| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 850008000 | AUXILIARY MEANS SERVING TO ASSIST OR IMPROVE THE SCANNING PROBE TECHNIQUES OR APPARATUS, E.G., DISPLAY OR DATA PROCESSING DEVICES | 52 |
| 20090106868 | ATOMIC FORCE MICROSCOPE TIP SHAPE DETERMINATION TOOL - The invention relates to an atomic force microscope tip characterization tool. An atomic force microscope uses a very fine exploration tip placed at the end of an elastic cantilever beam and an optical system for exploring movements of the beam in contact with a relief to be explored. The shape of the exploration tip must be known, and to this end a tool is used, placed in an atomic force microscope, the known shapes whereof are used to derive the shape of the tip. The tool of the invention includes a thin silicon beam ( | 04-23-2009 |
| 20100100990 | HIGH-SCAN RATE POSITIONER FOR SCANNED PROBE MICROSCOPY - A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half. | 04-22-2010 |
| 20100263096 | MEASURING PROBE DEVICE FOR A PROBE MICROSCOPE, MEASURING CELL AND SCANNING PROBE MICROSCOPE - The invention relates to a measuring probe device for a probe microscope, in particular a scanning probe microscope, with a measuring probe holder and a measuring probe arranged on the measuring probe holder, which is set up for a probe microscopic investigation of a sample, wherein on the measuring probe holder, a measuring probe chamber is formed, which receives the measuring probe at least partially and is open on a side away from the measuring probe holder, and is configured to receive a liquid surrounding the measuring probe. The invention also relates to a measuring cell for receiving a liquid sample for a probe microscope, a scanning probe microscope with a measuring probe device and a scanning probe microscope with a measuring cell. | 10-14-2010 |
| 20100306886 | Probe Microscope - An object of the present invention is to provide a probe microscope that permits qualitative and quantitative evaluation on ions existing near the surface of a sample and permits to detect further simply and easily such as impurities, flaws and corrosion origins existing on the sample in high sensitivity. A probe microscope according to the present invention is provided with a test cell that holds a sample and permits to receive liquid, a probe, a counter electrode, a reference electrode, a drive mechanism that causes the probe to follow the surface of the sample as well as to scan the same, a potential control portion that controls a potential between the probe and the reference electrode and a current measuring portion that measures a current flowing between the probe and the counter electrode, and is characterized in that the material of the probe is constituted by a conductive body containing any of gold or gold alloy, carbon or carbon compound, boron, zinc, lead, tin and mercury. | 12-02-2010 |
| 20110173729 | Method for Automatically Loading a Probe Assembly - The preferred embodiments are directed to a method of operating an SPM including providing probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices. | 07-14-2011 |
| 20130007929 | Frequency Measuring and Control Apparatus with Integrated Parallel Synchronized Oscillators - A frequency measuring and control apparatus includes a plurality of synchronized oscillators integrated in parallel into one programmable logic device. | 01-03-2013 |
| 20130014296 | PROBE ASSEMBLY FOR A SCANNING PROBE MICROSCOPE - A probe assembly for use with a scanning probe microscope includes a carrier supporting at least two probes mounted on a tilt stage arranged to tilt the carrier about an axis. The probes may be distributed on one or more surfaces. In use, the tilt stage operates either as a selection device, orienting a selected probe or surface towards a sample, and/or as an alignment tool, adjusting a planar array of probes such that they are better aligned with the sample. This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation. | 01-10-2013 |
| 20130125269 | Method And Apparatus Of Tuning A Scanning Probe Microscope - An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve. | 05-16-2013 |
| 20130174300 | HIGH-SCAN RATE POSITIONER FOR SCANNED PROBE MICROSCOPY - A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half. | 07-04-2013 |
| 20150101085 | COMPENSATION FOR CANONICAL SECOND ORDER SYSTEMS FOR ELIMINATING PEAKING AT THE NATURAL FREQUENCY AND INCREASING BANDWIDTH - The present invention adds gain and phase into a canonical second order system in order to mitigate the adverse effects of unwanted resonance, where the gain is added to the forward path of a control loop of the system and is a ratio of the square of the system and mechanism frequencies, and the phase lead (H-factor) is added to the feedback path of the control loop of the system and is a complex ratio of these frequencies which includes a dc-component (H | 04-09-2015 |
| 20150101086 | FREQUENCY MEASURING AND CONTROL APPARATUS WITH INTEGRATED PARALLEL SYNCHRONIZED OSCILLATORS - A frequency measuring and control apparatus includes a plurality of synchronized oscillators integrated in parallel into one programmable logic device. | 04-09-2015 |
| 20090106868 | ATOMIC FORCE MICROSCOPE TIP SHAPE DETERMINATION TOOL - The invention relates to an atomic force microscope tip characterization tool. An atomic force microscope uses a very fine exploration tip placed at the end of an elastic cantilever beam and an optical system for exploring movements of the beam in contact with a relief to be explored. The shape of the exploration tip must be known, and to this end a tool is used, placed in an atomic force microscope, the known shapes whereof are used to derive the shape of the tip. The tool of the invention includes a thin silicon beam ( | 04-23-2009 |
| 20100100990 | HIGH-SCAN RATE POSITIONER FOR SCANNED PROBE MICROSCOPY - A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half. | 04-22-2010 |
| 20100263096 | MEASURING PROBE DEVICE FOR A PROBE MICROSCOPE, MEASURING CELL AND SCANNING PROBE MICROSCOPE - The invention relates to a measuring probe device for a probe microscope, in particular a scanning probe microscope, with a measuring probe holder and a measuring probe arranged on the measuring probe holder, which is set up for a probe microscopic investigation of a sample, wherein on the measuring probe holder, a measuring probe chamber is formed, which receives the measuring probe at least partially and is open on a side away from the measuring probe holder, and is configured to receive a liquid surrounding the measuring probe. The invention also relates to a measuring cell for receiving a liquid sample for a probe microscope, a scanning probe microscope with a measuring probe device and a scanning probe microscope with a measuring cell. | 10-14-2010 |
| 20100306886 | Probe Microscope - An object of the present invention is to provide a probe microscope that permits qualitative and quantitative evaluation on ions existing near the surface of a sample and permits to detect further simply and easily such as impurities, flaws and corrosion origins existing on the sample in high sensitivity. A probe microscope according to the present invention is provided with a test cell that holds a sample and permits to receive liquid, a probe, a counter electrode, a reference electrode, a drive mechanism that causes the probe to follow the surface of the sample as well as to scan the same, a potential control portion that controls a potential between the probe and the reference electrode and a current measuring portion that measures a current flowing between the probe and the counter electrode, and is characterized in that the material of the probe is constituted by a conductive body containing any of gold or gold alloy, carbon or carbon compound, boron, zinc, lead, tin and mercury. | 12-02-2010 |
