| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 359200600 | Electrostatic driver | 19 |
| 20090244668 | METHOD OF DRIVING MEMS MIRROR SCANNER, METHOD OF DRIVING MEMS ACTUATOR SCANNER AND METHOD OF CONTROLLING ROTATION ANGLE OF MEMS ACTUATOR - A method of driving a MEMS mirror scanner having an electrostatic actuator, comprising a step of driving the electrostatic actuator according to an input signal in accordance with a driving waveform obtained by the following equation, | 10-01-2009 |
| 20100067078 | ACTUATOR - The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process. | 03-18-2010 |
| 20100103492 | MEMS-scanning mirror device and method for manufacturing the same - An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface ( | 04-29-2010 |
| 20100142020 | SCANNER AND IMAGE FORMING APPARATUS INCLUDING THE SAME - Disclosed are a scanner and an image forming apparatus employing the same. The scanner may produce bidirectional scanning of light by oscillating a deflecting mirror about a first axis substantially parallel to the mirror surface, and may compensate for skewing of the scan lines by rotating the mirror about a second axis that is substantially perpendicular to the first axis so as to allow the light to be scanned at an angle. | 06-10-2010 |
| 20110032591 | Micromechanical component, light-deflecting device, and manufacturing methods for a micromechanical component and a light-deflecting device - A micromechanical component includes: a mirror element with a reflective surface on a first outer side of the mirror element, which is designed in such a way that a first potential is applied to a first electrode surface on a second outer side of the mirror element opposite from the first outer side; a counterelectrode situated adjacent to the second outer side of the mirror element and which is designed in such a way that a second potential is applied to a second electrode surface of the counterelectrode; and a voltage control unit configured to apply a temporally varying voltage signal between the first electrode surface and the second electrode surface | 02-10-2011 |
| 20110102871 | Micro electro mechanical system using comb and parallel plate actuation - The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage. | 05-05-2011 |
| 20110194164 | OPTICAL MULTI-RING SCANNER - An optical multi-ring scanner is disclosed, which comprises: a substrate; an outer ring driving element, disposed inside the substrate and configured symmetrically at two sides thereof with a pair of first arms that are connected respectively to the substrate; at least one inner ring driving element, each configured with a first inner ring driver in a manner that the first inner ring driver has a pair of second arms symmetrically disposed at a top side and a bottom side thereof while being connected to the outer ring driving element; and a mirror element, disposed inside the first inner ring driver and having a pair of third arms symmetrically disposed at a top side of a bottom side thereof; wherein, the third arm is disposed coaxial with the second arm while enabling the first arm to be disposed perpendicular to the second arm and the third arm. | 08-11-2011 |
| 20110310451 | BIAXIAL SCANNING MIRROR FOR IMAGE FORMING APPARATUS AND METHOD FOR OPERATING THE SAME - A biaxial scanning minor is disclosed in the present invention. The minor includes: a first wafer having several cavities forming a first row and a second row, several permanent magnets each installed in one of the cavities, a spacer and a second wafer. The second wafer includes: a minor unit, rotating around a first axis, for reflecting light beams; and a rotating unit, formed around the minor unit, for rotating the minor unit around a second axis which is perpendicular to the first axis. At least one coil substrate having a planar coil is assembled in the rotating unit. | 12-22-2011 |
| 20120062971 | Tuned Support Structures for Electrostatic Comb Drive Scanner - Briefly, in accordance with one or more embodiments, an electric comb drive scanner comprises a scanning body comprising a mirror supported by one or more flexures along a first axis and one or more support structures coupled to the one or more flexures. One or more drive combs are disposed on the one or more support structures, wherein the drive combs cause the mirror to rotate about the first axis in response to a drive signal applied to the drive combs. The one or more support structures are tuned to reduce non-uniformity of warping of the support structures to reduce variation in disengagement of the drive combs along a length of the drive combs. | 03-15-2012 |
| 20120075685 | ELECTROSTATIC COMB-DRIVE MICROMECHANICAL ACTUATOR - The invention relates to a micromechanical actuator, especially a micro-mirror scanner, comprising an actuator unit in an outer frame which unit is suspended in the outer frame via two torsion elements, and electrostatic tilt drives from intermeshing first and second comb-type electrodes which are off-set from each other vertically. The first electrodes are rigidly connected to the outer frame and the second electrodes to the outer frame via an outer connecting element and to the actuator unit via an inner connecting element. The inner connecting element has a spring which extends in parallel to the outer tilting axis, which is connected to the same in a section of the actuator unit close the outer tilting axis, and which is designed and arranged to be rigid in the vertical direction and flexible at a right angle to the vertical direction. The micromechanical actuator according to the invention allows the use in a micro-mirror scanner whose slow axis is non-resonantly driven with excursions of >+/−7°, lateral mirror sizes having dimensions of 1 mm and more and a resonant frequency of >1 kHz and can be integrated even into flat mobile phones. | 03-29-2012 |
