electronics are arranged on the base and/or on the mount. The device furthermore has fixed contacts and switching contacts, which interact with alternate contact-making for reversing the direction of rotation of the electric motor as the mount is pivoted. | 01-19-2012 |
20130313930 | ELECTROMECHANICAL CONVERTER SYSTEM FOR ELECTRIC VEHICLES - The invention relates to a converter system ( | 11-28-2013 |
20150180308 | ADJUSTING DEVICE FOR AN ELECTRIC MOTOR - A device for reversing the direction of rotation and/or for adjusting the carbon brushes for a reversible electric motor, in particular for an electric hand tool, with a base and with a mount, which is mounted pivotably on the base and on which brushholders for the carbon brushes wiping over the collector of the electric motor are arranged. The electric motor can be driven by means of power electronics, such as a pulse width controller, a phase gating controller, a phase chopping controller or the like. The power electronics are arranged on the base and/or on the mount. The device furthermore has fixed contacts and switching contacts, which interact with alternate contact-making for reversing the direction of rotation of the electric motor as the mount is pivoted. | 06-25-2015 |
Patent application number | Description | Published |
20100316895 | BATTERY PACK - The invention relates to a battery pack ( | 12-16-2010 |
20110125433 | BATTERY MANAGEMENT SYSTEM - Control apparatus for operating a rechargeable energy storage device and for collecting operating data, as well as a method for operating such a control apparatus. The invention is described with reference to the use in a motor vehicle and to the control of the rechargeable energy storage device thereof for the supply of the electric drive of the motor vehicle. However, it should be noted that an apparatus having the features of the claims can operate rechargeable energy storage devices also independently of motor vehicles, or in stationary use. | 05-26-2011 |
20120189887 | ELECTRICAL ENERGY STORAGE DEVICE MADE OF FLAT CELLS AND FRAME ELEMENTS WITH A SUPPLY CHANNEL - The invention relates to an electrical energy storage device comprising a plurality of flat storage cells for storing and discharging electrical energy, having opposing flat current collectors, a plurality of frame elements for maintaining the storage cells, and a clamping means for clamping the cells with the frame elements into a stack. Each storage cell carries at least one measurement or sensor element for measuring at least one physical variable, to which at least one respective cable for transmitting the measurement data is fixed. The frame elements comprise first recesses for receiving the measurement or sensor elements and second recesses connected to the first recesses, the second recesses of the frame elements together forming at least one channel extending over the length of the device for receiving the cables. | 07-26-2012 |
20120196174 | ELECTRICAL ENERGY STORAGE CELL AND CELL BLOCK, ELECTRICAL ENERGY STORAGE DEVICE AND THE VEHICLE COMPRISING THE SAME - An electrical energy storage cell is provided with: an active part which is equipped and adapted to store electrical energy supplied from the outside and to discharge stored electrical energy to the outside; at least two current conductors which are connected to the active part and are equipped and adapted to supply electric current from the outside to the active part and to discharge electric current from the active part to the outside; and an enclosure, which defines a prismatic basic shape having a substantially cuboid-like outline and encloses the active part in a gas-tight and fluid-tight manner. According to the invention, the enclosure has two flat foil parts and a peripheral seam part connecting the edges of the foil parts, wherein the seam part surrounds the active part in the manner of the frame and has sections of maximum thickness, in which the thickness is uniformly greater than the thickness of the active part. A cell block comprises a plurality of said electrical energy storage cells, wherein the cells are stacked in the direction of the thickness thereof and, together with connecting terminals, form an electrical energy storage device which can advantageously be used in a vehicle. | 08-02-2012 |
20120282506 | ELECTROCHEMICAL ENERGY STORE FOR VEHICLES AND METHOD FOR COOLING OR HEATING SUCH AN ELECTROCHEMICAL STORE - An electrochemical energy storage device ( | 11-08-2012 |
20120288741 | BATTERY ASSEMBLY - A battery assembly ( | 11-15-2012 |
Patent application number | Description | Published |
20090045761 | DIESEL-ELECTRIC DRIVE SYSTEM HAVING A SYNCHRONOUS GENERATOR WITH PERMANENT-MAGNET EXCITATION - The invention relates to a diesel-electric drive system comprising a permanently excited synchronous generator ( | 02-19-2009 |
20090072772 | DIESEL-ELECTRIC DRIVE SYSTEM HAVING A SYNCHRONOUS GENERATOR WITH PERMANENT MAGNET EXCITATION - The invention relates to a diesel-electric drive system comprising a permanently excited synchronous generator ( | 03-19-2009 |
