Entries |
Document | Title | Date |
20090103158 | System configurations and method for controlling image projection apparatuses - A projection apparatus implemented with a mirror device that includes a first electrode and a second electrode with an elastic hinge disposed between the first electrode part and second electrode. The elastic hinge supports a mirror and the mirror is controlled to deflect when drawn by a Coulomb force generated between the mirror and electrodes by applying a voltage to the electrodes. The projection apparatus further includes a light source for projecting a light to the mirror for modulating the light by deflecting the mirror to different deflection states. The light source suppresses the emission of the illumination light during a period when the mirror performs a series of operations to shift from a non-deflection state, placing the mirror in a stationary and non-deflection state, to a predetermined deflection state. | 04-23-2009 |
20090122379 | Optical Deflecting Element - The present invention can provide a downsized optical deflecting element having less operating fluctuations at low cost and further it can be actuated at lower frequencies and at wider deflecting angles. The optical deflecting element comprises a base component having magnets therein; a soft resin component comprising a fixed part adhered to the base component and a movable part having a coil therein supported by the fixed part via a pair of beams; and a reflector plate | 05-14-2009 |
20090147338 | PROJECTION SYSTEM AND OPTICAL ACTUATOR THEREOF - An optical actuator includes a base, a carrier, a reflecting optical element, a connecting structure and an actuating component. The reflecting optical element is disposed at a first side of the carrier. The connecting structure has a first connecting portion located at the central region thereof and two second connecting portions located at two opposite sides thereof. The connecting portions connect the base to the second side of the carrier. The actuating component is disposed on the base and drives the carrier rotating along an axial line. The axial line is substantially perpendicular to the connecting structure. A projection system including the optical actuator is also disclosed. | 06-11-2009 |
20090153935 | ACTUATOR - An actuator according to the present invention includes: a base | 06-18-2009 |
20090168135 | OPTICAL ACTUATOR - An optical actuator includes a base, a carrier, an optical element, two rotation structures and two actuating components. The carrier is disposed over the base. The optical element is disposed in the carrier. The rotation structures are pivotally connected to two sides of the carrier. The actuating components drive the carrier to rotate an angle according to the rotation structures. | 07-02-2009 |
20090180168 | ACTUATOR - An actuator | 07-16-2009 |
20090185253 | OPTICAL DEFLECTOR - An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror. | 07-23-2009 |
20090219598 | DEFORMABLE MIRROR SYSTEM AND DEFORMABLE MIRROR DRIVE DEVICE - A deformable mirror system includes a deformable mirror, which comprises a deformation part with a reflection surface formed thereon, a fixing part configured to fix the deformation part, and a pair of electrodes disposed facing the deformation part and the fixing part, respectively, and a deformable mirror drive device. The deformable mirror drive device includes a drive unit configured to generate drive force so as to deform the deformation part, a capacitance detection unit configured to detect capacitance between the pair of electrodes, a conversion unit configured to convert a target deformation quantity signal into a target capacitance signal on the basis of a relationship between the capacitance and deformation quantity of the deformation part, and a control unit configured to decide drive force generated from the drive unit so as to coincide an output from the conversion unit with an output from the capacitance detection unit. | 09-03-2009 |
20090244674 | MIRROR DRIVING CIRCUIT AND OPTICAL SWITCH - A mirror driving circuit applies a voltage to drive a mirror and switches an optical path of light output from a channel of an input port to a channel of an output port. The mirror driving circuit includes an offset-voltage applying unit that applies an offset voltage to the mirror, an applied-voltage determining unit that determines an applied voltage to be applied to the mirror based on a relation between the channel of the input port and the channel of the output port forming a path of the light, and a voltage applying unit that applies to the mirror a remaining voltage obtained by subtracting the offset voltage from the applied voltage. | 10-01-2009 |
20090244675 | ELECTRODE AND MIRROR DRIVING APPARATUS - An electrode includes a fixed electrode and a movable electrode. The electrode drives a mirror disposed on the side of the movable electrode by generating electrostatic force between the fixed electrode and the movable electrode when voltage is applied. The fixed electrode and the movable electrode are formed so that a distance between the fixed electrode and the movable electrode increases as an overlapping area between the fixed electrode and the movable electrode increases. | 10-01-2009 |
20090284818 | PIEZOELECTRIC MIRROR DEVICE, OPTICAL DEVICE USING THE PIEZOELECTRIC MIRROR DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC MIRROR DEVICE - A piezoelectric mirror device ( | 11-19-2009 |
20090284819 | Mirror drive apparatus and imaging apparatus - A mirror drive apparatus includes:
| 11-19-2009 |
20090310202 | TILT MIRROR - A tilt mirror is disclosed. The tilt mirror can include: a reflection portion, which may reflect incident light; a first cantilever, which may be formed on either end of the reflection portion, and which may generate a stress in one direction; a second cantilever, which may be formed on either end of the reflection portion beside the first cantilever, and which may generate a stress in the other direction; and a connector portion, which may connect the reflection portion with one end of the first cantilever and with one end of the second cantilever such that the stress generated in the one direction and the stress generated in the other direction are transferred to the reflection portion. The tilt mirror provides a simple composition that can be utilized to alter the path for rays of light. | 12-17-2009 |
20090323149 | OPTICAL SWITCH, OPTICAL SWITCH CONTROL METHOD AND COMMUNICATIION SYSTEM - When a light intensity upon a perturbation is detected, an error calculation/correction unit ( | 12-31-2009 |
20090323150 | ACTUATOR FOR HOLOGRAPHIC INFORMATION STORING APPARATUS - An actuator to drive a mirror of a holographic information storing apparatus, the actuator including: piezoelectric cells; support members mounted on the piezoelectric cells; a hinge member mounted on the support member; and a post mounted on the hinge member, to support the mirror. The hinge member includes a bar disposed parallel to a rotation axis of the mirror, and a curved portion that extends from the bar. | 12-31-2009 |
20090323151 | OPTICAL DEFLECTOR - An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support. | 12-31-2009 |