| 20110173729 | Method for Automatically Loading a Probe Assembly - The preferred embodiments are directed to a method of operating an SPM including providing probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices. | 07-14-2011 |
| 20130007929 | Frequency Measuring and Control Apparatus with Integrated Parallel Synchronized Oscillators - A frequency measuring and control apparatus includes a plurality of synchronized oscillators integrated in parallel into one programmable logic device. | 01-03-2013 |
| 20130014296 | PROBE ASSEMBLY FOR A SCANNING PROBE MICROSCOPE - A probe assembly for use with a scanning probe microscope includes a carrier supporting at least two probes mounted on a tilt stage arranged to tilt the carrier about an axis. The probes may be distributed on one or more surfaces. In use, the tilt stage operates either as a selection device, orienting a selected probe or surface towards a sample, and/or as an alignment tool, adjusting a planar array of probes such that they are better aligned with the sample. This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation. | 01-10-2013 |
| 20130125269 | Method And Apparatus Of Tuning A Scanning Probe Microscope - An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve. | 05-16-2013 |
| 20130174300 | HIGH-SCAN RATE POSITIONER FOR SCANNED PROBE MICROSCOPY - A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half. | 07-04-2013 |
| 20150101085 | COMPENSATION FOR CANONICAL SECOND ORDER SYSTEMS FOR ELIMINATING PEAKING AT THE NATURAL FREQUENCY AND INCREASING BANDWIDTH - The present invention adds gain and phase into a canonical second order system in order to mitigate the adverse effects of unwanted resonance, where the gain is added to the forward path of a control loop of the system and is a ratio of the square of the system and mechanism frequencies, and the phase lead (H-factor) is added to the feedback path of the control loop of the system and is a complex ratio of these frequencies which includes a dc-component (H | 04-09-2015 |
| 20150101086 | FREQUENCY MEASURING AND CONTROL APPARATUS WITH INTEGRATED PARALLEL SYNCHRONIZED OSCILLATORS - A frequency measuring and control apparatus includes a plurality of synchronized oscillators integrated in parallel into one programmable logic device. | 04-09-2015 |
| 850009000 | Non-SPM analyzing devices, e.g., Scanning Electron Microscope [SEM], spectrometer or optical microscope | 13 |
| 20100229263 | PROTEIN MICROSCOPE - A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques, and includes: (A) an atmospheric-pressure or near-atmospheric-pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated vacuum chamber; (E) an atmospheric pressure interface connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument comprising a near-field probe for scanning the sample; a vacuum capillary nozzle for sucking in particles which are desorbed by said laser, the nozzle being connected to an inlet orifice of said atmospheric pressure interface; a scanner platform connected to the sample holder, the platform being movable to a distance within a near-field distance of the probe; and a controller for maintaining distance information about a current distance between said probe and said sample; (G) a recording device for recording topography and mass spectrum measurements made during scanning of the sample with the near-field probe; (H) a plotting device for plotting said topography and mass spectrum measurements as separate x-y mappings; and (I) an imaging device for providing images of the x-y mappings. | 09-09-2010 |
| 20110078834 | Temperature-Dependent Nanoscale Contact Potential Measurement Technique and Device - The present invention provides a microcantilever capable of independently measuring and/or controlling the electrical potential and/or temperature of a surface with nanometer scale position resolution. The present invention also provides methods of manipulating, imaging, and/or mapping a surface or the properties of a surface with a microcantilever. The microcantilevers of the present invention are also capable of independently measuring and/or controlling the electrical potential and/or temperature of a gas or liquid. The devices and methods of the present invention are useful for applications including gas, liquid, and surface sensing, micro- and nano-fabrication, imaging and mapping of surface contours or surface properties. | 03-31-2011 |
| 20110113516 | Atomic force microscope with combined FTIR-Raman spectroscopy having a micro thermal analyzer - An atomic force microscope is provided that includes a micro thermal analyzer with a tip. The micro thermal analyzer is configured for obtaining topographical data from a sample. A raman spectrometer is included and is configured for use in obtaining chemical data from the sample. | 05-12-2011 |
| 20120090056 | MICROCONTACT PROBER - The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever. | 04-12-2012 |
| 20120185977 | TIP-MOUNTED NANOWIRE LIGHT SOURCE INSTRUMENTATION - A scanning probe microscopy instrument includes a cantilevered tip that has a nanowire light emitting diode (LED). | 07-19-2012 |
| 20130145506 | Systems And Methods For Performing Microscopy At Hyperbaric Pressures - In some embodiments, a system for performing microscopy at hyperbaric pressures includes a hyperbaric chamber that defines a sealed interior space, and an imaging system contained within the interior space that is operated from outside of the hyperbaric chamber to image materials within the interior space at hyperbaric pressures. | 06-06-2013 |
| 20130180018 | QUANTITATIVE CHARACTERIZATION OF METALLIC AND SEMICONDUCTOR SINGLE-WALLED CARBON NANOTUBE RATIOS - Methods and processes for quantitatively determining the ratio of the metallic to semiconductor tubes in the sample single-wall carbon nanotubes is provided. The single-walled carbon nanotubes can be sonicated to debundle the bulk material. The debundled SWNTs can be coated with a polymer, such as sulfonated polystyrene-block-poly(ethylene-ran-butylene)-block-polystyrene (SDPS), and the coated SWNTs can be deposited on a substrate. The total number of tubes can be determined by atomic force microscopy (AFM). The semiconducting nanotubes can be determined by photoluminescence spectroscopy. The combination of photoluminescence and AFM measurements provides a quantitative ratio of the metallic to semiconductor tubes in the sample. | 07-11-2013 |
| 20130198913 | APPARATUS FOR MECHANICALLY ROBUST THERMAL ISOLATION OF COMPONENTS - An apparatus for scanning over a surface of an arbitrarily sized sample in magnetic resonance force microscopy comprising a cantilever for holding a magnetic particle at the cantilever tip, an RF antenna, positioned around the cantilever, for emitting an RF magnetic field across a portion of the sample causing spin of particles in the sample to reverse attracting and opposing the magnetic particle at the cantilever tip, an optical fiber, positioned close to the cantilever tip, for measuring displacements of the cantilever tip where the RF antenna, cantilever, magnetic particle and optical fiber are in fixed positions relative to each other and the sample is positionable according to a sample stage. | 08-01-2013 |
