Patent application number | Description | Published |
20100243163 | SUBSTRATE PROCESSING APPARATUS - Disclosed is a substrate processing apparatus for carrying a substrate W in a standing position and performing a predetermined process to the substrate W, including: a plurality of substrate processing chambers; and a common carrying delivery chamber for carrying a substrate to each of the substrate processing chambers, where: at least one of the substrate processing chambers is provided above or below the common carrying delivery chamber; and a substrate passage opening through which the substrate W can pass is provided at the boundaries between the processing chambers and the carrying chamber. | 09-30-2010 |
20100263797 | PLASMA PROCESSING APPARATUS - The present invention aims at providing a plasma processing apparatus for performing a plasma processing on a planar substrate body to be processed, the apparatus being capable of generating the plasma with good uniformity and efficiently using the plasma, and having a high productivity. That is, the plasma processing apparatus according to the present invention includes: a vacuum chamber; one or plural antenna supporters (plasma generator supporters) projecting into the internal space of the vacuum chamber; radio-frequency antennas (plasma generators) attached to each antenna supporter; and a pair of substrate body holders provided across the antenna supporter in the vacuum chamber, for holding a planar substrate body to be processed. | 10-21-2010 |
20100272550 | SUBSTRATE HOLDING MECHANISM, SUBSTRATE DELIVERING/RECEIVING MECHANISM, AND SUBSTRATE PROCESSING APPARATUS - The present invention provides a substrate holding mechanism capable of assuredly holding a substrate and delivering/receiving it: a substrate holding mechanism including a substrate holding unit for holding a rectangular substrate, comprising: a plurality of substrate holding rollers provided at positions corresponding to two opposite sides of the substrate on the substrate holding unit and pivotally supported by the substrate holding unit; and a roller driver for rotating the substrate holding rollers, wherein: the substrate holding roller comprises a cylinder part and a holding flange provided along a portion of a circumference of each end of the cylinder part; and each of the substrate holding rollers is rotated by the roller driver so that a state of holding edges of the substrate by the holding flange and a state of releasing the edges can be switched in accordance with a rotation angle of the substrate holding rollers. | 10-28-2010 |
20110274908 | FIBER COMPOSITE - To provide a cellulose fiber composite having high transparency, low water absorption and low coefficient of linear thermal expansion. | 11-10-2011 |
20130149540 | ELECTROPHOTOGRAPHIC MEMBER, INTERMEDIATE TRANSFER MEMBER, IMAGE FORMING APPARATUS, AND METHOD FOR MANUFACTURING ELECTROPHOTOGRAPHIC MEMBER - An object of the present invention is to provide: an electrophotographic member which enhances image quality, prevents the lowering of a grade of an image even when images have been repeatedly output, and can remarkably enhance the stability of the grade of the image; an intermediate transfer member; and an image forming apparatus. The electrophotographic member includes a base layer and a surface layer, wherein the surface layer has a binder resin, perfluoropolymer fine particles, a fluorocarbon resin dispersing agent and a particular fluorine compound, wherein the perfluoropolymer fine particle has a fluorine compound carried on its surface. | 06-13-2013 |
20140377564 | INTERMEDIATE TRANSFER MEMBER FOR ELECTROPHOTOGRAPHY AND ELECTROPHOTOGRAPHIC APPARATUS - An intermediate transfer member for electrophotography comprising a substrate and a surface layer provided on the substrate. The surface layer comprises a binder resin and a perfluoropolyether. An extraction amount of the perfluoropolyether per 10 mm | 12-25-2014 |
20140377695 | MEMBER FOR ELECTROPHOTOGRAPHY, PROCESS CARTRIDGE, AND ELECTROPHOTOGRAPHIC APPARATUS - A member for electrophotography having a multilayer structure or a single-layer structure, including an outermost layer which satisfies the following A, B and C:
| 12-25-2014 |
20150323888 | ELECTROPHOTOGRAPHIC INTERMEDIATE TRANSFER MEMBER AND ELECTROPHOTOGRAPHIC APPARATUS - The present invention relates to an electrophotographic intermediate transfer member that, even if an image is repeatedly and continuously transferred, can retain its transfer performance and can obtain an excellent image for a long time. The electrophotographic intermediate transfer member has a base layer and a surface layer, the surface layer has a matrix-domain structure in the cross section in the thickness direction, the matrix is formed of a binder resin, the domains contains a perfluoropolyether, and a microhardness of a surface of the electrophotographic intermediate transfer member measured by an ultramicro-hardness meter is 50 MPa or more. | 11-12-2015 |
