| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 372061000 | Discharge tube feature | 21 |
| 20080198891 | Excimer laser device operable at high repetition rate and having high band-narrowing efficiency - A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125. | 08-21-2008 |
| 20090034574 | SLAB LASER WITH STAND-OFF FOR CERAMIC SPACERS - An RF excited gas discharge laser is disclosed including a housing holding the lasing gas. An electrode assembly is mounted within the housing. The electrode assembly includes a pair of elongated planar electrodes mounted in face to face relationship with a narrow gap therebetween. A pair of planar dielectric plates are positioned along the side edges of the gap to seal the discharge region. The plates extend part of the way into the gap from both sides edges of the electrodes. The inner surfaces of the electrodes are provided with an opposed trench in the region surrounding the inner edges of the plates. In this way, the exposure of the inner edges of the plates to the discharge is minimized improving performance. | 02-05-2009 |
| 20100086000 | Laser Discharge Tube Assembly for a Gas Laser and Production Method for the Same - A laser discharge tube assembly for a HF-excited gas laser includes at least two electrodes that are disposed outside of the laser discharge tube, the electrodes are disposed at a separation from the laser discharge tube and are completely embedded in at least one insulating dielectric material. | 04-08-2010 |
| 20110158281 | GAS DISCHARGE CHAMBER - A gas discharge chamber that uses a calcium fluoride crystal which reduces a breakage due to mechanical stress (window holder and laser gas pressure), thermal stress from light absorption, and the like, increases the degree of linear polarization of output laser, and suppresses degradation due to strong ultraviolet (ArF, in particular) laser light irradiation. A first window ( | 06-30-2011 |
| 20120195342 | Configuration for Multiwavelength Emission with a CO2 Laser - Multiple independent electrode sets of a CO | 08-02-2012 |
| 20120230362 | LASER TUBE WITH DISTRIBUTED TAPS FOR A GAS DISCHARGE RF-EXCITED LASER - A laser device is provided. The laser device includes a laser tube, and power devices distributed uniformly along the length of the laser tube. | 09-13-2012 |
| 20130322483 | GAS DISCHARGE CHAMBER - A gas discharge chamber that uses a calcium fluoride crystal which reduces a breakage due to mechanical stress (window holder and laser gas pressure), thermal stress from light absorption, and the like, increases the degree of linear polarization of output laser, and suppresses degradation due to strong ultraviolet (ArF, in particular) laser light irradiation. A first window ( | 12-05-2013 |
| 20140064317 | GAS LASER OSCILLATOR WITH DISCHARGE START JUDGMENT FUNCTION - A gas laser oscillator, including a power supply part supplying a discharge tube voltage corresponding to a power output command to a discharge tube so as to start a discharge in the discharge tube; a voltage detecting part detecting the discharge tube voltage; a current detecting part detecting an output current of the power supply part; a command voltage control part gradually increasing a power output command value output from the output command part; and a discharge start judgment part judging if the discharge in the discharge tube has started, based on a detected value of the voltage detecting part when gradually increasing the power output command value. The command voltage control part, if the output current becomes a predetermined threshold value or more when gradually increasing the power output command value, decreases the power output command value once, then again gradually increases the power output command value. | 03-06-2014 |
| 20140341248 | AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM - An amplifier may include a plurality of discharge tubes arranged in a designed path of a seed laser beam and an optical system arranged to steer the seed laser beam to travel along the designed path. | 11-20-2014 |
| 20160099534 | GAS LASER DEVICE HAVING FUNCTION FOR DISCRIMINATING TYPE OF ALARM - A gas laser device having a function for properly controlling the gas pressure of a laser oscillator after an alarm is generated. A controller of the laser device has an alarm monitoring part which monitors as to whether an alarm is generated in the oscillator, by which discharge in the oscillator should be stopped; an alarm judging part which discriminates a type of the alarm generated in the oscillator; a gas pressure controlling part which controls a pressure of laser gas within a discharge tube of the oscillator; and a power supply controlling part which controls a power supply of the oscillator. The gas pressure controlling part controls the pressure of the laser gas within the discharge tube to an appropriate value, after the alarm is generated, based on one of a plurality of control patterns predetermined corresponding to the respective types of the alarm. | 04-07-2016 |
| 20160118761 | LASER OSCILLATOR FOR IMPROVING BEAM QUALITY - An output coupler and a rear mirror of a laser oscillator are made of materials having first reflectance and second reflectance with respect to laser beam. A first coating material that has reflectance higher than the first reflectance is coated at an inner side of a first circle of a first surface of the output coupler, and no coating material is coated at an outer side of the first circle. A second coating material that has reflectance higher than the second reflectance and higher than that of the first coating material is coated at an inner side of a second circle of a first surface of the rear mirror, and no coating material is coated at an outer side of the second circle. | 04-28-2016 |
| 372062000 | Segmented | 1 |
| 20100142582 | GAS DISCHARGE LASER CHAMBER - One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch. | 06-10-2010 |
| 372064000 | Waveguide | 6 |
| 20100316084 | ARRANGEMENT FOR RF POWER DELIVERY TO A GAS DISCHARGE LASER WITH CASCADED TRANSMISSION LINE SECTIONS - RF power is transmitted to a CO | 12-16-2010 |
