| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 850005000 | MONITORING THE MOVEMENT OR POSITION OF THE PROBE RESPONSIVE TO INTERACTION WITH THE SAMPLE (EPO) | 75 |
| 20090070904 | Oscillating scanning probe microscope - A scanning probe microscope that is easy to use, inexpensive to manufacture, has a fast scan rate, and has a broad range of applications. The oscillating sensor has a high resonance frequency. Because an oscillator is used, alignment of a laser is not required. Further, probe approach and scanning can be achieved at much faster rates. | 03-12-2009 |
| 20100100989 | PIEZORESISTOR HEIGHT SENSING CANTILEVER - A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided. | 04-22-2010 |
| 20100107284 | Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever - Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat. | 04-29-2010 |
| 20100122385 | METHOD AND APPARATUS OF OPERATING A SCANNING PROBE MICROSCOPE - An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum. | 05-13-2010 |
| 20100146673 | Apparatus and Method for Investigating Biological Systems and Solid Systems - Proposed is a procedure for carrying out a scanning probe microscopic or atomic force spectroscopic measurement within predetermined parameters, which said procedure encompasses the following steps: a determination of a value variance of at least one of the parameters, and control of an adjustment member in relation to said variance, so that the variance is at least partially compensated for. | 06-10-2010 |
| 20100235954 | DUAL-TIP CANTILEVER - A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height. | 09-16-2010 |
| 20110030109 | SURFACE STATE MEASURING DEVICE, AND SURFACE STATE MEASURING METHOD USING THE DEVICE - Provided are a surface state measuring device which can measure an alternating force of an arbitrary frequency and which is excellent in spatial resolution, and a surface state measuring method using the device. This surface state measuring device measures the surface state of a sample by detecting the modulation of the oscillation of a probe arranged above the sample. The measuring device comprises: a cantilever having a probe near a free end; an excitation mechanism for exciting the cantilever; a scanning mechanism for making the probe scan the sample by moving the probe and the sample relative to each other; and alternating force generator for generating an alternating force of an arbitrary frequency in a space; and a modulation measuring mechanism for measuring the degree of frequency modulation or amplitude modulation of the oscillations of the probe, which are generated by the alternating force. | 02-03-2011 |
| 20110041223 | SPATIALLY RESOLVED QUANTITATIVE MAPPING OF THERMOMECHANICAL PROPERTIES AND PHASE TRANSITION TEMPERATURES USING SCANNING PROBE MICROSCOPY - An approach for the thermomechanical characterization of phase transitions in polymeric materials (polyethyleneterephthalate) by band excitation acoustic force microscopy is developed. This methodology allows the independent measurement of resonance frequency, Q factor, and oscillation amplitude of a tip-surface contact area as a function of tip temperature, from which the thermal evolution of tip-surface spring constant and mechanical dissipation can be extracted. A heating protocol maintained a constant tip-surface contact area and constant contact force, thereby allowing for reproducible measurements and quantitative extraction of material properties including temperature dependence of indentation-based elastic and loss moduli. | 02-17-2011 |
| 20110047661 | MICROPROBE, MEASUREMENT SYSTEM AND METHOD - A microprobe, measurement system and method are disclosed. The microprobe includes a probe tip mounted at a meeting point of a plurality of flexures. The probe tip is moveable upon flexing of one or more of the flexures, each flexure further comprising one or more actuators controllable to flex the flexure and one or more sensors arranged to sense flexin of the flexure. | 02-24-2011 |
| 20110055983 | DYNAMIC MODE AFM APPARATUS - There is provided a dynamic mode AFM apparatus that configures an automatic control system which can automatically obtain a probe-sample distance, and allows high-speed identification of atoms of the sample surface. | 03-03-2011 |
| 20110307979 | Scanning-type Probe Microscope - To provide a scanning probe microscope wherein the scanning means is not damaged by fluids, the scanning probe microscope | 12-15-2011 |
| 20120227139 | FRICTION FORCE MICROSCOPE - Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force. | 09-06-2012 |
| 20120246768 | METHOD OF MEASURING VIBRATION CHARACTERISTICS OF CANTILEVER - A method of measuring vibration characteristics of a cantilever includes: generating a forward and backward high speed frequency sweep signal in a frequency range including a resonance frequency of the cantilever by an excitation signal generator; vibrating the cantilever; measuring frequencies at the largest amplitude in a forward path and in a backward path; and detecting an intermediate value between the measured frequencies as the resonance frequency of the cantilever. The method may further include checking whether or not there is a secondary resonance frequency that is | 09-27-2012 |
| 20120304341 | ELECTRONIC CONTROL AND AMPLIFICATION DEVICE FOR A LOCAL PIEZOELECTRIC FORCE MEASUREMENT PROBE UNDER A PARTICLE BEAM - An electronic control device for a local probe with a piezoelectric resonator and preamplification and processing of its signals, the probe being configured for local measurement of physical properties of a sample in an environment with a particle beam directed towards the probe, in which an excitation voltage generated by an excitation mechanism is applied to the piezoelectric resonator through a first galvanic isolation transformer, and a current for measurement of mechanical oscillations of the piezoelectric resonator is applied through a second galvanic isolation transformer to a preamplification device on the output side. | 11-29-2012 |
| 20130055473 | DEVICE AND METHOD FOR DIFFERENTIATING TARGET CELL - A device for differentiating a target cell includes a cantilever including a fixed end and a free end, where the cantilever is elastically deformable, a tip disposed on the free end of the cantilever, where the tip contacts a surface of a cell, a measurement unit connected to the fixed end of the cantilever, where the measurement unit measures a degree of a repulsive force based on an elastic deformation of the cantilever, and a conversion unit which converts the repulsive force measured by the measurement unit into a modulus of elasticity derived from the surface of the cell. | 02-28-2013 |
| 20130167272 | ELECTRICAL-MECHANICAL COMPLEX SENSOR FOR NANOMATERIALS - Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector. | 06-27-2013 |
| 20130340125 | BAND EXCITATION METHOD APPLICABLE TO SCANNING PROBE MICROSCOPY - Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response. | 12-19-2013 |
| 20140123347 | ANALYSIS OF EX VIVO CELLS FOR DISEASE STATE DETECTION AND THERAPEUTIC AGENT SELECTION AND MONITORING - Described herein is the analysis of nanomechanical characteristics of cells. In particular, changes in certain local nanomechanical characteristics of ex vivo human cells can correlate with presence of a human disease, such as cancer, as well as a particular stage of progression of the disease. Also, for human patients that are administered with a therapeutic agent, changes in local nanomechanical characteristics of ex vivo cells collected from the patients can correlate with effectiveness of the therapeutic agent in terms of impeding or reversing progression of the disease. By exploiting this correlation, systems and related methods can be advantageously implemented for disease state detection and therapeutic agent selection and monitoring. | 05-01-2014 |
