| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 414744400 | Moving pivot | 52 |
| 20080273957 | Transfer apparatus - A transfer apparatus includes a stationary base, a swivel rotatable around a vertical rotation axis, a linear movement mechanism supported by the swivel, a hand supported by the linear movement mechanism for transferring a work along a horizontal path, a driving power source in the stationary base, and a transmission shaft arranged along the rotation axis for transmitting driving force from the driving power source to the linear movement mechanism. The linear movement mechanism includes a driving mechanism and a guide rail for movably supporting the hand. The driving mechanism has a plurality of pulleys, including a driving pulley supported rotatably around a horizontal axis, and an output belt wound around the plurality of pulleys for reciprocal movement within a predetermined section extending parallel to the movement path. The hand is connected to the output belt via a connection member. | 11-06-2008 |
| 20090180855 | Pivot arm assembly for semiconductor wafer handling robots and method for making the same - A method for making a robot pivot arm assembly includes forming from a rigid, machinable material a circular disk, and forming a circular aperture through the center of the disk. An outer bearing track is formed integrally in the inside surface which defines the aperture, and the apertured disk is positioned in a machining device with a fixturing portion that engages the outer bearing track. An integral outer race, an arm and a gear segment with teeth are then machined into the disk to form the outer portion of the pivot arm assembly. An inner race with an inner bearing track is positioned inside the integral outer race, and rolling bearing elements are inserted into the first and second bearing tracks. | 07-16-2009 |
| 20130039732 | REMOTE CENTER OF MOTION MECHANISM AND METHOD OF USE - According to one exemplary embodiment, a manipulator device includes a base, first and second linear slides, a drive link, a drive member, a driven member and an end effector. The elements of the manipulator device cooperate to constrain the end effector to rotate about a remote center of motion that is displaced from a proximal center of motion as the drive link moves a carriage of the second linear slide along an arcuate path. | 02-14-2013 |
| 20140099180 | LOADING/UNLOADING ROBOT - A loading/unloading robot includes an arm unit attached to a support unit that is capable of being raised and lowered and a hand unit for conveying a loaded/unloaded object, attached to the arm unit. The support unit includes a base portion capable of revolving around a raising/lowering axis and a head portion rotatably attached to the base portion. The arm unit includes arms that are rotatably attached to the head portion. Front ends of the arms move forward and backward along a forward/backward direction that passes the head portion. The hand unit includes a loading/unloading hand rotatably attached to the arm. A center distance from the rotational axis of the head portion to the rotational axes of rear arms is shorter than a center distance from an axis of revolution of the base portion to the rotational axis of the head portion. | 04-10-2014 |
| 414744500 | Pivot swinging about second pivot | 48 |
| 20080219824 | MULTIPLE SUBSTRATE TRANSFER ROBOT - Embodiments of multiple substrate transfer robots and substrate processing systems have been disclosed herein. In some embodiments, a multiple substrate transfer robot is provided and may include an arm capable of extending along a horizontal direction; and a wrist coupled to the arm and having a plurality of blades coupled thereto, each blade configured to horizontally support a substrate thereupon and vertically disposed with respect to each of the other blades. In some embodiments, a substrate processing system is provided and may include a substrate processing chamber having a plurality of susceptors, wherein each susceptor is vertically disposed and capable of holding a semiconductor substrate; and a substrate transfer robot having a plurality of blades for transferring a plurality of substrates to and from the processing chamber, each blade configured to horizontally support a substrate thereupon and vertically disposed with respect to each of the other blades. | 09-11-2008 |
| 20080298944 | SUBSTRATE TRANSPORT APPARATUS - A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms. | 12-04-2008 |
| 20090067974 | END EFFECTOR AND ROBOT FOR TRANSFERRING A SUBSTRATE HAVING THE SAME - In a substrate transfer robot, an end effector includes a wrist plate, a first blade movably connected to the wrist plate in a vertical direction to support a first substrate, and a second blade connected to the wrist plate to support a second substrate, wherein the second blade is adjacent to the first blade. An elevating unit moves the first blade upward to allow the first blade to support the first substrate and moves the first blade downward to allow the second blade to support the second substrate. | 03-12-2009 |
| 20100158656 | Robot arm assembly - A robot arm assembly includes a turret, a lower arm pivotable with respect to the turret, and an upper arm pivotable with respect to the lower arm. | 06-24-2010 |
