| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 451402000 | Rotary | 6 |
| 20100184362 | Polishing Method, Polishing Device, Glass Substrate for Magnetic Recording Medium, and Magnetic Recording Medium - There are disclosed a polishing method and a polishing device in which cleaning of a glass substrate surface can be achieved to a high level. A glass substrate (MD substrate | 07-22-2010 |
| 20100261418 | Disk burnishing device - A method for manufacturing a magnetic disk is provided that includes the steps: forming a layer of a lubricant material on a surface of a magnetic storage medium, the layer of lubricant material also being located on an interior and/or exterior edge of the medium; and removing at least some of the lubricant material from the edge | 10-14-2010 |
| 20110217911 | POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING PROCESS AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE SAME - A chemical mechanical polishing apparatus includes a platen configured to support and rotate a wafer, and a polishing pad facing the platen. The polishing pad includes a body having a groove with a rotational symmetric pattern. | 09-08-2011 |
| 20120040595 | Silicon Carbide, Sapphire, Germanium, Silicon and Pattern Wafer Polishing Templates Holder - A template for polishing Silicon Carbide, Sapphire, Germanium, Silicon and pattern wafers having a slurry inlet, channels, outlets and pockets for holding said wafers terminating in peripheral vacuum ports in order to facilitate an efficient flow of slurry over the semiconductor wafers during a polishing process. | 02-16-2012 |
| 20120088441 | PROCESSING APPARATUS HAVING FOUR PROCESSING UNITS - A processing apparatus including a turn table rotatably provided and having an opening; at least five chuck tables provided on the turn table, each chuck table having a holding surface for holding a workpiece; a support bed inserted through the opening of the turn table; four processing unit supporting mechanisms each including a first support column provided on the outside of the turn table, a second support column provided on the support bed, and a support member mounted to the first and second support columns; four processing units respectively supported to the four processing unit supporting mechanisms, the four processing units respectively corresponding to four ones of the at least five chuck tables; and four feeding units for respectively moving the four processing units in a direction perpendicular to the holding surfaces of the chuck tables. | 04-12-2012 |
| 20150038065 | TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD - A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion. | 02-05-2015 |
