07th week of 2020 patent applcation highlights part 60 |
Patent application number | Title | Published |
20200051780 | CHARGED PARTICLE BEAM OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, CONTROL APPARATUS, CONTROL METHOD, INFORMATION GENERATION APPARATUS, INFORMATION GENERATION METHOD AND DEVICE MANUFACTURING METHOD | 2020-02-13 |
20200051781 | METHODS AND SYSTEMS FOR FORMING A PATTERN ON A SURFACE USING MULTI-BEAM CHARGED PARTICLE BEAM LITHOGRAPHY | 2020-02-13 |
20200051782 | WRITING DATA GENERATION METHOD, COMPUTER-READABLE RECORDING MEDIUM ON WHICH PROGRAM IS RECORDED, AND MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS | 2020-02-13 |
20200051783 | Metal Plating of Grids for Ion Beam Sputtering | 2020-02-13 |
20200051784 | PLASMA GENERATION APPARATUS, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND CONTROL METHOD FOR THE PLASMA GENERATION APPARATUS | 2020-02-13 |
20200051785 | PLASMA SHEATH CONTROL FOR RF PLASMA REACTORS | 2020-02-13 |
20200051786 | HIGH VOLTAGE SWITCH WITH ISOLATED POWER | 2020-02-13 |
20200051787 | SENSOR-TO-SENSOR MATCHING METHODS FOR CHAMBER MATCHING | 2020-02-13 |
20200051788 | IMPEDANCE MATCHING NETWORK AND METHOD | 2020-02-13 |
20200051789 | CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS | 2020-02-13 |
20200051790 | PRESSURE CONTROL RING, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | 2020-02-13 |
20200051791 | Etch Process With Rotatable Shower Head | 2020-02-13 |
20200051792 | L-SHAPED PLASMA CONFINEMENT RING FOR PLASMA CHAMBERS | 2020-02-13 |
20200051793 | RING-SHAPED ELEMENT FOR ETCHER AND METHOD FOR ETCHING SUBSTRATE USING THE SAME | 2020-02-13 |
20200051794 | METHODS AND APPARATUS FOR PRODUCING LOW ANGLE DEPOSITIONS | 2020-02-13 |
20200051795 | PHYSICAL VAPOR DEPOSITION ( PVD) CHAMBER WITH REDUCED ARCING | 2020-02-13 |
20200051796 | FILM-FORMING APPARATUS, FILM-FORMING SYSTEM, AND FILM-FORMING METHOD | 2020-02-13 |
20200051797 | Multicathode Deposition System | 2020-02-13 |
20200051798 | COLLIMATOR FOR SELECTIVE PVD WITHOUT SCANNING | 2020-02-13 |
20200051799 | SYSTEM AND METHOD FOR PARTICLE CONTROL IN MRAM PROCESSING | 2020-02-13 |
20200051800 | METHODS AND APPARATUS FOR IMPROVED TANDEM MASS SPECTROMETRY DUTY CYCLE | 2020-02-13 |
20200051801 | METHOD FOR NEUTRALIZING ION BEAM, AND APPARATUS USING THE METHOD | 2020-02-13 |
20200051802 | ADJUSTABLE SAMPLE FLOOR FOR ULTRAFAST SIGNAL WASHOUT | 2020-02-13 |
20200051803 | Monitoring Ion Mobility Spectrometry Environment for Improved Collision Cross Section Accuracy and Precision | 2020-02-13 |
20200051804 | TIME-OF-FLIGHT MASS SPECTROMETER AND PROGRAM | 2020-02-13 |
20200051805 | Quantitation Throughput Enhancement by Differential Mobility Based Pre-Separation | 2020-02-13 |
20200051806 | VFET DEVICES WITH ILD PROTECTION | 2020-02-13 |
20200051807 | METHOD TO CLEAN SNO2 FILM FROM CHAMBER | 2020-02-13 |
20200051808 | FIELD-EFFECT TRANSISTORS WITH A GROWN SILICON-GERMANIUM CHANNEL | 2020-02-13 |