Patent application number | Description | Published |
20090147485 | Sliding mechanism for portable electronic device - A sliding mechanism includes: a slidable intermediate member having first and second guide holes; a first shaft that is slidably inserted into the first guide hole, the first shaft having first and second end portions; a first spring member that is interposed between the first end portion of the first shaft and the slidable intermediate member to urge the slidable intermediate member toward the second end portion of the first shaft; a second shaft that is slidably inserted into the second guide hole, the second shaft having third and fourth end portions, the third end portion being disposed at a position opposite to the first end portion; and a second spring member that is interposed between the third end portion of the second shaft and the slidable intermediate member to urge the slidable intermediate member toward the fourth end portion of the second shaft. | 06-11-2009 |
20090200251 | CLAMPING MECHANISM FOR SEMICONDUCTOR DEVICE - A clamping mechanism for a semiconductor substrate includes: a C-shaped pickup plate; a susceptor top plate having a periphery adapted to receive and support an inner periphery portion of the C-shaped pickup plate thereon; and a clamp comprising (i) a top ring portion for clamping the substrate by sandwiching a periphery of the substrate between the top ring portion and the susceptor top plate and (ii) a pickup plate supporting portion adapted to support an outer periphery portion of the C-shaped pickup plate, wherein the C-shaped pickup plate is movable between the top ring portion and the pickup plate supporting portion, and the clamp is movable upward together with the C-shaped pickup plate and the susceptor top plate. | 08-13-2009 |
20100248796 | ELECTRONIC APPARATUS - An electronic apparatus includes: a first casing; a second casing; a coupling mechanism for coupling the first and second casings while allowing the first and second casings to slide and rotate with each other in a state where the first and second casings being overlapped with each other, the coupling mechanism retaining the first and second casings to be in one of: a first posture in which the first and second casings are being overlapped; a second posture in which the first and second casings are being slidably moved; and a third posture in which the first and second casing are being rotated; a magnet provided in one of the first casing and the second casing; a first magnetic sensor and a second magnetic sensor which are provided in the other of the first casing and the second casing, the sensors outputting detection signals generated by a magnetic force of the magnet. | 09-30-2010 |
20120067843 | Method of forming fine pattern - A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer. | 03-22-2012 |
20120254741 | PROOFREADING APPARATUS, PROOFREADING METHOD, AND RECORDING MEDIUM - An area of interest is designated from a page region having a size in common with at least two pages. An image of interest, which corresponds to the designated area of interest, is extracted from each of the at least two pages. A list image is generated in which extracted images of interest are arrayed along a predetermined direction. | 10-04-2012 |
20120263345 | PROOF INFORMATION PROCESSING APPARATUS, PROOF INFORMATION PROCESSING METHOD, RECORDING MEDIUM, AND ELECTRONIC PROOFREADING SYSTEM - A proof information processing apparatus adds a plurality of types of annotative information to a proof image by use of a plurality of input modes for inputting respective different types of annotative information. A proof information processing method is carried out by using the proof information processing apparatus. A recording medium stores a program for performing the functions of the proof information processing apparatus. An electronic proofreading system includes the proof information processing apparatus and a remote server. At least one of input modes including a text input mode, a stylus input mode, a color information input mode, and a speech input mode is selected depending on characteristics of an image in a region of interest which is indicated. | 10-18-2012 |
