Class / Patent application number | Description | Number of patent applications / Date published |
414226050 | Transporting means is a horizontally rotated arm | 27 |
20080260503 | Transfer apparatus - A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism supported by the swivel or the guide member, a hand supported by the linear movement mechanism and moved by the linear movement mechanism for carrying a work along a straight and horizontal travel stroke, a drive source disposed inside the stationary base, and a transmission shaft disposed along the vertical axis to transmit drive power from the drive source to the linear movement mechanism. The swivel includes an upper section and a lower section detachably connected with each other. The upper section has a connecting member supported by the upper section to be rotatable about the vertical axis. The connecting member has a detachable engagement member for engagement with the transmission shaft from the above. | 10-23-2008 |
20090245984 | HIGH THROUGHPUT CLEANER CHAMBER - A wafer cleaning chamber comprising a plurality of carrier arms each having concentrically-mounted midpoints between opposing ends of the carrier arms with a wafer carrier mounted on each of the opposing ends of the carrier arms. A hub includes a plurality of concentrically mounted drives where each of the plurality of drives is coupled near the midpoint of a respective one of the plurality of carrier arms. Each of the plurality of drives is configured to be controlled independently of the remaining plurality of concentrically-mounted drives. A respective motor is coupled to each of the concentrically mounted drives and is configured to move the coupled carrier arm in a rotary manner under control of a program containing a velocity profile. At least one cleaning chemical-supply head is positioned proximate to a path of the wafer carriers. | 10-01-2009 |
20100284770 | INDUSTRIAL ROBOT - An industrial robot may include a first hand and a second hand on which an object is mounted, a first arm which turnably holds the first hand on a first end side, a second arm which turnably holds the second hand on a first end side, a common arm which turnably holds a second end side of the first arm and a second end side of the second arm, a first turning center part which is a turning center of the first arm with respect to the common arm, a second turning center part which is a turning center of the second arm with respect to the common arm, and a main body part which turnably holds the common arm. The first hand and the second hand may be disposed so as to superpose each other, and the first hand and the second hand may be formed with an escape part. | 11-11-2010 |
20110064546 | Storage Device Testing System Cooling - A storage device transporter includes a transporter body having first and second body portions. The first body portion is configured to be engaged by automated machinery for manipulation of the storage device transporter. The second body portion is configured to receive and support a storage device. The first body portion is configured to receive and direct an air flow over one or more surfaces of a storage device supported in the second body portion. | 03-17-2011 |
20110200415 | SUBSTRATE LOAD AND UNLOAD MECHANISMS FOR HIGH THROUGHPUT - In various exemplary embodiments described herein, a system includes a plurality of carrier arms each having concentrically mounted midpoints between opposing ends of the carrier arms with a wafer carrier mounted on each of the opposing ends of the carrier arms. A hub includes a plurality of concentrically mounted drives where each of the plurality of drives is coupled near the midpoint of a respective one of the plurality of carrier arms. Each of the plurality of drives is configured to be controlled independently of the remaining plurality of concentrically mounted drives. A respective motor is coupled to each of the concentrically mounted drives and is configured to move the coupled carrier arm in a rotary manner. A linear wafer transport mechanism moves wafers to or from select ones of the wafer carriers on the plurality of carrier arms to an easy handoff location for a load/unload robot. | 08-18-2011 |
20120141237 | SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL - A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate. | 06-07-2012 |
20120201633 | WORKPIECE TRANSFER SYSTEM AND FRAME STRUCTURE FOR TRANSFER CHAMBER - A workpiece transfer system includes a transfer chamber in which a workpiece transfer apparatus is installed, and a load port provided adjacent to the transfer chamber. The transfer chamber includes a frame structure made of steel. The frame structure includes a first frame member and a second frame member. The first frame member is set on the floor, and the workpiece transfer apparatus is installed thereon. The second frame member is arranged in a standing posture with respect to the first frame member and which supports the load port. | 08-09-2012 |
20120201634 | TRANSFER DEVICE AND SEMICONDUCTOR PROCESSING SYSTEM - A transfer device | 08-09-2012 |