| 20130333077 | Integrated Microscope and Related Methods and Devices - An embodiment includes an integrated microscope including scanning probe microscopy (SPM) hardware integrated with optical microscopy hardware, and other embodiments include related methods and devices. | 12-12-2013 |
| 20140090117 | MAGNETIC HEAD INSPECTION SYSTEM AND MAGNETIC HEAD INSPECTION METHOD - The magnetic head inspection method includes, exciting the cantilever of a magnetic force microscope at a predetermined frequency, the cantilever being provided with a magnetic probe on the end thereof, floating the magnetic probe over the writing head of the magnetic head and two-dimensionally scanning a search range, detecting the specific position of the writing head based on the search two-dimensional magnetic field intensity of the writing head with exciting state of the cantilever in the two-dimensional scan, setting a shape detection range smaller than the search range for detecting the shape of the writing head based on the specific position, and floating the magnetic probe over the writing head with exciting state of the cantilever, detecting the shape of the writing head by detecting the detection two-dimensional magnetic field intensity of the writing head in the two-dimensional scan. | 03-27-2014 |
| 20140130212 | FUSION MEASUREMENT APPARATUS - Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope. | 05-08-2014 |
| 20140165236 | METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN EUV PHOTOMASK - The invention refers to a method for analyzing a defect of an optical element for the extreme ultra-violet wavelength range comprising at least one substrate and at least one multi-layer structure, the method comprising the steps: (a) determining first data by exposing the defect to ultra-violet radiation, (b) determining second data by scanning the defect with a scanning probe microscope, (c) determining third data by scanning the defect with a scanning particle microscope, and (d) com-bining the first, the second and the third data. | 06-12-2014 |
| 20140223616 | Apparatus of Analyzing a Sample and a Method for the Same - The apparatus includes a probe tip configured to scan a substrate having a defect to attach the defect on the probe tip while scanning the substrate, a cantilever configured to integrate a holder holding at least one probe tip, a stage configured to secure the substrate, an electromagnetic radiation source configured to generate the electromagnetic radiation beam, and an electromagnetic radiation detector configured to receive the first electromagnetic radiation signal and the second electromagnetic radiation signal. A first electromagnetic radiation signal is generated while an electromagnetic radiation beam focuses on the probe tip. A second electromagnetic radiation signal is generated while the electromagnetic radiation beam focuses on the sample attached on the probe tip. A chemical analysis of the sample is executed by comparing a difference between the first electromagnetic radiation signal and the second electromagnetic radiation signal. | 08-07-2014 |
| 20100229263 | PROTEIN MICROSCOPE - A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques, and includes: (A) an atmospheric-pressure or near-atmospheric-pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated vacuum chamber; (E) an atmospheric pressure interface connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument comprising a near-field probe for scanning the sample; a vacuum capillary nozzle for sucking in particles which are desorbed by said laser, the nozzle being connected to an inlet orifice of said atmospheric pressure interface; a scanner platform connected to the sample holder, the platform being movable to a distance within a near-field distance of the probe; and a controller for maintaining distance information about a current distance between said probe and said sample; (G) a recording device for recording topography and mass spectrum measurements made during scanning of the sample with the near-field probe; (H) a plotting device for plotting said topography and mass spectrum measurements as separate x-y mappings; and (I) an imaging device for providing images of the x-y mappings. | 09-09-2010 |
| 20110078834 | Temperature-Dependent Nanoscale Contact Potential Measurement Technique and Device - The present invention provides a microcantilever capable of independently measuring and/or controlling the electrical potential and/or temperature of a surface with nanometer scale position resolution. The present invention also provides methods of manipulating, imaging, and/or mapping a surface or the properties of a surface with a microcantilever. The microcantilevers of the present invention are also capable of independently measuring and/or controlling the electrical potential and/or temperature of a gas or liquid. The devices and methods of the present invention are useful for applications including gas, liquid, and surface sensing, micro- and nano-fabrication, imaging and mapping of surface contours or surface properties. | 03-31-2011 |
| 20110113516 | Atomic force microscope with combined FTIR-Raman spectroscopy having a micro thermal analyzer - An atomic force microscope is provided that includes a micro thermal analyzer with a tip. The micro thermal analyzer is configured for obtaining topographical data from a sample. A raman spectrometer is included and is configured for use in obtaining chemical data from the sample. | 05-12-2011 |
| 20120090056 | MICROCONTACT PROBER - The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever. | 04-12-2012 |
| 20120185977 | TIP-MOUNTED NANOWIRE LIGHT SOURCE INSTRUMENTATION - A scanning probe microscopy instrument includes a cantilevered tip that has a nanowire light emitting diode (LED). | 07-19-2012 |
| 20130145506 | Systems And Methods For Performing Microscopy At Hyperbaric Pressures - In some embodiments, a system for performing microscopy at hyperbaric pressures includes a hyperbaric chamber that defines a sealed interior space, and an imaging system contained within the interior space that is operated from outside of the hyperbaric chamber to image materials within the interior space at hyperbaric pressures. | 06-06-2013 |
| 20130180018 | QUANTITATIVE CHARACTERIZATION OF METALLIC AND SEMICONDUCTOR SINGLE-WALLED CARBON NANOTUBE RATIOS - Methods and processes for quantitatively determining the ratio of the metallic to semiconductor tubes in the sample single-wall carbon nanotubes is provided. The single-walled carbon nanotubes can be sonicated to debundle the bulk material. The debundled SWNTs can be coated with a polymer, such as sulfonated polystyrene-block-poly(ethylene-ran-butylene)-block-polystyrene (SDPS), and the coated SWNTs can be deposited on a substrate. The total number of tubes can be determined by atomic force microscopy (AFM). The semiconducting nanotubes can be determined by photoluminescence spectroscopy. The combination of photoluminescence and AFM measurements provides a quantitative ratio of the metallic to semiconductor tubes in the sample. | 07-11-2013 |
