| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 451365000 | Clamp | 41 |
| 20090163125 | GRINDING APPARATUS HAVING PRESSING PORTION AND GRINDING METHOD USING SAME - A grinding apparatus for grinding at least one workpiece includes a base, a first pressing portion, and a second pressing portion. The base is configured for receiving the workpiece. The first pressing portion and a second pressing portion are configured for applying a pressing force against the workpiece cooperatively, so as to hold the workpiece between the first pressing portion and the second pressing portion. The first pressing portion and the second pressing portion are moveable and rotatable relative to the base for removing the workpiece apart from the base and rotating the workpiece clockwise and counter-clockwise. A grinding method is also provided. | 06-25-2009 |
| 20090247060 | Retainer ring used for polishing a structure for manufacturing magnetic head, and polishing method using the same - Disclosed is a polishing method for polishing a surface of a structure for magnetic-head manufacture by CMP in the process of manufacturing a magnetic head using a ceramic substrate made of a ceramic material containing AlTiC, the structure including the ceramic substrate and one or more layers formed thereon, and having the surface to be polished. The polishing method uses a retainer ring made of a ceramic material containing AlTiC. | 10-01-2009 |
| 20110034114 | Vibration-Free Machining of Pilgrim Mandrels - A support collar plate for vibration-free holding of workpiece, i.e., pilgrim mandrel, clamped at both ends and to be processed between its ends by means of a grinding wheel, comprised of a base, arranged fixed in place in respect to the workpiece, and a clamp, which extends around the workpiece on at least two oppositely located sides. The workpiece can be clamped by a clamping force, wherein the clamp extends around the workpiece so that it is possible to perform processing in the area of the clamp on the side facing the grinding wheel, and wherein the clamp is floatingly seated in at least one direction perpendicularly in respect to a longitudinal axis of the workpiece, so that the clamp is self-centering in respect to the workpiece. By means of the floatingly seated clamp, the workpiece is maintained independent of exterior forces which change the spatial position of the workpiece. | 02-10-2011 |
| 20110117826 | MANUAL LOCKING MEANS FOR BIT HOLDER WITH MICRO/MACRO ADJUSTMENT - A locking means for a bit holder fixture for use with grinding apparatus for grinding the hard metal inserts of rock drill bits is provided. The locking means has a macro adjustment for quick positioning of a pressure plate against the body of the bit(s) and a micro adjustment to lock the bit(s) in place by applying pressure against the skirt or shank of the drill bit(s). | 05-19-2011 |
| 20120108152 | Electrode Securing Platens And Electrode Polishing Assemblies Incorporating The Same - In one embodiment, an electrode polishing assembly may include an electrode securing platen, a plurality of electrode locating fasteners, and an electrode. Each of the electrode locating fasteners may include an electrode spacing shoulder, a variance cancelling shoulder extending from the electrode spacing shoulder, a threaded platen clamping portion extending from the variance cancelling shoulder, and a threaded nut that engages the threaded platen clamping portion. The electrode locating fasteners clamp the electrode securing platen between the threaded nut and the electrode spacing shoulder. The variance cancelling shoulder is at least partially within one of a plurality of variance cancelling passages of the electrode securing platen. A minimum position stack-up is equal to a minimum passage size minus a maximum shoulder size. A maximum position stack-up is equal to a maximum passage size minus a minimum shoulder size. The maximum position stack-up is greater than the minimum position stack-up. | 05-03-2012 |
| 20120282847 | METHOD AND APPARATUS FOR MULTIPLE CUTOFF MACHINING OF RARE EARTH MAGNET BLOCK, CUTTING FLUID FEED NOZZLE, AND MAGNET BLOCK SECURING JIG - In a method for multiple cutoff machining a rare earth magnet block, a cutting fluid feed nozzle having a plurality of slits is combined with a plurality of cutoff abrasive blades coaxially mounted on a rotating shaft, each said blade comprising a base disk and a peripheral cutting part. The slits in the feed nozzle into which the outer peripheral portions of cutoff abrasive blades are inserted serve to restrict any axial run-out of the cutoff abrasive blades during rotation. Cutting fluid is fed from the feed nozzle through slits to the rotating cutoff abrasive blades and eventually to points of cutoff machining on the magnet block. | 11-08-2012 |