| 20100178146 | SYSTEMS, APPARATUS AND METHODS FOR TRANSPORTING SUBSTRATES - A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper arm rotatable in an X-Y plane, a forearm rotatable relative to the upper arm in the X-Y plane, and a wrist member rotatable relative to the forearm in the X-Y plane, the wrist member including an end effector adapted to carry a substrate. The wrist member may be subjected to independent rotation such that various degrees of yaw may be imparted to the wrist member. In some aspects, the independent rotation is provided without a motive power device (e.g., motor) being provided on the arms or wrist member, i.e., the wrist member may be remotely driven. Systems and methods using the robot apparatus are also provided as are numerous other aspects. | 07-15-2010 |
| 20100178147 | ROBOT SYSTEMS, APPARATUS AND METHODS FOR TRANSPORTING SUBSTRATES - Substrate transport systems, apparatus and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating a robot assembly to put or pick the substrate at the destination. Numerous other aspects are provided. | 07-15-2010 |
| 20100209225 | SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR PRODUCING SEMICONDUCTOR - A substrate transfer robot includes a substrate gripping portion, an arm unit, and a controller. The substrate gripping portion is configured to hold a substrate. The arm unit includes a plurality of arms which are capable of turning in a horizontal plane. The arm unit has the substrate gripping portion at a leading end of the arm unit and is configured to transfer the substrate between a plurality of taught positions taught beforehand. When the taught positions are taught, the controller is configured to generate an access standby position corresponding to each of the plurality of taught positions and configured to generate and store a plurality of routes from the access standby position to a minimum turning posture of the substrate transfer robot. | 08-19-2010 |
| 20110123305 | TRANSFER ROBOT - A transfer robot includes a hand section, a horizontal arm mechanism, and a lift mechanism. An object is to be placed on the hand section. The horizontal arm mechanism is connected to the hand section and includes at least two rotary joints. The horizontal arm mechanism is configured to extend and contract so as to move the hand section along one direction. The lift mechanism is configured to move the horizontal arm mechanism up and down and includes a plurality of link mechanisms disposed on a base member. The horizontal arm mechanism is disposed between parts of the lift mechanism when the horizontal arm mechanism is moved to a lowest position. | 05-26-2011 |
| 20110135437 | HORIZONTAL MULTI-JOINT ROBOT AND TRANSPORTATION APPARATUS INCLUDING THE SAME - A third arm is provided in addition to an end effecter, a first arm and a second arm. The third arm performs swinging and turning motion until a third rotational axis is aligned with an extension of an axial line on an access position. Then, the end effecter moves linearly to transport a workpiece from and to the access position. | 06-09-2011 |
| 20110262257 | Horizontal articulated robot and substrate transfer system provided with the same - A horizontal articulated robot includes a first arm and a second arm respectively supported at their base end portions by a body and the tip end portion of the second arm to be rotatable about a first joint and a second joint; and a fork including its base end portion supported by the tip end portion of the second arm to be rotatable about a third joint. The first arm includes a first enlarged portion, formed in its tip end portion, with an upper surface positioned higher than an upper surface of the base end portion of the first arm. The second arm includes a second enlarged portion, formed in its tip end portion, with a lower surface positioned lower than a lower surface of the base end portion of the second arm. The first and the second enlarged portion are at least partially overlapped with each other horizontally. | 10-27-2011 |
| 20110293395 | TRANSFERRING APPARATUS - A transferring apparatus | 12-01-2011 |
| 20110299967 | TRANSFER DEVICE - A device for transferring objects, in particular parisons ( | 12-08-2011 |
| 20130071217 | SUBSTRATE TRANSPORT APPARATUS - A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms. | 03-21-2013 |
| 20130071218 | Low Variability Robot - An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber. | 03-21-2013 |
| 20130084156 | ROBOT ARM - The robot arm of the present application is a robot arm that transports semiconductor wafers. The robot arm includes a hand, a lower arm link, and an upper arm link. The hand is connected to the lower arm link via a first joint. The upper arm link is connected to the lower arm link via a second joint. In the robot arm of the present application, the lower arm link is capable of being separated at a location between the first joint and the second joint. | 04-04-2013 |
| 20130121798 | ROBOT SYSTEM WITH INDEPENDENT ARMS - A substrate handling robot drive comprising a drive chassis for one or more robot arms. A first housing is movable with respect to the chassis and includes at least a first shaft and a first motor subsystem driving the first shaft. A Z-axis drives the first housing. A second housing is movable with respect to the chassis includes at least a second shaft and a second motor subsystem driving the second shaft. A Z-axis drive for the second housing is independently movable with respect to the Z-axis drive for the first housing. | 05-16-2013 |