| 20140150139 | METHOD OF CONTROLLING FREQUENCY MODULATED-ATOMIC FORCE MICROSCOPE - A method is provided for controlling an FM-AFM including a cantilever having a resonant frequency and an excitation system configured to oscillate the cantilever in response to a drive signal. The method includes determining latency of the excitation system; receiving a deflection signal indicating a deflection of a cantilever tip; mixing the deflection signal with a first sine signal output by a PLL indicating a frequency shift of a frequency response of the cantilever; measuring the frequency shift in response to the drive signal; determining spurious phase of the cantilever based on the determined latency, the resonant frequency of the cantilever, and the measured frequency shift; providing a second sine signal having a phase that is advanced by the determined spurious phase to preemptively compensate for subsequent spurious phase of the cantilever; and driving the excitation system using the second sine signal with an adjusted amplitude as the drive signal. | 05-29-2014 |
| 20140223615 | Method and Apparatus of Operating a Scanning Probe Microscope - Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation. | 08-07-2014 |
| 20140283229 | Method and Apparatus of Operating a Scanning Probe Microscope - An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum. | 09-18-2014 |
| 20140289911 | METHOD OF INVESTIGATING A SAMPLE SURFACE - A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analysing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle. | 09-25-2014 |
| 20140331367 | MOTION SENSOR INTEGRATED NANO-PROBE N/MEMS APPARATUS, METHOD, AND APPLICATIONS - A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip. | 11-06-2014 |
| 20150293144 | Band Excitation Method Applicable to Scanning Probe Microscopy - Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response. | 10-15-2015 |
| 20150323561 | HIGH THROUGHPUT MICROSCOPY DEVICE - An object is mounted on a surface of a sample carrier. Properties of the surface of the object are measured and/or modified by means of a plurality of independently movable heads, each comprising a microscopic probe. The heads being located between the surface of a reference grid plate and the surface of the sample carrier. Head specific target locations are selected for the heads. Each head is moved over the surface of the reference grid plate, to the target location of the head. During movement a position of the head is determined from markings on the reference grid plate sensed by sensor in the head. When the sensor has indicated that the head is at the target location selected for the head a force between the head and the reference grid plate is switched to seat and/or clamp the head on the reference grid plate. | 11-12-2015 |
| 20150369838 | METHOD AND DEVICE FOR CONTROLLING A SCANNING PROBE MICROSCOPE - The present invention relates to a method for controlling a scanning probe microscope having a probe ( | 12-24-2015 |
| 20150369839 | DESIGN AND INTERFACE OF A MICROFABRICATED SCANNING FORCE SENSOR FOR COMBINED FORCE AND POSITION SENSING - A micro fabricated sensor for micro-mechanical and nano-mechanical testing and nano-indentation. The sensor includes a force sensing capacitive comb drive for the sensing of a force applied to a sample, a position sensing capacitive comb drive for the sensing of the position of a sample and a micro fabricated actuator to apply a load to the sample. All the sensor components mentioned above are monolithically integrated on the same silicon MEMS chip. | 12-24-2015 |
| 20160025770 | SCANNING PROBE MICROSCOPE AND SCANNING PROBE MICROSCOPY - A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (π/2 [rad]) and provides a combined amount to the phase difference. | 01-28-2016 |
| 20160047841 | SIGNAL DETECTION CIRCUIT AND SCANNING PROBE MICROSCOPE - A signal detection circuit includes: a VCO that generates a reference signal; a complex signal generation circuit that generates a complex signal from an input signal and the reference signal; a vector operation circuit that calculates an argument of the complex signal by performing a vector operation; and a subtracting phase comparator that compares the argument with a phase of the reference signal by calculating a difference between the argument and the phase of the reference signal, wherein the complex signal generation circuit includes: a multiplication circuit that multiplies the input signal by the reference signal; and an HPF that removes a DC component from a signal output from the multiplication circuit. | 02-18-2016 |
| 20160187374 | MINUTE OBJECT CHARACTERISTICS MEASURING APPARATUS - A minute object characteristics measuring apparatus is provided. The minute object characteristics measuring apparatus includes a holder, a cantilever, a measuring device, and a driver. The holder holds a minute object. The cantilever faces the minute object held by the holder. The measuring device measures a displacement of the cantilever. The driver drives one of the holder holding the minute object and the cantilever in a direction that the minute object held by the holder and the cantilever are brought close to or drawn away from each other. | 06-30-2016 |
| 20090070904 | Oscillating scanning probe microscope - A scanning probe microscope that is easy to use, inexpensive to manufacture, has a fast scan rate, and has a broad range of applications. The oscillating sensor has a high resonance frequency. Because an oscillator is used, alignment of a laser is not required. Further, probe approach and scanning can be achieved at much faster rates. | 03-12-2009 |
| 20100100989 | PIEZORESISTOR HEIGHT SENSING CANTILEVER - A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided. | 04-22-2010 |
| 20100107284 | Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever - Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat. | 04-29-2010 |
| 20100122385 | METHOD AND APPARATUS OF OPERATING A SCANNING PROBE MICROSCOPE - An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum. | 05-13-2010 |
| 20100146673 | Apparatus and Method for Investigating Biological Systems and Solid Systems - Proposed is a procedure for carrying out a scanning probe microscopic or atomic force spectroscopic measurement within predetermined parameters, which said procedure encompasses the following steps: a determination of a value variance of at least one of the parameters, and control of an adjustment member in relation to said variance, so that the variance is at least partially compensated for. | 06-10-2010 |
| 20100235954 | DUAL-TIP CANTILEVER - A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height. | 09-16-2010 |
| 20110030109 | SURFACE STATE MEASURING DEVICE, AND SURFACE STATE MEASURING METHOD USING THE DEVICE - Provided are a surface state measuring device which can measure an alternating force of an arbitrary frequency and which is excellent in spatial resolution, and a surface state measuring method using the device. This surface state measuring device measures the surface state of a sample by detecting the modulation of the oscillation of a probe arranged above the sample. The measuring device comprises: a cantilever having a probe near a free end; an excitation mechanism for exciting the cantilever; a scanning mechanism for making the probe scan the sample by moving the probe and the sample relative to each other; and alternating force generator for generating an alternating force of an arbitrary frequency in a space; and a modulation measuring mechanism for measuring the degree of frequency modulation or amplitude modulation of the oscillations of the probe, which are generated by the alternating force. | 02-03-2011 |