20100002409 | Energy storage module - Energy storage modules generally include a housing with component parts arranged therein. The component parts are in this case either capacitors, for example double-layer capacitors and/or electrolyte capacitors. According to the invention, a filler is provided in the housing and binds electrolyte liquid occurring in the even of damage or else electrolyte gases. Beds of material with a large specific surface area, such as zeolites or else active carbons, are suitable as fillers. The surfaces are also possibly catalytically coated. | 01-07-2010 |
20100191432 | Method for braking electrically driven vehicles - A method is disclosed for braking electrically driven vehicles, in particular rail vehicles. In at least one embodiment, the behaviour of the brake system is configured directly as a function of the system state, i.e. the operating conditions of the vehicle, such as for example the laden state of the vehicle, temperature of the engines and in particular of the magnets, as well as redundancy requirements, and therefore permit the fully functioning mechanical brake which is present in vehicles nowadays to be eliminated. The method of at least one embodiment for braking electrically driven vehicles which are equipped with spring-store-based friction brakes and whose motive drive is provided by way of permanently excited synchronous machines whose terminals are connected via switches to devices which generate a braking torque includes an open-loop or closed-loop controller being activated and the controller connecting the brake system of the engines which are present and the spring-store-based friction brakes into the circuit individually and successively as a function of the operating conditions of the vehicle and the required brake values. | 07-29-2010 |
20100230216 | Brake device for a rail vehicle - A brake device is disclosed for rail vehicles. In at least one embodiment, the brake device includes an electromagnetic spring pressure brake, the brake force being applied by an elastic force to the part to be braked and a magnetic arrangement being provided for neutralizing the brake force. The magnetic arrangement counteracts the elastic force and consists of a coil arrangement and an armature place that are mobile in relation to each other, the mobile part being connected to the brake element that impinges the part to be braked. The brake device for a rail vehicle according to at least one embodiment of the invention allows a high brake force and short reaction times and is very compact. For this purpose, the mobile part is connected to an axially displaceable plunger which on one end can be impinged upon with the elastic force and which is connected on the other end to the brake element. | 09-16-2010 |
Patent application number | Description | Published |
20130233107 | Gear Train - The invention relates to a liquid-lubricated gear train having the following characteristics: the gear train has at least two gears, the teeth of which mesh with each other; the gear train has an engagement area, which has an inlet and an outlet; the gear train has a casing wall, which encloses at least one of two gears that work with each other and partially or completely blocks the enclosed interior off from the environment; the casing wall has an outlet in the area of the inlet, wherein said outlet establishes a conducting connection between the interior and the atmosphere; and the distance between the dynamic enveloping circle of the gears and the casing wall is less than the tooth height. | 09-12-2013 |
20150049969 | Radial Bearing - The invention relates to a radial bearing, comprising a housing, a housing bore extending along a bearing axis, several tilting segments that are arranged around the bearing axis in order to support a shaft and each have a radially outer bearing surface, by means of which the tilting segments are supported on a supporting surface on the housing. The radially outer bearing surface of each tilting segment and the supporting surface are arranged facing each other. Each tilting segment is movably arranged relative to the housing. The invention is characterized by the following features: a first one of the surfaces forms a first section curve with a first section plane perpendicular to the bearing axis; the first section curve is convexly curved and has a first main radius of curvature, and the second surface forms a second section curve with the section plane perpendicular to the bearing axis; the second section curve is correspondingly concavely curved and has a second main radius of curvature, wherein the magnitude of the first main radius of curvature of the first surface is smaller than the magnitude of the second main radius of curvature of the second surface; the first surface forms a third section curve with a second section plane parallel to the bearing axis; the third section curve is convexly curved and has a first secondary radius of curvature, and the second surface forms a fourth section curve with the second section plane parallel to the bearing axis; and the fourth section curve is correspondingly concavely curved or not curved and has a second secondary radius of curvature or correspondingly has no curvature, the two secondary radii of curvature being different from each other. | 02-19-2015 |