20120282066 | ROBOT - A manipulator for transporting work pieces, especially between two subsequent molding presses of a press working line, including a moving mechanism allowing three dimensional movements on the path between the molding presses, a supplemental arm attached to the moving mechanism and connected to this moving mechanism via a support member that allows a swiveling movement of the supplemental arm around a vertical axis of the support member as well as a translation movement of the supplemental arm with respect to the support member, and a tool support provided at the outer end of a supplemental arm, the tool support being rotatable around a horizontal first axis and around a second axis perpendicular to the first axis, the tool support including a tool reception that is rotatable around a third axis perpendicular with respect to the second axis. | 11-08-2012 |
20130039726 | ROBOT SYSTEMS, APPARATUS, AND METHODS ADAPTED TO TRANSPORT SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING - Substrate transport systems, apparatus, and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then independently actuating an upper arm link housing and one or more wrist members to put or pick one or more substrates at the destination wherein the wrist member is independently actuated relative to the forearm link housing and the motion of the forearm link member is kinematically linked to the motion of the upper arm link housing. Numerous other aspects are provided. | 02-14-2013 |
20130078061 | SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM - A substrate treatment system comprise a treatment station having a plurality of treatment units provided at multiple tiers in an up-down direction, a cassette mounting table on which a cassette housing a plurality of wafers W is mounted, and a wafer transfer mechanism arranged between the treatment station and the cassette mounting table, wherein a delivery block in which a plurality of delivery units are provided at multiple tiers is provided between the treatment station and the wafer transfer mechanism, the delivery units temporarily housing a wafer to be transferred between the cassette mounting table and the treatment station and a wafer to be transferred between the tiers of the treatment units. The wafer transfer mechanism includes a first transfer arm that transfers a wafer between the cassette mounting table and the delivery block, and a second transfer arm that transfers a wafer between the tiers of the delivery units. | 03-28-2013 |
20130209201 | CARRIER DEVICE - A carrier device according to embodiments includes a carrier chamber that is provided with a plurality of connecting holes that are communicated with the outside, an articulated robot that is placed inside the carrier chamber, and a linear moving mechanism that makes at least the arm part of the articulated robot linearly move in a short side direction of the carrier chamber. The bottom end of the arm part of the articulated robot is provided on a base via an arm spindle to be rotatable horizontally and its leading end is provided with a hand that is rotatable horizontally and holds a board to be taken in and out via the connecting holes. | 08-15-2013 |
20140133942 | SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE PROCESSING SYSTEM - A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus comprising an opening. The substrate transfer robot includes a hand and an arm. The hand is configured to support a substrate. The arm is configured to move the hand. The arm and the hand supporting the substrate are configured to rotate on a horizontal surface within a minimal rotation area of the substrate transfer robot such that an outer periphery of the minimal rotation area overlaps an inside of the second apparatus through the opening so as to transfer the substrate from a first position in the first apparatus to a second position in the second apparatus through the opening. | 05-15-2014 |
20140241836 | SUBSTRATE TRANSPORTING APPARATUS, SUBSTRATE DELIVERY POSITION CONFIRMING METHOD, AND SUBSTRATE PROCESSING SYSTEM - A loader module of a substrate processing system includes a transportation arm configured to move towards a wafer accommodated in a carrier and receive the wafer, and a control unit configured to confirm a delivery position of the wafer based on an upward movement amount of an end effector of the transportation arm, and a contact sound generated when the end effector comes in contact with the wafer. The control unit confirms the delivery position of the wafer based on an average height of the end effector when the contact sound of each pad of the end effector comes in contact with the wafer to generate a contact sound a plurality of times. | 08-28-2014 |
20140271061 | MANUFACTURING SYSTEM, ROBOT CELL APPARATUS, AND METHOD OF MANUFACTURING PRODUCT - A manufacturing system includes a first robot cell apparatus including a first manufacturing robot and a first rack to which the first manufacturing robot is fixed, a second robot cell apparatus including a second manufacturing robot and a second rack to which the second manufacturing robot is fixed, the second robot cell apparatus being disposed adjacent to the first robot cell apparatus, and a transport path setter that sets a transport path of a transport robot that performs at least one of receiving a workpiece from the first robot cell apparatus and supplying a workpiece component to the first robot cell apparatus. A space through which the transport robot is movable is provided under each of the first and second racks, and the transport path setter sets the transport path of the transport robot so that the transport path passes through at least one of the spaces. | 09-18-2014 |
