Class / Patent application number | Description | Number of patent applications / Date published |
356600000 | SURFACE ROUGHNESS | 38 |
20080259351 | Device and Method for Recognizing Particles in Milk - A device for recognizing particles in milk comprising a measuring surface and a housing. The measuring surface is structured so as to cause the milk to spread on the measuring surface in that the measuring surface has a specific surface roughness. | 10-23-2008 |
20080266575 | Hybrid Contact Mode Scanning Cantilever System - This invention addresses a contact mode hybrid scanning system (HSS), which can be used for measuring topography. The system consists of a cantilever or a cantilever array, a scanning stage, a light source, and instrumentation to synchronize and control the individual components. Detection of the cantilever's movement is achieved by directly measuring the change in disposition of the cantilever including its height, rotation at one or more points on the cantilever thereby providing a partial three-dimensional reconstruction without the need for actuating the cantilever. This is achieved by employing a displacement meter such as a triangulation meter or a confocal meter. | 10-30-2008 |
20090002718 | Optical Measurement Device - The invention relates to an optical measurement device ( | 01-01-2009 |
20090027690 | MEASURING PROBE, SAMPLE SURFACE MEASURING APPARATUS AND SAMPLE SURFACE MEASURING METHOD - A measurement probe | 01-29-2009 |
20090046299 | NANOSCALE IMAGING VIA ABSORPTION MODULATION - An imaging system is provided. The imaging system includes a sample to be scanned by the imaging system. An absorbance modulation layer (AML) is positioned in close proximity to the sample and is physically separate from the sample. One or more sub-wavelength apertures are generated within the AML, whose size is determined by the material properties of the AML and the intensities of the illuminating wavelengths. A light source transmits an optical signal through the one or more sub-wavelength apertures generating optical near-fields that are collected for imaging. | 02-19-2009 |
20090046300 | DEVICE FOR EXAMINING THE OPTICAL PROPERTIES OF SURFACES - A device for examining the optical properties of surfaces includes at least one first radiation device which emits radiation to a surface to be examined at a first predetermined spatial angle, at least one first detector device for capturing the radiation emitted to and reflected back from the surface wherein the first detector device, allowing a local resolution of detected radiation, is positioned at least at a second predetermined spatial angle relative to the surface, and at least one further radiation device or second detector device emitting radiation to the surface to be examined at a third predetermined spatial angle or detecting radiation emitted to and reflected back from the surface. | 02-19-2009 |
20090147270 | System and method for investigating and/or determining the condition or state of a ship's hull - A system and a method for investigating and/or determining the condition or the state of a ship's hull, in particular its outer skin, for making it possible to select, in particular to lengthen, the docking time interval for ships depending on the condition or the state of the ship's hull. The outer skin is provided with a subdivision, in particular by means of at least one grid or network, which subdivision cooperates functionally with at least floating/submersible investigation/determination unit for investigating and/or for determining the condition or the state of the ship's hull. | 06-11-2009 |
20090290168 | Inspecting Method and Inspecting Apparatus for Substrate Surface - To inspect a substrate such as a semiconductor substrate for surface roughness at high precision. | 11-26-2009 |
20090310143 | APPARATUS FOR MEASURING CARRIAGEWAY SURFACE PROPERTIES - An apparatus for measuring surface properties of a carriageway or road, comprising a platform arranged to move over the carriageway, the platform carrying a light source arranged to illuminate the carriageway, and a detector arranged to receive light returning from the carriageway, characterised in that the light source projects a line of light onto the surface and data representing light returning from the line of light is captured and stored. | 12-17-2009 |
20100134804 | Method and device for determining the topography of a material surface - A method and a device for determining a topography under load of the surface of a material, wherein a test piece ( | 06-03-2010 |
20100182613 | DOPPLER SENSOR FOR THE DERIVATION OF TORSIONAL SLIP, FRICTION AND RELATED PARAMETERS - An optical method and apparatus are described for the measurement of properties of a travel vehicle or a travel surface upon which the travel vehicle travels, which includes providing an incident light from a light source to the travel surface, collecting light reflected from the travel surface, determining a surface induced Doppler shift from the incident and collected light and determining at least one of a motion property of the travel vehicle and a surface property of the travel surface based on the determined surface induced Doppler shift. | 07-22-2010 |
20100265518 | Back Quartersphere Scattered Light Analysis - A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter. | 10-21-2010 |