20200051809 | APPARATUS FOR CHEMICAL MECHANICAL POLISHING PROCESS | 2020-02-13 |
20200051810 | DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME | 2020-02-13 |
20200051811 | Organoaminosilane Precursors And Methods For Depositing Films Comprising Same | 2020-02-13 |
20200051812 | PREVENTING DELAMINATION AT SILICON/DIELECTIC INTERFACE | 2020-02-13 |
20200051813 | SELECTIVE MODIFICATION METHOD OF A BASE MATERIAL SURFACE | 2020-02-13 |
20200051814 | Germanium Nanosheets and Methods of Forming the Same | 2020-02-13 |
20200051815 | TWO-STEP PROCESS FOR GAPFILLING HIGH ASPECT RATIO TRENCHES WITH AMORPHOUS SILICON FILM | 2020-02-13 |
20200051816 | METHODS FOR REPAIRING SUBSTRATE LATTICE AND SELECTIVE EPITAXY PROCESSING | 2020-02-13 |
20200051817 | EPITAXIAL SILICON WAFER AND METHOD FOR MANUFACTURING EPITAXIAL SILICON WAFER | 2020-02-13 |
20200051818 | Doping Techniques | 2020-02-13 |
20200051819 | CARBON MATERIALS FOR CARBON IMPLANTATION | 2020-02-13 |
20200051820 | MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE | 2020-02-13 |
20200051821 | METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH MASK STRUCTURE | 2020-02-13 |
20200051822 | MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY | 2020-02-13 |
20200051823 | METHOD OF MANUFACTURING A HEMT DEVICE WITH REDUCED GATE LEAKAGE CURRENT, AND HEMT DEVICE | 2020-02-13 |
20200051824 | SYSTEM AND METHOD FOR A TRANSDUCER IN AN EWLB PACKAGE | 2020-02-13 |
20200051825 | ABATEMENT AND STRIP PROCESS CHAMBER IN A LOAD LOCK CONFIGURATION | 2020-02-13 |
20200051826 | MODIFIED ETCH-AND-DEPOSIT BOSCH PROCESS IN SILICON | 2020-02-13 |
20200051827 | MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND ETCHING GAS | 2020-02-13 |
20200051828 | SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE | 2020-02-13 |
20200051829 | DEPOSITION OF ORGANIC FILMS | 2020-02-13 |
20200051830 | Performing Planarization Process Controls in Semiconductor Fabrication | 2020-02-13 |
20200051831 | Method for Modifying Substrates Based on Crystal Lattice Dislocation Density | 2020-02-13 |
20200051832 | Method Utilizing Using Post Etch Pattern Encapsulation | 2020-02-13 |
20200051833 | Ruthenium Hard Mask Process | 2020-02-13 |
20200051834 | PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS USING TCR ELEMENT-BASED HEATERS | 2020-02-13 |
20200051835 | ANNEALING APPARATUS | 2020-02-13 |
20200051836 | Systems and Methods for Annealing Semiconductor Structures | 2020-02-13 |
20200051837 | CLUSTER TOOL TECHNIQUES WITH IMPROVED EFFICIENCY | 2020-02-13 |
20200051838 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | 2020-02-13 |
20200051839 | SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM | 2020-02-13 |
20200051840 | METHODS AND ASSEMBLIES FOR GAS FLOW RATIO CONTROL | 2020-02-13 |
20200051841 | BOARD STORING CONTAINER | 2020-02-13 |
20200051842 | ADAPTIVE INSET FOR WAFER CASSETTE SYSTEM | 2020-02-13 |
20200051843 | ADAPTIVE INSET FOR WAFER CASSETTE SYSTEM | 2020-02-13 |