20130019158 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUMAANM WATANABE; AkiraAACI TokyoAACO JPAAGP WATANABE; Akira Tokyo JP - An editing mode is designated from among a plurality of editing modes available for input of handwriting. An executed position is acquired at a location on the display screen at which a particular handwriting operation is performed. A mode image, which represents the editing mode designated at a time the particular handwriting operation is performed, is temporarily displayed near the executed position. | 01-17-2013 |
20140079189 | X-RAY GENERATING DEVICE AND X-RAY-GENERATING-DEVICE CONTROL - An X-ray generating device ( | 03-20-2014 |
20140086387 | X-RAY GENERATING APPARATUS AND CONTROL METHOD FOR X-RAY GENERATING APPARATUS - An object is to emit x-rays having a plurality of different energies and to suppress variations in the energy of the created x-rays. In an x-ray generating apparatus ( | 03-27-2014 |
20150291694 | Cancer Diagnosis and Treatment of Cancer Using Anti-Robo 1 Antibody - A method for diagnosing cancer comprising detecting ROBO1 protein is disclosed. In addition, a method for treating a disease caused by abnormal cell growth comprising administrating an antibody that binds to ROBO1, as well as a pharmaceutical composition, a cell growth inhibitor and an anticancer agent comprising an antibody that binds to ROBO1 as an active ingredient are disclosed. Further, a method for inducing cell damages in a ROBO1 expressing cell and a method for inhibiting the growth of a ROBO1 expressing cell by bringing a ROBO1 expressing cell into contact with an antibody that binds to ROBO1, are disclosed. Furthermore, a method for monitoring progression of hepatitis by detecting ROBO1 protein is disclosed. | 10-15-2015 |
Patent application number | Description | Published |
20100231964 | IMAGE PROCESSING SYSTEM AND IMAGE PROCESSING APPARATUS AND METHOD - A scanner that provides WSD standard scan service does not allow the notification and identification by a client PC of scan parameters, such as a resolution and a reading range, that are selected by a user in push scan on a panel, for example, attached to the scanner body. This prevents the push scan with the user-specified scan parameters. Accordingly, an event that temporarily limits the scanning functions is issued to inhibit the specification of parameters excluding user-specified scan parameters from a client PC. Thus, the client PC can instruct the scanning with the user-specified parameters, and the push scan requested by the user can be implemented. The limitation is valid only to the destination client of the push scan. | 09-16-2010 |
20130088752 | IMAGE PROCESSING SYSTEM AND IMAGE PROCESSING APPARATUS AND METHOD - A scanner that provides WSD standard scan service does not allow the notification and identification by a client PC of scan parameters, such as a resolution and a reading range, that are selected by a user in push scan on a panel, for example, attached to the scanner body. This prevents the push scan with the user-specified scan parameters. Accordingly, an event that temporarily limits the scanning functions is issued to inhibit the specification of parameters excluding user-specified scan parameters from a client PC. Thus, the client PC can instruct the scanning with the user-specified parameters, and the push scan requested by the user can be implemented. The limitation is valid only to the destination client of the push scan. | 04-11-2013 |
20130180948 | MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a release layer is formed on a magnetic recording layer, a mask layer is formed on the release layer, projecting patterns are formed on the mask layer, the projecting patterns are transferred onto the mask layer, the projecting patterns are transferred onto the release layer, the projecting patterns are transferred onto the magnetic recording layer, the release layer is removed by a solvent, and a remaining mask layer is removed from the surface of the magnetic recording layer. The release layer is made of a polymeric material. The mask layer is made of at least one of a metal or a metal compound. The projecting patterns are formed by using a self-organized layer made of a block copolymer having at least two of polymer chains. | 07-18-2013 |
20130182351 | PERPENDICULAR MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCTION APPARATUS - A perpendicular magnetic recording medium according to an embodiment includes a substrate and perpendicular magnetic recording layer. The perpendicular magnetic recording layer includes a recording portion and non-recording portion. The recording portion has patterns regularly arranged in the longitudinal direction, and includes magnetic layers containing Fe or Co and Pt as main components, and at least one additive component selected from Ti, Si, Al, and W. The non-recording portion includes oxide layers formed by oxidizing the side surfaces of the magnetic layers, and nonmagnetic layers formed between the oxide layers. | 07-18-2013 |