| 20130065495 | CARRIER HEAD WITH COMPOSITE PLASTIC PORTIONS - A chemical mechanical polishing head includes a base assembly that includes at least one component formed of a composite plastic having a tensile modulus approximately equal to or greater than aluminum, a retaining ring secured to the base assembly, and a flexible membrane secured to the base assembly to form a pressurizable chamber between the base assembly and an upper surface of the flexible membrane. A lower surface of the flexible membrane providing a substrate mounting surface. | 03-14-2013 |
| 20140004779 | SUBSTRATE HOLDING APPARATUS AND POLISHING APPARATUS | 01-02-2014 |
| 20140248825 | METHODS AND APPARATUS FOR DEFLECTING AND SUPPORTING A TIRE SIDEWALL - Particular embodiments of the invention include methods and apparatus for deforming a tire sidewall. Such methods include the step of providing a tire having at least one sidewall connected to a corresponding bead. A further step includes constraining at least one of the sidewall and bead from moving laterally toward the other. Yet another step of such methods includes engaging the sidewall with an inclined member. Another step of such methods includes moving at lest one of the sidewall and bead in a lateral direction away from the other until the sidewall is laterally deformed into a laterally deformed configuration. | 09-04-2014 |
| 20140342643 | CHEMICAL MECHANICAL POLISHING FIXTURE HAVING LATERAL PERFORATION STRUCTURES - A chemical mechanical polishing fixture having lateral perforation structures includes: a holder and a retaining ring. The holder includes: an annular substrate, a plurality of third holes and a plurality of lateral perforation structures. The annular substrate has a first joint surface, an outer periphery and an inner periphery. The third holes are annularly arranged on the first joint surface, and each third hole includes a first inner thread structure for individually providing a screw to be locked to a semiconductor machine. The lateral perforation structures penetrate from the outer periphery to the inner periphery of the annular substrate, where the lateral perforations are selected from: a converse U-shaped cube structure, an converse U-shaped cube structure, a cuboid structure, a cylinder structure, an elliptic cylinder structure, a flat cuboid structure or a hybrid structure of at least one cuboid structure and the above. | 11-20-2014 |
| 451366000 | Work oscillating | 1 |
| 20080318501 | Vibrating Device - The object of the present invention is to enable efficient vibration processing by applying a sufficient displacement amount and response speed to an object to be vibrated. In grinding of an outer surface of a workpiece W, first and second supporting members are provided for supporting two opposed points of the workpiece, and first and second vibrators comprising a plurality of piezoelectric elements are arranged in blind holes formed in the center of the first and second supporting members. The first and second vibrators are activated with sine wave signals which differ in phase by 180 degrees so as to cause the first and second supporting members to expand and shrink in the back-and-forth direction. The displacement amount is amplified and the processing is performed. Also, the second supporting member can move back and forth toward the first supporting member. | 12-25-2008 |
| 451367000 | Edge tool | 15 |
| 20130237134 | RAZOR SHARPENING SYSTEM - A shaving system includes a razor having a handle and a safety housing with a blade extendably received within the safety housing. An integrated sharpening system incorporates an armature receiving the razor, the armature being movable from a first position for attachment and extraction of the razor and a second position for sharpening of the blade. A sharpening mandrel is provided with a first sharpening surface for sharpening a first side of the blade and a second surface for sharpening of a second side of the blade. The sharpening mandrel is rotatable from a first position for engagement of the first sharpening surface to a second position for engagement of the second sharpening surface. The sharpening mandrel is laterally oscillated for sharpening of the blade. A controller is provided for positioning of the armature and sharpening mandrel | 09-12-2013 |
| 20130295825 | KNIFE JIG ASSEMBLY - A knife jig assembly ( | 11-07-2013 |
| 20140087639 | RAZOR SHARPENING SYSTEM - A self sharpening razor system includes a razor having a handle and a safety housing with a blade extendably received within the safety housing. An integrated sharpening system incorporates an armature receiving the razor and movable between a first position for attachment and extraction of the razor and a second position for sharpening of the blade. A sharpening mandrel is provided with sharpening surfaces for sharpening first and second sides of the blade. The sharpening mandrel is rotatable from to engage the first sharpening surface and second sharpening surface. The sharpening mandrel is laterally oscillated for sharpening of the blade. In alternative embodiments, sharpening is accomplished with reciprocating honing plates with available stropping wheels or integrated honing and stropping wheels with exposure adjustability and sharpness adjustability via honing time variance. A controller is provided for positioning of the armature and sharpening mandrel. | 03-27-2014 |