| 20130156534 | TRANSFER ROBOT - A transfer robot includes a first arm having a base end portion rotatably connected to an arm base, the first arm including a specified drive system arranged therein, a second arm having a base end portion rotatably connected to a tip end portion of the first arm, and a hand having a hand base rotatably connected to a tip end portion of the second arm, the hand serving to hold a substrate. The first arm includes an arm housing provided with a plurality of air injection holes and at least one air exhaust hole are provided. The first arm is configured such that a compressed air injected through the air injection holes flows along an inner wail surface of the arm housing and flows out through the air exhaust hole. | 06-20-2013 |
| 20130156535 | LINEAR MOTION MECHANISM AND ROBOT PROVIDED WITH THE LINEAR MOTION MECHANISM - A linear motion mechanism includes a base portion; a guide member attached to the base portion; and a slider provided to slide along an axial direction of the guide member. The guide member is fastened to the base portion by a guide fastening member in a specified fastening direction substantially orthogonal to the axial direction, and is pressed by a guide pressing member in an orthogonal direction substantially orthogonal to both the axial direction and the fastening direction. | 06-20-2013 |
| 20130183131 | DUAL ARM VACUUM ROBOT - A robot for use in semiconductor vacuum chambers is disclosed. The robot may include two independently-driven arms configured for wafer handling. The robot may include three motors or drive systems and a tri-axial seal to realize independent extension/retraction of each arm and overall simultaneous rotation of the arm assembly. The robot may provide enhanced throughput efficiency over other robot designs. | 07-18-2013 |
| 20130195599 | ROBOT - A robot includes an arm unit having a base end portion rotatably installed through a joint part. The arm unit includes a housing and a specified member arranged within the housing. At least a portion of the housing is made of a transparent material. | 08-01-2013 |
| 20130195600 | ROBOT - A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the arm and configured to drive the output shaft at a reduced speed. The drive mechanism includes a motor having a motor shaft, a driving pulley attached to the motor shaft, a driven pulley attached to the output shaft, at least one intermediate pulley provided between the driving pulley and the driven pulley, and a plurality of belts for operatively interconnecting the driving pulley and the driven pulley through the intermediate pulley. | 08-01-2013 |
| 20130195601 | TRANSFER SYSTEM - A transfer system according to an embodiment includes a transfer room, a robot, a trajectory generator, a determination unit, and an output unit. The transfer room has an exclusive area defined by a predetermined distance. The robot has an arm unit that is equipped with a robot hand transferring a thin plate-like workpiece and that operates in horizontal directions. The robot is installed in the transfer room so that a minimum turning area of the arm unit overlaps with a part of the exclusive area. The transfer system generates a trajectory of the robot hand, then determines, based on the generated trajectory, whether a part of the arm unit is included in the exclusive area, and outputs a predetermined signal. | 08-01-2013 |
| 20130294877 | Vacuum Robot Adapted to Grip and Transport a Substrate and Method Thereof - A vacuum robot adapted to grip and transport a substrate. The robot includes a robot drive coupled to an arm and having an end-effector adapted to support the substrate. A robot gripper system is coupled to the end-effector including a front support having at least one hard stop, a movable contact element coupled to the end-effector, a bias device coupled to the contact element, and at least one actuator coupled to the end-effector configured to move the contact element between a release position and a grip position. The bias device is configured to passively bias the contact element in the grip position such that the contact element contacts an edge of the substrate to urge the substrate against the at least one hard stop to secure the substrate in the grip position and to passively bias the contact element in the release position such that the contact element is retained in the release position. | 11-07-2013 |
| 20130323002 | TRANSFER ROBOT AND EQUIPMENT FRONT END MODULE INCLUDING TRANSFER ROBOT - A transfer robot according to the embodiment includes an arm unit, a base unit, a guide unit, a lifting unit, and a vent part. The arm unit includes a robot hand capable of holding an object to be transferred. The base unit is formed into a substantially box shape. The guide unit includes a vertical shaft vertically arranged in the base unit. The lifting unit is provided to be raisable and lowerable along the vertical shaft and supports the arm unit at an upper end portion. The vent part is opened in an upper surface of the base unit and vents downflow from an outside to an inside of the base unit. | 12-05-2013 |