| 20110041223 | SPATIALLY RESOLVED QUANTITATIVE MAPPING OF THERMOMECHANICAL PROPERTIES AND PHASE TRANSITION TEMPERATURES USING SCANNING PROBE MICROSCOPY - An approach for the thermomechanical characterization of phase transitions in polymeric materials (polyethyleneterephthalate) by band excitation acoustic force microscopy is developed. This methodology allows the independent measurement of resonance frequency, Q factor, and oscillation amplitude of a tip-surface contact area as a function of tip temperature, from which the thermal evolution of tip-surface spring constant and mechanical dissipation can be extracted. A heating protocol maintained a constant tip-surface contact area and constant contact force, thereby allowing for reproducible measurements and quantitative extraction of material properties including temperature dependence of indentation-based elastic and loss moduli. | 02-17-2011 |
| 20110047661 | MICROPROBE, MEASUREMENT SYSTEM AND METHOD - A microprobe, measurement system and method are disclosed. The microprobe includes a probe tip mounted at a meeting point of a plurality of flexures. The probe tip is moveable upon flexing of one or more of the flexures, each flexure further comprising one or more actuators controllable to flex the flexure and one or more sensors arranged to sense flexin of the flexure. | 02-24-2011 |
| 20110055983 | DYNAMIC MODE AFM APPARATUS - There is provided a dynamic mode AFM apparatus that configures an automatic control system which can automatically obtain a probe-sample distance, and allows high-speed identification of atoms of the sample surface. | 03-03-2011 |
| 20110307979 | Scanning-type Probe Microscope - To provide a scanning probe microscope wherein the scanning means is not damaged by fluids, the scanning probe microscope | 12-15-2011 |
| 20120227139 | FRICTION FORCE MICROSCOPE - Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force. | 09-06-2012 |
| 20120246768 | METHOD OF MEASURING VIBRATION CHARACTERISTICS OF CANTILEVER - A method of measuring vibration characteristics of a cantilever includes: generating a forward and backward high speed frequency sweep signal in a frequency range including a resonance frequency of the cantilever by an excitation signal generator; vibrating the cantilever; measuring frequencies at the largest amplitude in a forward path and in a backward path; and detecting an intermediate value between the measured frequencies as the resonance frequency of the cantilever. The method may further include checking whether or not there is a secondary resonance frequency that is | 09-27-2012 |
| 20120304341 | ELECTRONIC CONTROL AND AMPLIFICATION DEVICE FOR A LOCAL PIEZOELECTRIC FORCE MEASUREMENT PROBE UNDER A PARTICLE BEAM - An electronic control device for a local probe with a piezoelectric resonator and preamplification and processing of its signals, the probe being configured for local measurement of physical properties of a sample in an environment with a particle beam directed towards the probe, in which an excitation voltage generated by an excitation mechanism is applied to the piezoelectric resonator through a first galvanic isolation transformer, and a current for measurement of mechanical oscillations of the piezoelectric resonator is applied through a second galvanic isolation transformer to a preamplification device on the output side. | 11-29-2012 |
| 20130055473 | DEVICE AND METHOD FOR DIFFERENTIATING TARGET CELL - A device for differentiating a target cell includes a cantilever including a fixed end and a free end, where the cantilever is elastically deformable, a tip disposed on the free end of the cantilever, where the tip contacts a surface of a cell, a measurement unit connected to the fixed end of the cantilever, where the measurement unit measures a degree of a repulsive force based on an elastic deformation of the cantilever, and a conversion unit which converts the repulsive force measured by the measurement unit into a modulus of elasticity derived from the surface of the cell. | 02-28-2013 |
| 20130167272 | ELECTRICAL-MECHANICAL COMPLEX SENSOR FOR NANOMATERIALS - Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector. | 06-27-2013 |
| 20130340125 | BAND EXCITATION METHOD APPLICABLE TO SCANNING PROBE MICROSCOPY - Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response. | 12-19-2013 |
| 20140123347 | ANALYSIS OF EX VIVO CELLS FOR DISEASE STATE DETECTION AND THERAPEUTIC AGENT SELECTION AND MONITORING - Described herein is the analysis of nanomechanical characteristics of cells. In particular, changes in certain local nanomechanical characteristics of ex vivo human cells can correlate with presence of a human disease, such as cancer, as well as a particular stage of progression of the disease. Also, for human patients that are administered with a therapeutic agent, changes in local nanomechanical characteristics of ex vivo cells collected from the patients can correlate with effectiveness of the therapeutic agent in terms of impeding or reversing progression of the disease. By exploiting this correlation, systems and related methods can be advantageously implemented for disease state detection and therapeutic agent selection and monitoring. | 05-01-2014 |
| 20140150139 | METHOD OF CONTROLLING FREQUENCY MODULATED-ATOMIC FORCE MICROSCOPE - A method is provided for controlling an FM-AFM including a cantilever having a resonant frequency and an excitation system configured to oscillate the cantilever in response to a drive signal. The method includes determining latency of the excitation system; receiving a deflection signal indicating a deflection of a cantilever tip; mixing the deflection signal with a first sine signal output by a PLL indicating a frequency shift of a frequency response of the cantilever; measuring the frequency shift in response to the drive signal; determining spurious phase of the cantilever based on the determined latency, the resonant frequency of the cantilever, and the measured frequency shift; providing a second sine signal having a phase that is advanced by the determined spurious phase to preemptively compensate for subsequent spurious phase of the cantilever; and driving the excitation system using the second sine signal with an adjusted amplitude as the drive signal. | 05-29-2014 |
| 20140223615 | Method and Apparatus of Operating a Scanning Probe Microscope - Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation. | 08-07-2014 |
| 20140283229 | Method and Apparatus of Operating a Scanning Probe Microscope - An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum. | 09-18-2014 |
| 20140289911 | METHOD OF INVESTIGATING A SAMPLE SURFACE - A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analysing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle. | 09-25-2014 |
| 20140331367 | MOTION SENSOR INTEGRATED NANO-PROBE N/MEMS APPARATUS, METHOD, AND APPLICATIONS - A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip. | 11-06-2014 |
| 20150293144 | Band Excitation Method Applicable to Scanning Probe Microscopy - Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response. | 10-15-2015 |
| 20150323561 | HIGH THROUGHPUT MICROSCOPY DEVICE - An object is mounted on a surface of a sample carrier. Properties of the surface of the object are measured and/or modified by means of a plurality of independently movable heads, each comprising a microscopic probe. The heads being located between the surface of a reference grid plate and the surface of the sample carrier. Head specific target locations are selected for the heads. Each head is moved over the surface of the reference grid plate, to the target location of the head. During movement a position of the head is determined from markings on the reference grid plate sensed by sensor in the head. When the sensor has indicated that the head is at the target location selected for the head a force between the head and the reference grid plate is switched to seat and/or clamp the head on the reference grid plate. | 11-12-2015 |
