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Work chamber having gaseous material supply or removal structure

Subclass of:

432 - Heating

432120000 - WORK CHAMBER HAVING HEATING MEANS

Patent class list (only not empty are listed)

Deeper subclasses:

Class / Patent application numberDescriptionNumber of patent applications / Date published
432200000 Work chamber having gaseous material supply or removal structure 19
20100323313STAGE STRUCTURE AND HEAT TREATMENT APPARATUS - There is provided a stage structure which can prevent the formation of a cool spot in the central portion of a stage, thereby preventing breakage of the stage, and can enhance the in-plane uniformity of heat treatment of a processing object.12-23-2010
20110143297Thermal Diffusion Chamber - A frame supporting a containment chamber, the containment chamber is preferably configured to enclose and confine a process chamber. A heat source module is disposed between the containment chamber and the process chamber, while a thermal regulation cavity is maintained between the heat source module and the process chamber. Preferably, at least one fluid inlet box is in fluidic communication with the thermal regulation cavity, in which the fluid inlet box provides a plate valve that mitigates the flow of fluids from the thermal regulation cavity through the fluid inlet box and to an environment external to the thermal regulation cavity. Additionally, the preferred fluid inlet box further includes a flow adjustment structure interacting with the plate valve to control fluid flow from the environment external to the thermal regulation cavity past the plate valve and into thermal regulation cavity.06-16-2011
20110189621Sintering Furnace for Producing an HTSC Strip - The invention relates to a method for producing a high temperature superconductor (HTSC) from a strip including an upper side precursor layer and which, for continuous sintering of the precursor layer within a furnace in the presence of a fed-in reaction gas, is drawn across a support. A furnace for performing the method is also described.08-04-2011
20120308950MULTI-PIPE EXTERNAL-HEATING COAL DECOMPOSITION EQUIPMENT - A multi-pipe external-heating coal decomposition equipment, comprising a airtight kiln body; a channel for impelling and decomposing coal is formed in the kiln body, which has a coal inlet, a coal outlet and a collecting pipe for coal decomposition gas; a heat transfer chamber is formed between the channel and inner wall of the kiln body, which is connected with a high temperature gas heating facility and comprises a heated gas outlet. Because the channel for impelling and decomposing coal is set in a kiln body with high temperature, so a vast of heat gas in high temperature kiln body surrounds the channel and its heat conducts and radiates to the pulverized coal in the channel. Thus, the pulverized coal can fully absorb the heat to be heated for decomposing to the gas, coal tar and coal with high heat-value in the channel.12-06-2012
20120308951COAL DECOMPOSITION EQUIPMENT - The invention discloses a coal decomposition equipment including an airtight kiln body with an inlet and an outlet, wherein a flame gas pipeline heating facility is set in the kiln body and a channel for impelling and decomposing coal is formed between the flame gas pipeline heating facility and an inner wall of the kiln body; and a coal decomposition gas collecting pipe is provided on the kiln body to communicate with the channel. Since the present invention makes the vast thermal conduction produced by the flame gas pipeline heating facility and radiate to the coal power in the coal substance impel decomposition channel. The pulverized coal fully absorbs the heat so as to be heated and decomposed to the gas, coal tar gas and coal with a higher heat-value in the channel.12-06-2012
20130065190FURNACE FOR MELTING INORGANIC SALTS - Furnace for melting inorganic salts, comprising a container (03-14-2013
20140072925HEAT TREATMENT APPARATUS - A heat treatment apparatus includes: a reaction tube processing a plurality of substrates; a support member supporting the reaction tube; a flange protruding outwardly from a lower end of the reaction tube: a concave portion formed in an outer periphery of the flange; and a rotatable roller installed in a top surface of the support member. The rotatable roller engages the concave portion and positions the reaction tube in a circumferential direction.03-13-2014
20150044622HEATER MOVING TYPE SUBSTRATE PROCESSING APPARATUS - Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber providing an inner space in which a process with respect to a substrate is performed, a heating plate on which the substrate is placed, the heating plate being fixedly disposed within the chamber, a heater spaced from a lower portion of the heating plate to heat the heating plate, and a lift module lifting the heater.02-12-2015
432201000 Air flow-through type 8
20110014581KILNS FOR PROCESSING CERAMICS AND METHODS FOR USING SUCH KILNS - Kilns for processing ceramics and methods for using such kilns are disclosed herein. In one embodiment, a kiln includes an inner body configured to hold one or more ceramic workpieces for processing. The kiln can also include an outer body at least partially surrounding the inner body and spaced apart from the inner body to define an airflow passageway therebetween. The airflow passageway includes an inlet proximate to an upper portion of the outer body and an outlet proximate to a lower portion of the outer body. The kiln can further include an air mover positioned to move air through the airflow passageway from the inlet toward the outlet. In several embodiments, the kiln can additionally include a lid assembly pivotably coupled to the outer body and configured to sealably close against at least the inner body.01-20-2011
20140004474ELECTROCATALYST ROTATING DISK ELECTRODE PREPARATION APPARATUS01-02-2014