| 20140213160 | APPARATUS FOR SHARPENING BLADES - An apparatus for sharpening blades, such as those used for mowing. A rotary grinder is mounted within an extensible, retractable, and rotatable support assembly. Lockable, rotational adjustment of the position of the grinder about three axes, and translational movement along one axis is thereby provided. A spring attached to one end of the assembly counter-balances the weight of the grinder. An adjacent blade holding fixture maintains the workpiece at a predetermined angle for grinding. A toggle clamp, edge alignment keepers, and a registration pin secure the blade in place. An adapter fixture, including a toggle clamp and an alignment recess, attaches to one end of the blade holding fixture. The adapter fixture has an angled shelf to orient and secure smaller, contoured blades requiring a different edge grinding angle. Once the support assembly is adjustably secured, the grinder is moved along the cutting edge of the blade for sharpening. | 07-31-2014 |
| 451369000 | Gauging device | 9 |
| 20090318066 | GRINDING AND HONING FIXTURE WITH CLAMPING JAWS - A blade holding jig arrangement for either grinding or honing a blade including a mounting bracket assembly with an elongate guide bar and a device for rigidly supporting the guide bar. A support arm can be pivotally mounted on the guide bar by means of a tubular support mounted on one end of the arm and extending perpendicular thereto. The guide bar extends through a passageway in the tubular support. The support arm can be moved along the guide bar for grinding. A clamp unit for clamping a blade includes a U-bracket with two legs and two clamping jaws adjustably mounted on the U-bracket between the legs. The clamp unit is attached to an end section of the arm remote from the one end of the arm. The clamping jaws can be moved towards one another in order to clamp the blade. | 12-24-2009 |
| 20140162538 | SHARPENING FIXTURE, PORTABLE SHARPENING TOOL AND KIT - The present invention is a blade sharpening fixture, tool and kit for use with logging equipment with a rotary drum that has dozens of staggered blades mounted thereupon. The sharpening tool clamps onto a single blade of the logging equipment while the blade is still mounted on the rotary drum, so that the blade may be sharpened in the field. The sharpening tool includes a sharpening fixture and a grinder The sharpening fixture includes a blade clamp for clamping onto the blade; a track attached to an sloped surface that can be positioned parallel or perpendicular to the blade; and a grinder connector assembly for securing grinder securely and slibably to the track. | 06-12-2014 |
| 20140342644 | Blade Sharpening Stand - A blade sharpening stand including a support base body comprised of a pair of supporting stands spacedly provided, a blade set plate swingably attached at its rear side to the rear end of the support base body, a blade holder provided in the blade set plate for holding a blade of a knife on the blade set plate, and a guide roller provided on the front end of the support base body in a manner bridging the pair of supporting stands. A blade is held by the blade holder on the blade set plate after the blade set plate is set at desired inclined angle, and a grind stone set on the cutting edge of the blade and on the guide roller is moved back and forth to sharpen the cutting edge of the blade. | 11-20-2014 |
| 20160121448 | Guiding apparatus for sharpening woodworking cutters - A guiding apparatus for sharpening woodworking cutters contains: a holder and an accommodation assembly. The holder clamps a cutter and tilts relative to a grinding plane to form a grinding angle between the holder and the grinding plane. The holder includes a rolling sleeve and an outlet defined between two front ends of two sides thereof to extend a cutting tip of the cutter out of the outlet at an extending distance. The accommodation assembly is joined with the holder and includes a positioning plate. The positioning plate has a stopping extension formed on a rear end thereof to stop the cutting tip of the cutter and has a distance indicator arranged on a top surface thereof adjacent to the stopping extension and with respect to the grinding angle, such that the distance indicator indicates the extending distance at which the cutting tip extends out of the outlet. | 05-05-2016 |
| 451370000 | Portable | 5 |
| 451371000 | Blade sharpener | 5 |
| 20090004956 | HONING JIG - The honing jig has a base on which a whetstone or other abrasive substance is mounted. A pair of spaced guide rods extends the length of the base. A carriage is mounted to tubes which slide along the rods and through which the guide rods extend. The blade to be sharpened is held to the carriage by a clamp and the clamp swivels on the carriage to allow the inclination of the blade relative to the whetstone to be adjusted. The angle of the guide rods can be adjusted to permit fine adjustment of the inclination of the blade. | 01-01-2009 |