| 20150369838 | METHOD AND DEVICE FOR CONTROLLING A SCANNING PROBE MICROSCOPE - The present invention relates to a method for controlling a scanning probe microscope having a probe ( | 12-24-2015 |
| 20150369839 | DESIGN AND INTERFACE OF A MICROFABRICATED SCANNING FORCE SENSOR FOR COMBINED FORCE AND POSITION SENSING - A micro fabricated sensor for micro-mechanical and nano-mechanical testing and nano-indentation. The sensor includes a force sensing capacitive comb drive for the sensing of a force applied to a sample, a position sensing capacitive comb drive for the sensing of the position of a sample and a micro fabricated actuator to apply a load to the sample. All the sensor components mentioned above are monolithically integrated on the same silicon MEMS chip. | 12-24-2015 |
| 20160025770 | SCANNING PROBE MICROSCOPE AND SCANNING PROBE MICROSCOPY - A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (π/2 [rad]) and provides a combined amount to the phase difference. | 01-28-2016 |
| 20160047841 | SIGNAL DETECTION CIRCUIT AND SCANNING PROBE MICROSCOPE - A signal detection circuit includes: a VCO that generates a reference signal; a complex signal generation circuit that generates a complex signal from an input signal and the reference signal; a vector operation circuit that calculates an argument of the complex signal by performing a vector operation; and a subtracting phase comparator that compares the argument with a phase of the reference signal by calculating a difference between the argument and the phase of the reference signal, wherein the complex signal generation circuit includes: a multiplication circuit that multiplies the input signal by the reference signal; and an HPF that removes a DC component from a signal output from the multiplication circuit. | 02-18-2016 |
| 20160187374 | MINUTE OBJECT CHARACTERISTICS MEASURING APPARATUS - A minute object characteristics measuring apparatus is provided. The minute object characteristics measuring apparatus includes a holder, a cantilever, a measuring device, and a driver. The holder holds a minute object. The cantilever faces the minute object held by the holder. The measuring device measures a displacement of the cantilever. The driver drives one of the holder holding the minute object and the cantilever in a direction that the minute object held by the holder and the cantilever are brought close to or drawn away from each other. | 06-30-2016 |
| 850006000 | By optical means (EPO) | 44 |
| 20100005552 | SCANNING PROBE MICROSCOPE AND A METHOD TO MEASURE RELATIVE POSITION BETWEEN PROBES - A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope comprises multiple probes | 01-07-2010 |
| 20100088787 | PUMP PROBE MEASURING DEVICE AND SCANNING PROBE MICROSCOPE APPARATUS USING THE DEVICE - A pump probe measuring device ( | 04-08-2010 |
| 20100132075 | Self displacement sensing cantilever and scanning probe microscope - Provided is a self displacement sensing cantilever, including: a cantilever ( | 05-27-2010 |
| 20100175155 | Measurement and Mapping of Molecular Stretching and Rupture Forces - Detection and localization of stretching and rupture of targets (e.g., macromolecules) is achieved using time-varying tip-sample force measurements in a dynamic-mode atomic force microscope. The detection and localization is achieved with an independent force sensor that can detect and distinguish stretching and rupture forces acting on a sensor device as the tip of the sensor device traverses a surface, wherein the stretching and rupture forces are temporally distinct from forces between the tip and the substrate. | 07-08-2010 |
| 20100180355 | Probe Sensor with Multi-Dimensional Optical Grating - A displacement sensor employs an electromagnetic radiation source that generates a beam of electromagnetic radiation for measuring a feature of an object. The displacement sensor includes a displacement probe, a multi-dimensional diffraction grating and a plurality of photon detectors. A reflection surface, which is changed when the probe interacts with the object, interacts with the beam from the electromagnetic radiation source and reflects a beam from the reflection surface. The multi-dimensional diffraction grating interacts with the reflected beam and generates a pattern of diffracted beams. Each photon detector senses a different diffracted beam, thereby providing information about the state of the probe. | 07-15-2010 |
| 20100199393 | PROBE MICROSCOPE - A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens. | 08-05-2010 |
| 20100218286 | Modulated microwave microscopy and probes used therewith - A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip. | 08-26-2010 |
| 20100218287 | SCANNING PROBE MICROSCOPE AND METHOD OF OBSERVING SAMPLE USING THE SAME - In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample. | 08-26-2010 |
| 20100229262 | APPARATUS AND METHOD FOR EXAMINING A SPECIMEN BY MEANS OF PROBE MICROSCOPY - The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination. | 09-09-2010 |
| 20100235955 | VIBRATION COMPENSATION IN PROBE MICROSCOPY - A The local probe microscopy apparatus ( | 09-16-2010 |
| 20110035849 | SPM Imaging Apparatus, Probe and Method - An elongate probe ( | 02-10-2011 |
| 20110113515 | Scanning Probe Microscope - A portion of light emitted from a laser source ( | 05-12-2011 |
| 20110138506 | METHOD OF PROBE ALIGNMENT - A method of probe alignment is described in which an interrogating light beam is aligned with the probe of a scanning probe microscope. The methods described ensure that the light beam is positioned as closely as possible to a point directly above the probe tip. This improves image quality by removing variations that may arise if cantilever deflection is allowed to vary during the course of a scan and/or if scanning at high scanning speeds that may excite transient motion of the probe. | 06-09-2011 |
| 20110162117 | DEVICE FOR SCANNING A SAMPLE SURFACE COVERED WITH A LIQUID - A device for scanning the surface of a sample which is covered with a liquid, comprising a probe which has a tip at one end, means for moving the probe and the sample relative to one another a light source focussing device which focuses light from the light source onto a location in the area of the tip located in the liquid and a detector for detecting light which was scattered by the tip, wherein a boundary surface at which the light enters the liquid is located on the light path between the light source and the tip, wherein the boundary surface is positionally fixed with respect to the probe. | 06-30-2011 |
| 20110231965 | MODE SYNTHESIZING ATOMIC FORCE MICROSCOPY AND MODE-SYNTHESIZING SENSING - A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling. | 09-22-2011 |
| 20110247106 | DYNAMIC PROBE DETECTION SYSTEM - A dynamic probe detection system ( | 10-06-2011 |
| 20110247107 | METHOD FOR PROCESSING OUTPUT OF SCANNING TYPE PROBE MICROSCOPE, AND SCANNING TYPE PROBE MICROSCOPE - Incident light | 10-06-2011 |
| 20110252512 | CANTILEVER-BASED OPTICAL INTERFACIAL FORCE MICROSCOPE - An apparatus may comprise an optical detector configured to detect an optical beam reflected from a cantilever. The apparatus may further comprise an optical fiber probe suspended from the cantilever and a piezotube configured to move a sample substance in proximity to the optical fiber probe. The cantilever may be configured to deflect in response to an interfacial force between the sample substance and the optical fiber probe. The apparatus may further comprise a feedback controller communicatively coupled to the optical detector and a semiconductive circuit element abutting the cantilever. In response to detecting movement of the optical beam reflected from the cantilever, the feedback controller may apply a voltage to the semiconductive circuit element, which may reduce deflection of the cantilever. The voltage applied by the feedback controller may indicate a strength of the interfacial force between the sample substance and the optical fiber probe. | 10-13-2011 |