20140127637OUTER COOLING LOOP - The present invention relates to an arrangement for treatment of articles by hot pressing and in particular by hot isostatic pressing. The pressing arrangement includes a pressure vessel and a furnace chamber adapted to hold articles, which furnace chamber is provided inside the pressure vessel. At least one guiding passage communicating with the furnace chamber forms an outer cooling loop, wherein the pressure medium in a part of the outer cooling loop is guided in proximity to pressure vessel walls and the top end closure before it re-enters into the furnace chamber. Further, a guiding channel element is located in the at least one guiding passage forming the outer cooling loop is arranged with at least one pressure medium channel for guiding the pressure medium from a central opening of the heat insulated casing radially and circumferentially towards a lateral wall of the pressure cylinder. The at least one pressure medium channel has a substantially constant cross-sectional area in a flow direction of the pressure medium.05-08-2014
20160148823BAKING DEVICE FOR A WAFER COATED WITH A COATING CONTAINING A SOLVENT - A baking device for a wafer coated with a coating containing a solvent is described, having a baking chamber, a support for the wafer, an inlet for a purge gas, and an evacuation for the purge gas charged with solvent evaporated from the coating. The inlet is formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer, and the evacuation is formed as an evacuation ring which radially surrounds the diffusion element and is arranged at a ceiling of the baking chamber.05-26-2016
432202000 Having means heating work by radiation or conduction 2
20140349240HEAT TREATMENT FURNACE - The heat transfer efficiency is improved.11-27-2014
20150323257HEATING FURNACE - The disclosure discloses a heating furnace including a housing, a first rack, a chamber, and at least one fan. The first rack is disposed in the housing. The chamber is disposed in the housing and located at a side of the first rack. The chamber includes an inlet, a first sidewall, and a second sidewall. The first sidewall is adjacent to the first rack. The first sidewall has a plurality of vents. The first sidewall and the second sidewall are disposed to face each other. A width is spaced between the first sidewall and the second sidewall, and the width is larger than or equal to 200 mm. The fan is disposed in the housing for generating an airflow to the inlet.11-12-2015
432203000 Pump for atmosphere 2
20130017505OVEN FOR HEAT TREATMENT OF A MULTIPLICITY OF OBJECTSAANM Mohr; StefanAACI HofAACO DEAAGP Mohr; Stefan Hof DE - The invention relates to an oven for heat treatment of a multiplicity of objects. The oven comprises a support stand, which is realized as a three-dimensional frame, an elongate heating chamber, which is arranged vertically or horizontally in a central region of the support stand, and a plurality of elongate combustion chambers, which are arranged vertically or horizontally inside the support stand. The oven additionally comprises a heating element, which is assigned to the heating chamber, and at least one fan for generating an air stream from the heating chamber to the combustion chambers. The combustion chambers are provided to receive the objects to be treated. The support stand is provided to support the heating chamber and the combustion chambers. The invention additionally relates to an oven installation having a multiplicity of such ovens.01-17-2013
20130209950OVEN FOR HEAT TREATMENT OF A MULTIPLICITY OF OBJECTS - The invention relates to an oven for heat treatment of a multiplicity of objects. The oven comprises a support stand, which is realized as a three-dimensional frame, an elongate heating chamber, which is arranged vertically or horizontally in a central region of the support stand, and a plurality of elongate combustion chambers, which are arranged vertically or horizontally inside the support stand. The oven additionally comprises a heating element, which is assigned to the heating chamber, and at least one fan for generating an air stream from the heating chamber to the combustion chambers. The combustion chambers are provided to receive the objects to be treated. The support stand is provided to support the heating chamber and the combustion chambers. The invention additionally relates to an oven installation having a multiplicity of such ovens.08-15-2013
432205000 Having pump, jet or valve means establishing chamber pressure distinct from ambient 3
20130095442Heat Treatment Container for Vacuum Heat Treatment Apparatus - Provided is a heat treatment container for a vacuum heat treatment apparatus. The heat treatment container includes a bottom and a sidewall. An exhaust passage is defined in an upper portion of the sidewall.04-18-2013
20130337395PRESSING ARRANGEMENT - The present invention relates to an arrangement for treatment of articles by hot pressing. The pressing arrangement for treatment of articles by hot pressing comprises a pressure vessel including: a furnace chamber comprising a heat insulated casing and a furnace adapted to hold the articles. A heat exchanger unit is arranged below said furnace chamber and adapted to exchange thermal energy with pressure medium when the pressure medium is passing through said heat exchanger unit. According to the present invention, at least one first and second inlet or aperture, respectively, for passage of alternating warm and cold pressure medium are arranged in the heat insulated casing in proximity to the heat exchanger unit (i.e. at approximately same the height as, above or below the heat exchanger unit). The at least one second inlet (or lower inlet) is below the at least one first inlet (or upper inlet) but at same height as or below the heat exchanger unit.12-19-2013
20150010877HIGH PRESSURE CONTAINER - A high pressure container includes a casing disposed in a housing and spaced from the housing for forming a peripheral space between the housing and the casing, the casing includes a compartment and spaced from the peripheral space that is formed between the housing and the casing, and a pressurizing device is connected to the compartment of the casing with a pipe for supplying a heated or pressurized air into the casing in order to heat or pressurize the work piece to the required higher pressure or temperature, and the pressurizing device is coupled to the peripheral space that is formed between the housing and the casing with a tube for supplying a pressurized air into the peripheral space for balancing the pressure.01-08-2015
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