| 20110159791 | Blade Sharpening Assembly - A blade sharpening assembly generally consisting of a base member; a clamping member disposed on the base member, cooperable therewith for releasably securing a blade thereon with a cutting edge thereof protruding therefrom; a guide post mountable on the base member; a carrier member mounted on the guide post, displaceable along a length thereof, including means for releasably securing the carrier member at selected positions along the length of the guide post; and a tool for sharpening a blade secured between the base and clamping members, including a handle section, an elongated section engageable with a support surface of the carrier member and a honing section engageable with a cutting edge of a blade secured between the base and clamping members when the elongated section engages the support surface of the carrier member. | 06-30-2011 |
| 20110177764 | Knife Sharpener With Anti-Rocking Blade-Conforming Clamping Members - A clamping-type knife sharpener is designed with anti-rocking blade holding capability. The knife sharpener includes first and second clamping members and a clamping member adjustment mechanism configured to adjustably manipulate the clamping members into clamping engagement with a knife blade to be sharpened. The knife blade is maintained by the clamping members in orientation with a planar knife sharpener axis extending along a centerline of the knife blade that passes through an edge of the knife blade. First and second deformable clamping boots are respectively disposed on the first and second clamping members. The first and second clamping boots have respective first and second clamping faces adapted to engage the knife blade when the clamping members are in the clamping engagement with the knife blade. At least one of the clamping faces has a blade-conforming contour that substantially conforms to a surface contour of the knife blade and restrains the knife blade against rocking during sharpening. The blade-conforming contour may include at least one region that is angled with respect to the planar knife sharpener axis. | 07-21-2011 |
| 20150140909 | Holder for sharpening and faceting - A holder for sharpening and faceting includes a cylindrical body having a first end, a second end and an opening formed transversely through the body between the first end and the second end. The opening has a tool support surface. An adjustable clamping component has a rotatably adjustable fastening plate positioned within the opening, where the fastening plate has a top surface and a tool engaging surface to hold the tool against the tool support surface and a plurality of predefined plate end openings. A plurality of roller members are disposed within a longitudinal raceway formed in a lower portion of the body below the opening. The roller members are aligned to roll parallel to the longitudinal axis of the cylindrical body and the axis of rotation of the roller members is perpendicular to the longitudinal axis of the cylindrical body. | 05-21-2015 |
| 20150367224 | SKATE SHARPENING FIXTURE - A skate sharpening fixture. The skate sharpening figure including an anvil base plate that is suspended on a lower plate. An upper anvil plate is connected to the anvil base plate and presents an upper anvil surface for resting a skate blade therealong. A clamp assembly is mounted relative to the upper anvil plate and includes a clamp for biasing the skate blade against the upper anvil surface to establish a closed and clamped position of the skate sharpening fixture. At least one of the anvil base plate, the lower plate, or the clamp are comprised of a lightweight material for reducing an overall weight of the skate sharpening fixture and placing a center of gravity of the skate sharpening fixture in close proximity to an operator's position. | 12-24-2015 |
| 451374000 | Rotary cutter | 1 |
| 20090053979 | Jig - A jig intended in use to hold a set of blanks of rod-like or wire-like form during machining, said jig having a body adapted to be mounted to a drive shaft for rotation of the body about an axis of rotation, the body having an outer portion and an inner portion wherein the inner and outer portions are capable of angular displacement relative to each other, the portions having opposed faces which are concentric and which define clamping faces which in use are intended to support the set of blanks such that their central axes are substantially parallel to the axis of rotation and at least one end extends axially beyond the body. | 02-26-2009 |
| 451380000 | Angularly adjustable | 1 |
