| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 374002000 | By thermal radiation emitting device (e.g., blackbody cavity) | 22 |
| 20080317088 | Fixed-Point Cell, Fixed-Point Temperature Realizing Apparatus, and Method of Thermometer Calibration - A fixed-point cell is provided which can provide a fixed-point in a wide temperature range by changing the fixed-point material. During the use of the fixed-point cell, the fixed-point material can be prevented from being contaminated, and the crucible of the cell can be prevented from being cracked. The fixed-point cell includes: the crucible composed of carbon; the fixed-point material enclosed in the crucible and composed of one of a metal, a eutectic of a metal and carbon, and a eutectic of a metal carbide and carbon; and a woven fabric of graphite fibers containing 10 ppm or lower of impurities and interposed between the crucible and the fixed-point material. | 12-25-2008 |
| 20090122826 | Infrared Target Temperature Correction System and Method - Infrared IR thermometer calibration systems and methods are disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system. | 05-14-2009 |
| 20090122827 | Calibration Substrate and Method of Calibration Therefor - A system and method is disclosed that reliably determines the transmissivity of a substrate. By determining the transmissivity of a calibration substrate, for instance, a temperature measuring device can be calibrated. The method and system are particularly well suited for use in thermal processing chambers that process semiconductor wafers used for forming integrated circuit chips. | 05-14-2009 |
| 20090213895 | Sensor device with improved sensitivity to temperature variation in a semiconductor substrate - A sensor device formed on a semiconductor substrate. The device comprises a thermal radiation sensor including a sensing cell and a referencing cell which are co-operable for providing a first output signal indicative of the temperature fluctuation resulting from incident radiation. A gradient sensor including a pair of cells spatially located on the semiconductor substrate is provided which are co-operable to provide a second output signal indicative of the temperature gradient across the semiconductor substrate for facilitating calibrating the first output signal. At least one of the cells of the gradient sensor is not common to the cells of the thermal radiation sensor. | 08-27-2009 |
| 20090245320 | Methods for Determining Wafer Temperature - Methods and apparatus for wafer temperature measurement and calibration of temperature measurement devices may be based on determining the absorption of a layer in a semiconductor wafer. The absorption may be determined by directing light towards the wafer and measuring light reflected from the wafer from below the surface upon which the incident light impinges. Calibration wafers and measurement systems may be arranged and configured so that light reflected at predetermined angles to the wafer surface is measured and other light is not. Measurements may also be based on evaluating the degree of contrast in an image of a pattern in or on the wafer. Other measurements may utilize a determination of an optical path length within the wafer alongside a temperature determination based on reflected or transmitted light. | 10-01-2009 |
| 20100061419 | Automated Self Calibration in Optical Detectors - A method and apparatus for automated field calibration of temperature sensors uses a series of readings including a reading of a known source, such as an LED, for use in calculating a factor that is compared to a reference for adjusting the sensor output signal. Calibration readings are taken more frequently after start up to compensate for sensor drift during storage, as opposed to less frequent readings during operation to compensate for slower sensor drift while operational. | 03-11-2010 |
| 20100103976 | INFRARED TARGET TEMPERATURE CORRECTION SYSTEM AND METHOD - Infrared IR thermometer calibration systems and methods are disclosed in which the temperature of an IR thermometer calibration system is controlled such that radiation emitted by a target at a given input temperature is equal to the radiation emitted by a graybody heated to the input temperature and having an emissivity equal to an emissivity setting of an IR thermometer to be calibrated using the IR thermometer calibration system. | 04-29-2010 |
| 20100232470 | SYSTEM AND PROCESS FOR CALIBRATING PYROMETERS IN THERMAL PROCESSING CHAMBERS - A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system. | 09-16-2010 |
| 20100246631 | BLACKBODY FITTING FOR TEMPERATURE DETERMINATION - A temperature monitoring technique for collecting radiation intensity (blackbody emission) across a broad wavelength range. A solid state spectrometer ( | 09-30-2010 |