20100020378 | OPTICAL SWITCH - A detection means ( | 01-28-2010 |
20100027091 | APPARATUS FOR REDUCING MIRROR BOUNCE, PHOTOGRAPHING APPARATUS COMPRISING THE SAME, AND PHOTOGRAPHING METHOD FOR THE SAME - Provided are an image processing device, the operating speed of which is increased by reducing mirror bounce, a photographing apparatus having the same, and a photographing method. The image processing device includes a mirror disposed to revolve with respect to a shaft, a first guide unit disposed in a path of revolution of the mirror to lessen vibration of the mirror when the mirror revolves, and a first elastic unit applying predetermined elastic force onto the first guide unit while being engaged with the first guide unit. | 02-04-2010 |
20100060966 | ACTUATOR USING PIEZOELECTRIC ELEMENT AND METHOD OF DRIVING THE SAME - An actuator using a piezoelectric element and a method of driving the same. The actuator includes at least one piezoelectric cell moving by displacement according to an input voltage, at least one piezoelectric sensor sensing the displacement of the at least one piezoelectric cell, an error detector detecting an error in the at least one piezoelectric sensor, and a feedback signal generator generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing. | 03-11-2010 |
20100067083 | Micro-movable device - A micro-movable device includes a frame, a movable section including a body section, and a torsion coupling section for coupling the frame with the movable section to define an axis of oscillation of the movable section, wherein the frame includes a first extending portion and a second extending portion that are spaced apart from each other in a direction parallel to the axis and extend along the body section, and oppose the body section via a gap. | 03-18-2010 |
20100067084 | OPTICAL SCANNING MIRROR, SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF - A semiconductor structure provided with an insulation structure in a moving unit is manufactured easily. An optical scanning mirror (semiconductor structure) is formed by processing an SOI substrate consists of a first silicon layer, an oxide film and a second silicon layer. A moving unit, which is supported on a fixed frame through first hinges, is formed on the first silicon layer. The moving unit is divided into a plurality of regions by forming trenches (insulation structure). A supporting member formed of the oxide film and the second silicon layer is formed just below the trenches. The plurality of regions of the moving frame divided by the trenches are joined to the supporting member so that the moving unit is swingable with the supporting member. Thereby, the supporting member is formed by simple etching processes, and thus, mechanical strength of the moving unit is ensured. | 03-18-2010 |
20100067085 | SYSTEMS, METHODS AND DEVICES FOR ACTUATING A MOVEABLE MINIATURE PLATFORM - Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror. | 03-18-2010 |
20100085622 | MICRO-MIRROR ACTUATOR HAVING ENCAPSULATION CAPABILITY AND METHOD FOR THE PRODUCTION THEREOF - The present invention relates to a method for producing a micro-mirror actuator and the corresponding actuator. In the method, the actuator is generated from a layered construction made of at least three main layers ( | 04-08-2010 |
20100085623 | MICRO MOVABLE DEVICE AND OPTICAL SWITCHING APPARATUS - A micro movable device includes: a micro movable substrate including a micro movable unit, the micro movable unit including a frame section, a movable section, and a coupling section which couples the frame section and the movable section to each other; a support base; a first spacer and a second spacer which are provided between the frame section of the micro movable substrate and the base, the first and second spacers joining the frame section and the base to each other; and a fixation member provided between the frame section of the micro movable substrate and the base, the fixation member including a spacer portion which joins the frame section and the base to each other and an adhesive portion which covers the spacer portion and joins the frame section and the base to each other, the fixation member being provided between the first and second spacers. | 04-08-2010 |
20100118371 | THREE-DIMENSIONAL SPACE SCANNER - A three-dimensional space scanner can obtain spatial data by scanning a space around a mobile object not only in the horizontal direction but also in the vertical direction to measure a distance to a surrounding obstacle using a mirror that is driven to rotate as well as to tilt. | 05-13-2010 |
20100118372 | MICROMIRROR DEVICE AND MICROMIRROR ARRAY - A movable beam ( | 05-13-2010 |
20100134860 | MEMS DEVICE AND OPTICAL SWITCH - A micro electro mechanical system device includes a fixed electrode that includes a first electrode group; and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group. Further, electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor. | 06-03-2010 |
20100245962 | OPTICAL DEVICE, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS - An optical device includes: a movable plate disposed in a distribution range of light input from outside, and having a light reflecting surface adapted to reflect the light; a shaft member adapted to support the movable plate so that the movable plate can swing around a predetermined axis; a ferromagnetic member provided to the movable plate; and a drive section configured to generate electromagnetic force between the drive section and the ferromagnetic member to thereby swing the movable plate, wherein a portion of the drive section, included in the distribution range of the light, is formed of a surface having a normal vector with which the light is reflected to outside of a predetermined range. | 09-30-2010 |
20100245963 | PIEZOELECTRIC ACTUATOR, DRIVING DEVICE, POSITIONING DEVICE AND LASER MODULE - In a piezoelectric actuator ( | 09-30-2010 |
20100259809 | OSCILLATOR DEVICE, OPTICAL DEFLECTOR AND IMAGE FORMING APPARATUS USING THE OPTICAL DEFLECTOR - An oscillator device includes an oscillation system having first and second oscillators and first and second resilient supporting members, wherein the oscillation system has at least two frequencies of natural oscillation mode around a torsion axis which include a first resonance frequency f | 10-14-2010 |
20110007376 | MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME - A micromechanical component having a base part, a swiveling part, which has an electrically conductive material, and a swiveling part insulation which electrically insulates a first and a second section of the swiveling part from each other. A first flexible, electrically conductive connecting element connects the base part to the first swiveling part section, and a second flexible, electrically conductive connecting element connects the base part to the second swiveling part section. A method also created for producing a micromechanical component includes the following steps: providing a substrate wafer that has a conductive overlayer, etching an insulation trench into the overlayer that insulates a first and second section of the overlayer from each other, as well as forming a base part and a swiveling part including the first and the second section of the overlayer from the substrate wafer, while allowing to remain a first flexible, electrically conductive connecting element, which connects the base part to the first swiveling part section, and allowing to remain a second flexible connecting element which connects the base part to the second swiveling part section. | 01-13-2011 |