| 20090088053 | METHOD AND APPARATUS FOR SHARPENING A TOOL BLADE - A device for sharpening a tool blade has a pair of spaced guide rails and a bracket for mounting a sharpening stone on the guide rails. A carriage is slidably supported on the guide rails and has a pair of spaced slide plates adjustably supporting a blade angle plate thereon. A clamp mechanism secures the tool blade on the angle plate which is secured in an adjusted position for forming a primary angle on the blade cutting edge by reciprocal movement of the carriage along the guide rails. The angle plate and attached tool blade are readjusted on the carriage for subsequently forming a secondary angle on the cutting edge of the tool blade. Printed indicia adjacent a plurality of adjustment holes formed in the slide plates set the primary and secondary angles of the cutting edge. Mating surfaces on the carriage and guide rails set the amount of material to be removed from the blade during reciprocal movement along an abrasive sharpening material. | 04-02-2009 |
| 451381000 | Hollow work | 2 |
| 20130309949 | TIRE SPREADER FOR TIRE REPAIR - The present invention concerns methods and apparatus for spreading beads in a tire. Particular embodiments of such methods include positioning a tire adjacent an automated material abrading tool, the tire having: a central opening bounded radially by an inner bead diameter; an interior tire cavity extending radially outward from the inner bead diameter; and an interior tire cavity opening extending between opposing an annular beads of the tire, the cavity being positioned between the central cavity and the interior tire cavity. Such methods may also include securing at least a portion of the first bead of the tire and positioning a tire spreader within the central opening of the tire, the tire spreader having a bead engaging portion for engaging a portion of the second bead generally opposite the secured portion of the first bead. | 11-21-2013 |
| 20160031274 | TIRE SPREADER FOR TIRE REPAIR - The present invention concerns methods and apparatus for spreading beads in a tire. Particular embodiments of such methods include securing at least a portion of a first bead of the tire and positioning a tire spreader within the central opening of the tire, the tire spreader having a bead engaging portion for engaging a portion of a second bead generally opposite the secured portion of the first bead. Such methods may further include automatically translating the bead engaging portion of the tire spreader generally in an axial direction of the tire to displace the engaged portion of the second bead a desired distance to increase the distance between the opposing beads to form a widened interior cavity opening. | 02-04-2016 |
| 451383000 | Skate | 3 |
| 20120315832 | SKATE SHARPENING SQUARING DEVICE AND METHOD OF USE - A skate squaring device includes a main frame having a slot to receive a skate blade. The main frame is designed to attach to a portion of a skate sharpening fixture such that calibration lines on the main frame are perpendicular to a centerline axis of a body of the skate blade when mounted in the holder. A magnetic angle is attached to the end of the skate blade and positioned adjacent a face of the main frame having the calibration lines to determine if the skate blade edge is square. | 12-13-2012 |
| 20160114452 | SKATE BLADE RETENTION MECHANISM WITH JAW GUIDES - A skate blade sharpening system includes a chassis having a slot for receiving a skate blade, and a skate blade retention mechanism for retaining the skate blade in a sharpening position. The skate blade retention mechanism includes an actuator and a pair of jaws on respective sides of the slot, the jaws being coupled to the actuator and configured for symmetrical opening and closing movements about a centerline of the skate blade. The jaws are secured to the chassis by guide blocks extending though corresponding guide slots of the jaws. The guide blocks have respective angled surfaces contacting corresponding angled surfaces of the jaws permitting the jaws to slide on the guide blocks when the jaws are open. The angled surfaces are oriented in a manner urging the jaws upward against a surface referenced to the chassis as the jaws are urged to a closed position by the actuator. | 04-28-2016 |
| 20160250732 | SKATE BLADE HOLDER TOOL WITH ADJUSTABLE-SIZE BLADE RETENTION | 09-01-2016 |
| 451384000 | Lens holder | 2 |
| 20100112915 | LENS HOLDER - A lens holder ( | 05-06-2010 |
| 20120238191 | Securing Structure for Optic Device - A securing structure for an optical piece is disclosed and which comprises: a hub portion; a surrounding portion connected to the hub portion; a plurality of recess structures formed or otherwise provided in at least one of the hub portion and the surrounding portion and which are at least partially open on at least one side; and a rib structure that at least partially separates the plurality of recess structures, The structure is capable of use with an apparatus for securing and clamping optical lenses (e.g., spectacle lenses) requiring edge-machining. | 09-20-2012 |
| 451385000 | Work rotating | 7 |