| 20130198913 | APPARATUS FOR MECHANICALLY ROBUST THERMAL ISOLATION OF COMPONENTS - An apparatus for scanning over a surface of an arbitrarily sized sample in magnetic resonance force microscopy comprising a cantilever for holding a magnetic particle at the cantilever tip, an RF antenna, positioned around the cantilever, for emitting an RF magnetic field across a portion of the sample causing spin of particles in the sample to reverse attracting and opposing the magnetic particle at the cantilever tip, an optical fiber, positioned close to the cantilever tip, for measuring displacements of the cantilever tip where the RF antenna, cantilever, magnetic particle and optical fiber are in fixed positions relative to each other and the sample is positionable according to a sample stage. | 08-01-2013 |
| 20130333077 | Integrated Microscope and Related Methods and Devices - An embodiment includes an integrated microscope including scanning probe microscopy (SPM) hardware integrated with optical microscopy hardware, and other embodiments include related methods and devices. | 12-12-2013 |
| 20140090117 | MAGNETIC HEAD INSPECTION SYSTEM AND MAGNETIC HEAD INSPECTION METHOD - The magnetic head inspection method includes, exciting the cantilever of a magnetic force microscope at a predetermined frequency, the cantilever being provided with a magnetic probe on the end thereof, floating the magnetic probe over the writing head of the magnetic head and two-dimensionally scanning a search range, detecting the specific position of the writing head based on the search two-dimensional magnetic field intensity of the writing head with exciting state of the cantilever in the two-dimensional scan, setting a shape detection range smaller than the search range for detecting the shape of the writing head based on the specific position, and floating the magnetic probe over the writing head with exciting state of the cantilever, detecting the shape of the writing head by detecting the detection two-dimensional magnetic field intensity of the writing head in the two-dimensional scan. | 03-27-2014 |
| 20140130212 | FUSION MEASUREMENT APPARATUS - Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope. | 05-08-2014 |
| 20140165236 | METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN EUV PHOTOMASK - The invention refers to a method for analyzing a defect of an optical element for the extreme ultra-violet wavelength range comprising at least one substrate and at least one multi-layer structure, the method comprising the steps: (a) determining first data by exposing the defect to ultra-violet radiation, (b) determining second data by scanning the defect with a scanning probe microscope, (c) determining third data by scanning the defect with a scanning particle microscope, and (d) com-bining the first, the second and the third data. | 06-12-2014 |
| 20140223616 | Apparatus of Analyzing a Sample and a Method for the Same - The apparatus includes a probe tip configured to scan a substrate having a defect to attach the defect on the probe tip while scanning the substrate, a cantilever configured to integrate a holder holding at least one probe tip, a stage configured to secure the substrate, an electromagnetic radiation source configured to generate the electromagnetic radiation beam, and an electromagnetic radiation detector configured to receive the first electromagnetic radiation signal and the second electromagnetic radiation signal. A first electromagnetic radiation signal is generated while an electromagnetic radiation beam focuses on the probe tip. A second electromagnetic radiation signal is generated while the electromagnetic radiation beam focuses on the sample attached on the probe tip. A chemical analysis of the sample is executed by comparing a difference between the first electromagnetic radiation signal and the second electromagnetic radiation signal. | 08-07-2014 |
| 850010000 | Display or data processing devices | 5 |
| 20150323562 | MAGNETIC PROFILE MEASURING DEVICE AND METHOD FOR MEASURING MAGNETIC PROFILE FOR DIRECT-CURRENT (DC) MAGNETIC FIELD - A magnetic profile measuring device which scans on a surface of a specimen by a magnetized probe on a tip of a driven cantilever, detects vibration of the cantilever, and generates a magnetic field distribution image of the area, the device including: the cantilever having the probe equipped on tip thereof; a driver driving the cantilever; an alternating-current magnetic field generator periodically reversing the magnetic polarity of the probe; a vibration sensor detecting vibration of the probe; a demodulator demodulating from a detection signal of the vibration sensor a magnetic signal corresponding to an alternating magnetic force between the probe and the specimen; a scanning mechanism; a data storage storing an initial data for each coordinate of the scanning area; a modified data generator generating a plurality of data by modifying the phase of the initial data; and an image display device. | 11-12-2015 |
| 20160018437 | CHEMICAL NANO-IDENTIFICATION OF A SAMPLE USING NORMALIZED NEAR-FIELD SPECTROSCOPY - Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and optionally, in the mid-infrared portion of the spectrum. | 01-21-2016 |
| 20160109477 | Method and Apparatus of Tuning a Scanning Probe Microscope - An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve. | 04-21-2016 |
| 20160146853 | EXPLOITATION OF SECOND-ORDER EFFECTS IN ATOMIC FORCE MICROSCOPY - A processing system cooperates with an atomic force microscope operating in ramp mode at a ramp frequency is configured to collect data indicative of at least one of physical and chemical properties of a sample. The system collects data indicative of probe movement at a frequency that is higher than the ramp frequency. This data comprises a second-order portion of the probe's signal. Based at least in part on the second-order portion, the processor obtains a parameter that is indicative at least one of a physical and a chemical property of a sample. | 05-26-2016 |
| 20150323562 | MAGNETIC PROFILE MEASURING DEVICE AND METHOD FOR MEASURING MAGNETIC PROFILE FOR DIRECT-CURRENT (DC) MAGNETIC FIELD - A magnetic profile measuring device which scans on a surface of a specimen by a magnetized probe on a tip of a driven cantilever, detects vibration of the cantilever, and generates a magnetic field distribution image of the area, the device including: the cantilever having the probe equipped on tip thereof; a driver driving the cantilever; an alternating-current magnetic field generator periodically reversing the magnetic polarity of the probe; a vibration sensor detecting vibration of the probe; a demodulator demodulating from a detection signal of the vibration sensor a magnetic signal corresponding to an alternating magnetic force between the probe and the specimen; a scanning mechanism; a data storage storing an initial data for each coordinate of the scanning area; a modified data generator generating a plurality of data by modifying the phase of the initial data; and an image display device. | 11-12-2015 |
| 20160018437 | CHEMICAL NANO-IDENTIFICATION OF A SAMPLE USING NORMALIZED NEAR-FIELD SPECTROSCOPY - Apparatus and method for nano-identification a sample by measuring, with the use of evanescent waves, optical spectra of near-field interaction between the sample and optical nanoantenna oscillating at nano-distance above the sample and discriminating background backscattered radiation not sensitive to such near-field interaction. Discrimination may be effectuated by optical data acquisition at periodically repeated moments of nanoantenna oscillation without knowledge of distance separating nanoantenna and sample. Measurement includes chemical identification of sample on nano-scale, during which absolute value of phase corresponding to near-field radiation representing said interaction is measured directly, without offset. Calibration of apparatus and measurement is provided by performing, prior to sample measurement, a reference measurement of reference sample having known index of refraction. Nano-identification is realized with sub-50 nm resolution and optionally, in the mid-infrared portion of the spectrum. | 01-21-2016 |