20110043880 | RISLEY INTEGRATED STEERING MODULE - A beam steering device is disclosed which includes an outer assembly rotatable about an axis by a motor assembly, and an inner assembly rotatable about the axis by another motor assembly and positioned radially within the outer assembly. The beam steering device also includes a first prism or grating connected to the outer assembly and a second prism or grating connected to the inner assembly. Both motor assemblies are axially displaced from the steering devices. The beam steering device also consists of beam expansion optics carried by either the inner assembly or the stationary assembly. In a further embodiment, an array of steerable sub-apertures are maintained within the inner and outer assemblies. | 02-24-2011 |
20110075234 | WINDOW MOUNTED BEAM DIRECTOR - A laser system employs a window integrated in the surface of a weapon platform. A high energy laser is mounted in the weapon platform to provide a laser beam which is received by a Coude' path for internal direction of the beam. A beam director receives the laser beam from the Coude' path and employs an outer steering assembly and an inner steering assembly to cooperatively provide pointing of a centerline of the laser beam at a substantially single location on the window for a full conical field of regard. | 03-31-2011 |
20110090551 | Micromechanical assembly having a displaceable component - A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane. | 04-21-2011 |
20110090552 | ACTUATOR, OPTICAL SCANNER AND IMAGE-FORMING DEVICE - An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part. | 04-21-2011 |
20110102875 | OPTICAL SWITCH AND OPTICAL SWITCH DEVICE HAVING THE SAME - Provided is an optical switch member including a bi-stable mechanism, and first and second electro-thermal actuators. The bi-stable mechanism includes a curved-beam disposed on a bending portion of a first cantilever, one end of the first cantilever having a driven portion disposed thereon. The first electro-thermal actuator includes a first beam of a first driven arm disposed on the bending portion. The second electro-thermal actuator includes a second beam of a second driven arm disposed on the bending portion. The ends of the first and second driven arms are adjacent to first and second sides of the driven arm, respectively. Also proposed is an optical switch device including a substrate, a third thermal actuator, and the optical switch member disposed on the substrate to form an optical switch device to thereby integrate the optical switch with variable optical attenuators on the substrate. | 05-05-2011 |
20110109952 | NONVOLATILE NANO-ELECTROMECHANICAL SYSTEM DEVICE - A nonvolatile nano-electromechanical system device is provided and includes a cantilever structure, including a beam having an initial shape, which is supported at one end thereof by a supporting base and a beam deflector, including a phase change material (PCM), disposed on a portion of the beam in a non-slip condition with a material of the beam, the PCM taking one of an amorphous phase or a crystalline phase and deflecting the beam from the initial shape when taking the crystalline phase. | 05-12-2011 |
20110134502 | Micromechanical component, device for beam deflection of monochromatic light, and spectrometer - A micromechanical component includes a micromechanical unidimensional optical lattice structure for diffracting an incident light beam, and a linear drive connected to the lattice structure for compressing and/or stretching the lattice structure in the plane of the lattice structure. The lattice structure is of elastic design with regard to a change of shape resulting from the compressing and/or stretching. The micromechanical component may be incorporated in a device for beam deflection of monochromatic light or in a spectrometer. | 06-09-2011 |
20110149361 | MICRO-MIRROR WITH ELECTRODE SPACER - A micro-mirror includes stiffer end sections for limiting curvature, and thin middle sections forming ground electrodes and a hinge. Spacers arc provided beneath the thin middle sections of the micro-mirror for supporting hot electrodes, which attract the ground electrodes for rotating the micro-mirror about a tilt axis. The spacers enable the gap between the hot electrode and the micro-mirror to be designed separately from the thickness of the micro-mirror, and the gap between the ends of the micro-mirror and the substrate. | 06-23-2011 |
20110228370 | MANUFACTURING METHOD FOR STRESS COMPENSATED X-Y GIMBALED MEMS MIRROR ARRAY - A wafer-level manufacturing method produces stress compensated x-y gimbaled comb-driven MEMS mirror arrays using two SOI wafers and a single carrier wafer. MEMS structures such as comb drives, springs, and optical surfaces are formed by processing front substrate layer surfaces of the SOI wafers, bonding together the processed surfaces, and removing the unprocessed SOI layers to expose second surfaces of the front substrate layers for further wafer-level processing. The bonded SOI wafers are mounted to a surface of the carrier wafer that has been separately processed. Processing wafer surfaces may include formation of a stress compensation layer to counteract physical effects of MEMS mirrors. The method may form multi-layered conductive spring structures for the mirrors, each spring having a first conducting layer for energizing a comb drive, a second conducting layer imparting a restoring force, and an insulating layer between the first and second conducting layers. | 09-22-2011 |
20110228371 | Apparatus for Reducing Fringe Interference of Light Created in an Optical System of a Laser Spectroscopy System - An apparatus for reducing fringe interference of light created in the optical system of a laser spectroscopy system comprising an electromagnetic actuator for generating, along a laser path, physical translational vibration of an optical element of the optical system and a control device for controlling the amplitude and frequency of said vibration. The optical element is arranged on a cantilever body which is, at one end, attached to a base by a flexural pivot and, at the other free end, coupled to the electromagnetic actuator, and the control device includes a controller that controls the amplitude of the vibration and a vibration sensor attached to the cantilever body and providing the actual vibration value to the controller to improve fringe interference reduction, especially with longer wavelengths. | 09-22-2011 |
20110228372 | MICROSTRUCTURE AND METHOD OF MANUFACTURING THE SAME - A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion. | 09-22-2011 |
20120019886 | VIA STRUCTURE AND METHOD THEREOF - A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided. | 01-26-2012 |