20140286736 | SYSTEMS, APPARATUS AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING - An electronic device processing system is disclosed. The system includes a transfer chamber including facets and a plurality of single-entry process chambers coupled to the facets, wherein at least some process chambers are non-focalized process chambers, at least one load lock chamber, and a robot apparatus operable to transport substrates between the process chambers and the load lock chamber(s). Robot apparatus includes an upper arm, a forearm, and a wrist member adapted for independent rotation relative to the forearm about a wrist axis, and an end effector adapted to carry a substrate. Various degrees of yaw may be imparted to the wrist member in order to service the non-focalized process chambers. Systems and methods are also provided as are other aspects. | 09-25-2014 |
20140341682 | SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME - Provided is a substrate processing module. The substrate processing module includes a lower chamber having an opened upper portion, the lower chamber having a passage, through which a substrate is accessible, in a side thereof, a plurality of susceptors on which the substrate is placed on each of top surfaces thereof, the plurality of susceptors being disposed within the lower chamber and fixedly disposed around a preset center of the lower chamber, a rotation member disposed on the preset center of the lower chamber, the rotation member being rotatable with respect to the preset center, a plurality of holders connected to the rotation member and rotated together with the rotation member, the plurality of holders having at least one seat surface on which the substrate is placed, and a driving module connected to the rotation member, the driving module moving one of the holders to a transfer position corresponding to the passage by driving the rotation member. | 11-20-2014 |
20150063956 | LABORATORY CONTAINER TRANSFER DEVICE - A laboratory vial transfer device for automatically transferring laboratory vials from a transport package containing a plurality of said vials, comprising: a vial feeder configured to connect to the transport package after the package has been opened, so as to feed vials directly from the package without manual contact, wherein the vial feeder comprises a rotatable carousel having a plurality of vial receiving positions located on the carousel each for receiving a single vial and adapted to collect the vials from the opened package into respective vial receiving positions upon operation of the carousel, wherein the carousel is operable to feed the vials from their respective vial receiving positions to an exit position | 03-05-2015 |
20150063957 | SEGMENTED SUBSTRATE LOADING FOR MULTIPLE SUBSTRATE PROCESSING - Embodiments of the present disclosure provide apparatus and methods for loading and unloading a multiple-substrate processing chamber segment by segment. One embodiment of the present disclosure provides an apparatus for processing multiple substrates. The apparatus includes a substrate supporting tray having a plurality of substrate pockets forming a plurality of segments, and a substrate handling assembly configured to pick up and drop off substrates from and to a segment of substrate pockets of the substrate supporting tray. | 03-05-2015 |
20150071742 | UNIT CONTROL PANEL, SUBSTRATE TRANSFER TEST METHOD, AND SUBSTRATE PROCESSING APPARATUS - It is an object of the embodiment of the invention to enhance the work efficiency of a substrate transfer test between a plurality of units. A test control section (CPU) which is provided in a loading/unloading unit | 03-12-2015 |
20150098773 | SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL - A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate. | 04-09-2015 |
20150117989 | BILATERAL DOOR-TYPE AUTOMATIC MATERIAL-TAKING DEVICE - A bilateral door-type automatic material-taking device includes a feed table located between two machine tools and a material-taking mechanism having a lifting unit, a linear displacement unit and a robotic arm. The lifting unit has a fixed member, a sliding member and a positioning member. The fixed member is fixed to the feed table. The sliding member is configured to move vertically with respect to the fixed member. The positioning member is deposited between the fixed member and the sliding member position the sliding member with respect to the fixed member. The linear displacement unit is attached to the sliding member, for moving the robotic arm along X, Y and Z axes to take and place workpieces between the feed table and the machine tools. Thereby, the automatic material-taking device helps to reduce costs for equipment deployment, and is suitable for standardized and mass production, thereby providing economic benefits. | 04-30-2015 |