| 20160109477 | Method and Apparatus of Tuning a Scanning Probe Microscope - An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve. | 04-21-2016 |
| 20160146853 | EXPLOITATION OF SECOND-ORDER EFFECTS IN ATOMIC FORCE MICROSCOPY - A processing system cooperates with an atomic force microscope operating in ramp mode at a ramp frequency is configured to collect data indicative of at least one of physical and chemical properties of a sample. The system collects data indicative of probe movement at a frequency that is higher than the ramp frequency. This data comprises a second-order portion of the probe's signal. Based at least in part on the second-order portion, the processor obtains a parameter that is indicative at least one of a physical and a chemical property of a sample. | 05-26-2016 |
| 850011000 | For error compensation | 1 |
| 20110314577 | METHOD FOR AUTOMATIC ADJUSTMENT OF THE APPLIED FORCE AND CONTROL OF THE FORCE DRIFT IN AN ATOMIC FORCE MICROSCOPE DURING CONTACT MODE IMAGING - A method, apparatus and computer program are provided for automatically compensating a drift of a force applied by an Atomic Force Microscope during contact mode. The method makes it possible to automatically control and correct force drift in contact mode Atomic Force Microscopy. In a preferred embodiment, the present method includes steps measuring independently lateral and vertical vibration signals, analyzing theses signals and finally comparing theses signals to reference vibration signals. In a second embodiment, the vibration signals may be combined by means of an index, called force index. | 12-22-2011 |
| 20110314577 | METHOD FOR AUTOMATIC ADJUSTMENT OF THE APPLIED FORCE AND CONTROL OF THE FORCE DRIFT IN AN ATOMIC FORCE MICROSCOPE DURING CONTACT MODE IMAGING - A method, apparatus and computer program are provided for automatically compensating a drift of a force applied by an Atomic Force Microscope during contact mode. The method makes it possible to automatically control and correct force drift in contact mode Atomic Force Microscopy. In a preferred embodiment, the present method includes steps measuring independently lateral and vertical vibration signals, analyzing theses signals and finally comparing theses signals to reference vibration signals. In a second embodiment, the vibration signals may be combined by means of an index, called force index. | 12-22-2011 |
| 850012000 | Means for establishing or regulating a desired environmental condition within a sample chamber | 5 |
| 850013000 | Thermal environment | 2 |
| 20100031403 | Heat Coupling Device - The invention concerns a heat coupling device for scanning force or atomic force microscopy, comprising a first heat conducting device ( | 02-04-2010 |
| 20150074859 | Low Drift Scanning Probe Microscope - A scanning probe microscope, such as an atomic force microscope, and method including z-stage and a bridge structure. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. The method reduces thermal drift of the z-stage and the bridge using a combination of heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. Ideally, the temperatures in the system are selected so as to reduce drift between the probe and the sample during AFM scanning, wherein the drift is preferably maintained at less than about 1 nm for an ambient temperature change of about 1° C. | 03-12-2015 |
| 20100031403 | Heat Coupling Device - The invention concerns a heat coupling device for scanning force or atomic force microscopy, comprising a first heat conducting device ( | 02-04-2010 |
| 20150074859 | Low Drift Scanning Probe Microscope - A scanning probe microscope, such as an atomic force microscope, and method including z-stage and a bridge structure. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. The method reduces thermal drift of the z-stage and the bridge using a combination of heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. Ideally, the temperatures in the system are selected so as to reduce drift between the probe and the sample during AFM scanning, wherein the drift is preferably maintained at less than about 1 nm for an ambient temperature change of about 1° C. | 03-12-2015 |
| 850014000 | Fluid environment | 2 |
| 20160003867 | ATOMIC FORCE MICROSCOPE DRYING SYSTEM AND ATOMIC FORCE MICROSCOPE - A drying system, which can be implemented in an atomic force microscopy (AFM) machine according to the invention, includes an elastomer having elasticity and disposed between an AFM scan head device and a platen to form a chamber. A sample supporting substrate is disposed in the chamber and for placement of a specimen. A gas inlet pipeline extends from an outside of the chamber to an inside of the chamber to introduce a drying gas into the chamber. A gas outlet pipeline extends from the inside of the chamber to the outside of the chamber to exhaust the drying gas out of the chamber. Using the mechanism of introducing and exhausting the drying gas can exhaust the moisture out of the chamber, so that the relative humidity (RH) is decreased below 5% and a constant internal pressure is held in the space to become stable. | 01-07-2016 |
| 20160003867 | ATOMIC FORCE MICROSCOPE DRYING SYSTEM AND ATOMIC FORCE MICROSCOPE - A drying system, which can be implemented in an atomic force microscopy (AFM) machine according to the invention, includes an elastomer having elasticity and disposed between an AFM scan head device and a platen to form a chamber. A sample supporting substrate is disposed in the chamber and for placement of a specimen. A gas inlet pipeline extends from an outside of the chamber to an inside of the chamber to introduce a drying gas into the chamber. A gas outlet pipeline extends from the inside of the chamber to the outside of the chamber to exhaust the drying gas out of the chamber. Using the mechanism of introducing and exhausting the drying gas can exhaust the moisture out of the chamber, so that the relative humidity (RH) is decreased below 5% and a constant internal pressure is held in the space to become stable. | 01-07-2016 |
| 850015000 | Liquid environment | 1 |
| 20100107285 | TUNABLE BIO-FUNCTIONALIZED NANOELECTROMECHANICAL SYSTEMS HAVING SUPERHYDROPHOBIC SURFACES FOR USE IN FLUIDS - Tunable, bio-functionalized, nanoelectromechanical systems (Bio-NEMS), micromechanical resonators (MRs), nanomechanical resonators (NRs), surface acoustic wave resonators, and bulk acoustic wave resonators having superhydrophobic surfaces for use in aqueous biochemical solutions. The MRs, NRs or Bio-NEMS include a system resonator that can vibrate or oscillate at a relatively high frequency and to which an analyte molecule(s) contained in the solution ○ can attach or upon which small molecular-scale forces can act; a device for adjusting a relaxation time of the solution, to increase the quality (Q-factor) of the resonator inside the solution, to reduce energy dissipation into the solution; and a device for detecting a frequency shift in the resonator due to the analyte molecule(s) or applied molecular-scale forces. The resonator can include roughness elements that provide superhydrophobicity and, more particularly, gaps between adjacent asperities for repelling the aqueous solution from the surface of the device. | 04-29-2010 |
