| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 356217000 | Modulating (e.g., flicker beam) | 11 |
| 20090290148 | METHOD AND DEVICE FOR CALIBRATING A LIGHT INTENSITY MEASUREMENT DEVICE - It is an object of the present invention to provide a method and a device for automatically calibrating a light intensity measurement device. The device ( | 11-26-2009 |
| 20090303467 | METHOD AND APPARATUS FOR DETERMINING INTENSITIES AND PEAK WAVELENGTHS OF LIGHT - The present invention provides a method and apparatus for determining intensities and peak wavelengths of light. The apparatus comprises one or more pairs of sensing units for sensing the light, a first sensing unit of a pair configured to sense a first intensity of the light in a first predetermined wavelength range with a first predetermined spectral responsivity and a second sensing unit of a pair configured to sense a second intensity of the light in the first predetermined wavelength range with a second predetermined spectral responsivity. The apparatus further comprises a processing system operatively connected to the one or more pairs of sensing units; the processing system configured to determine the intensity and peak wavelength for each of the one or more predetermined wavelength ranges of the light according to one or more predetermined functional relationships between each of the first intensity and second integral. | 12-10-2009 |
| 20090316141 | FOURIER DOMAIN SENSING - Methods, systems, and apparatuses are provided for measuring one or more sinusoidal Fourier components of an object. A structured second radiation is generated by spatially modulating a first radiation. The structured second radiation illuminates the object, The structured second radiation is scaled and oriented relative to the object. The object produces a third radiation in response to the illuminating. A single-element detector detects a portion of the third radiation from multiple locations on the object substantially simultaneously for each spatial modulation of the first radiation and for each orientation of the second radiation. A time-varying signal is produced based on said detected portion of the third radiations. One or more characteristics of the one or more sinusoidal Fourier components of the object are estimated based on the time-varying signal. | 12-24-2009 |
| 20100321675 | OBSERVATION DEVICE - An observation device | 12-23-2010 |
| 20110013179 | CONTROLLABLE LIGHT ANGLE SELECTOR - A controllable light angle selecting device ( | 01-20-2011 |
| 20110102780 | CALIBRATION OF A SPATIAL LIGHT MODULATOR - A method for calibrating a spatial light modulator comprising an array of channels includes selecting a plurality of channel sets; operating each of the channel sets to provide corresponding output radiation; providing a detector for measuring the output radiation; determining a plurality of intensity values, each representing an intensity of the output radiation provided by a different one of the channel sets; providing a correction factor for each of the channels sets, wherein each correction factor remains constant during a subsequent recalibration of the spatial light modulator; modifying each determined intensity value in accordance with a corresponding one of the correction factors; determining a difference between one of the modified intensity values and a target intensity value; and reducing the determined difference by adjusting a control level of at least one channel in the channel set corresponding to the one of the modified intensity values. | 05-05-2011 |
| 20110122402 | Device and Method for Measuring Luminescence - An optical device for measuring luminescence includes a pulse generator for generating a periodic modulation signal having rectangular pulses, a pulse duration of the pulse being variably adjustable, an illumination device and/or means for illuminating an object under investigation with excitation radiation modulated in a pulse-like manner depending on the modulation signal, and a time-of-flight camera for phase-sensitive detection of a luminescence response emitted by the object under investigation in response to the excitation radiation. The modulation signal is supplied as reference signal to the time-of-flight camera. A method of measuring luminescence includes generating the periodic modulation signal having rectangular pulses, generating the signal-dependent, pulse-modulated excitation radiation, illuminating the object with the radiation, providing the modulation signal as reference signal to the camera, and performing phase-sensitive detection with the camera of the luminescence response emitted by the object in response to the excitation radiation for different pulse durations. | 05-26-2011 |
| 20120019814 | Sensing System - Described herein is an improved sensing system ( | 01-26-2012 |
| 20120019815 | MULTICHANNEL PHOTOMETRIC MEASUREMENT APPARATUS - A multichannel photometric measurement apparatus according to one embodiment includes: a single signal generator for generating an initial signal, the initial signal containing a harmonic component for collectively generating a plurality of modulation signals; a light emitting device including a plurality of light sources that are respectively drivable by each of the plurality of modulation signals having different frequencies; a light detector for detecting a plurality of kinds of light emitted from the light emitting device; and discriminating means for discriminating a detected signal output from the light detector per frequency domain of each of the different frequencies for each of the modulation signals. | 01-26-2012 |
| 20120206720 | METHOD AND DEVICE FOR EXAMINING A LASER SYSTEM - A method for analyzing a laser system, which has a focused laser beam and a controllable deflection assembly for controlling the transverse and/or longitudinal position of the beam focus, said method comprising the steps of directing the laser beam or a partial beam branched therefrom downstream of the deflection assembly toward an optically nonlinear medium for the purpose of generating frequency multiplied radiation, the wavelength of which corresponds to an uneven higher harmonic of the wavelength of the laser beam, activating the deflection assembly, and measuring a power of the frequency multiplied radiation while the deflection assembly is activated. The conversion efficiency of the nonlinear process by which the frequency multiplied radiation is produced is dependent upon the focusability of the laser beam. By evaluating the measured power of the frequency multiplied radiation, dynamic impairments of focusability can be detected, which can be caused by inertia-induced deformations of optical scan components of the laser system. | 08-16-2012 |
| 20130016344 | Method and Apparatus for Measuring Process Parameters of a Plasma Etch ProcessAANM Bullock; LarryAACI ArlingtonAAST TXAACO USAAGP Bullock; Larry Arlington TX USAANM Kueny; Andrew WeeksAACI DallasAAST TXAACO USAAGP Kueny; Andrew Weeks Dallas TX USAANM Meloni; Mark AnthonyAACI The ColonyAAST TXAACO USAAGP Meloni; Mark Anthony The Colony TX US - A configurable hybrid superheterodyne spectrum analyzer for deriving process state parameters from detected modulated light emitted by a plasma receives and conditions the electric signals converted from the modulated light for subsequent superheterodyne mixing at a specific intermediate frequency (IF) that is lower than the frequency of the modulated light. Signal conditioning includes filtering noise, aliasing and DC and/or amplifying or de-amplifying the signal. Once mixed, the superheterodyne signal is further filtered by an IF filter to define the signal bandwidth characteristics relevant to the process state parameters. The IF filter may configurably employ multiple filter functions such as Gaussian filtering of increasing widths and/or comb filtering for multiple passbands in the frequency spectrum. Finally, the IF mixed and filtered signal is digitized with respect to the specific intermediate frequency using an IF digitizer. The processed signal is then passed to a signal analyzer for derivation of process state parameters. The system may further include a controller for receiving information from the signal analyzer regarding signal processing requirements and then actively configuring one or all of the signal conditioner filter, signal conditioner amplifier, IF filter and IF digitizer to meet those requirements. | 01-17-2013 |