20150117990 | FRONT DOOR-TYPE AUTOMATIC MATERIAL-TAKING DEVICE - A front door-type automatic material-taking device includes a feed table, a material-taking mechanism and a sliding mechanism. The feed table is positioned in front of a machine tool and serves to hold workpieces. The material-taking mechanism includes a linear displacement unit and a robotic arm. The linear displacement unit is fixed to the feed table, and drives the robotic arm to move along a first axis, a second axis, and a third axis and to rotate against the first axis up to a specific angle. The material-taking mechanism is slidably attached to the sliding mechanism for sliding away from the front of the machine tool. The disclosed feed table has good stability, thereby enabling the material-taking mechanism to take and place workpieces with enhanced precision, and the sliding mechanism allows the feed table to perform prompt movement, thereby improving working efficiency. | 04-30-2015 |
20150117991 | DOOR-TYPE AUTOMATIC MATERIAL-TAKING DEVICE - A door-type automatic material-taking device includes a feed table for holding workpieces and a material-taking mechanism having a lifting unit, a linear displacement unit and a robotic arm. The lifting unit has a fixed member, a sliding member and a positioning member. The fixed member is fixed to the feed table. The sliding member moves vertically with respect to the fixed member. The positioning member is deposited between the fixed member and the sliding member, for positioning the sliding member with respect to the fixed member. The linear displacement unit is attached to the sliding member, for moving the robotic arm along X, V and Z axes to take and place workpieces. The automatic material-taking device is adaptive to machine tools of various specifications, making it suitable for standardized and mass production, and helpful to reduce costs for development and installation, thereby providing economic benefits. | 04-30-2015 |
20150332946 | SUBSTRATE TRANSFER SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSFER ROBOT - A substrate transfer robot is disposed in a robot installment area defined between a first apparatus and a second apparatus including an opening. The first apparatus includes a first wall, the second apparatus including a second wall. The first apparatus accommodates the substrate at each of a lowest height position and a highest height position. The substrate transfer robot includes a base stationary, a hand configured, and an arm. The arm is rotatably mounted to the base to move the hand. The hand and the arm move in a height direction between a movable range defined between a lowest position and a highest position. The arm rotates with partially entering the opening when the substrate transfer robot takes out the substrate from the first apparatus. The substrate is accommodated at each of the lowest height position and the highest height position. | 11-19-2015 |
20160148830 | SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE PROCESSING SYSTEM - A substrate transfer system includes a substrate transfer robot. The substrate transfer robot is provided between a first apparatus and a second apparatus which has a wall provided opposite to the substrate transfer robot and having an opening on the wall. The substrate transfer robot is configured to transfer a substrate from the first apparatus to the second apparatus via the opening and includes a base having a first axis, an arm body, and a hand. The arm body has a proximal end and a distal end and is connected to the base at the proximal end to rotate around the first axis. The substrate transfer robot includes a minimum distance from the first axis to an outermost portion of the arm body and the hand in a radius direction from the first axis being larger than a distance between the first axis and the opening on the wall. | 05-26-2016 |
20160163572 | METHOD AND SYSTEM RELATED TO SEMICONDUCTOR PROCESSING EQUIPMENT - A system including a first linear bearing, a second linear bearing, a first shuttle, and a second shuttle. The first linear bearing is mounted in and disposed along a linear path of a transfer chamber. The second linear bearing is mounted on a same side of the transfer chamber as the first linear bearing and disposed along the linear path. The first shuttle rides on the first linear bearing and carries a first wafer. The second shuttle rides on the second linear bearing and carries a second wafer. The second shuttle moves independent of the first shuttle. During movement of the first shuttle and the second shuttle and during a first period of time, a first portion of the second shuttle is above the first shuttle such that the first portion of the second shuttle is vertically overlapping the first shuttle. During movement of the first shuttle and the second shuttle and during a second period of time, the first portion of the second shuttle is not above the first shuttle such that the first portion of the second shuttle is not vertically overlapping the first shuttle. | 06-09-2016 |