| 20110271411 | METHOD AND APPARATUS FOR MEASURING CANTILEVER DEFLECTION IN CONSTRAINED SPACES - Atomic Force Microscopes (AFMs) allow forces within systems under observation to be probed from the piconewton forces of a single covalent bond to the forces exerted by cells in the micronewton range. The pendulum geometry prevents the snap-to-contact problem afflicting soft cantilevers in AFMs which enable attonewton force sensitivity. However, the microscopic length scale studies of cellular/subcellular forces parallel to the imaging plane of an optical microscope requires high sensitivity force measurements at high sampling frequencies despite the difficulties of implementing the pendulum geometry from constraints imposed by the focused incoming/outgoing light interfering with the sample surface. Additionally measurement systems for biological tissue samples in vitro must satisfy complex physical constraints to provide access to the vertical cantilever. Embodiments of the invention address these geometrical restrictions by exploiting optical periscope approaches that further allows multiple probes to be deployed and multiple optical beams within each probe. | 11-03-2011 |
| 20120047610 | CANTILEVER-BASED OPTICAL INTERFACE FORCE MICROSCOPE - A method and an apparatus for detecting a normal force component and a friction force component between a probe and a sample substance using an interfacial force microscope is disclosed herein. According to one embodiment, a method of measuring normal and friction forces with an interfacial force microscope includes positioning a sample substance on a piezotube and in proximity to a probe suspended from a cantilever such that a molecular force between the sample substance and the probe causes the cantilever to deflect. The method may include converting the deflection of the cantilever into an electrical signal comprising a normal force and a friction force component, and measuring the normal and friction force components. | 02-23-2012 |
| 20120079633 | Apparatus and Method for Isolating and Measuring Movement in Metrology Apparatus - An Improved metrology apparatus, such as a scanning probe microscope (SPM), has an actuator that controls motion in three orthogonal directions when it is selectively and electrically stimulated. The X-Y section of the actuator, preferably a piezoelectric actuator, controls motion in the X and Y directions and the Z section of the actuator controls motion in the Z direction. A flexure is attached to the actuator and is mounted on a reference structure to prevent unwanted X and Y motion by the Z section of the actuator from moving a probe attached to the flexure. Preferably, two mirrors are mounted on the flexure. In operation of the SPM, a light beam is directed towards these mirrors. When the flexure moves in the Z direction, one of the mirrors is deflected and causes the reflected light to move across a detector, generating a signal representative of a change in the Z position of the flexure and the probe. | 03-29-2012 |
| 20120137395 | SCANNED PROBE MICROSCOPE WITHOUT INTERFERENCE OR GEOMETRIC CONSTRAINT FOR SINGLE OR MULTIPLE PROBE OPERATION IN AIR OR LIQUID - A method and a device permit scanned probe microscopes with a non-optical feedback mechanism ( | 05-31-2012 |
| 20120204296 | Multiple modulation heterodyne infrared spectroscopy - A heterodyne detection technique for highly localized IR spectroscopy based on an AFM. A pulsed IR source illuminates a sample and causes contact resonance of an AFM probe, which is a function of localized absorption. The probe is operated in intermittent contact mode and is therefore oscillated at a resonance frequency. A secondary oscillation is mixed in to the probe oscillation such that the sum of the secondary oscillation and the IR source pulse frequency is near another harmonic of the probe. A mixing effect causes measurable probe response at the other harmonic allowing data to be taken away from the pulse frequency, resulting in background effect rejection and improved spatial resolution. | 08-09-2012 |
| 20120272411 | Nanoindenter - A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements. | 10-25-2012 |
| 20130047302 | PROCESSES FOR SURFACE MEASUREMENT AND MODIFICATION BY SCANNING PROBE MICROSCOPY FUNCTIONING IN CONTINUOUS CURVILINEAR MODE, SCANNING PROBE MICROSCOPE AND DEVICE PERMITTING THEIR IMPLEMENTATION OF SAID METHODS - The invention relates to processes for the modification of surfaces and on processes for the measurement of adhesion forces and of different forces of interaction (friction forces, adhesion forces) by scanning probe microscopy functioning in continuous <> mode, as well as to a scanning probe microscope and a device permitting the implementation of said processes. | 02-21-2013 |
| 20130097739 | Cantilever of Scanning Probe Microscope and Method for Manufacturing the Same, Method for Inspecting Thermal Assist Type Magnetic Head Device and its Apparatus - To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit. | 04-18-2013 |
| 20130111635 | PROBE HEAD SCANNING PROBE MICROSCOPE INCLUDING THE SAME | 05-02-2013 |
| 20130276174 | Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode - An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement. | 10-17-2013 |
| 20130298294 | SYSTEM AND METHOD FOR IMAGING SOFT MATERIALS - A method of measuring properties of a sample, the method comprising: measuring a deflection of a cantilever of a COIFM; measuring a voltage at an actuator contacting the cantilever and configured to counteract the deflection of the cantilever; measuring a voltage at a scan signal source, wherein the scan signal source is communicably coupled to the piezotube and configured to move the piezotube along an X- and a Y-axis; measuring a voltage at a feedback controller, wherein the feedback controller is communicably coupled to the piezotube and configured to move the piezotube along a Z-axis; switching a switch from a first position to a second position; switching the switch to a third position; correlating at least one of the measurements to (i) a repulsive force, and (ii) an attractive force. | 11-07-2013 |
| 20130312142 | SYSTEM AND METHOD FOR HIGH-SPEED ATOMIC FORCE MICROSCOPY - A high-speed atomic force microscope (HSAFM) is disclosed herein. The HSAFM includes a cantilever, a piezotube, an optical detector, a circuit element, and a feedback controller. The cantilever has a probe, and the piezotube is arranged in proximity to the probe. The optical detector is configured to detect deflection of the cantilever, and the circuit element is abutting a first end of the cantilever and is configured to exert a force on the cantilever to resist deflection of the cantilever. The circuit element is communicably connected to the optical detector by a first feedback loop. The feedback controller is communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe. And the feedback controller is communicably connected to the optical detector through a second feedback loop. | 11-21-2013 |
| 20140082775 | Modular UHV Compatible Angle Physical Contact Fiber Connection for Transferable Fiber Interferometer Type Dynamic Force Microscope Head - A modular transferable ultra-high vacuum compatible device has a body with a tunnel through its thickness. An interferometric sensor is mounted above the body and has a brace on which a cantilever is disposed and through which an optical fiber passes so that the two may be aligned prior to installation in an atomic force measurement apparatus. The sensor-mounted body is coupled to a mount for engaging an atomic force measurement apparatus to act as the interferometric head of the apparatus. | 03-20-2014 |
| 20140317790 | OPTICAL BEAM POSITIONING UNIT FOR ATOMIC FORCE MICROSCOPE - This invention relates to an optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other. | 10-23-2014 |