| 20110103422 | LASER-INDUCED OPTICAL WIRING APPARATUS - A laser-induced optical wiring apparatus includes a substrate, first and second light-reflecting members provided on the substrate separately from each other, an optical waveguide provided on the substrate for optically coupling the first and second light-reflecting members to form an optical resonator, a first optical gain member provided across the optical waveguide and forming a laser oscillator along with the first and second light-reflecting members, and a second optical gain member provided across the optical waveguide separately from the first optical gain member, and forming another laser oscillator along with the first and second light-reflecting members. | 05-05-2011 |
| 20120128022 | CERAMIC GAS LASER HAVING AN INTEGRATED BEAM SHAPING WAVEGUIDE - A laser may comprise a ceramic body defining a chamber therein containing a laser gas. The ceramic body may include a plurality of parallel walls that partially define a first section of the chamber, the first section of the chamber defining a waveguide. The ceramic body may further include a plurality of oblique walls that partially define a second section of the chamber, the second section of the chamber being shaped to modify a transverse profile of a laser beam traveling through the second section of the chamber. The laser may further comprise a plurality of electrodes positioned outside the ceramic body and adjacent to the plurality of parallel walls such that only laser gas within the first section of the chamber is excited when an excitation signal is applied to the plurality of electrodes. | 05-24-2012 |
| 20140023105 | Device for deflecting laser radiation, and laser device having such a device - A device for deflecting laser radiation ( | 01-23-2014 |
| 20140064318 | WAVEGUIDE CO2 LASER WITH MULTIPLY FOLDED RESONATOR - A gas-discharge waveguide CO | 03-06-2014 |
| 20150139262 | Photonic micro-structured vacuum-ultraviolet radiation source based on solid-state frequency conversion - A coherent extreme ultraviolet (XUV) radiation source is provided that includes a non-linear optical conversion material solid substrate disposed for nonlinear conversion of infrared (IR) coherent radiation into XUV coherent radiation, where the solid substrate includes an IR coherent radiation region, and an XUV coherent radiation waveguide region, where the IR coherent radiation region is optically coupled to the XUV coherent radiation waveguide region, where the XUV coherent radiation converted from the IR coherent radiation by the non-linear optical conversion material propagates in and outputs from the XUV coherent radiation waveguide region. | 05-21-2015 |
| 372065000 | Support | 3 |
| 20080205473 | High power low inductance RF hermetic sealed feed-through for slab CO2 lasers - A low inductance, hermetically sealed, RF shielded feed-through is provided for exciting low impedance discharges associated with high power CO | 08-28-2008 |
| 20080279247 | Electrically Excited Gas Discharge Laser for Generating High-Repetition Frequency Light Pulses and Method for the Production Thereof - A transversally electrically excited gas discharge laser for generating light pulses with a high pulse repetition rate. The gas discharge laser has components include a gas-tight discharge tube with opposed wall passages and front ends. The discharge tube includes ceramic material with laser gas sealed therein. The components also include partial metal layers disposed on the discharge tube. Decoupling and holding elements including support trays are disposed in the wall passages, with the support trays being adhered with solder to the discharge tube via the partial metal layers. The components also include a pair of electrodes extending axially and disposed in the decoupling and holding elements so as to form a gas discharge path. The components also include a pair of rod-shaped electrodes disposed in the discharge tube that are substantially parallel to the main electrodes and operable to control the starting conditions of gas discharge. The electrical excitation circuit includes a switch to generate a high-current discharge from an energy storage device. Support rings are joined to the front ends of the discharge tube and a pair of optical resonator mirrors are welded into the support rings. At least some of the components are usable with an ultrahigh vacuum and heatable to above a second water boundary. The support trays and the support rings are deformable so as to enable fine adjustment of the main electrodes and of the resonator mirrors. | 11-13-2008 |
| 20100014552 | GAS LASER OSCILLATOR - A gas laser oscillator including a plurality of discharge tube arrays, each including a plurality of electrical discharge tubes aligning in an axial direction thereof; a support mechanism supporting the discharge tube arrays with axes thereof extending in directions parallel to each other; and an optical part optically connecting the discharge tube arrays to each other with all of the electrical discharge tubes being arranged optically in series. The optical part includes an output mirror and a rear mirror, disposed at a pair of electrical discharge tubes located at opposite ends of an optically serial arrangement of the discharge tube arrays supported by the support mechanism; and a returning mirror disposed at an optical connection between the discharge tube arrays supported by the support mechanism. The support mechanism includes a discharge tube linking holder mutually linking and supporting the electrical discharge tubes of each discharge tube array in a state aligning in the axial direction; a pair of end plates disposed at axially opposite ends of each discharge tube array, and supporting the discharge tube arrays with the axes extending in directions parallel to each other; a support rod fixed at opposite ends thereof to and extending between the end plates; and an elastic member joining the discharge tube linking holder to the support rod. | 01-21-2010 |