20130216864 | MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING THE SAME - According to at least one embodiment, a release layer, a first mask layer containing a first metal material, an antidiffusion layer containing an oxide or nitride of the first metal material, and a second mask layer containing a second metal material are formed on a magnetic recording layer, a resist layer is formed on the second mask layer, and projections pattern is formed in the resist layer and sequentially transferred to the second mask layer, antidiffusion layer, first mask layer, release layer, and magnetic recording layer. After that, the release layer is removed. | 08-22-2013 |
20130252029 | MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING THE SAME - In a removing step, a phase-separated release solution including a first phase containing a first solvent capable of dissolving a release layer and a second phase containing a second solvent having a property of separating from the first solvent is prepared, and a patterned magnetic recording medium is dipped in the first phase together with a release layer, mask layer, and resist layer remaining on a magnetic recording layer, thereby removing the release layer. After that, the patterned magnetic recording medium is moved to the second phase, and separated from the first phase containing the release layer and the layers remaining on the release layer. | 09-26-2013 |
20140120249 | MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD AND MICROPATTERN MANUFACTURING METHOD - According to one embodiment, in a magnetic recording medium manufacturing method, an inversion liftoff layer and pattern formation layer are formed on a layer on which an inverted pattern is to be formed, a depressions pattern is formed by patterning the pattern formation layer and transferred to the inversion liftoff layer, the surface of the layer on which an inverted pattern is to be formed is exposed by removing the inversion liftoff layer from depressions, an inversion layer is formed on the inversion liftoff layer and exposed layer, and the inversion liftoff layer is removed, thereby forming, on the exposed layer, an inversion layer having a projections pattern obtained by inverting the depressions pattern. | 05-01-2014 |
20140120375 | MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, MAGNET RECORDING/REPRODUCTION APPARATUS, AND STAMPER MANUFACTURING METHOD - According to one embodiment, a magnetic recording medium manufacturing method includes a step of coating the mask layer with a metal fine particle coating solution containing metal fine particles and a first solvent, thereby forming a metal fine particle coating layer having a multilayered structure of the metal fine particles, and a step of dropping, on the coating layer, a second solvent having a second solubility parameter having a difference of 0 to 12.0 from a first solubility parameter of the first solvent, thereby forming a monolayered metal fine particle film by washing away excessive metal fine particles and changing the multilayered structure of the metal fine particles into a monolayer. The projections pattern is made of the monolayered metal fine particle film. | 05-01-2014 |
20140153128 | MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCTION APPARATUS - According to one embodiment, a magnetic recording medium includes a magnetic recording layer formed on a substrate and including magnetic grains and a grain boundary formed between the magnetic grains, the grain boundary includes a first grain boundary having a first thermal conductivity, and a second grain boundary formed on the first grain boundary and having a second thermal conductivity different from the first thermal conductivity, and at least one of the first and second grain boundaries suppresses thermal conduction. | 06-05-2014 |
20140247519 | MAGNETIC RECORDING MEDIUM AND METHOD FOR PRODUCING THE SAME - According to one embodiment, there is provided a magnetic recording medium which includes a base, a magnetic recording layer having convex-shaped magnetic layers, which is formed on the base, and a protective film formed on the magnetic recording layer. There are gaps in a region surrounded by the protective film, the surface of the base, and each side wall of each magnetic layer. | 09-04-2014 |