| 20140338074 | MICROSCOPE PROBE AND METHOD FOR USE OF SAME - A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end | 11-13-2014 |
| 20150020244 | BEAM SCANNING SYSTEM - Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror. | 01-15-2015 |
| 20150059026 | MEASURING SURFACE CURVATURE - A method of measuring surface curvature comprises forming an intensity distribution defined by Fresnel diffraction, wherein said intensity distribution is formed by electromagnetic radiation reflected from a surface, obtaining data for the intensity distribution and determining information relating to the curvature of the surface using the obtained data. | 02-26-2015 |
| 20150121575 | DEVICE AND METHOD FOR MEASURING DISTRIBUTION OF ATOMIC RESOLUTION DEFORMATION - The present invention relates to an atomic resolution deformation distribution measurement device that can measure a deformation rate of an atomic scale with low expense by improving resolution using an AFM system, and the atomic resolution deformation distribution measurement device includes: a laser source generating a laser beam; a first cantilever and a second cantilever provided close to a measurement specimen or a reference specimen to cause deformation by an atomic force; an optical system controlling a light path of the laser beam so as to cause the laser beam to be sequentially reflected to the first cantilever and the second cantilever and locate the first cantilever and the second cantilever to an image point; a measurement unit measuring the laser beam reflected from the second cantilever; and a stage on which a measurement specimen or a reference specimen is located and movable in X, Y, and Z axis directions. | 04-30-2015 |
| 20150301079 | PROBE CALIBRATION OR MEASUREMENT ROUTINE - A method of performing a measurement routine on a probe, the probe comprising a cantilever extending from a support. An interferometer is operated to reflect a sensing beam with the cantilever thereby generating a reflected sensing beam and combine the reflected sensing beam with a reference beam to generate an interferogram. The interferometer generates a first interference measurement value at a first measurement time by measuring the interferogram and a second interference measurement value at a second measurement time by measuring the interferogram, The cantilever deforms to form a different shape between the measurement times. A change in height of the probe between the measurement times is estimated in accordance with a difference between the first and second interference measurement values, and corrected in accordance with the difference in shape of the cantilever between the measurement times. | 10-22-2015 |
| 20160025771 | SCANNING PROBE MICROSCOPE HEAD DESIGN - A SPM head incorporates a probe and a cantilever on which the probe is mounted. The cantilever has a planar reflecting surface proximate a free end of the cantilever. The cantilever extends from a mechanical mount and a single-mode optical fiber is supported by the mechanical mount to provide a beam axis at an angle away from normal relative to the reflecting surface. | 01-28-2016 |
| 20160033547 | Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source - An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme. | 02-04-2016 |
| 20160033548 | INSPECTION METHOD AND ITS APPARATUS FOR THERMAL ASSIST TYPE MAGNETIC HEAD ELEMENT - To detect near-field light, which is generated by a thermal assist type magnetic head element, and leaking light with high sensitivity and to more accurately obtain the spatial intensity distribution of a near-field light generation area, an inspection apparatus for a thermal assist type magnetic head element is adapted so that a distance between a cantilever and the surface of a specimen and the excitation amplitude of the cantilever are set to be small to detect near-field light with high sensitivity by the suppression of an influence of other light components, a distance between the cantilever and the surface of the specimen and the excitation amplitude of the cantilever are set to be large to detect other light components present in the vicinity of near-field light with high sensitivity by the suppression of an influence of the amount of detected near-field light when other light components are measured. | 02-04-2016 |
| 20160124014 | Force Detection for Microscopy Based on Direct Tip Trajectory Observation - With example embodiments described herein, a probe tip of a scanning probe microscope (such as an atomic force microscope (AFM)) is directly detected as it moves in a tapping mode to determine the tip positions over time, and a force for the tip is computed from these determined tip positions. | 05-05-2016 |
| 20160169937 | Metrological Scanning Probe Microscope | 06-16-2016 |
| 20160202288 | SCANNING PROBE MICROSCOPE HEAD DESIGN | 07-14-2016 |
| 20160252545 | Multiple Integrated Tips Scanning Probe Microscope | 09-01-2016 |
| 20100005552 | SCANNING PROBE MICROSCOPE AND A METHOD TO MEASURE RELATIVE POSITION BETWEEN PROBES - A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope comprises multiple probes | 01-07-2010 |
| 20100088787 | PUMP PROBE MEASURING DEVICE AND SCANNING PROBE MICROSCOPE APPARATUS USING THE DEVICE - A pump probe measuring device ( | 04-08-2010 |
| 20100132075 | Self displacement sensing cantilever and scanning probe microscope - Provided is a self displacement sensing cantilever, including: a cantilever ( | 05-27-2010 |
| 20100175155 | Measurement and Mapping of Molecular Stretching and Rupture Forces - Detection and localization of stretching and rupture of targets (e.g., macromolecules) is achieved using time-varying tip-sample force measurements in a dynamic-mode atomic force microscope. The detection and localization is achieved with an independent force sensor that can detect and distinguish stretching and rupture forces acting on a sensor device as the tip of the sensor device traverses a surface, wherein the stretching and rupture forces are temporally distinct from forces between the tip and the substrate. | 07-08-2010 |
| 20100180355 | Probe Sensor with Multi-Dimensional Optical Grating - A displacement sensor employs an electromagnetic radiation source that generates a beam of electromagnetic radiation for measuring a feature of an object. The displacement sensor includes a displacement probe, a multi-dimensional diffraction grating and a plurality of photon detectors. A reflection surface, which is changed when the probe interacts with the object, interacts with the beam from the electromagnetic radiation source and reflects a beam from the reflection surface. The multi-dimensional diffraction grating interacts with the reflected beam and generates a pattern of diffracted beams. Each photon detector senses a different diffracted beam, thereby providing information about the state of the probe. | 07-15-2010 |
| 20100199393 | PROBE MICROSCOPE - A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens. | 08-05-2010 |
| 20100218286 | Modulated microwave microscopy and probes used therewith - A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip. | 08-26-2010 |
| 20100218287 | SCANNING PROBE MICROSCOPE AND METHOD OF OBSERVING SAMPLE USING THE SAME - In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample. | 08-26-2010 |
| 20100229262 | APPARATUS AND METHOD FOR EXAMINING A SPECIMEN BY MEANS OF PROBE MICROSCOPY - The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination. | 09-09-2010 |
| 20100235955 | VIBRATION COMPENSATION IN PROBE MICROSCOPY - A The local probe microscopy apparatus ( | 09-16-2010 |
| 20110035849 | SPM Imaging Apparatus, Probe and Method - An elongate probe ( | 02-10-2011 |
| 20110113515 | Scanning Probe Microscope - A portion of light emitted from a laser source ( | 05-12-2011 |