20100328676 | METHOD FOR DETECTING IMPURITIES ON A SURFACE - A method is provided for detecting not fully set coatings and liquid or smearing impurities on a surface, in which in a first step a film is pressed onto a surface of a coating using a predefined press-on pressure, the film having a relative motion with respect to the surface of the coating, thereafter the film is pulled off the surface of the coating and finally it is determined whether impurities are adhering to the film. A device is also provided for performing the method, including at least one film, which may be pressed against a surface to be tested, at least one press-on roller having a surface by which the film is pressed against the coating, and at least one device for determining whether there are impurities adhering to the film. | 12-30-2010 |
20100328677 | Estimating spectral distribution of reflections from object surface based on low frequency illumination - A system for estimating the specular roughness of points on a surface of an object may include a lighting system, an image capture system and a computer processing system. The lighting system may be configured to illuminate the surface of the object at different times with different illumination patterns. Each illumination pattern may illuminate the surface from a plurality of different directions and form an intensity gradient having an order of no more than two. The image capture system may be configured to capture an image of the surface of the object when illuminated by each of the different illumination patterns at each of the different times. The computer processing system may be configured to compute the specular roughness of each point on the surface of the object based on the images captured by the image capture system. | 12-30-2010 |
20110037988 | LINE EDGE ROUGHNESS MEASURING TECHNIQUE AND TEST STRUCTURE - A test structure is presented test structure on a substrate for monitoring a LER and/or LWR effect, said test structure comprising an array of features manufactured with amplified LER and/or LWR effect. | 02-17-2011 |
20110090512 | SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD - An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool | 04-21-2011 |
20110149299 | CONTACTLESS OPTICAL GLIDE HEAD - A device for detecting disk asperities. The device includes an optical glide head. The glide head is not required to physically contact a disk for detection of the disk asperities. The optical glide head includes a waveguide configured to transmit light onto the disk and receive reflected light from the disk. | 06-23-2011 |
20110310398 | FRICTION-COEFFICIENT ESTIMATING DEVICE AND FRICTION-COEFFICIENT ESTIMATING METHOD - A friction-coefficient estimating device is configured to estimate friction coefficient of the surface of a medium in a form of a sheet by irradiating a light on the surface and by detecting specularly-reflected light component of a reflected light and a diffusely-reflected light intensity. The friction-coefficient estimating device comprises an irradiating unit including a first irradiating unit and a second irradiating unit, a specularly-reflected light receiving unit including a first specularly-reflected light receiving unit that receives a first specularly-reflected light component of a reflected light and detects a first specularly-reflected light intensity and a second specularly-reflected light receiving unit that receives a second specularly-reflected light component of a reflected light and detects a second specularly-reflected light intensity, and a diffusely-reflected light receiving unit that receives a diffusely-reflected light component of a reflected light and detects a diffusely-reflected light intensity, and a control unit that estimates a friction coefficient of the surface based on a first reflected-light intensity coefficient and a second reflected-light intensity coefficient. | 12-22-2011 |
20120019835 | DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS - Provided are a defect inspecting method and a defect inspecting apparatus, wherein defect detecting sensitivity is improved and also haze measurement is performed using polarization detection, while suppressing damages to samples. The defect inspecting apparatus is provided with a light source which oscillates to a sample a laser beam having a wavelength band wherein a small energy is absorbed, and two independent detecting optical systems, i.e., a defect detecting optical system which detects defect scattered light generated by a defect, by radiating the laser beams oscillated by the light source, and a haze detecting optical system which detects roughness scattered light generated due to roughness of the wafer surface. Polarization detection is independently performed with respect to the scattered light detected by the two detecting optical systems, and based on the two different detection signals, defect determination and haze measurement are performed. | 01-26-2012 |
20120133952 | SYSTEM AND METHOD OF MEASURING IRREGULARITY OF A GLASS SUBSTRATE - A system and a method of measuring irregularity of a glass substrate using only a reflection light reflected by an upper surface of reflection lights reflected by the upper surface and a lower surface of the glass substrate are disclosed. The system includes a light source section configured to output a first light to the glass substrate and a screen. Here, the first light outputted from the light source section is reflected by an upper surface and a lower surface of the glass substrate, a first reflection light reflected by the upper surface of the glass substrate is inputted into the screen, a first line is formed on the screen in accordance with the input of the first reflection light, a second reflection light reflected by the lower surface of the glass substrate is inputted into the screen through the upper surface, a second line is formed on the screen in accordance with the input of the second reflection light, and the light source section and the screen are disposed on the basis of the glass substrate so that the lines are separated. | 05-31-2012 |