| 20130336753 | WAFER HANDLING ROBOT - A wafer handling robot includes a body and an arm having a plurality of links. A wafer holder is provided on one end of the arm. A base of the arm serves as a drive link and is rotatably connected to the body. The arm is configured such that, when the drive link is rotated by a motor, the arm end is constrained to move along a straight or curved trajectory. A starting point and an end point of the trajectory are located equal distantly from a center of rotation of the drive link. Further, the direction of the arm end at the starting point is a mirror image of the direction of the arm end at the end point with respect to a straight reference line passing through the center of rotation and a middle point between the starting and the end points. | 12-19-2013 |
| 20140064901 | TRANSPORTING DEVICE - A transporting device includes a base, a driving assembly, a first linking mechanism, and a second linking mechanism. The first linking mechanism includes first and second connecting links that re hinged together. The second linking mechanism includes third and fourth connecting links that are hinged together. The first and the third connecting links are rotatably driven by the driving assembly, such that the first linking mechanism and the second linking mechanism are movable relative to the base toward each other, away from each other, or in a same direction, for transporting a workpiece. | 03-06-2014 |
| 20140140800 | ROBOT ARM, ROBOT AND ROBOT OPERATING METHOD - A robot arm includes an extensible/retractable arm unit, which is configured to extend and retract in a horizontal direction and provided with a pulley arranged in a tip end portion thereof, and a robot hand rotatably connected to the tip end portion of the extensible/retractable arm unit through the pulley. The robot arm further includes a belt drive device including one or more drive power sources, which are arranged close to the robot hand and configured to directly drive a belt wound around the pulley. | 05-22-2014 |
| 20140154038 | MULTI-AXIS ROBOT APPARATUS WITH UNEQUAL LENGTH FOREARMS, ELECTRONIC DEVICE MANUFACTURING SYSTEMS, AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING - Embodiments include multi-arm robots for substrate transport systems that include a boom, first and second forearms rotationally coupled to the boom, the second forearm being shorter than the first forearm, a first wrist member rotationally coupled to the first forearm, and a second wrist member rotationally coupled to the second forearm. Each of the boom, first and second forearms, and the first and second wrist members are configured to be independently rotated to carry out substrate motion profiles. Electronic device processing systems and methods of transporting substrates are described, as are numerous other aspects. | 06-05-2014 |
| 20140199149 | HORIZONTAL MULTIPLE ARTICULATION TYPE ROBOT - A horizontal multijoint type robot is so constructed that it comprises a first arm connected through a first joint shaft to a base, a second arm connected through a second joint shaft to the first arm, and a working shaft provided rotatably and movably up and down on the distal end of the second arm, and that the arm length L | 07-17-2014 |
| 20140286741 | SUBSTRATE PROCESSING SYSTEMS AND ROBOT APPARATUS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING - Robot apparatus, substrate transport systems, and methods are described. The robot apparatus and systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating robot assemblies to put or pick the substrates at the destination. Numerous other aspects are provided. | 09-25-2014 |
| 20140294551 | SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM - A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration. | 10-02-2014 |
| 20140321957 | WAFER TRANSPORT ROBOT - An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. | 10-30-2014 |
| 20150016935 | SUBSTRATE RETAINING DEVICE - Included are: a support mechanism configured to change a pitch at which a plurality of substrate retaining units are arranged; urging mechanisms provided for the respective substrate retaining units and configured to urge the movable units to cause movable retaining members to press-hold substrates; and a push back mechanism configured to release the press-holding of the substrates by the movable retaining members. It is configured to position a push back portion of the push back mechanism at a standby position, at which the push back portion makes no contact with the movable units. | 01-15-2015 |
| 20150044008 | Robot Blade Design - The present disclosure relates to a wafer transfer robot having a robot blade that can be used to handle substrates that are patterned on both sides without causing warpage of the substrates. In some embodiments, the wafer transfer robot has a robot blade coupled to a transfer arm that varies a position of the robot blade. The robot blade has a wafer reception area that receives a substrate. Two or more spatially distinct contact points are located at positions along a perimeter of the wafer reception area that provide support to opposing edges of the substrate. The two or more contact points are separated by a cavity in the robot blade. The cavity mitigates contact between a backside of the substrate and the robot blade, while providing support to opposing sides of the substrate to prevent warpage of the substrate. | 02-12-2015 |