20120044557 | OPTICAL APPARATUS AND DISPLAY APPARATUS - There is provided a display apparatus and an optical apparatus by which the generation of interfering pattern can be reduced while achieving miniaturization. The optical apparatus includes an optical device through which laser light passes; one or more holding members holding the optical device; and a driving section allowing the optical device to vibrate in a plane orthogonal to a light path of the laser light. Each of the holding members has an opening or a cutout through which the optical device passes at the time of vibration. | 02-23-2012 |
20120057214 | MICRO MOVABLE ELEMENT ARRAY AND A COMMUNICATION APPARATUS - A micro movable element array includes a first frame; a second frame; a first movable part row including plural first movable parts and a second movable part row including plural second movable parts. The first movable parts include first movable main parts. The second movable parts include second movable main parts. The first and second frames are stacked such that the first and second movable part rows are opposed to each other. In the first movable part row, the first movable parts are located such that the first movable main parts are arranged in a first direction and the first movable main parts and gaps are disposed alternately. In the second movable part row, the second movable parts are located such that the second movable main parts are arranged in the first direction and the second movable main parts are opposed to the corresponding gaps. | 03-08-2012 |
20120062973 | MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME - A MOEMS apparatus is provided for scanning an optical beam and a method for manufacturing it. The apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes two active layers separated by an insulating layer, and comprises an electro-static comb drive that includes a stator formed in a first of the two active layers and a rotor formed in a second of the two active layers, and wherein the electro-static comb drive is operative to impart a tilting motion to a micro-mirror formed in the second active layer. The MOEMS apparatus is characterized in that: a) at least one of the distances created between a tooth belonging to the rotor and an adjacent tooth belonging to the stator is less than 7 μm; and the aspect ratio of the apparatus is higher than 1:20. | 03-15-2012 |
20120162740 | MIRROR ACTUATOR AND BEAM IRRADIATION DEVICE - A mirror actuator has a first pivot portion which is pivotally supported on a base member, and a second pivot portion which is pivotally supported on the first pivot portion. A mirror is disposed in the second pivot portion. A first coil is disposed in the first pivot portion, and a second coil is disposed in the second pivot portion. A first elastic member connects between the base member and the first pivot portion. A second elastic member connects between the first pivot portion and the second pivot portion. The first elastic member and the second elastic member are connected by a circuit pattern. With the provision of the first elastic member, the second elastic member and the circuit pattern, a current is supplied to the first coil and to the second coil. | 06-28-2012 |
20120200903 | PIEZOELECTRIC MIRROR DEVICE, OPTICAL EQUIPMENT INCORPORATING THE SAME, AND PIEZOELECTRIC MIRROR DEVICE FABRICATION PROCESS - A piezoelectric mirror device ( | 08-09-2012 |
20120229880 | OPTICAL COMPONENT SYSTEM - The subject of the invention is a mechanical device for inserting one out of a multitude of optical components (such as filters) in an optical path and changing the angle of incidence between the incoming light and the selected optical component independently of the optical component selection. | 09-13-2012 |
20120314269 | PIEZOELECTRIC ACTUATOR MECHANISM - A piezoelectric actuator mechanism including: a screw-driven feeding mechanism that has a feed screw ( | 12-13-2012 |
20130077143 | VIBRATING TILTING PLATES WITH IMPROVED DYNAMIC FLATNESS AND SHOCK RESISTANCE - Devices with tilting plates, in particular tilting mirror plates, having improved dynamic flatness and shock resistance and methods for forming and operating such devices. A mirror device includes a minor plate operative to perform a tilt motion around a mirror tilt axis and an elastic foundation which provides distributed support to the minor plate. In an embodiment, the minor plate and the elastic foundation are formed in a single silicon-on-insulator (SOI) wafer. In another embodiment, the minor plate and the elastic foundation are formed in separate SOI wafers. The elastic foundation may include spiral or serpentine or any other appropriate shaped springs distributed uniformly or non-uniformly between the minor plate and a base. | 03-28-2013 |
20130094071 | FAST, MODULAR PORT SWITCHER FOR AN OPTICAL MICROSCOPE USING A GALVANOMETER - A fast modular port switching device is described. The device can be used with an optical microscope to facilitate using multiple devices with the microscope. The port switching is done with a galvanometer for switching very fast. The device is modular so it can be combined with any number of similar devices for building a complex, multi-modal imaging system. Also described is the combination of a port switcher with automated spherical aberration correction. Even further described is a similar device where the outputs are recombined, thus making the device a fast filter switcher. | 04-18-2013 |
20130155479 | IMAGE-CAPTURING APPARATUS - Provided is an image-capturing apparatus including a connecting portion having an opening through which a beam coming from an observation device is incident; an optical-path switching portion that switches an optical path of the beam incident along an incident optical axis; image-capturing devices that capture an image of the beam passing along the switched optical path. A first image-capturing device is provided so as to be rotatable about an axis parallel to the central axis thereof. The optical-path switching portion is provided so as to be pivotable such that a reflecting surface thereof is disposed on or retracted from the incident optical axis. When the reflecting surface is retracted, the beam is incident on a second image-capturing device. When the reflecting surface is disposed, the beam is reflected by the reflecting surface and incident on at least the first image-capturing device. | 06-20-2013 |
20130250389 | DEVICE FOR GENERATING OPTICAL VORTEX - A device for generating optical vortex of desired topological charge is disclosed. The device comprises a circular mirror having hole at its centre and a radial slit. The mirror comprises a piezoelectric actuator. The actuator comprises a hollow tube having inner diameter equal to the diameter of the hole of the mirror, a through cut extending along the length of the tube from an inner till an outer diameter, and an inner and outer electrode being formed on inner and outer wall of the tube respectively, wherein the length of the electrode increases continuously in the azimuth direction across said outer wall. The Actuator is coaxially joined to the mirror such that the slit formed between the inner and outer diameter of the tube overlaps with the radial slit. Shape of the mirror undergoes azimuthal expansion upon applying excitation voltage across electrodes forming single turn helix to generate optical vortex. | 09-26-2013 |