20200051844 | DEVICE AND METHOD FOR CONTROLLING THE TIGHTNESS OF A TRANSPORT ENCLOSURE FOR THE CONVEYANCE AND ATMOSPHERIC STORAGE OF SEMICONDUCTOR SUBSTRATES | 2020-02-13 |
20200051845 | SEMICONDUCTOR STOCKER SYSTEMS AND METHODS | 2020-02-13 |
20200051846 | TRANSFER SYSTEM AND TRANSFER METHOD | 2020-02-13 |
20200051847 | CARRIER PLATE REMOVING METHOD | 2020-02-13 |
20200051848 | DUAL-ZONE HEATER FOR PLASMA PROCESSING | 2020-02-13 |
20200051849 | Methods of Forming Memory Arrays | 2020-02-13 |
20200051850 | AIRGAP FORMATION IN BEOL INTERCONNECT STRUCTURE USING SIDEWALL IMAGE TRANSFER | 2020-02-13 |
20200051851 | Shallow Trench Isolation for Integrated Circuits | 2020-02-13 |
20200051852 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | 2020-02-13 |
20200051853 | Multi-Metal Fill with Self-Align Patterning | 2020-02-13 |
20200051854 | INTERCONNECT STRUCTURE | 2020-02-13 |
20200051855 | Method of Cleaning Wafer After CMP | 2020-02-13 |
20200051856 | Contact Plug without Seam Hole and Methods of Forming the Same | 2020-02-13 |
20200051857 | Method of Semiconductor Integrated Circuit Fabrication | 2020-02-13 |
20200051858 | Conductive Feature Formation and Structure Using Bottom-Up Filling Deposition | 2020-02-13 |
20200051859 | ALD (ATOMIC LAYER DEPOSITION) LINER FOR VIA PROFILE CONTROL AND RELATED APPLICATIONS | 2020-02-13 |
20200051860 | LASER DICING FOR SINGULATION | 2020-02-13 |
20200051861 | WAFER PROCESSING METHOD | 2020-02-13 |
20200051862 | WAFER PROCESSING METHOD | 2020-02-13 |
20200051863 | METHOD AND SYSTEM OF FORMING INTEGRATED CIRCUIT | 2020-02-13 |
20200051864 | METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE | 2020-02-13 |
20200051865 | METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE | 2020-02-13 |
20200051866 | MINIMIZE MIDDLE-OF-LINE CONTACT LINE SHORTS | 2020-02-13 |
20200051867 | FIN STRUCTURES | 2020-02-13 |
20200051868 | TAPERED FIN-TYPE FIELD-EFFECT TRANSISTORS | 2020-02-13 |
20200051869 | METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DEVICE | 2020-02-13 |
20200051870 | Silicon and Silicon Germanium Nanowire Formation | 2020-02-13 |
20200051871 | METHOD OF FORMING SOURCE/DRAIN REGIONS OF TRANSISTORS | 2020-02-13 |
20200051872 | BOUNDARY PROTECTION FOR CMOS MULTI-THRESHOLD VOLTAGE DEVICES | 2020-02-13 |
20200051873 | PROCESSING SYSTEM, DETERMINING METHOD WITH REGARD TO CATALYTIC LAYER OF NOBLE METAL, AND MANUFACTURING METHOD OF PRODUCT | 2020-02-13 |
20200051874 | DUMMY ELEMENT AND METHOD OF EXAMINING DEFECT OF RESISTIVE ELEMENT | 2020-02-13 |
20200051875 | SEMICONDUCTOR STRUCTURE | 2020-02-13 |
20200051876 | APPARATUSES AND METHODS FOR TSV RESISTANCE AND SHORT MEASUREMENT IN A STACKED DEVICE | 2020-02-13 |
20200051877 | SUBSTRATE PROCESSING CARRIER | 2020-02-13 |
20200051878 | SEMICONDUCTOR WAFER AND METHOD OF PROBE TESTING | 2020-02-13 |
20200051879 | PRINTED CIRCUIT BOARD AND SEMICONDUCTOR PACKAGE INCLUDING THE SAME | 2020-02-13 |