| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 359497000 | Using plural elements | 21 |
| 20080204877 | ILLUMINATION SYSTEM OR PROJECTION LENS OF A MICROLITHOGRAPHIC EXPOSURE SYSTEM - In some embodiments, the disclosure provides an optical system, in particular an illumination system or a projection lens of a microlithographic exposure system, having an optical system axis and at least one element group including three birefringent elements each of which includes optically uniaxial material and having an aspheric surface, wherein a first birefringent element of the group has a first orientation of its optical crystal axis, a second birefringent element of the group has a second orientation of its optical crystal axis, wherein the second orientation can be described as emerging from a rotation of the first orientation, the rotation not corresponding to a rotation around the optical system axis by an angle of 90° or an integer multiple thereof, and a third birefringent element of the group has a third orientation of its optical crystal axis, wherein the third orientation can be described as emerging from a rotation of the second orientation, the rotation not corresponding to a rotation around the optical system axis by an angle of 90° or an integer multiple thereof. | 08-28-2008 |
| 20080239490 | Wide-acceptance-angle circular polarizers - A circular polarizer comprising a single linear polarizer producing a linear state of polarization and at least one phase retardation film layered with the single linear polarizer. In a first embodiment, the at least one phase retardation film includes at least one uniaxial A-plate phase retardation film and at least one uniaxial C-plate phase retardation film. In a second embodiment of the invention, the circular polarizer includes a linear polarizer and at least one biaxial phase retardation film layered with the linear polarizer. In another example of the circular polarize of the second embodiment, at least one uniaxial A-plate phase retardation film and/or at least one uniaxial C-plate phase retardation film is also layer with the linear polarize and the biaxial phase retardation film. | 10-02-2008 |
| 20090034072 | METHOD AND APPARATUS FOR DECORRELATION OF SPATIALLY AND TEMPORALLY COHERENT LIGHT - A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating. | 02-05-2009 |
| 20090067049 | POLARIZATION CONTROL SYSTEM AND PROJECTOR - A phase compensation element is disposed between a reflective type display element and a polarizing beam splitter. Composed of a crystal structure retardation layer functioning as a quarter-wave plate and an inclined-axis retardation layer functioning as an O-plate, the phase compensation element is aligned substantially parallel to a reflective surface of the reflective type display element. The inclined-axis retardation layer is made of inorganic material obliquely deposited on the crystal structure retardation layer. The inclined-axis retardation layer has a principal refractive index axis inclined at between 0° and 45° to a surface normal of the crystal structure retardation layer, and has a thickness not to increase haze of the phase compensation element. | 03-12-2009 |
| 20090097117 | CURVED OPTICAL FILTERS - Curved polarization filters and methods of manufacturing such filters are described in the present disclosure. An exemplary method includes laminating a planar polarization layer to a planar retarder layer at a predetermined orientation and bending the laminate to create a curved filter. The strain on the retarder layer results in stress-induced birefringence, and the predetermined orientation of the retarder substantially compensates for the stress-induced birefringence. In some embodiments, the predetermination is based on mathematical models. In some other embodiment, the predetermination is based on experimental data. | 04-16-2009 |
| 20090128909 | Birefringent filter using reflective polarizers and dichroic elements - An optical filter uses two or more reflective polarizers together with retarders to form birefringent filters with controlled transmission. The energy reflected by these polarizers is absorbed by one or more dichroic elements, which can be adjacent to a reflective polarizer; or spaced apart from it by one or more retarder elements. These dichroic elements act as dampers, so the energy of rays undergoing multiple reflections is markedly reduced or virtually eliminated, and high image quality is maintained. This provides a filter arrangement with enhanced spectral range, image quality, or greater extinction, or lower cost, compared to filters using dichroic or prism-type polarizers. | 05-21-2009 |