| 20100260229 | Apparatus for Testing Infrared Sensors - An apparatus for use with automatic testing equipment for testing infrared sensors on integrated circuits is provided. The apparatus includes an infrared source, a heat mass, and an electronic frequency modulator. The infrared source is modulated according to a predetermined test frequency such that the infrared source emits an infrared test signal representative of a test temperature and corresponding to the temperature of the heat mass and the predetermined test frequency. A signal processor, electrically coupled to an integrated circuit having an infrared sensor, receives a sensed signal from the infrared sensor in response to the infrared test signal and uses the sensed signal according to the predetermined test frequency to determine a measured temperature. | 10-14-2010 |
| 20100290500 | METHOD FOR CALIBRATING A PYROMETER, METHOD FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER AND SYSTEM FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER - The present invention relates to a method for calibrating a pyrometer, a method for determining the temperature of a semiconducting wafer and a system for determining the temperature of a semiconducting wafer. | 11-18-2010 |
| 20120170609 | METHODS AND SYSTEMS FOR IN-SITU PYROMETER CALIBRATION - A method of in-situ pyrometer calibration for a wafer treatment reactor such as a chemical vapor deposition reactor desirably includes the steps of positioning a calibrating pyrometer at a first calibrating position and heating the reactor until the reactor reaches a pyrometer calibration temperature. The method desirably further includes rotating the support element about the rotational axis, and while the support element is rotating about the rotational axis, obtaining first operating temperature measurements from a first operating pyrometer installed at a first operating position, and obtaining first calibrating temperature measurements from the calibration pyrometer. Both the calibrating pyrometer and the first operating pyrometer desirably are adapted to receive radiation from a first portion of a wafer support element at a first radial distance from a rotational axis of the wafer support element. | 07-05-2012 |
| 20130094535 | DEVICE FOR TESTING A SENSOR OF TRAIN UNDERCARRIAGE TEMPERATURES - A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor. | 04-18-2013 |
| 20130148688 | QUANTUM THEORY CORRECTION METHOD AND SYSTEM FOR IMPROVING ACCURACY OF TEMPERATURE MEASUREMENT OF RADIATION THERMOMETER - The present invention provides a quantum theory correction method for improving the accuracy of temperature measurement of radiation thermometer and a radiation thermometer system. The invention is related to the radiation thermometer in the field of instrumentation. The present invention acquires parameters reflecting energy level structure by adopting effective physical model to process data and using keyboard input or data transmission. The temperature of the object to be measured is finally acquired and displayed on the displayer. The quantum theory correction method and radiation thermometer system effectively overcome the difficulty that the value of radiance ε(λ·T) cannot be accurately measured in the event that radiance correction method is used to improve the accuracy of radiation thermometer. Thus, the accuracy of thermometer is improved significantly. | 06-13-2013 |
| 20130223472 | INFRARED TEMPERATURE SENSOR CALIBRATION SYSTEM AND METHOD - Systems and methods that facilitate calibrated temperature measurements are discussed. Such a system can include a target object that changes temperature, a test infrared (IR) temperature sensor that can make a first set of measurements of the temperature of the target object over a period of time, and a standard IR temperature sensor that can make a second set of measurements of the temperature of the target object over the period of time. Additionally, the system can include a calibration unit that compares the first set of measurements with the second set of measurements and determines an accuracy of the test IR temperature sensor based on the comparison. | 08-29-2013 |
| 20130294476 | FLAT LIGHT EMITTING PLATE FOR SIMULATING THERMAL RADIATION, METHOD FOR CALIBRATING A PYROMETER AND METHOD FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER - A flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer. The invention provides a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit. According to the invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources. | 11-07-2013 |