20130250390 | OPTICAL DEFLECTOR INCLUDING FOUR COUPLING BARS BETWEEN SUPPORT BODY AND FRAME - In an optical deflector including a mirror, a movable ring-shaped frame surrounding the mirror, a pair of torsion bars connected between the mirror and the movable ring-shaped frame and oppositely arranged along a rocking direction of the mirror, a support body surrounding the movable ring-shaped frame, and piezoelectric actuators for rocking the mirror through the torsion bars along the rocking direction, first, second, third and fourth coupling bars are connected between the support body and the movable ring-shaped frame. The first and third coupling bars are oppositely arranged along a first direction obtained by inclining the rocking direction by a first predetermined angle between +30° and +45°, and the second and fourth coupling bars are oppositely arranged along a second direction obtained by inclining the rocking direction by a second predetermined angle between −30° and −60°. | 09-26-2013 |
20130271805 | ELECTRONIC ELEMENT, VARIABLE CAPACITOR, MICRO SWITCH, METHOD FOR DRIVING MICRO SWITCH, AND MEMS TYPE ELECTRONIC ELEMENT - An electronic element includes a fixed portion, and a movable portion which is movable with respect to the fixed portion and which is provided to generate a spring force to make restoration to a predetermined position. The fixed portion is provided with a first driving electrode and a first signal electrode. The movable portion is provided with a second driving electrode and a second signal electrode. An electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened. | 10-17-2013 |
20130271806 | MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT - A micromechanical component is described as having a mounting support, an actuator plate having a coil, situated on and/or in the actuator plate, which is connected to the mounting support via at least one supply line spring. A mirror element and/or filter element is connected to the mounting support via the actuator plate and the at least one supply line spring. A spacer has a first end that contacts an inner side of the mirror element and/or the filter element that is directed away from an incident light surface of the mirror element and/or the filter element. The spacer has a second end that contacts a carrier side of the actuator plate that is aligned towards the mirror element and/or the filter element. Also described is a method for producing a micromechanical component. | 10-17-2013 |
20130271807 | MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT - A micromechanical component having a control element is described, which is connected via at least one supply line spring having a supply line spring constant to a mounting support in an adjustable manner, and a drive device having at least one actuator component situated on the control element. Via at least one line component guided over the at least one supply line spring an electric potential or a current signal is able to be provided to the actuator component in such a way that the control element is able to be set by the drive device into a motion with respect to the mounting support. The control element is additionally connected to the mounting support, and the supply line spring constant is less than vibratory spring constant. Also described is a method for producing a micromechanical component. | 10-17-2013 |
20130301098 | Mechanically Balanced Optical Membrane Device for Orientation Insensitivity - An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field. | 11-14-2013 |
20130301099 | OPTICAL DEVICE, OPTICAL SCANNER, AND IMAGE DISPLAY DEVICE - An optical scanner is an optical device including a base portion that is rotatable about the Y-axis, a frame portion that is rotatable about the X-axis intersecting the Y-axis, and a shaft portion that supports the base portion so as to be rotatable about the Y-axis with respect to the frame portion. The optical scanner includes a light reflecting plate that is fixed to the base portion and includes a light reflecting portion with a light reflecting property. The frame portion is provided so as to surround the base portion. The shaft portion includes one end connected to the base portion and the other end connected to the frame portion. The light reflecting plate is separated from the shaft portion in the thickness direction of the light reflecting plate and overlaps the shaft portion, as viewed from the thickness direction. | 11-14-2013 |
20130301100 | OPTICAL DEVICE, OPTICAL SCANNER, AND IMAGE DISPLAY DEVICE - An optical scanner includes: a movable portion that includes a base portion and a light reflecting plate which is fixed to the base portion and includes a light reflecting portion with a light reflecting property and is rotatable about the Y-axis; a frame portion that is provided so as to surround the base portion and is rotatable about the X-axis perpendicular to the Y-axis; a shaft portion that supports the movable portion so as to be rotatable about the Y-axis with respect to the frame portion; and a permanent magnet that is provided in the frame portion. The light reflecting plate is provided such that it is separated from the shaft portion in a thickness direction and overlaps the shaft portion, as viewed from the thickness direction. The permanent magnet is fixed to a surface of the frame portion close to the light reflecting plate. | 11-14-2013 |
20130301101 | MICROMECHANICAL DEVICE - The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible. | 11-14-2013 |
20130301102 | LIGHT DEFLECTOR - An optical deflector includes a movable portion having a mirror plane, a fixed portion, a pair of combined torsion bars connecting the movable portion and the fixed portion to each other so that the movable portion can be rotationally displaced about a rotation axis with respect to the fixed portion, and a driver to drive the movable portion. Each combined torsion bar includes a plurality of torsion bars extending to be parallel to the rotation axis and a plurality of connecting bars, each of the connecting bars connecting one ends of each adjacent two of the torsion bars to each other. A torsion bar farther from the rotation axis has higher torsional rigidity than a torsion bar closer to the rotation axis. | 11-14-2013 |
20130308173 | MICROMECHANICAL ASSEMBLY, METHOD FOR MANUFACTURING A MICROMECHANICAL ASSEMBLY AND METHOD FOR OPERATING A MICROMECHANICAL ASSEMBLY - A micromechanical assembly having a holder, a drive frame which has at least one energizable coil device disposed at least one of on and in the drive frame and which is joined to the holder via at least one frame spring, a mirror element that is at least partially framed by the drive frame and is suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the two mirror springs and being adjustable about a mirror axis of rotation in relation to the drive frame, and the mirror element being suspended from the drive frame asymmetrically relative to the mirror axis of rotation. A method for manufacturing a micromechanical assembly is also described. A method for operating a micromechanical assembly is also described. | 11-21-2013 |