| 20080299880 | SUBSTRATE HOLDING APPARATUS AND SUBSTRATE POLISHING APPARATUS - A substrate holding apparatus has a substrate holder body with a substrate holding side facing a polishing surface and holding a substrate on the substrate holding side and a retainer ring fixedly secured to the substrate holder body. The retainer ring is arranged to surround an outer periphery of the substrate held by the substrate holder body so that the retainer ring engages with the polishing surface radially outside the substrate as the polishing of the substrate is effected. The substrate holder body is provided with a membrane having inside and outside surfaces. The inside surface cooperates with a surface of the substrate holder body to define a fluid pressure chamber to which a fluid pressure is applied. The outer surface engages with the substrate held by the substrate holder body. | 12-04-2008 |
| 20090221223 | MULTILAYER RETAINING RING FOR CHEMICAL MECHANICAL POLISHING - A carrier head for a chemical mechanical polishing apparatus includes a retaining ring having a flexible lower portion and a rigid upper portion. | 09-03-2009 |
| 20110065368 | RETAINING RING FOR CHEMICAL MECHANICAL POLISHING - An improved retaining ring used for chemical mechanical polishing of substrates, such as semiconductor wafers, to hold a substrate in place during the polishing process. The retaining rings are configured with inserts through which fasteners are positioned to securely affix the retaining ring to the polishing head. The inserts assist in dissipating the force of the fasteners, thereby allowing a more uniform polishing surface. The opening through which the fastener is positioned may be configured with concave or convex side walls to assist in dissipating the force of the fasteners during installation of the retaining ring or the polishing process. | 03-17-2011 |
| 20130316627 | WAFER CARRIER FOR BATCH WAFER POLISHING IN WAFER POLISHING MACHINES - A carrier assembly includes carrier protrusions extending outward from a base plate front face, one protrusion for each wafer to be polished. Each carrier protrusion has a front face separated from the base plate front face. An optional detachable ring may surround each protrusion front face to form a cavity for holding a wafer. In some examples of a carrier assembly, a frame having a separate aperture for each carrier protrusion holds all the detachable rings against the base plate front face. In other examples of a carrier assembly, the detachable rings are omitted, or a separate retaining ring for each carrier protrusion replaces the frame. A carrier protrusion may optionally be formed with edge relief to allow part of the wafer to deflect away from a polishing pad during polishing. A compressible elastic material may optionally be placed between a wafer and a carrier protrusion. | 11-28-2013 |
| 20150050869 | RETAINER RING STRUCTURE FOR CHEMICAL-MECHANICAL POLISHING MACHINE AND METHOD FOR MANUFACTURING THE SAME - A retainer ring structure for a chemical-mechanical polishing (CMP) machine includes: an insert ring made of metal and having a plurality of holes formed at the top surface thereof and coupled to a head of the CMP machine; an insert pin made of resin, including a body having a hollow portion of which the top surface is opened and one or more elongated grooves formed at side surfaces thereof in a longitudinal direction, and press-fitted into a hole of the insert ring so as to be subjected to a tapping process; and an outer ring formed to surround the insert pin and the insert ring. | 02-19-2015 |
| 20150050870 | RETAINER RING STRUCTURE FOR CHEMICAL-MECHANICAL POLISHING MACHINE - A retainer ring structure for a chemical-mechanical polishing (CMP) machine includes: a upper ring made of metal and having a plurality of bolt holes formed on the top surface thereof and coupled to a head of the CMP machine; and a lower ring made of resin and having a coupling groove formed in the center thereof and coupled to the upper ring, wherein the upper ring and the lower ring are coupled to each other such that the top surface of the upper ring and the circumferential top surface of the lower ring are positioned on the same plane. | 02-19-2015 |
| 20160121453 | METHODS AND APPARATUS FOR PROFILE AND SURFACE PREPARATION OF RETAINING RINGS UTILIZED IN CHEMICAL MECHANICAL POLISHING PROCESSES - A retaining ring for a polishing process is disclosed. The retaining ring includes a body comprising an upper portion and a lower portion, and a sacrificial surface disposed on the lower portion, the sacrificial surface comprising a negative tapered surface having a taper height that is about 0.0003 inches to about 0.00015 inches. | 05-05-2016 |
| 451387000 | Angularly adjustable | 1 |
| 20140370794 | POLISHING APPARATUS - A polishing apparatus capable of precisely controlling a polishing profile, particularly a polishing profile in an edge portion, of a wafer is disclosed. The polishing apparatus includes: a top ring shaft; a housing fixed to the top ring shaft; a flexible membrane configured to press a wafer against a polishing pad; a top ring body configured to hold the flexible membrane; a retaining ring coupled to the top ring body and disposed so as to surround the flexible membrane; a gimbal mechanism configured to allow the top ring body and the retaining ring to tilt with respect to the housing; and a local load exerting mechanism configured to exert a downward local load on a part of the retaining ring. | 12-18-2014 |
