POLYMERIZABLE ESTER COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESSAANM HASEGAWA; KojiAACI Joetsu-shiAACO JPAAGP HASEGAWA; Koji Joetsu-shi JPAANM SAGEHASHI; MasayoshiAACI Joetsu-shiAACO JPAAGP SAGEHASHI; Masayoshi Joetsu-shi JPAANM SUKA; YuukiAACI Joetsu-shiAACO JPAAGP SUKA; Yuuki Joetsu-shi JPAANM IIO; MasashiAACI Joetsu-shiAACO JPAAGP IIO; Masashi Joetsu-shi JP - diagram, schematic, and image 72
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