Method And A Device For Depositing A Film Of Material Or Otherwise Processing Or Inspecting, A Substrate As It Passes Through A Vacuum Environment Guided By A Plurality Of Opposing And Balanced Air Bearing Lands And Sealed By Differentially Pumped Grooves And Sealing Lands In A Non-Contact Manner - diagram, schematic, and image 04
![Method And A Device For Depositing A Film Of Material Or Otherwise Processing Or Inspecting, A Substrate As It Passes Through A Vacuum Environment Guided By A Plurality Of Opposing And Balanced Air Bearing Lands And Sealed By Differentially Pumped Grooves And Sealing Lands In A Non-Contact Manner - diagram, schematic, and image 04](/img/20150037514_04.png)
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