20140036332 | System and Method for Positioning a Mirror in a Lidar System Using Open Loop and Closed Loop Control - A control system structure is provided that improves system bandwidth without affecting optimization for other performance criteria (such as, suppressing loop disturbances, or other optimization criteria) and stability of a closed-loop system. | 02-06-2014 |
20140063579 | RUGGEDIZED TWO-AXIS OPTICAL BEAM STEERING DEVICE - An optical beam steering device is disclosed which includes a compartment for containing an optical component for interacting with an optical beam, a gimbal supporting the optical component and defining a pan axis, a roll cage rotatably supporting the gimbal and defining a tilt axis, wherein the tilt axis is orthogonal to the pan axis, and a mount that houses and rotatably supports the roll cage, wherein the angular position of the roll cage with respect to the mount and the angular position of the gimbal with respect to the roll cage are both locked from one side of the mount. | 03-06-2014 |
20140063580 | VIA STRUCTURE AND METHOD THEREOF - A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro- mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided. | 03-06-2014 |
20140085697 | MULTIDIMENSIONAL ROTARY MOTION APPARATUS MOVING A REFLECTIVE SURFACE AND METHOD OF OPERATING SAME - A rotary motion controller controlling the motion of a mirror in a projection system is described having a mounting element coupled to a support member. A two-axis coupling is provided with at least two input shafts coupled to two drive mechanisms. A channeled portion is provided in a second of the two input shafts through which the support member extends there through and is guided thereby and where the at least one support member is coupled to the first input shafts via an input coupling coupled to and driving the support member and a control input controlling the position of the at least two input shafts. A method of controlling a mirror in an underwater projection system is also provided along with a method of operating a controller for an underwater projection system. | 03-27-2014 |
20140153074 | MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME - An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm. | 06-05-2014 |
20140185120 | Rotating Spectral Display Device - A solar powered rainbow-making device produces a visual display that is created by the interplay of light and a light refractive element that form constantly changing patterns from a rotating crystal. The rotating display device includes a circular-shaped refractive element that is mounted on a base and is turned by a motor driven transmission gear train. The crystal rotates about a horizontal axis as sunlight is transformed into a color spectrum that moves in a circular fashion. The color images can include a plurality of distinct rainbow images that are projected onto the walls and other structures in the immediate environment. | 07-03-2014 |
20140198367 | Translation Mirror Based Beam Steering Mechanism With Ultrahigh Frequency Response And High Sensitivity - This invention relates to a beam steering mechanism with ultrahigh frequency response and high sensitivity, which is based on the translation of two mirrors. Beam steering is achieved by the translations of two mirrors in the X axial mirror group and Y axial mirror group. The two translation mirrors are located at the output ends of two PZT actuators, and are directly actuated by the two PZT actuators. The dynamic characteristics of the two translation mirrors are always exactly the same as the output characteristics of the PZT actuators. There is no mechanical translation loss in this beam steering mechanism, and so, the beam steering mechanism has an ultrahigh frequency response and high angular deflection sensitivity. | 07-17-2014 |
20140240810 | MEMS Drive and Beam-Steering Apparatus - A drive apparatus and a beam-steering apparatus fabricated from a MEMS process. The apparatus has a first layer, a second layer and a plurality of fluid-filled volumes defined there between. A plurality of flexible structures such as bellows structures are defined on the first layer and are configured whereby a predetermined pressure in each of the volumes results in a predetermined displacement of the flexible structures. Pressurization means selectively changes the pressures in each of the volumes to define the predetermined displacement of the flexible structures. An electromagnetically reflective or mirror element and a plurality of drive beams are affixed to the reflective element and to one of the plurality of flexible structures whereby selected pressurization of the fluid in the volumes causes a predetermined displacement of the flexible structure to displace the reflective element about the plane of its surface. | 08-28-2014 |
20140333980 | MICROACTUATOR ARRANGEMENT FOR DEFLECTING ELECTROMAGNETIC RADIATION - A microactuator arrangement for the deflection of electromagnetic radiation, with a mirror plate which is suspended on a drive frame in a movable manner about a first rotation axis via spring elements, wherein the drive frame is suspended on a chip frame in a movable manner about a second rotation axis via spring elements, wherein the drive frame is not closed and comprises a recess adjacent to the mirror plate and wherein the chip frame at least in the region of the recess of the drive frame is not closed, in a manner such that a deflected and/or incident beam is not inhibited by the drive frame and the chip frame. | 11-13-2014 |
20140340725 | LASER MARKER - A laser marker/pointer for projecting circular or elliptical laser beam patterns onto a target surface such as a portion of a presentation screen or to assist in the aiming of a firearm, comprises a handheld shell body in which is mounted a laser light source, a rotating optical mirror driven by a motor, and an electronic drive circuit, whereby the aspect ratio of the marking pattern is determined by the geometric relationship of the motor shaft axis, the laser beam, and the mirror surface. The motor drive circuit when initially powered (along with the laser diode), applies full power (a continuous DC voltage to the motor to overcome inertia), followed by a pulsed voltage to lower the duty cycle of the motor, increase battery life, and reduce rotational noise. | 11-20-2014 |
20140355092 | APPARATUS COMPRISING A SPRING AND AN OPTICAL ELEMENT SUSPENDED THEREON - Apparatuses with actuators having actuator-side attachment areas disposed thereon, an optical element having mirror-side attachment areas disposed thereon and springs are described, wherein an optical element is connected to actuators via two or four springs. | 12-04-2014 |
20140355093 | ROTARY ACTUATOR - The present invention is a rotary actuator having segments, which are spaced apart and are connected by means of at least one support structure, and at least one actuator for exerting forces, characterized in that the support structure is substantially rotationally symmetrical about an axis and is composed of elements which are not oriented parallel to the axis or which are twisted through an angle in relation to the axis, and the elements can be changed by rotation about the axis and the actuator can exert forces to at least one of the segments and the support structure in the direction of the axis. | 12-04-2014 |
