Class / Patent application number | Description | Number of patent applications / Date published |
359295000 | Having multiple electrodes | 30 |
20080218844 | MEMS devices with an etch stop layer - This invention discloses a MEMS device supported on a substrate formed with electric circuit thereon. The MEMS device includes at least an electrode connected to the circuit and at least a movable element that is controlled by the electrode. The MEMS device further includes a conformal protective layer over the electrode and the circuit wherein the protective layer is semiconductor-based material. In a preferred embodiment, the MEMS device is a micromirror and the semiconductor material is one of a group of materials consisting of Si, SiC, Ge, SiGe, SiNi and SiW. | 09-11-2008 |
20080247029 | MICRO-ELECTRO-MECHANICAL SYSTEM MICRO MIRROR - A micro-electro-mechanical system (MEMS) micro mirror and a method of making the same. The micro mirror includes a body having a mirror support, opposed anchor s and flexible hinges which connect the mirror support to the anchor s. The mirror support has opposed comb edges with comb fingers. Electrodes, which have comb fingers to interact with the comb fingers of the mirror support, are spaced from the comb edges. The comb fingers along each of the comb edges of the mirror support surface are positioned on different horizontal planes from and the comb fingers on the electrodes so as to maximize electrostatic actuation. | 10-09-2008 |
20090122388 | Optical element, optical device, atmosphere provider, optical scanning device, light coupling device, and method of operating interfacial waves - An optical element ( | 05-14-2009 |
20090128888 | Mirror array device - The present invention provides a mirror array device, comprising: a plurality of mirror elements each comprising a hinge and a deflectable mirror supported by the hinge; a memory cell for controlling the mirror element; a bit line for transmitting a data signal to the memory cell; a word line for controlling a connection between the bit line and the memory cell; a plate line for controlling the memory cell. Each of the mirror elements further comprises a first address electrode controlled by the word line to connect to the memory cell. Each of the mirror elements further comprises a second address electrode electrically connected to the plate line. | 05-21-2009 |
20090135465 | SYSTEM AND METHOD FOR MULTI-LEVEL BRIGHTNESS IN INTERFEROMETRIC MODULATION - A display having a plurality of reflective display elements. In one embodiment, the display elements comprise at least one electrode having a plurality of active areas. In one embodiment, at least two of the sizes of the active areas are different with respect to each other, e.g., they are non-uniform in size. The interferometric modulators have a plurality of states, wherein selected ones of the interferometric modulators are configured to be actuated depending differing electrostatic forces in the interferometric modulators. The electrostatic forces in the interferometric modulators are different at least in part due to variations in the sizes of the active areas of the electrodes. | 05-28-2009 |
20090135466 | METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION - A multi-state light modulator comprises a first reflector | 05-28-2009 |
20090161198 | Micro mirror device - The present invention provides a mirror device, comprising: an electrode placed on a substrate; a memory circuit connected to the electrode; an elastic hinge disposed near said electrode and extending from said substrate for supporting a mirror above said electrode wherein said elastic hinge having a negative temperature coefficient of resistance. | 06-25-2009 |
20090161199 | Mircromirror device having a vertical hinge - A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes. The mirror device further comprises a barrier layer is disposed between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Furthermore, this invention discloses a projection apparatus implemented with a mirror device manufactured and assembled according to the configuration as described. | 06-25-2009 |
20090174926 | Micromirror device with a single address electrode - A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable in a plurality of directions, an address electrode composed of first and second regions that are arranged across the deflection axis of each mirror, and a driving circuit for controlling the mirror to deflect in the directions of the first and the second regions. | 07-09-2009 |
20090201568 | Three states of micro mirror device - The present invention provides a spatial light modulator, comprising a mirror modulating a light emitted from a light source, wherein the mirror is further controlled to operate with at least three stationary states whereby an image is projected with a gray scale expression through a combination of modulation of the light operated in the three stationary states. | 08-13-2009 |
20090207474 | Micro mirror device - The present invention provides a mirror device, comprising: a mirror; an elastic hinge for supporting the mirror and the elastic hinge has a specific electric resistance. The mirror device further includes an electrode for controlling the mirror, wherein a voltage is applied to the elastic hinge for a predetermined period in synchronous with a change of an electric voltage applied to the electrode. | 08-20-2009 |