| 20150314459 | Two-Link Arm Trajectory - Providing a first movement including rotating a first arm about a rotational axis of a robot drive; rotating a second arm on the first arm, where the first and second arms form a robot arm, where the first and second arms are the only arms of the robot arm, where the robot arm has an end effector rotationally fixed to the second arm, and where the end effector is configured to support a substrate thereon for transporting the substrate by the robot arm; and controlling the rotating to provide a path of the end effector such that the end effector does not contact the substrate during the rotating. Providing a second movement including rotating the arms to provide an at least partially straight linear path of a center of the substrate relative to the rotational axis of the drive robot when the substrate is on the end effector. | 11-05-2015 |
| 20150316098 | BEARING MECHANISM AND TRANSFER DEVICE - A bearing mechanism includes: a bearing that includes an inner and outer races, the outer race facing the inner race and a rolling element being interposed between the inner and outer races; a magnet that includes a first and second magnetic poles and extends between the first and second magnetic poles along an axial direction of the bearing, the first magnetic pole being in contact with an end surface of the outer race and the second magnetic pole opposing the first magnetic pole; a yoke that forms a magnetic circuit together with the bearing and the magnet, the yoke extending between the second magnetic pole and an end surface of the inner race so that the yoke is in contact with the second magnetic pole and faces the end surface of the inner race with a gap interposed therebetween; and a magnetic fluid held by the magnetic circuit. | 11-05-2015 |
| 20150321347 | LINK-TYPE TRANSFER ROBOT - The present invention provides a transfer robot which has a simple structure and a small occupied area in an operation. | 11-12-2015 |
| 20150352714 | Robot Having Arm with Unequal Link Lengths - A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted. | 12-10-2015 |
| 20150352729 | Robot Having Arm With Unequal Link Lengths - A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted. | 12-10-2015 |
| 20160020126 | DUAL SCARA ARM - A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm. | 01-21-2016 |
| 20160027676 | ROBOT FOR A SUBSTRATE PROCESSING SYSTEM - A robot for a substrate processing system includes a first arm and a second arm each including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion. The first arm and the second arm are each configured to actuate between a fully retracted position and a plurality of extended positions. The end effector of the first arm is configured to support a first substrate and the end effector of the second arm is configured to support a second substrate. When the first arm and the second arm are in the respective fully retracted positions, the first substrate is spaced apart from and does not overlap the second substrate. | 01-28-2016 |
| 20160039089 | Redundantable robot assembly for workpiece transfer - A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility. | 02-11-2016 |
| 20160064263 | Low Variability Robot - An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber. | 03-03-2016 |
| 20160075012 | MULTI-COMPONENT ROBOTIC HUB MOUNTING PLATE TO FACILITATE HUB REMOVAL - A robot is provided which includes a hub plate ( | 03-17-2016 |
| 20160082599 | SUBSTRATE CONVEYANCE APPARATUS - Disclosed is a substrate conveyance apparatus that collectively conveys a plurality of substrates. The apparatus includes: a plurality of substrate placement racks disposed at intervals in a height direction and configured to simultaneously place the substrates thereon; a substrate placement rack holder configured to integrally hold the plurality of substrate placement racks; and a moving mechanism connected to the substrate placement rack holder and configured to integrally move the plurality of substrate placement racks. The moving mechanism includes: a first arm unit having a first support supported from an outside, and connected to one end of the substrate placement rack holder in a longitudinal direction; a second arm unit having a second support supported from the outside, and connected to another end of the substrate placement rack holder in the longitudinal direction; and a connecting portion which connects the first arm unit to the second arm unit. | 03-24-2016 |
| 20160089776 | Compact Parallel Kinematics Robot - An industrial robot includes first and second kinematic chains configured to transmit the movements of corresponding first and second actuators to respective movements of an end effector. The first kinematic chain includes a first rod which is stiff. The second kinematic chain includes elements between the second actuator and the first rod such that the actuation of the second actuator causes bending forces on the first rod. The first and second kinematic chains thereby have the first rod as a common element, which improves compactness and accessibility of the robot. This improvement assumes that the robot is provided with one or more stiff rods that can bear the bending forces resulting from the actuation of the corresponding actuators. | 03-31-2016 |
| 20180021961 | CONVEYING ROBOT | 01-25-2018 |
| 20190148199 | Robot Having Predetermined Orientation | 05-16-2019 |