20140376069 | MICRO-ELECTROMECHANICAL REFLECTOR AND METHOD FOR MANUFACTURING A MICRO-ELECTROMECHANICAL REFLECTOR - A micro-electromechanical reflector is described including an electrode substrate having a first surface and a second surface, which is opposite to the first surface, on whose first surface a carrier layer is situated, a plurality of electrode recesses, which are introduced under the carrier layer from the first surface into the electrode substrate, a plurality of second electrode recesses, which are introduced from the second surface into the electrode substrate, at least one torsion spring structure which is formed in the carrier layer over one of the first electrode recesses, a carrier substrate, which is attached to the second surface of the electrode substrate, and a reflector surface, which is situated on the carrier layer. | 12-25-2014 |
20140376070 | Micro-electromechanical reflector and method for manufacturing a micro-electromechanical reflector - A micro-electromechanical reflector includes an electrode substrate having first and second surfaces opposite to the first surface, on whose first surface a monocrystalline silicon layer is situated, a plurality of electrode recesses, which are introduced from the second surface into the electrode substrate, at least one torsion spring structure, which is implemented in the monocrystalline silicon layer above one of the electrode recesses, a carrier substrate, which is applied to the second surface of the electrode substrate, and a reflector surface situated on the monocrystalline silicon layer. At least one first electrode, movably mounted in the electrode substrate via the torsion spring structure, and at least one second electrode, mechanically fixedly anchored to the carrier substrate and the monocrystalline silicon layer, are formed by the electrode recesses. The electrode surfaces of the first and second electrodes are situated in parallel to one another and perpendicularly to the electrode substrate surfaces. | 12-25-2014 |
20140376071 | Micromechanical component, micromirror device, and manufacturing method for a micromechanical component - A micromechanical component includes a mounting, and a mirror plate which is adjustable with respect to the mounting about at least one rotational axis and which has a mirror side and a rear side which faces away from the mirror side. The mirror plate is connected to the mounting at least via four springs. Each of the four springs extends partially along the rear side of the mirror plate and is connected to the mirror plate via one support post each, which in each case contacts an anchoring area situated on the rear side. Also described is a micromirror device, as well as a manufacturing method for a micromechanical component. | 12-25-2014 |
20150062681 | METHOD FOR ADAPTING THE PARAMETERS OF A CONTROLLER FOR MICROMECHANICAL ACTUATORS, AND DEVICE - A method for adapting the parameters of a controller for micromechanical actuators, including the following steps: acting on the micromechanical actuator with a test signal which has a step, detecting a test signal response of the micromechanical actuator to the test signal, identifying an absolute position of at least one mode in the detected test signal response, and adapting at least one of the parameters of the controller based on the identified absolute position of the at least one mode. Moreover, a corresponding device is described. | 03-05-2015 |
20150070740 | ELECTROACTIVE POLYMER ACTUATOR LENTICULAR SYSTEM - The present invention provides an optical system comprising a lens element, a display unit displaced transversely from the lens element, at least one actuator coupled to at least one of the lens element or the display unit and capable of changing position of the lens element relative to the display unit in a lateral direction, and an electronic control system capable of driving the at least one actuator to move in a programmed manner to control positioning of the lens element relative to the display unit. | 03-12-2015 |
20150124305 | Beam Steering Mirror Device - A beam steering mirror device includes a mirror having an optical part with a reflecting or optical surface and a mirror body. The optical part is essentially thermally de-coupled from the body. A biaxial suspension of the mirror body has two rotation axes arranged essentially perpendicular with respect to each other and being located in a common plane. The suspension includes a set of four flexible pivots with a pair of pivots assigned to each rotation axis. The mirror is arranged with regard to the biaxial suspension such that its center of mass is approximately located in the intersection point of the two rotation axes. The device also includes motors for moving of the mirror body around the two rotation axes, sensors for determining the tilting angle of the mirror, and a housing for the mirror, the biaxial suspension, the motors and the sensors. | 05-07-2015 |
20150131135 | MICROELECTROMECHANICAL COMPONENT AND CORRESPONDING PRODUCTION METHOD - A micro-electromechanical component includes: an electrically conductive substrate having an upper side and an underside; a structured electrically conductive first functional layer fashioned on the upper side of the substrate; an elastically deflectable actuator device suspended via a spring device fashioned in the first functional layer; a movable first electrode device extending vertically through the substrate and connected to the actuator device; and a stationary second electrode device extending vertically through the substrate, at a distance from the first electrode device, the actuator device being configured to be deflected through the application of an electrical voltage between the first and the second electrode device. | 05-14-2015 |
20150131136 | MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT - A micromechanical component is described having a first substrate that has a first front side a first rear side facing away from the first front side; first printed conductors that are fashioned on the first front side of the first substrate; a plurality of actuator devices that are fashioned on and/or in the first substrate and that are electrically bonded to the first printed conductors, the actuator devices each having at least one stator electrode and each having at least one actuator electrode that works together with the at least one stator electrode, which are fashioned such that a voltage can be applied between the actuator electrode and cooperating stator electrode in such a way that the actuator electrode can be displaced relative to the stator electrode | 05-14-2015 |
20150346485 | LIGHT DEFLECTOR AND IMAGE FORMING APPARATUS - A light deflector and an image forming apparatus including the light deflector are provided. The light deflector includes a polygon mirror made of plastic and a motor including a rotor. The rotor supports the polygon mirror and includes a base and a first protrusion protruding from the base toward the polygon mirror in an axial direction. The polygon mirror includes a main body having a plurality of reflecting surfaces, and a second protrusion protruding from the main body toward the base. The second protrusion has an end face and an inner face. The end face is in contact with the base in the axial direction, and the inner face is in contact with the first protrusion in a radial direction. | 12-03-2015 |