| 20090153964 | METHODS FOR REDUCING POLARIZATION ABERRATION IN OPTICAL SYSTEMS - An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices. | 06-18-2009 |
| 20090251776 | MULTILAYER POLARIZING FIBERS AND POLARIZERS USING SAME - A polarizing film is made of multilayer polarizing fibers embedded within a matrix. The fibers are formed with layers of at least a first and a second polymer material. Layers of the first polymer material are disposed between layers of the second polymer material. At least one of the first and second polymer materials is birefringent. In some embodiments the thickness of the layers of at least one of the materials varies across the fiber, and may include layers are selected as quarter-wavelength thickness for light having a wavelength of more than 700 nm. | 10-08-2009 |
| 20090296214 | OPTICAL ELEMENT AND OPTICAL APPARATUS - An optical element including a first layer ( | 12-03-2009 |
| 20100079864 | OPTICAL SHEET - An optical sheet including a plurality of optical anisotropic films is provided. The optical anisotropic films of the optical sheet are alternately stacked on one another. Each optical anisotropic film has a plurality of main axis refractive indexes nx, ny and nz. The main axis refractive indexes nx and ny are in-plane main refractive indexes, and the main axis refractive index nz is a thickness-wise refractive index. The main axis refractive index nx is the minimum or the maximum among the main axis refractive indexes nx, ny and nz. Each optical anisotropic film has an optcial axis, and a direction of the optical axis is the same to a main axis direction of the main axis refractive index nx. The optical axes of the optical anisotropic films sequentially rotates along a predetermined in a thickness direction, and a totally rotation angle thereof is greater than or equal to 360 degrees. | 04-01-2010 |
| 359498000 | Frequency filter or interference effects | 2 |
| 20090034073 | Multilayer Polarizer - The present invention relates generally to the field of multilayer polarizer, in particular, to the polarizer designed to polarize selected wavelengths of light by optical interference and reflectance. The multilayer polarizer comprises a plurality of layers located on the substrate. The layers and the substrate are transparent in at least one predetermined wavelength subrange of the wavelength band in the range from 200 to 2500 nm. The layers are arranged in such a way that a light of first polarization is substantially reflected while a light of second polarization is substantially transmitted through the multilayer polarizer. At least one of said layers is formed by rod-like supramolecules that at least partially form a three-dimensional structure in the layer. | 02-05-2009 |
| 20090046363 | WAVELENGTH DISCRIMINATION FILTER FOR INFRARED WAVELENGTHS - An optical comb filter has polarizers placed before and after two or more birefringent elements, each having a fixed retarder and an aligned tunable liquid crystal. The birefringent elements are equal in birefringence and thickness and are tuned in unison. As few as two birefringent elements are provided, thereby minimizing transitions where infrared absorption occurs. The birefringent elements are in a symmetrical array of rotational angles, encompassing 90° of span in a bandpass configuration where the polarizers are parallel. Polarization components from the input polarizer or a given birefringent element are coupled in unequal proportions to the fast and slow axes of the next birefringent element, by using a relative angle that is distinctly different from 45°. The filter is tolerant of rotational alignment errors. A two element filter uses angles of 22.5 and 67.5°; a three element version has 12.5, 45 and 77.5°; and a four element filter has 7.5, 29.5, 60.5 and 82.5°; all these angles being ±5°. | 02-19-2009 |
| 359499000 | Using compensation techniques | 9 |
| 20080198455 | Optical System, In Particular Objective Or Illumination System For A Microlithographic Projection Exposure Apparatus - The invention relates to an optical system, in particular an objective or an illumination system for a microlithographic projection exposure apparatus, which in particular also permits the use of crystal materials with a high refractive index while reducing the influence of intrinsic birefringence on the imaging properties. In particular the invention relates to an optical system having at least two lens groups ( | 08-21-2008 |
| 20080198456 | Laminated retarder stack - Chemically-bonded retarder stacks are provided in this disclosure. A first organic layer having a first molecular orientation is chemically welded to a second organic layer having a second molecular orientation. The first and second molecular orientations are crossed when the organic layers are laminated. The first and second organic layers may be polycarbonate films, which can be welded together using a suitable solvent. | 08-21-2008 |