20140248513 | MAGNETIC RECORDING MEDIUM, METHOD FOR PRODUCING THE SAME, AND METHOD FOR PRODUCING STAMPER - According to one embodiment, there is provided a method for producing a magnetic recording medium which includes forming a mask layer on a magnetic recording layer, applying metal fine particles on the mask layer, covering the metal fine particles with an overcoat layer, irradiating with energy beams through the overcoat layer so as to deactivate a protective coating of the metal fine particles, transferring a metal fine particle pattern from the mask layer to the magnetic recording layer, and removing the mask layer from the magnetic recording layer. | 09-04-2014 |
20140287265 | MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a magnetic recording medium including a substrate and a magnetic recording layer formed on the substrate and including a plurality of projections is obtained. The array of the plurality of projections includes a plurality of domains in which the projections are regularly arranged, and a boundary region between the domains, in which the projections are irregularly arranged. The boundary region is formed along a perpendicular bisector of a line connecting the barycenters of adjacent projections. | 09-25-2014 |
20150099064 | PATTERN FORMATION METHOD AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD - According to one embodiment, a pattern formation method includes forming a surface treatment polymer film on a substrate, applying a solution containing a monomer or oligomer of a surface treatment polymer material to a surface of the surface treatment polymer film, forming a self-assembled layer by coating the surface treatment polymer film with a coating solution containing a block copolymer having at least two types of polymer chains, and forming a microphase-separated structure in the self-assembled layer by annealing, and optionally removing one type of a polymer layer from the microphase-separated structure, thereby forming convex patterns by a remaining polymer layer. | 04-09-2015 |
20150154996 | PERPENDICULAR MAGNETIC RECORDING MEDIUM - According to one embodiment, a perpendicular magnetic recording medium is provided, which includes a non-magnetic granular underlayer formed on a substrate and containing metal grains of a first metal and a grain boundary layer surrounding the metal grains, each metal grain including a projection projecting from the boundary layer and a bottom portion embedded in the grain boundary layer, and a contact angle of the edge of the projection to the surface of the grain boundary layer being 45° to 85°, a non-magnetic intermediate layer formed on a surface of each projection and a magnetic recording layer having a projection pattern formed on the basis of a pattern of the projections in the non-magnetic intermediate layer via the non-magnetic intermediate layer. | 06-04-2015 |
20150206547 | PERPENDICULAR MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCTION APPARATUS - A perpendicular magnetic recording medium according to an embodiment includes a soft underlayer, an orientation control layer mainly containing Ni having a face-centered cubic structure, a grain size control layer including a plurality of metal oxide posts having a pitch dispersion of 15% or less and crystal grains having grown in a region defined by the plurality of metal oxide posts, and having a hexagonal close-packed structure or face-centered cubic structure, and a perpendicular magnetic recording layer, formed in this order on a substrate. | 07-23-2015 |
Patent application number | Description | Published |
20090135555 | PORTABLE TERMINAL - A portable terminal includes a first casing having a first wiring board, a first operation portion, and an accommodating portion opened in its peripheral surface, and a second casing configured to be accommodated in the accommodating portion through the opening and having a second wiring board and a second operation portion. A casing movement guiding/supporting mechanism is interposed between one side portion of the first casing and that of the second casing in one direction intersecting a moving locus of the second casing between a retracted position and an extended position in relation to the accommodating portion, and supports the second casing to be movable linearly between the retracted and extended positions. The second casing is selectively locked at the retracted position by a locking mechanism. A battery for supplying electricity to the wiring boards is accommodated in an accommodating chamber in at least one of the casings. | 05-28-2009 |
20110132752 | PERPENDICULAR MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC READ/WRITE APPARATUS - According to one embodiment, an electroforming master comprises a patterns of protrusions and recesses formed on one major surface of an Si substrate having two major surfaces, corresponding to information for positioning of a read/write head (a preamble, address, and burst), recording tracks or recording bits. Impurity ions are doped in the surface of this patterns of protrusions and recesses. The impurity ion concentration distribution in the film thickness direction of the Si substrate has a peak in a portion from the patterns of protrusions and recesses surface to a depth of 40 nm in the film thickness direction. The impurity concentration of this peak is 1×10 | 06-09-2011 |