| 20100107285 | TUNABLE BIO-FUNCTIONALIZED NANOELECTROMECHANICAL SYSTEMS HAVING SUPERHYDROPHOBIC SURFACES FOR USE IN FLUIDS - Tunable, bio-functionalized, nanoelectromechanical systems (Bio-NEMS), micromechanical resonators (MRs), nanomechanical resonators (NRs), surface acoustic wave resonators, and bulk acoustic wave resonators having superhydrophobic surfaces for use in aqueous biochemical solutions. The MRs, NRs or Bio-NEMS include a system resonator that can vibrate or oscillate at a relatively high frequency and to which an analyte molecule(s) contained in the solution ○ can attach or upon which small molecular-scale forces can act; a device for adjusting a relaxation time of the solution, to increase the quality (Q-factor) of the resonator inside the solution, to reduce energy dissipation into the solution; and a device for detecting a frequency shift in the resonator due to the analyte molecule(s) or applied molecular-scale forces. The resonator can include roughness elements that provide superhydrophobicity and, more particularly, gaps between adjacent asperities for repelling the aqueous solution from the surface of the device. | 04-29-2010 |
| 850016000 | Vacuum environment | 1 |
| 20090260112 | Stable Emission Gas Ion Source and Method for Operation Thereof - A method of operating a focused ion beam device for emitting during operation a focused ion beam including ions of a gas generated at a first partial pressure, comprising cleaning an emitter tip positioned in an emitter tip region of the focused ion beam device, the cleaning comprises introducing the gas into the emitter tip region such that the gas has a second partial pressure of at least two times the first pressure. Further, a focused ion beam device is provided, comprising a gas field emitter tip ( | 10-15-2009 |
| 20090260112 | Stable Emission Gas Ion Source and Method for Operation Thereof - A method of operating a focused ion beam device for emitting during operation a focused ion beam including ions of a gas generated at a first partial pressure, comprising cleaning an emitter tip positioned in an emitter tip region of the focused ion beam device, the cleaning comprises introducing the gas into the emitter tip region such that the gas has a second partial pressure of at least two times the first pressure. Further, a focused ion beam device is provided, comprising a gas field emitter tip ( | 10-15-2009 |
| 850017000 | Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g., vibrations or electromagnetic fields | 1 |
| 20130212750 | ZERO THERMAL EXPANSION, LOW HEAT TRANSFER, VARIABLE TEMPERATURE SAMPLE ASSEMBLY FOR PROBE MICROSCOPY - A variable temperature assembly for scanning probe microscopy (SPM) is described which minimizes or eliminates motion of the sample caused by the thermal expansion or contraction of the sample holder assembly and platform/scanning stage on which the assembly is mounted, and minimizes heating or cooling of the platform/stage. In heater form, the variable temperature assembly includes a thin boron nitride puck with one or more high-resistivity wires embedded along an underside of the puck. The puck is suspended from its polished top surface by posts that are secured to the microscope stage. All thermal expansion of the puck occurs in the downward direction, away from the SPM probe-sample interface, thus eliminating relative motion between the probe tip and sample surface. The top surface of the puck remains stationary as a result of the unique geometry of the posts and the puck-post attachment configuration described herein. | 08-15-2013 |
| 20130212750 | ZERO THERMAL EXPANSION, LOW HEAT TRANSFER, VARIABLE TEMPERATURE SAMPLE ASSEMBLY FOR PROBE MICROSCOPY - A variable temperature assembly for scanning probe microscopy (SPM) is described which minimizes or eliminates motion of the sample caused by the thermal expansion or contraction of the sample holder assembly and platform/scanning stage on which the assembly is mounted, and minimizes heating or cooling of the platform/stage. In heater form, the variable temperature assembly includes a thin boron nitride puck with one or more high-resistivity wires embedded along an underside of the puck. The puck is suspended from its polished top surface by posts that are secured to the microscope stage. All thermal expansion of the puck occurs in the downward direction, away from the SPM probe-sample interface, thus eliminating relative motion between the probe tip and sample surface. The top surface of the puck remains stationary as a result of the unique geometry of the posts and the puck-post attachment configuration described herein. | 08-15-2013 |
| 850018000 | Sample handling device or method | 17 |
| 20090119807 | METHOD OF PREPARING A TRANSMISSION ELECTRON MICROSCOPE SAMPLE AND A SAMPLE PIECE FOR A TRANSMISSION ELECTRON MICROSCOPE - Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder. | 05-07-2009 |
| 20090126051 | Method and System for Sample Preparation - Method and system for preparing samples for use in electron microscopy. The method and system use a focused ion beam (FIB) instrument and a scanning electron microscope to improve the time efficiency of the FIB instrument. The FIB instrument incorporates machining means for preparing thin-film samples by ion beam irradiation. The scanning electron microscope incorporates a gas supply means and a manipulator equipped with a probe. The gas supply means ejects gas at the sample after it has been shifted from the FIB instrument together with a sample holder. The sample is irradiated with an electron beam while the gas is injected at the sample from the gas supply means under the condition where the probe is contacted with the sample. Thus, the sample is bonded to the probe. | 05-14-2009 |
| 20100242142 | SCANNING PROBE MICROSCOPE - The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions. | 09-23-2010 |
| 20100306887 | Molded microfluidic fluid cell for atomic force microscopy - A microfluidic cell includes a compressible block and a cantilever. The compressible block includes a first horizontal surface, an opposite second horizontal surface and a plurality of vertical surfaces therebetween. A gasket structure depends downwardly from the second horizontal surface. The gasket structure defines an open cavity therein. The compressible block defines a fluid inlet passage and a fluid outlet passage each in fluid communication with the cavity and opening to a selected one of the first horizontal surface and one of the plurality of vertical surfaces. The cantilever includes body portion and a beam extending laterally therefrom. The body portion is embedded in the compressible block and a portion of the beam extends into the cavity defined by the gasket structure. | 12-02-2010 |
| 20120102601 | SCANNING PROBE MICROSCOPE - Disclosed herein is a scanning probe microscope having an improved structure to precisely control a distance between a scanning probe and a surface of a sample. The scanning probe microscope includes a sample stage having a support structure on which a sample to be measured is placed and generating vibration, and a scanning probe not attached to the sample stage but independently constituted and scanning a surface of the sample placed on the sample stage and vibrated by the sample stage. | 04-26-2012 |