20090257111 | Tunable Optical Array Device Comprising Liquid Cells - A tunable optical component includes comprises a plurality of individual tunable liquid cells regularly arranged and integrated to at least one cell structure forming an array on the supporting substrate. A single liquid cell comprises several integrated cell walls, the cell walls projecting away from the supporting substrate and having a closed base area and an open cell surface at the cell wall edges. The liquid cell is filled with at least two liquids or fluids to provide at least one tunable interface area for varying the optical characteristic of the liquid cell. | 10-15-2009 |
20100007940 | MICRO OSCILLATING DEVICE - A micro oscillating device includes a first frame; an oscillating portion; a first twist coupling portion and a second twist coupling portion coupling the first frame and the oscillating portion to define a first shaft center of an oscillating operation of the oscillating portion; a second frame including a support base and an arm portion extended from the support base toward the oscillating portion; and a third twist coupling portion and a fourth twist coupling portion coupling the second frame and the first frame to define a second shaft center of an oscillating operation of the first frame, wherein the third twist coupling portion is coupled to the first frame and the arm portion between the oscillating portion and the support base, and the fourth twist coupling portion is coupled to the first frame and the support base or the arm portion between the oscillating portion and the support base. | 01-14-2010 |
20100033800 | Mirror device with flat and smooth mirror surface without protrusion or dip - This invention discloses a mirror device comprises a mirror array. The mirror array includes multiple mirror elements. Each element comprises a mirror supported on a hinge. The hinge is attached directly to the mirror and is substantially perpendicular to the mirror. The hinge penetrates a bottom surface of the mirror with a hinge-top buried in a layer of the mirror beneath a top surface of the mirror. | 02-11-2010 |
20100053727 | Display Device - A flat panel display device displays an image using a micro-shutter electrode and a diffusive reflection layer. The display device has a wide viewing angle and reduces a loss of light to thus improve light efficiency. In addition, gray levels can be determined by an electrostatic force between the pixel electrode and the micro-shutter electrode. An opening/closing operation of the micro-shutter electrode is fast so that the response speed can be improved. | 03-04-2010 |
20100067096 | Structure body electrically connected via semiconductor material layer - The present invention discloses an image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements further comprises an electrode having a structural body comprising: a first electrically conductive layer; a second electrically conductive layer; and a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer and the semiconductor layer further comprises a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer. | 03-18-2010 |
20100118382 | ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE - A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force. | 05-13-2010 |
20100195186 | TWDM ELEMENT, IMAGER, AND METHOD FOR TEMPORALLY AND SPATIALLY MODULATING BY USING THE SAME - A tri wavelength diffracting modulation (TWDM) element, a TWDM imager, and methods of temporally and spatially modulating by using the same are disclosed. The TWDM element includes first and second sets of movable reflective rigid plates under independent electrical actuation, provides four different spatial configurations for reflecting and selectively diffracting incident radiation of three distinguished wavelengths. The TWDM imager is formed with a plurality of the TWDM elements in a regularly spaced planar array configuration on a planar substrate. Incident visible light is spatially modulated by the TWDM imager, either in a time sequential mode or via spatial combination with help of an aligned color filter array. | 08-05-2010 |
20100202040 | DYNAMIC IMAGING AND/OR IDENTIFICATION APPARATUS AND METHOD THEREOF - A preferred embodiment comprises a dynamic display based on a program image element which will only generate a preprogrammed image. As an example, the image element may comprise electrically-driven MEMS mirrors. This example may be embedded in an ID card. At the time of issue of the ID card, pixels in the mirror array will be permanently programmed as either ‘alive’ or ‘dead’ in a pattern matching the photo of the person in question. When stimulated, only ‘alive’ pixels will actuate, creating an image for comparison to the adjacent printed photo. Due to its dynamic behavior, delicate mechanical structures, and single-time hard-wiring, duplication of, or tampering with, this secondary dynamic image will be nearly impossible. The ID car is but one exemplary application and other embodiments, applications, and methods are described in the specification and claims. | 08-12-2010 |
20100284057 | Mircromirror device having a vertical hinge - A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device. | 11-11-2010 |
20110292491 | DISPLAY DEVICE AND ELECTRIC APPARATUS USING THE SAME - A display device ( | 12-01-2011 |