20110235212 | METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM - According to one embodiment, a method of manufacturing a magnetic recording medium includes forming on a magnetic recording layer a first hard mask, a second hard mask, a third hard mask and a resist, imprinting the resist with a stamper, removing a residue left in the recesses of the patterned resist, etching the third hard mask by use of the patterned resist as a mask, etching the second hard mask by use of the third hard mask as a mask, etching the first hard mask by use of the second hard mask as a mask, forming a pattern of the magnetic recording layer with ion beam irradiation, and removing the first hard mask by use of a remover liquid with higher reactivity to the metal material of the first hard mask than to a constituent element of the magnetic recording layer. | 09-29-2011 |
20120275058 | MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCTION APPARATUS - According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L1 | 11-01-2012 |
20120275059 | PERPENDICULAR MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCTION APPARATUS - According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L1 | 11-01-2012 |
20120276414 | MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING/REPRODUCTION APPARATUS - According to one embodiment, a perpendicular magnetic recording medium includes a nonmagnetic interlayer formed on a nonmagnetic substrate, an antiferromagnetic layer having a thickness of 2 to 30 nm, a first nonmagnetic underlayer having a thickness of 0.2 to 5 nm, a first bit patterned ferromagnetic layer, a first bit patterned nonmagnetic layer, and a second bit patterned ferromagnetic layer. | 11-01-2012 |
20140042013 | MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCTION APPARATUS - According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L1 | 02-13-2014 |
20140139951 | MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING/REPRODUCTION APPARATUS - According to one embodiment, a perpendicular magnetic recording medium includes a nonmagnetic interlayer formed on a nonmagnetic substrate, an antiferromagnetic layer having a thickness of 2 to 30 nm, a first nonmagnetic underlayer having a thickness of 0.2 to 5 nm, a first bit patterned ferromagnetic layer, a first bit patterned nonmagnetic layer, and a second bit patterned ferromagnetic layer. | 05-22-2014 |
Patent application number | Description | Published |
20150069010 | PATTERN FORMING METHOD, METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING MEDIUM - A patterning method includes steps of forming a first copolymer layer comprising a first diblock copolymer which has portions which are phase incompatible. The first copolymer layer is annealed to form a first phase pattern including a first phase dispersed in a second surrounding phase. The first copolymer is then etched forming a first topographic pattern that corresponds to the first phase pattern. A second copolymer layer of a second diblock copolymer is then formed over the first topographic pattern, and then annealed to generate a second phase pattern offset from the first topographic pattern. Etching is used to form a second topographic pattern corresponding to the second phase pattern. The first and second topographic patterns are then transferred to the substrate. The patterning method can be used, for example, to form patterned recording layers for magnetic storage devices. | 03-12-2015 |
20150310885 | PATTERN FORMING METHOD AND MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM - According to one embodiment, disclosed is a pattern forming method including preparing a second dispersion by adding a second protective group and second solvent to fine particles including a first protective group whose surface polarity is close to that of the substrate, the fine particles containing, at least on the surface thereof, a material selected from Al, Ti, V, Cr, Mn, Fe, Co, Ni, Zn, Y, Zr, Sn, Mo, Ta, W, Au, Ag, Pd, Cu, Pt, and an oxide thereof, modifying the fine particles including the first protective group with the second protective group, adding a viscosity adjustment agent to the dispersion containing the fine particles to prepare a coating solution, and applying the coating solution on the substrate to form a fine particle layer thereon. | 10-29-2015 |