| 20140219308 | DEVICES AND METHODS FOR DETERMINING VACUUM PRESSURE LEVELS - A device is disclosed including a substrate; an infrared detector coupled to and thermally isolated from the substrate; and a heat shield coupled to the substrate by a plurality of contacts, the heat shield disposed above the infrared detector to block external thermal radiation from being received by the infrared detector. The heat shield is configured to receive a current through the contacts to heat the heat shield to a first temperature, and the infrared detector is configured to detect the first temperature and provide an output signal that is related to a vacuum pressure within the device. Methods for using and forming the device are also disclosed. | 08-07-2014 |
| 20140219309 | APPARATUS FOR CALIBRATING PYROMETER - Disclosed is a calibrating apparatus which is adapted to remove a measurement deviation of a pyrometer, and more particularly, to an apparatus for calibrating a pyrometer, which calibrates a reference value so as to remove a deviation in a temperature measured in a pyrometer. The apparatus for calibrating a pyrometer includes a blackbody including a radiant space from which radiant energy is radiated, a body housing configured to receive the blackbody therein and including a light output wall having a light output port connected with the radiant space, a light output wall protecting cover configured to be coupled with the light output wall of the body housing so as to define a passage connecting the light output wall of the body housing and an outside environment, and a fixing member configured to fix the light output wall protecting cover to the light output wall of the body housing. | 08-07-2014 |
| 20140219310 | APPARATUS FOR CALIBRATING PYROMETER - Disclosed is a calibrating apparatus which is adapted to remove a measurement deviation of a pyrometer, and more particularly, to an apparatus for calibrating a pyrometer, which calibrates a reference value so as to remove a deviation in a temperature measured in a pyrometer. The apparatus for calibrating a pyrometer includes a blackbody including a radiant space from which radiant energy is radiated, a body housing configured to receive the blackbody therein and including a light output wall having a light output port connected with the radiant space, a light output wall protecting cover comprising a transparent blocking plate disposed at a position opposite to the light output port so as to transmit a long wavelength of approximately 5 μm to approximately 20 μm may and configured to be coupled with the light output wall of the body housing, and a fixing member configured to fix the light output wall protecting cover to the light output wall of the body housing. | 08-07-2014 |
| 20140269814 | INTEGRITY VERIFICATION OF IR DETECTORS FOR A RAIL VEHICLE - An apparatus for integrity verification of an IR detector that is configured to detect a temperature of an IR emission from an undercarriage component is described. The apparatus includes an IR emitter which emits an IR signal at a reference temperature and the IR signal is directed at the IR detector. A controller is connected to the IR detector and the IR emitter. The controller is configured to compare the reference temperature of the IR signal and the detected temperature of the IR signal to determine the integrity of the IR detector. | 09-18-2014 |
| 20140314118 | BLACKBODY FUNCTION - A blackbody radiometric reference comprising a source plate or a target plate, metallic nanoparticles or other high emissivity coating disposed on the plate, and an intermediate coating such as paint. The plate may comprise copper, aluminum or composites thereof. Apparatus capable of functioning as a radiometric or thermometric reference. A pre-heater or weakly-coupled area may be disposed around or adjacent a highly thermally uniform area. A groove or perforations extending into a front surface of the source plate defining a weakly-coupled edge portion surrounding a thermally-controlled, optically-active area, and connected by bridges or structures thereto. An external probe may be located near the source plate for measuring ambient temperature, for compensating for ambient temperature or for radiative load on the blackbody. | 10-23-2014 |
| 20150131696 | Device for Testing a Sensor of Train Undercarriage Temperatures - A test apparatus for testing an IR sensor of train undercarriage temperatures is disclosed. The IR sensor may be used to obtain infrared IR emission data by sensing a wheel or a wheel bearing of a rail vehicle. The test apparatus may comprise a heat emitter for supplying IR emissions at a reference temperature to the IR sensor. A support may support the heat emitter at a position spaced from the passage of the rail vehicle and in an orientation for directing the IR emissions at the IR sensor. | 05-14-2015 |