20150362722 | MEMBRANE STRUCTURES FOR MICROELECTROMECHANICAL PIXEL AND DISPLAY DEVICES AND SYSTEMS, AND METHODS FOR FORMING MEMBRANE STRUCTURES AND RELATED DEVICES - Embodiments relate to microelectromechanical systems (MEMS) and more particularly to membrane structures comprising pixels for use in, e.g., display devices. In embodiments, a membrane structure comprises a monocrystalline silicon membrane above a cavity formed over a silicon substrate. The membrane structure can comprise a light interference structure that, depending upon a variable distance between the membrane and the substrate, transmits or reflects different wavelengths of light. Related devices, systems and methods are also disclosed. | 12-17-2015 |
20150370063 | PRECISE DEFINITION OF TRANSDUCER ELECTRODES - A semiconductor device, includes a semiconductor substrate ( | 12-24-2015 |
20150378064 | Piezoelectric Optical MEMS Device With Embedded Moisture Layers - A piezoelectric optical micro-electro-mechanical systems (POMEMS) device includes a glass layer having a bottom surface and a top surface. The device may also include an upper moisture barrier layer having a top surface and a bottom surface in which the bottom surface of the top moisture barrier layer is substantially coextensive with and interfaces with the top surface of the glass layer. A piezo stack may be attached above the upper moisture barrier layer. The device may also include a lower moisture barrier layer having a bottom surface and a top surface. The top surface of the lower moisture barrier layer is substantially coextensive with and interfaces with the bottom surface of the glass layer. A semiconductor substrate may be attached below the bottom moisture barrier layer. | 12-31-2015 |
20150378149 | MIRROR DRIVE DEVICE CAPABLE OF HIGH-SPEED FORWARD AND BACKWARD DRIVING OF MIRROR - A mirror drive device in which the speed of forward and backward movement of a mirror is increased while reducing a power amount required therefor without affecting a finder image and a focus distance of an image viewed through a finder. A mirror-down cam is cam-engaged with a drive shaft provided in a mirror holder, and causes the mirror holder to enter a finder observation position of a photographing optical path. A mirror-up cam is cam-engaged with the drive shaft, and causes the mirror holder to retract from the photographing optical path. A down spring urges the mirror holder toward the finder observation position with low necessary and sufficient pressure. A motor transmits rotation to the mirror-down cam and the mirror-up cam via a shift gear train. The rotation axes of the mirror-down cam and the mirror-up cam are arranged in positions different from each other. | 12-31-2015 |
20160004068 | MICRO-MIRROR DEVICE AND METHOD FOR DRIVING MIRROR THEREOF - A micro-mirror device and a method for driving a mirror thereof are disclosed. The micro-mirror device includes a mirror, a first and a second electrode, a memory, and a controller. The mirror is tiltable about a hinge. The first electrode and the second electrode are disposed on different sides of the hinge. The memory stores a state data indicating a first electrode state for the first electrode and a second electrode state for the second electrode corresponding to the mirror. The controller is operable to receive the state data of the first and second electrodes from the memory, and in response to a crossover operation request, the controller inverts the states of the first and second electrodes. The controller sends a reset signal to the mirror according to the modified states of the first and second electrodes. | 01-07-2016 |
20160025964 | MIRROR DEVICE - A mirror device | 01-28-2016 |
20160103313 | OPTICAL MODULE FOR VIBRATING LIGHT BEAM - An optical module includes a mirror unit including a mirror holder and a mirror on the mirror holder, the mirror holding including a first plate; a center guide supporting the mirror unit; and an actuator configured to rotate the mirror unit about a rotation axis. The actuator includes a first actuator at the first plate and second and third actuators at second and third plates, respectively, and spaced from each other in a direction parallel to the rotation axis, and the first actuator is configured to be acted upon by the second and third actuators to rotate the mirror unit about the rotation axis. | 04-14-2016 |
20160154233 | MIRROR DEVICE | 06-02-2016 |
20160170200 | MIRROR DRIVE DEVICE | 06-16-2016 |
20160172951 | ACTUATOR DEVICE AND MIRROR DRIVE DEVICE | 06-16-2016 |
20160187611 | OPTICAL STRUCTURE WITH RIDGES ARRANGED AT THE SAME AND METHOD FOR PRODUCING THE SAME - An apparatus having an optical structure, ridges and an electrostatic actuator is described, wherein the ridges connect the optical structure to a supporting structure and the electrostatic drive is implemented to deflect the optical structure. | 06-30-2016 |
20160202471 | DISPLAY DEVICE | 07-14-2016 |
20160202473 | SEMICONDUCTOR DEVICE | 07-14-2016 |
20160377858 | SPATIAL LIGHT MODULATOR FOR ACTUATING MICROELECTROMECHANICAL SYSTEMS (MEMS) STRUCTURES - A spatial light modulator is provided by positioning and repositioning micromirrors of a microelectromechanical system. The micromirrors are positioned by an actuator linked to the micromirrors by a frame. The actuator responds to a control signal having voltages that create electrical fields. The electrical fields provide forces that change the positions of the micromirrors in such a way that a light beam striking the micromirrors reflects as a modulated light beam. | 12-29-2016 |
20190146208 | ROTARY DRIVE APPARATUS | 05-16-2019 |
20220137327 | Optical Element Driving Device, Camera Device and Electronic Apparatus - A camera device is described that includes a prism driving device for driving a prism, a lens driving device for driving a lens body, and a base for fixing an image sensor. These components stand in order in a straight line in a case. The prism driving device has a driving portion and a flexible printed circuit board for relaying current supply from an external portion to the driving portion. Terminals of the flexible printed circuit board are connected to terminal receiving portions of the base. | 05-05-2022 |
20220137393 | ELECTROMAGNETIC DRIVEN MICRO MIRROR WITH FLUID OF HIGH REFRACTIVE INDEX AND ITS MANUFACTURING THEREOF - A microelectromechanical systems (MEMS) apparatus, including a package having a cavity formed therein; a semiconductor device disposed within the cavity and including at least one electromagnetically driven MEMS micro-mirror device; a high refractive index fluid disposed within the cavity and at least partially surrounding a portion of the semiconductor device; and a magnet assembly disposed outside the cavity isolating from the fluid. The magnet assembly is magnetically coupled with the micro-mirror device. | 05-05-2022 |