| 20110138506 | METHOD OF PROBE ALIGNMENT - A method of probe alignment is described in which an interrogating light beam is aligned with the probe of a scanning probe microscope. The methods described ensure that the light beam is positioned as closely as possible to a point directly above the probe tip. This improves image quality by removing variations that may arise if cantilever deflection is allowed to vary during the course of a scan and/or if scanning at high scanning speeds that may excite transient motion of the probe. | 06-09-2011 |
| 20110162117 | DEVICE FOR SCANNING A SAMPLE SURFACE COVERED WITH A LIQUID - A device for scanning the surface of a sample which is covered with a liquid, comprising a probe which has a tip at one end, means for moving the probe and the sample relative to one another a light source focussing device which focuses light from the light source onto a location in the area of the tip located in the liquid and a detector for detecting light which was scattered by the tip, wherein a boundary surface at which the light enters the liquid is located on the light path between the light source and the tip, wherein the boundary surface is positionally fixed with respect to the probe. | 06-30-2011 |
| 20110231965 | MODE SYNTHESIZING ATOMIC FORCE MICROSCOPY AND MODE-SYNTHESIZING SENSING - A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling. | 09-22-2011 |
| 20110247106 | DYNAMIC PROBE DETECTION SYSTEM - A dynamic probe detection system ( | 10-06-2011 |
| 20110247107 | METHOD FOR PROCESSING OUTPUT OF SCANNING TYPE PROBE MICROSCOPE, AND SCANNING TYPE PROBE MICROSCOPE - Incident light | 10-06-2011 |
| 20110252512 | CANTILEVER-BASED OPTICAL INTERFACIAL FORCE MICROSCOPE - An apparatus may comprise an optical detector configured to detect an optical beam reflected from a cantilever. The apparatus may further comprise an optical fiber probe suspended from the cantilever and a piezotube configured to move a sample substance in proximity to the optical fiber probe. The cantilever may be configured to deflect in response to an interfacial force between the sample substance and the optical fiber probe. The apparatus may further comprise a feedback controller communicatively coupled to the optical detector and a semiconductive circuit element abutting the cantilever. In response to detecting movement of the optical beam reflected from the cantilever, the feedback controller may apply a voltage to the semiconductive circuit element, which may reduce deflection of the cantilever. The voltage applied by the feedback controller may indicate a strength of the interfacial force between the sample substance and the optical fiber probe. | 10-13-2011 |
| 20110271411 | METHOD AND APPARATUS FOR MEASURING CANTILEVER DEFLECTION IN CONSTRAINED SPACES - Atomic Force Microscopes (AFMs) allow forces within systems under observation to be probed from the piconewton forces of a single covalent bond to the forces exerted by cells in the micronewton range. The pendulum geometry prevents the snap-to-contact problem afflicting soft cantilevers in AFMs which enable attonewton force sensitivity. However, the microscopic length scale studies of cellular/subcellular forces parallel to the imaging plane of an optical microscope requires high sensitivity force measurements at high sampling frequencies despite the difficulties of implementing the pendulum geometry from constraints imposed by the focused incoming/outgoing light interfering with the sample surface. Additionally measurement systems for biological tissue samples in vitro must satisfy complex physical constraints to provide access to the vertical cantilever. Embodiments of the invention address these geometrical restrictions by exploiting optical periscope approaches that further allows multiple probes to be deployed and multiple optical beams within each probe. | 11-03-2011 |
| 20120047610 | CANTILEVER-BASED OPTICAL INTERFACE FORCE MICROSCOPE - A method and an apparatus for detecting a normal force component and a friction force component between a probe and a sample substance using an interfacial force microscope is disclosed herein. According to one embodiment, a method of measuring normal and friction forces with an interfacial force microscope includes positioning a sample substance on a piezotube and in proximity to a probe suspended from a cantilever such that a molecular force between the sample substance and the probe causes the cantilever to deflect. The method may include converting the deflection of the cantilever into an electrical signal comprising a normal force and a friction force component, and measuring the normal and friction force components. | 02-23-2012 |
| 20120079633 | Apparatus and Method for Isolating and Measuring Movement in Metrology Apparatus - An Improved metrology apparatus, such as a scanning probe microscope (SPM), has an actuator that controls motion in three orthogonal directions when it is selectively and electrically stimulated. The X-Y section of the actuator, preferably a piezoelectric actuator, controls motion in the X and Y directions and the Z section of the actuator controls motion in the Z direction. A flexure is attached to the actuator and is mounted on a reference structure to prevent unwanted X and Y motion by the Z section of the actuator from moving a probe attached to the flexure. Preferably, two mirrors are mounted on the flexure. In operation of the SPM, a light beam is directed towards these mirrors. When the flexure moves in the Z direction, one of the mirrors is deflected and causes the reflected light to move across a detector, generating a signal representative of a change in the Z position of the flexure and the probe. | 03-29-2012 |
| 20120137395 | SCANNED PROBE MICROSCOPE WITHOUT INTERFERENCE OR GEOMETRIC CONSTRAINT FOR SINGLE OR MULTIPLE PROBE OPERATION IN AIR OR LIQUID - A method and a device permit scanned probe microscopes with a non-optical feedback mechanism ( | 05-31-2012 |
| 20120204296 | Multiple modulation heterodyne infrared spectroscopy - A heterodyne detection technique for highly localized IR spectroscopy based on an AFM. A pulsed IR source illuminates a sample and causes contact resonance of an AFM probe, which is a function of localized absorption. The probe is operated in intermittent contact mode and is therefore oscillated at a resonance frequency. A secondary oscillation is mixed in to the probe oscillation such that the sum of the secondary oscillation and the IR source pulse frequency is near another harmonic of the probe. A mixing effect causes measurable probe response at the other harmonic allowing data to be taken away from the pulse frequency, resulting in background effect rejection and improved spatial resolution. | 08-09-2012 |
| 20120272411 | Nanoindenter - A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements. | 10-25-2012 |
| 20130047302 | PROCESSES FOR SURFACE MEASUREMENT AND MODIFICATION BY SCANNING PROBE MICROSCOPY FUNCTIONING IN CONTINUOUS CURVILINEAR MODE, SCANNING PROBE MICROSCOPE AND DEVICE PERMITTING THEIR IMPLEMENTATION OF SAID METHODS - The invention relates to processes for the modification of surfaces and on processes for the measurement of adhesion forces and of different forces of interaction (friction forces, adhesion forces) by scanning probe microscopy functioning in continuous <> mode, as well as to a scanning probe microscope and a device permitting the implementation of said processes. | 02-21-2013 |
| 20130097739 | Cantilever of Scanning Probe Microscope and Method for Manufacturing the Same, Method for Inspecting Thermal Assist Type Magnetic Head Device and its Apparatus - To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit. | 04-18-2013 |
| 20130111635 | PROBE HEAD SCANNING PROBE MICROSCOPE INCLUDING THE SAME | 05-02-2013 |
| 20130276174 | Method and Apparatus of Electrical Property Measurement Using an AFM Operating in Peak Force Tapping Mode - An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement. | 10-17-2013 |