| 20130031680 | SEMI-AUTO SCANNING PROBE MICROSCOPY SCANNING - A semi-automated method for atomic force microscopy (“AFM”) scanning of a sample is disclosed. The method can include manually teaching a sample and AFM tip relative location on an AFM tool; then scanning, via a predefined program, on the same sample or other sample with same pattern to produce more images automatically. | 01-31-2013 |
| 20130061356 | Active Damping of High Speed Scanning Probe Microscope Components - A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes. | 03-07-2013 |
| 20140182020 | VERTICALLY MOUNTED SAMPLE STAGE FOR MICROSCOPY AND SCANNING PROBE MICROSCOPE USING THE SAMPLE STAGE - A sample stage for microscopy includes a sample holder including a body in which a sample-mounting part and a seating part are provided on a bottom of the body and a grip part for a mounting unit is provided on a top of the body, a sample rack, on which the sample holder is mounted, including a supporter supporting the seating part of the sample holder, and an elastic element provided on the sample rack, providing the sample holder with a pressing force inclined with respect to a vertical direction and fastening the sample holder to the sample rack while the seating part is being supported by the supporter. The sample stage may be vertically mounted. | 06-26-2014 |
| 20140289912 | Peakforce Photothermal-Based Detection of IR Nanoabsorption - An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ω, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system. | 09-25-2014 |
| 20140304861 | LEVELING APPARATUS AND ATOMIC FORCE MICROSCOPE INCLUDING THE SAME - The present invention relates to a leveling apparatus that levels an object to be leveled with a surface of a substrate by measuring the force applied to the object, and an atomic force microscope including the leveling apparatus. | 10-09-2014 |
| 20150067931 | Method and Means for Coupling High-Frequency Energy to and/or from the Nanoscale Junction of an Electrically-Conductive Tip with a Semiconductor - A method for coupling high-frequency energy, in particular for microwave circuits, to a nanoscale junction involves placing a bias-T outside of the tip and sample circuits of a scanning probe microscope and connecting a portion of a sample of analyzed semi-conductor through an outer shielding layer of coaxial cable so as to complete a circuit with minimal involvement of the sample. The bias-T branches into high and low-frequency circuits, both of which are completed and, at least the high-frequency circuit, does not rely on grounding of implements or other structure to accomplish said completion. | 03-05-2015 |
| 20150316583 | SEMICONDUCTOR TESTING STRUCTURES AND FABRICATION METHOD THEREOF - A method is provided for fabricating a semiconductor testing structure. The method includes providing a substrate having a to-be-tested device structure formed on a surface of the substrate, a dielectric layer formed on the surface of the substrate and a surface of the to-be-tested structure, and conductive structures and an insulation layer electrically insulating the conductive structures formed on a first surface of the dielectric layer. The method also includes planarizing the conductive structures and the insulation layer to remove the conductive structures and the insulation layer until the first surface of the dielectric layer is exposed; and bonding the first surface of the dielectric layer with a dummy wafer by an adhesive layer. Further, the method includes removing the substrate to expose a second surface relative to the first surface of the dielectric layer of the dielectric layer and a surface of the to-be-tested device structure. | 11-05-2015 |
| 20150338438 | Modular Atomic Force Microscope with Environmental Controls - A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures. | 11-26-2015 |
| 20150355266 | ATOM PROBE TOMOGRAPHY SAMPLE PREPARATION FOR THREE-DIMENSIONAL (3D) SEMICONDUCTOR DEVICES - A method for atom probe tomography (APT) sample preparation from a three-dimensional (3D) field effect transistor device formed within a semiconductor structure is provided. The method may include measuring a capacitance-voltage (C-V) characteristic for the 3D field effect transistor device and identifying, based on the measured capacitance-voltage (C-V) characteristic, a Fin structure corresponding to the 3D field effect transistor device. The identified Fin structure is detached from the 3D field effect transistor device using a nanomanipulator probe tip. The detached Fin is then welded to the nanomanipulator probe tip using an incident focused ion beam having a voltage of less than about 1000 eV. The incident focused ion beam having a voltage of less than about 1000 eV is applied to a tip of the Fin that is welded to the nanomanipulator probe tip. | 12-10-2015 |
| 20160178658 | SAMPLE HOLDER FOR AN AFM | 06-23-2016 |
| 20160187375 | SAMPLE HOLDER FOR AN ATOMIC FORCE MICROSCOPE - The present invention relates to sample holders for holding a sample, particularly for an atomic force microscope. Such a sample holder comprising a sample dish ( | 06-30-2016 |
| 20160187376 | PROBE AND SAMPLE EXCHANGE MECHANISM - A scanning probe microscope system. A sample stage is provided along with a microscope arranged to collect data with a probe carried by the microscope from a sample carried by the sample stage. A probe/sample exchange mechanism is arranged to exchange the probe carried by the microscope with a new probe, and is also arranged to exchange the sample carried by the sample stage with a new sample. The probe/sample exchange mechanism comprises a transport structure which can move relative to the microscope and the sample stage; a probe carrier carried by the transport structure and adapted to carry the probe or the new probe when the probe is exchanged with the new probe; a sample carrier carried by the transport structure, wherein the sample carrier is adapted differently from the probe carrier to carry the sample or the new sample when the sample is exchanged with the new sample; and a drive system arranged to move the transport structure relative to the microscope and the sample stage when the probe is exchanged with the new probe and the sample is exchanged with the new sample. | 06-30-2016 |
| 20090119807 | METHOD OF PREPARING A TRANSMISSION ELECTRON MICROSCOPE SAMPLE AND A SAMPLE PIECE FOR A TRANSMISSION ELECTRON MICROSCOPE - Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder. | 05-07-2009 |
| 20090126051 | Method and System for Sample Preparation - Method and system for preparing samples for use in electron microscopy. The method and system use a focused ion beam (FIB) instrument and a scanning electron microscope to improve the time efficiency of the FIB instrument. The FIB instrument incorporates machining means for preparing thin-film samples by ion beam irradiation. The scanning electron microscope incorporates a gas supply means and a manipulator equipped with a probe. The gas supply means ejects gas at the sample after it has been shifted from the FIB instrument together with a sample holder. The sample is irradiated with an electron beam while the gas is injected at the sample from the gas supply means under the condition where the probe is contacted with the sample. Thus, the sample is bonded to the probe. | 05-14-2009 |
| 20100242142 | SCANNING PROBE MICROSCOPE - The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions. | 09-23-2010 |