20120162665 | Inspecting Method and Inspecting Apparatus for Substrate Surface - An inspecting method and apparatus for inspecting a substrate surface includes application of a light to the substrate surface, detection of scattered light or reflected light from the substrate surface due to the applied light at a plurality of positions to obtain a plurality of electrical signals, extraction of a signal in a mutually different frequency band from each of the plurality of electrical signals, and calculation of a value regarding a state of film of the substrate through an arithmetical operation process of a plurality of extracted signals in the frequency bands. | 06-28-2012 |
20120170051 | METHOD AND DEVICE FOR INSPECTING THE QUALITY OF A FORMED THERMOPLASTIC FIBER-REINFORCED PLASTIC COMPONENT - A method and a device for inspecting the quality of a formed thermoplastic fiber-reinforced plastic component wherein the component is tested by means of a sensor unit with a downstream electronic evaluation unit for analysis of the measuring result acquired by sensor technology by means of sample comparison, wherein by means of the optical sensor unit the surface roughness of the plastic component is measured after forming, which surface roughness is analyzed by means of the evaluation unit by a comparison with a stored reference pattern in such a manner that increased surface roughness is interpreted as increased internal materials porosity. | 07-05-2012 |
20120243003 | ASPERITY DETECTION DEVICE FOR CAN - Provided is an asperity detection device for a can which does not need an additional conveyance device for inspection, reduces increased inspection costs, and allows for quick detection of defective merchandise while conveying the can. | 09-27-2012 |
20120257217 | SYSTEMS AND METHODS FOR CALIBRATING AN OPTICAL NON-CONTACT SURFACE ROUGHNESS MEASUREMENT DEVICE - A calibration apparatus for an optical non-contact surface roughness measurement device allowing for quick, accurate, and repeatable device calibration is described. In certain embodiments, the calibration apparatus may include a base, one or more calibration surfaces coupled to a top surface of the base, and an alignment collar coupled to the top surface of the base defining a window exposing the one or more calibration surfaces. By utilizing the mechanical structure of the alignment collar and base, the optical non-contact surface roughness measurement device may be accurately aligned with respect to the calibration surfaces, allowing for repeatable calibration measurements. | 10-11-2012 |
20120262723 | SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD - A surface inspection tool | 10-18-2012 |
20130208285 | METHOD AND DEVICE FOR MEASURING THE COLOUR AND OTHER PROPERTIES OF A SURFACE - The invention relates to a device and method for measuring the properties of a surface. The device comprises means for producing illuminating light, which means are arranged to aim the illuminating light at the surface to be measured using at least two different wavelengths and at least two different angles, as well as means for directing the light reflected or scattered from the surface to a detector, in order to create an image of the surface to be measured. The device according to the invention further comprises at least one reference surface, the contents of which can be placed in the vicinity of the surface to be measured, in such a way that the illuminating light is also aimed at the reference surface and the light reflected or scattered from the reference surface can also be directed to the detector. The invention makes possible excellent measurement precision and repeatability, using a simple device construction with low production costs. | 08-15-2013 |
20130258351 | SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD - A surface inspection tool | 10-03-2013 |
20140153000 | APPARATUS FOR DETECTING THE FLATNESS OF WAFER AND THE METHOD THEREOF - An apparatus for detecting the flatness of a top surface of a wafer includes a plurality of detector elements, a metal sink and a plurality of injection pipes. Each detector element comprises: a metal tube body, jet pipes, a light receiver and a light emitter. The method comprises: injecting ultra-pure water into the detector elements by injection pipes; emitting parallel beams along an upward-oblique direction, a preset Angle θ being formed between the beams and the vertical direction. The radiated beams above the water surface are incident on a receiver. The intensity of the beams received by the light receiver is used to calculate the height of the detecting point of the surface of the silicon wafer to determine the flatness condition of the wafer surface. The flatness of the photo-resist covered on the wafer surface can also be accurately measured by this method. | 06-05-2014 |
20140293292 | Device For Measuring The Surface State Of A Surface - Devices for measuring the surface state of a surface, at least one portion of which has a surface curvature. The devices may includes a probe for being in contact with the curved surface portion. The probe may be stressed on the surface with a substantially constant stress. A way to measure the displacement of the probe may be provided and arranged to measure the displacement of the probe along an axis substantially perpendicular to the surface. The probe may also be relatively displaced in relation to the surface only along a path following the surface curvature. | 10-02-2014 |