| 20130298294 | SYSTEM AND METHOD FOR IMAGING SOFT MATERIALS - A method of measuring properties of a sample, the method comprising: measuring a deflection of a cantilever of a COIFM; measuring a voltage at an actuator contacting the cantilever and configured to counteract the deflection of the cantilever; measuring a voltage at a scan signal source, wherein the scan signal source is communicably coupled to the piezotube and configured to move the piezotube along an X- and a Y-axis; measuring a voltage at a feedback controller, wherein the feedback controller is communicably coupled to the piezotube and configured to move the piezotube along a Z-axis; switching a switch from a first position to a second position; switching the switch to a third position; correlating at least one of the measurements to (i) a repulsive force, and (ii) an attractive force. | 11-07-2013 |
| 20130312142 | SYSTEM AND METHOD FOR HIGH-SPEED ATOMIC FORCE MICROSCOPY - A high-speed atomic force microscope (HSAFM) is disclosed herein. The HSAFM includes a cantilever, a piezotube, an optical detector, a circuit element, and a feedback controller. The cantilever has a probe, and the piezotube is arranged in proximity to the probe. The optical detector is configured to detect deflection of the cantilever, and the circuit element is abutting a first end of the cantilever and is configured to exert a force on the cantilever to resist deflection of the cantilever. The circuit element is communicably connected to the optical detector by a first feedback loop. The feedback controller is communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe. And the feedback controller is communicably connected to the optical detector through a second feedback loop. | 11-21-2013 |
| 20140082775 | Modular UHV Compatible Angle Physical Contact Fiber Connection for Transferable Fiber Interferometer Type Dynamic Force Microscope Head - A modular transferable ultra-high vacuum compatible device has a body with a tunnel through its thickness. An interferometric sensor is mounted above the body and has a brace on which a cantilever is disposed and through which an optical fiber passes so that the two may be aligned prior to installation in an atomic force measurement apparatus. The sensor-mounted body is coupled to a mount for engaging an atomic force measurement apparatus to act as the interferometric head of the apparatus. | 03-20-2014 |
| 20140317790 | OPTICAL BEAM POSITIONING UNIT FOR ATOMIC FORCE MICROSCOPE - This invention relates to an optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other. | 10-23-2014 |
| 20140338074 | MICROSCOPE PROBE AND METHOD FOR USE OF SAME - A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end | 11-13-2014 |
| 20150020244 | BEAM SCANNING SYSTEM - Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror. | 01-15-2015 |
| 20150059026 | MEASURING SURFACE CURVATURE - A method of measuring surface curvature comprises forming an intensity distribution defined by Fresnel diffraction, wherein said intensity distribution is formed by electromagnetic radiation reflected from a surface, obtaining data for the intensity distribution and determining information relating to the curvature of the surface using the obtained data. | 02-26-2015 |
| 20150121575 | DEVICE AND METHOD FOR MEASURING DISTRIBUTION OF ATOMIC RESOLUTION DEFORMATION - The present invention relates to an atomic resolution deformation distribution measurement device that can measure a deformation rate of an atomic scale with low expense by improving resolution using an AFM system, and the atomic resolution deformation distribution measurement device includes: a laser source generating a laser beam; a first cantilever and a second cantilever provided close to a measurement specimen or a reference specimen to cause deformation by an atomic force; an optical system controlling a light path of the laser beam so as to cause the laser beam to be sequentially reflected to the first cantilever and the second cantilever and locate the first cantilever and the second cantilever to an image point; a measurement unit measuring the laser beam reflected from the second cantilever; and a stage on which a measurement specimen or a reference specimen is located and movable in X, Y, and Z axis directions. | 04-30-2015 |
| 20150301079 | PROBE CALIBRATION OR MEASUREMENT ROUTINE - A method of performing a measurement routine on a probe, the probe comprising a cantilever extending from a support. An interferometer is operated to reflect a sensing beam with the cantilever thereby generating a reflected sensing beam and combine the reflected sensing beam with a reference beam to generate an interferogram. The interferometer generates a first interference measurement value at a first measurement time by measuring the interferogram and a second interference measurement value at a second measurement time by measuring the interferogram, The cantilever deforms to form a different shape between the measurement times. A change in height of the probe between the measurement times is estimated in accordance with a difference between the first and second interference measurement values, and corrected in accordance with the difference in shape of the cantilever between the measurement times. | 10-22-2015 |
| 20160025771 | SCANNING PROBE MICROSCOPE HEAD DESIGN - A SPM head incorporates a probe and a cantilever on which the probe is mounted. The cantilever has a planar reflecting surface proximate a free end of the cantilever. The cantilever extends from a mechanical mount and a single-mode optical fiber is supported by the mechanical mount to provide a beam axis at an angle away from normal relative to the reflecting surface. | 01-28-2016 |
| 20160033547 | Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source - An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme. | 02-04-2016 |
| 20160033548 | INSPECTION METHOD AND ITS APPARATUS FOR THERMAL ASSIST TYPE MAGNETIC HEAD ELEMENT - To detect near-field light, which is generated by a thermal assist type magnetic head element, and leaking light with high sensitivity and to more accurately obtain the spatial intensity distribution of a near-field light generation area, an inspection apparatus for a thermal assist type magnetic head element is adapted so that a distance between a cantilever and the surface of a specimen and the excitation amplitude of the cantilever are set to be small to detect near-field light with high sensitivity by the suppression of an influence of other light components, a distance between the cantilever and the surface of the specimen and the excitation amplitude of the cantilever are set to be large to detect other light components present in the vicinity of near-field light with high sensitivity by the suppression of an influence of the amount of detected near-field light when other light components are measured. | 02-04-2016 |
| 20160124014 | Force Detection for Microscopy Based on Direct Tip Trajectory Observation - With example embodiments described herein, a probe tip of a scanning probe microscope (such as an atomic force microscope (AFM)) is directly detected as it moves in a tapping mode to determine the tip positions over time, and a force for the tip is computed from these determined tip positions. | 05-05-2016 |
| 20160169937 | Metrological Scanning Probe Microscope | 06-16-2016 |
| 20160202288 | SCANNING PROBE MICROSCOPE HEAD DESIGN | 07-14-2016 |
| 20160252545 | Multiple Integrated Tips Scanning Probe Microscope | 09-01-2016 |
| 850007000 | Self-detecting probes (EPO) | 1 |
| 20100306885 | Cantilevers with Integrated Actuators for Probe Microscopy - An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move. | 12-02-2010 |
| 20100306885 | Cantilevers with Integrated Actuators for Probe Microscopy - An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move. | 12-02-2010 |