20120134008 | ELECTROMECHANICAL INTERFEROMETRIC MODULATOR DEVICE - This disclosure provides systems, methods and apparatus for an electromechanical system. In one aspect, an electromechanical interferometric modulator system includes a substrate and a plurality of interferometric modulators (IMODs). At least two different IMOD types correspond to different reflected colors. Each IMOD has an optical stack, an absorber layer, a movable reflective layer, where the movable reflective layer has at least open and collapsed states, and an air gap defined between the movable reflective layer and the optical stack in the open state. The optical stacks define different optical path lengths for each of the different IMOD types by way of different transparent layer thickness and/or material, while the air gap has the same size when in the open state. The IMODs reflect different colors in the closed state and a common appearance in the open state. Use of two absorbers aids in defining the common appearance in the open state and can also improve color saturation. | 05-31-2012 |
20120140313 | MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE - A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode. | 06-07-2012 |
20130265631 | FLEXIBLE DISPLAY APPARATUS - A flexible display apparatus that has improved portability and convenience of usage. The flexible display apparatus includes a display main body that is flexible; and a bendable driving film coupled to the display main body, and that bends when an electric current flows. The flexible display apparatus may be flexibly transformed to be stored when it is carried, and then, may be unfolded to be flat through a simple manipulation when it is in use for displaying an image. Thus, the convenience of carrying and using the flexible display apparatus may be increased. | 10-10-2013 |
20130286463 | DYNAMIC ACTUATION WAVEFORM FOR A DIGITAL MICROMIRROR DEVICE - A method of actuating micromirror elements of a digital micromirror device is disclosed. A logic state is stored in the micromirror element including applying a negative voltage more negative than about −5 volts to the micromirror element, applying a positive voltage less than about 5 volts to a first electrode, and applying ground to a second electrode. A first logic state is switched to a second logic state with an inverted waveform, including applying ground to the first electrode, applying a positive voltage less than 5 volts to the second electrode, applying a negative BSA voltage to the first electrode, applying a positive reset voltage pulse greater than about 10 volts, removing the negative BSA voltage, and applying the negative voltage to the micromirror element. | 10-31-2013 |
20130335808 | ANALOG IMOD HAVING HIGH FILL FACTOR - This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator (AIMOD) includes a reflective display pixel having a movable element disposed between first and second electrodes. The movable element includes a third electrode embedded within a deformable layer and a reflector. The movable element is moved to different positions between first and second electrodes, with different positions corresponding to different reflected colors from the AIMOD. In another aspect, the reflector is coupled to, but spaced apart from, the deformable layer, thereby decoupling the mechanical and optical properties of the movable element. In another aspect, the need for a bending region in the reflector is eliminated, providing for increased fill factor. In another aspect, the reflector may include a dielectric layer having substantially identical metal layers above and below, so as to provide increased rigidity to the reflector. | 12-19-2013 |
20140063588 | CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY - Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first conductive layer suspended over a second electrode layer. In certain embodiments, a second conductive layer is provided over the first conductive layer. One of the first and/or second conductive buses may further connect to the first electrode layer and/or the second electrode layer. Other disclosed features can be incorporated into embodiments of the interferometric modulator to improve response time, power consumption, and image resolution. | 03-06-2014 |
20150309306 | APPLICATIONS OF CONTACT-TRANSFER PRINTED MEMBRANES - The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable minors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few. | 10-29-2015 |
20160033759 | MICROELECTROMECHANICAL SYSTEM DEVICE - A microelectromechanical system (MEMS) device includes a substrate and at least one MEMS unit disposed on the substrate. The MEMS unit includes at least one first electrode, at least one second electrode, at least one landing element, and a hinge layer. The first electrode is disposed on the substrate. The second electrode is disposed on the substrate. The landing element is disposed on the substrate. The hinge layer includes a hinge portion and at least one cantilever portion. The hinge portion is connected to the second electrode. The cantilever portion is connected to the hinge portion. The cantilever portion has a first opening and at least one spring disposed in the first opening and connected to at least one side of the first opening. When a voltage difference exists between the first electrode and the second electrode, the hinge portion is distorted and the spring thus touches the landing element. | 02-04-2016 |
20160091708 | REFLECTIVE DISPLAY DEVICE - A reflective pixel for a display device includes a first substrate, a membrane formed relative to the first substrate, and a fluid arranged between the first substrate and the membrane. An actuator mechanism is operative to move the membrane between at least a first and second position that differ in average separation distance relative to the first substrate to produce a low reflective state and a high reflective state of the pixel. | 03-31-2016 |