20140355003 | LIGHTING DEVICE FOR INSPECTION AND LIGHTING METHOD FOR INSPECTION - In order to make it possible for a difference between a defect and a normal part, such as contrast, to appear, a lighting device for inspection is provided with: a surface light source that emits inspection light; a lens that is provided on a light axis of the inspection light emitted from the surface light source, and between an inspection object and the surface light source; and a first diaphragm that is provided between the lens and the surface light source or the inspection object, wherein: the surface light source and the lens are set such that an image plane on which the surface light source is imaged is present near the inspection object; and the first diaphragm is set such that the central axis of an irradiation solid angle determined by a part of the inspection light is parallel to the light axis. | 12-04-2014 |
20150323319 | LITHOGRAPHIC PRINTING SYSTEM WITH PLACEMENT CORRECTIONS - The technology disclosed relates to methods and devices that compensate for displacements in a pattern or deformations of a workpiece. In particular, this relates to using timing to compensate for displacements along a first axis along the scanning direction while using resampling, interpolation or a similar method to compensate for displacements along a second axis that is substantially orthogonal to the first axis. The scanning direction may be an actual direction of movement of the scanning head or it may be a direction perpendicular to an orientation of an image projected onto a workpiece. | 11-12-2015 |
20150338212 | PHOTOREFLECTANCE DEVICE - A photoreflectance device for characterizing a rough surface includes a pump beam emitter to emit a pump beam; a probe beam emitter to emit a probe beam; a detector to detect the probe beam reflected by the surface; an integrating sphere to collect the probe beam reflected by the surface, the integrating sphere including: a first output connected to the detector, and disposed so as to receive a majority of the probe beam reflected by the surface; a second output arranged so as to receive a majority of the pump beam reflected by the surface. | 11-26-2015 |
20150354947 | Surface Measurement Apparatus - Patent Document 1 discloses height measurement using an atomic force microscope (AFM) as means for measuring micro roughness. However, since it takes time for this measurement, it is difficult to apply a single display to inspection of all wafers and the entire surface thereof in an in-line manner. The invention provides a technique that estimates micro roughness from a total sum of detection signals from plural detection systems and signal ratios, using a light scattering method. The technique rotates and translates a wafer at high speed to measure the entire surface of the wafer with high throughput. Further, the relationship between the micro roughness and the intensity of scattered light varies according to a material of the wafer and a film thickness thereof. Further, calibration of an apparatus is also necessary. In consideration of this point, the invention provides a technique that has a function of correcting an optically acquired detection result using a sample which is substantially the same as a measurement target and makes the optically acquired detection result come close to a result measured by an apparatus (for example, an AFM) using a different measurement principle. | 12-10-2015 |
20150369595 | MULTIPLE-STAGE METHOD OF INVESTIGATING SURFACES AND CORRESPONDING APPARATUS - A multiple-stage method of determining surface properties, with the steps:
| 12-24-2015 |
20160061596 | Portable Optical Profilometer Device, System and Method - A hand-portable optical surface profilometer device can employ depth from defocus techniques to measure surface roughness in wide-area industrial processes. | 03-03-2016 |
20160069672 | SURFACE ROUGHNESS MEASUREMENT DEVICE - A surface roughness measurement device that in one embodiment includes main and auxiliary emitting fibers, multiple collecting fibers, an optical housing, main and auxiliary reflective mirrors, and an external circuit. The optical housing includes the fibers and defines an aperture for optically contacting a surface of an object. The main reflective mirror is arranged in the optical housing, for reflecting light emitted from the main emitting fiber to a detecting point of the aperture and reflected light by the object to the collecting fibers. The auxiliary reflective mirror is arranged in the optical housing, for reflecting light emitted from the auxiliary emitting fiber to the detecting point. The external circuit is for generating a laser beam to the main and auxiliary emitting fibers, collecting the reflected light from the collecting fibers, and calculating the surface roughness of the object based on the collected reflected light. | 03-10-2016 |
20160178360 | SURFACE SHAPE MEASURING APPARATUS | 06-23-2016 |
20160377424 | Automated Resin Ridge Reduction System - An apparatus comprises an automated guided vehicle that moves on a surface of a composite structure during operation of the apparatus to inspect the composite structure, a surface inspection sensor system associated with the automated guided vehicle, and an automated guided vehicle and surface inspection sensor system controller in communication with the automated guided vehicle and the surface inspection sensor system. | 12-29-2016 |