| 20080259452 | RETARDATION COMPENSATION ELEMENT AND METHOD FOR MANUFACTURING THE SAME - Substrates | 10-23-2008 |
| 20080259453 | RETARDATION COMPENSATION ELEMENT AND MANUFACTURING METHOD OF THE SAME - Two types of layers are simultaneously formed on a substrate and another substrate under the same layer forming condition, the heights of which are equal to a half height of an intended retardation compensation layer. Physical properties of the respective two types of layers formed on the substrates are identical to each other, and if deviations are produced in retardation distribution characteristics for azimuth angles of incident light, these deviations are commonly provided in the respective two types of layers. When one substrate is superposed with the other substrate and these superposed substrates are integrated with each other in order to make a single sheet of retardation compensation element, after one of these substrates is rotated by an angle of 90 degrees with respect to the other substrate, these substrates are stuck to each other by an adhesive agent. | 10-23-2008 |
| 20090021830 | PROJECTION LENS OF A MICROLITHOGRAPHIC EXPOSURE SYSTEM - In some embodiments, the disclosure provides a projection lens configured to configured to image radiation from an object plane of the projection lens to an image plane of the projection lens. The projection lens can, for example, be used in a microlithographic projection exposure apparatus. The projection lens includes a last lens on the image plane side. The last lens includes at least one intrinsically birefringent material. The material can be, for example, magnesium oxide, a garnet, lithium barium fluoride and/or a spinel. The last lens can have a thickness d which satisfies the condition 0.8*y | 01-22-2009 |
| 20090122403 | OPTICAL FILM WITH LOW OR ZERO BIREFRINGENCE AND METHOD FOR FABRICATING THE SAME - An optical film with low or zero birefringence and a method for fabricating the same are provided. The optical film with low or zero birefringence includes a plurality of birefringence films, and the plurality of birefringence films is overlapped with the long axes perpendicular to each other. A sum of the refractive indices of the overlapped birefringence films in an x direction is equal to that in a y direction. The placement of the birefringence films in the optical film with low or zero birefringence can solve the problem that optical polymer cannot be applied to optical parts due to the birefringence of optical polymer. | 05-14-2009 |
| 20090195876 | METHOD FOR DESCRIBING A RETARDATION DISTRIBUTION IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - In a method for describing a retardation distribution of a light bundle emerging from a selected field point, which passes through a birefringent optical element contained in an optical system of a microlithographic projection exposure apparatus, a distribution of retardation vectors is determined so that precisely one direction of a retardation vector is allocated to each directionless orientation of the retardation. The retardation vector distribution is then at least approximately described as a linear superposition of predetermined vector modes with scalar superposition coefficients. | 08-06-2009 |
| 20090231705 | Devices for Dispersion Compensation, Beam Displacement, and Optical Switching - A method of laterally displacing at least a component of a light beam, the method comprising: a) directing the beam to enter a block of birefringent material at a first location, and at least the component of the beam to pass through the block on a first path to an exit location; and b) changing a polarization of the component of the beam after it has passed through the block, and directing it to pass back through the block from the previous exit location to a next exit location, following a next path oriented at changed angle due to its changed polarization state, at least one time; the component of the beam thereby being laterally displaced from the first location, when it exits the block a last time. | 09-17-2009 |
| 20100110543 | LAMINATED QUARTER WAVE PLATE - A laminated quarter wave plate includes: a first wave plate made of an optically uniaxial crystal material; and a second wave plate made of an optically uniaxial crystal material. In the laminated quarter wave plate, the first and second wave plates are disposed in this order from an entrance side of light so that the optical axes of the first and second wave plates intersect with each other at an angle of 90°, and a phase difference Γ | 05-06-2010 |