| 20100306887 | Molded microfluidic fluid cell for atomic force microscopy - A microfluidic cell includes a compressible block and a cantilever. The compressible block includes a first horizontal surface, an opposite second horizontal surface and a plurality of vertical surfaces therebetween. A gasket structure depends downwardly from the second horizontal surface. The gasket structure defines an open cavity therein. The compressible block defines a fluid inlet passage and a fluid outlet passage each in fluid communication with the cavity and opening to a selected one of the first horizontal surface and one of the plurality of vertical surfaces. The cantilever includes body portion and a beam extending laterally therefrom. The body portion is embedded in the compressible block and a portion of the beam extends into the cavity defined by the gasket structure. | 12-02-2010 |
| 20120102601 | SCANNING PROBE MICROSCOPE - Disclosed herein is a scanning probe microscope having an improved structure to precisely control a distance between a scanning probe and a surface of a sample. The scanning probe microscope includes a sample stage having a support structure on which a sample to be measured is placed and generating vibration, and a scanning probe not attached to the sample stage but independently constituted and scanning a surface of the sample placed on the sample stage and vibrated by the sample stage. | 04-26-2012 |
| 20130031680 | SEMI-AUTO SCANNING PROBE MICROSCOPY SCANNING - A semi-automated method for atomic force microscopy (“AFM”) scanning of a sample is disclosed. The method can include manually teaching a sample and AFM tip relative location on an AFM tool; then scanning, via a predefined program, on the same sample or other sample with same pattern to produce more images automatically. | 01-31-2013 |
| 20130061356 | Active Damping of High Speed Scanning Probe Microscope Components - A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes. | 03-07-2013 |
| 20140182020 | VERTICALLY MOUNTED SAMPLE STAGE FOR MICROSCOPY AND SCANNING PROBE MICROSCOPE USING THE SAMPLE STAGE - A sample stage for microscopy includes a sample holder including a body in which a sample-mounting part and a seating part are provided on a bottom of the body and a grip part for a mounting unit is provided on a top of the body, a sample rack, on which the sample holder is mounted, including a supporter supporting the seating part of the sample holder, and an elastic element provided on the sample rack, providing the sample holder with a pressing force inclined with respect to a vertical direction and fastening the sample holder to the sample rack while the seating part is being supported by the supporter. The sample stage may be vertically mounted. | 06-26-2014 |
| 20140289912 | Peakforce Photothermal-Based Detection of IR Nanoabsorption - An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ω, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system. | 09-25-2014 |
| 20140304861 | LEVELING APPARATUS AND ATOMIC FORCE MICROSCOPE INCLUDING THE SAME - The present invention relates to a leveling apparatus that levels an object to be leveled with a surface of a substrate by measuring the force applied to the object, and an atomic force microscope including the leveling apparatus. | 10-09-2014 |
| 20150067931 | Method and Means for Coupling High-Frequency Energy to and/or from the Nanoscale Junction of an Electrically-Conductive Tip with a Semiconductor - A method for coupling high-frequency energy, in particular for microwave circuits, to a nanoscale junction involves placing a bias-T outside of the tip and sample circuits of a scanning probe microscope and connecting a portion of a sample of analyzed semi-conductor through an outer shielding layer of coaxial cable so as to complete a circuit with minimal involvement of the sample. The bias-T branches into high and low-frequency circuits, both of which are completed and, at least the high-frequency circuit, does not rely on grounding of implements or other structure to accomplish said completion. | 03-05-2015 |
| 20150316583 | SEMICONDUCTOR TESTING STRUCTURES AND FABRICATION METHOD THEREOF - A method is provided for fabricating a semiconductor testing structure. The method includes providing a substrate having a to-be-tested device structure formed on a surface of the substrate, a dielectric layer formed on the surface of the substrate and a surface of the to-be-tested structure, and conductive structures and an insulation layer electrically insulating the conductive structures formed on a first surface of the dielectric layer. The method also includes planarizing the conductive structures and the insulation layer to remove the conductive structures and the insulation layer until the first surface of the dielectric layer is exposed; and bonding the first surface of the dielectric layer with a dummy wafer by an adhesive layer. Further, the method includes removing the substrate to expose a second surface relative to the first surface of the dielectric layer of the dielectric layer and a surface of the to-be-tested device structure. | 11-05-2015 |
| 20150338438 | Modular Atomic Force Microscope with Environmental Controls - A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures. | 11-26-2015 |
| 20150355266 | ATOM PROBE TOMOGRAPHY SAMPLE PREPARATION FOR THREE-DIMENSIONAL (3D) SEMICONDUCTOR DEVICES - A method for atom probe tomography (APT) sample preparation from a three-dimensional (3D) field effect transistor device formed within a semiconductor structure is provided. The method may include measuring a capacitance-voltage (C-V) characteristic for the 3D field effect transistor device and identifying, based on the measured capacitance-voltage (C-V) characteristic, a Fin structure corresponding to the 3D field effect transistor device. The identified Fin structure is detached from the 3D field effect transistor device using a nanomanipulator probe tip. The detached Fin is then welded to the nanomanipulator probe tip using an incident focused ion beam having a voltage of less than about 1000 eV. The incident focused ion beam having a voltage of less than about 1000 eV is applied to a tip of the Fin that is welded to the nanomanipulator probe tip. | 12-10-2015 |
| 20160178658 | SAMPLE HOLDER FOR AN AFM | 06-23-2016 |
| 20160187375 | SAMPLE HOLDER FOR AN ATOMIC FORCE MICROSCOPE - The present invention relates to sample holders for holding a sample, particularly for an atomic force microscope. Such a sample holder comprising a sample dish ( | 06-30-2016 |
| 20160187376 | PROBE AND SAMPLE EXCHANGE MECHANISM - A scanning probe microscope system. A sample stage is provided along with a microscope arranged to collect data with a probe carried by the microscope from a sample carried by the sample stage. A probe/sample exchange mechanism is arranged to exchange the probe carried by the microscope with a new probe, and is also arranged to exchange the sample carried by the sample stage with a new sample. The probe/sample exchange mechanism comprises a transport structure which can move relative to the microscope and the sample stage; a probe carrier carried by the transport structure and adapted to carry the probe or the new probe when the probe is exchanged with the new probe; a sample carrier carried by the transport structure, wherein the sample carrier is adapted differently from the probe carrier to carry the sample or the new sample when the sample is exchanged with the new sample; and a drive system arranged to move the transport structure relative to the microscope and the sample stage when the probe is exchanged with the new probe and the sample is exchanged with the new sample. | 06-30-2016 |
