Patent application number | Description | Published |
20100156198 | SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS - According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature. | 06-24-2010 |
20110109419 | Thermally Conductive Coil and Methods and Systems - Embodiments of the invention provide improved thermal conductivity within, among other things, electromagnetic coils, coil assemblies, electric motors, and lithography devices. In one embodiment, a thermally conductive coil includes at least two adjacent coil layers. The coil layers include windings of wires formed from a conductor and an insulator that electrically insulates the windings within each coil layer. In some cases the insulator of the wires is at least partially absent along an outer surface of one or both coil layers to increase the thermal conductivity between the coil layers. In some embodiments, an insulation layer is provided between the coil layers to electrically insulate the coil layers. In some cases the insulation layer has a thermal conductivity greater than the thermal conductivity of the wire insulator. | 05-12-2011 |
20120062866 | MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG - Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag. | 03-15-2012 |
20120325027 | MEASUREMENT STAGE WITH TUBE CARRIER - In one embodiment, a stage apparatus includes a wafer stage, at least one conduit, and a measurement stage. The at least one conduit is coupled between the wafer stage and a ground. The measurement stage is configured to approximately follow the wafer stage during at least a portion of a motion of the wafer stage, and is configured to carry the at least one conduit to reduce disturbances on the wafer stage caused by the at least one conduit. | 12-27-2012 |
20130099957 | Optical Assembly for Laser Radar - A compact optical assembly for a laser radar system is provided, that is configured to move as a unit with a laser radar system as the laser radar system is pointed at a target and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the laser radar. The optical assembly comprises a light source, a lens, a scanning reflector and a fixed reflector that are oriented relative to each other such that: (i) a beam from the light source is reflected by the scanning reflector to the fixed reflector; (ii) reflected light from the fixed reflector is reflected again by the scanning reflector and directed along a line of sight through the lens; and (iii) the scanning reflector is moveable relative to the source, the lens and the fixed reflector, to adjust the focus of the beam along the line of sight. | 04-25-2013 |
20130141735 | TARGET FOR LARGE SCALE METROLOGY SYSTEM | 06-06-2013 |
20130194563 | OPTICAL ASSEMBLY FOR LASER RADAR - A compact optical assembly for a laser radar system is provided, that is configured to move as a unit with a laser radar system as the laser radar system is pointed at a target and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the laser radar. The optical assembly comprises a light source, a lens, a scanning reflector and a fixed reflector that are oriented relative to each other such that: (i) a beam from the light source is reflected by the scanning reflector to the fixed reflector; (ii) reflected light from the fixed reflector is reflected again by the scanning reflector and directed along A line of sight through the lens; and (iii) the scanning reflector is moveable relative to the source, the lens and the fixed reflector, to adjust the focus of the beam along the line of sight. | 08-01-2013 |
20130241761 | BEAM STEERING FOR LASER RADAR AND OTHER USES - Optical systems suitable for use as or in laser radar systems and other uses include a beam-forming unit, a beam-scan unit, and a controller. The beam-forming unit includes a first optical element, and the beam-scan unit includes a second optical element. The first optical element is movable to shape and direct a substantially collimated optical beam along a nominal propagation axis to a target, and the second optical element includes at least one movable beam deflector that moves the optical beam in a scanning manner relative to the nominal propagation axis. The controller is coupled to the beam-forming unit and beam-scan unit, and is configured to induce movement of the first optical element required for shaping and directing the optical beam along the nominal propagation axis and to induce independent motion of the beam deflector of the second optical element as required to scan the optical beam relative to the nominal propagation axis. The beam deflector can be refractive or reflective. | 09-19-2013 |
20130241762 | LIGHT-BEAM SCANNING FOR LASER RADAR AND OTHER USES - A light beam is scanned, for use in laser radar and other uses, by an optical system of which an example includes a beam-shaping optical system that includes a first movable optical element and a second movable optical element. The first optical element forms and directs an optical beam along a nominal propagation axis from the beam-shaping optical system to a target, and the second optical element includes a respective actuator by which the second optical element is movable relative to the first optical element. A controller is coupled at least to the actuator of the second optical element and is configured to induce motion, by the actuator, of the second optical element to move the optical beam, as incident on the target, relative to the nominal propagation axis. | 09-19-2013 |
20140152972 | ORIENTATION INDEPENDENT FOCUS MECHANISMS FOR LASER RADAR - Focus arrangements for laser radar and other applications provide compensation of orientation-dependent gravitational forces. A linear stage can be preloaded and provided with balanced linear encoders so that gravitational force induced pitch, yaw, and roll can be reduced, detected, or compensated. Alternatively, movable focus elements can be secured to actuator driven spring assemblies that are controlled to compensate orientation-dependent gravitational forces. | 06-05-2014 |