| 20120218613 | MEMS-SCANNING MIRROR DEVICE AND METHOD FOR MANUFACTURING THE SAME - An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface ( | 08-30-2012 |
| 20120250129 | MEMS MIRROR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A MEMS mirror device includes a semiconductor substrate, a mirror provided on the semiconductor substrate, a first cavity, a second cavity, and a frame portion to define the first cavity and the second cavity. The semiconductor substrate further includes a swing portion formed just above the first cavity to support the mirror, a straight beam provided just above the first cavity to extend between the frame portion and the swing portion, a comb-teeth-like fixed electrode, and a comb-teeth-like movable electrode, the movable electrode meshing with the fixed electrode with a gap left therebetween, the swing portion configured to swing about the beam as a swing axis in response to movement of the movable electrode. | 10-04-2012 |
| 20130250384 | LIGHT SCANNING MIRROR DEVICE, CONTROL METHOD FOR THE SAME, AND AN IMAGE DRAWING DEVICE EMPLOYING THE SAME - A light scanning mirror device is provided, which can be improved low power consumption, low voltage, small size, and a large scanning angle. The light scanning mirror device comprises a reflective mirror; and a torsion beam connecting the reflective mirror with a frame structure so as to enable the reflective mirror to rotate around an axis; a pair of cantilevers arranged perpendicular to the axis of rotation of the reflective mirror, and in axial symmetry centering on the axis of rotation; and a fixed electrode arranged oppositely to the cantilever in parallel at rest. The fixed electrode comprises an adsorptive fixed electrode on the free end side of the cantilever, and a rotation controlling fixed electrode on the fixed end side of the cantilever. The cantilever, the adsorptive fixed electrode, and the rotation controlling fixed electrode are configured to be separated electrically with each other. | 09-26-2013 |
| 20130278986 | ANNULAR STRUCTURE AND MICRO SCANNING MIRROR - A micro scanning mirror is disclosed in the present invention. The micro scanning mirror includes a substrate, an annular structure and a mirror structure. The substrate includes a hollow area and a first shaft. The annular structure is disposed inside the hollow area on the substrate and encircles the mirror structure. The mirror structure includes a second shaft connected to the annular structure. The annular structure includes at least one first edge, at least one second edge and a first comb electrode. The first edge is connected to the first shaft, and an end of the second edge is connected to the first edge. The second edge includes a first side adjacent to the mirror structure, and a second side adjacent to the substrate. The first comb electrode is disposed on the second edge. | 10-24-2013 |
| 20130301095 | FREQUENCY TUNABLE MICROMIRROR - An optical imaging system having two micromirrors is disclosed. Each of the two micromirrors can be rotated by a first set of combdrive actuators along a first axis and a second set of combdrive actuators along a second axis. Each of the first and second set of combdrive actuators includes multiple stator comb fingers and multiple rotor comb fingers capable of rotating about a torsion bar. One of the micromirrors can be tuned by applying a current to the torsion bar to change the Young's modulus of the torsion bar via thermoelectrical heating of the torsion bar. | 11-14-2013 |
| 20140036330 | MEMS DEVICE WITH INDEPENDENT ROTATION IN TWO AXES OF ROTATION - A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation. | 02-06-2014 |
| 20140268268 | ELECTROSTATICALLY STEERABLE ACTUATOR - An electrostatically steerable actuator includes a gimbaled platform. A central portion of a rear side of the platform extends outward from the platform. A diameter of the central portion is substantially smaller than a corresponding diameter of the platform. An array of electrodes faces the rear side of the platform to provide an adjustable electrostatic field for tilting the platform. | 09-18-2014 |
| 20150346481 | OPTICAL DEFLECTOR AND IMAGE FORMING APPARATUS INCLUDING THE SAME - In an optical deflector, a vibration mirror part extends in a direction crossing a swing axis of the vibration mirror part. A rib part extending along an extension direction of the vibration mirror part is formed on an opposite side surface of the reflective surface side in the vibration mirror part. The optical deflector further includes a solidified portion. The solidified portion is provided adjacent to both end portions of the rib part in the extension direction. The solidified portion is obtained by solidifying a liquid or gel-like substance in a state in which the surface of the liquid or gel-like substance has a curved surface shape by surface tension. | 12-03-2015 |
| 20160131893 | MEMS SCANNER - The present invention relates to a micro electro mechanical systems (MEMS) scanner, and more particularly, to an MEMS scanner for implementing stable driving while increasing a driving angle between a fixed electrode and a driving electrode using an MEMS process. The MEMs scanner comprises a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion. | 05-12-2016 |
