Entries |
Document | Title | Date |
20080218766 | APPARATUS AND METHOD FOR SIZING NANOPARTICLES BASED ON INTERFEROMETRIC FIELD DETECTION - Light from a laser source is split into a reference arm and a detection arm. The light in the detection arm is focused into a channel containing particles to be detected and is backscattered by the particles. The light in the reference arm is attenuated. The attenuated and backscattered light are caused to interfere and detected by a split detector so that the effects of background light can be subtracted out, while the backscattered light is detected to detect the particles. | 09-11-2008 |
20080225301 | METHOD, APPARATUS, AND PROGRAM FOR PROCESSING TOMOGRAPHIC IMAGES - Image quality of tomographic images obtained by optical tomographic measurement is improved. Spatial frequency processes are administered on a tomographic image, with the frequency processing properties (high frequency gain) in the scanning direction of a measuring light beam set to be lower than the frequency processing properties (high frequency gain) in the direction of the optical axis of the measuring light beam. For example, a smoothing process that removes high frequency components is administered to the tomographic image only in the scanning direction. Alternatively, a sharpening process that emphasizes high frequency components is administered to the tomographic image only in the direction of the optical axis. As a further alternative, a smoothing process that removes high frequency components is administered to the tomographic image in the scanning direction, then a sharpening process that emphasizes high frequency components is administered to the tomographic image in the direction of the optical axis. | 09-18-2008 |
20080259346 | Optical Measuring Device for Measuring a Plurality of Surfaces of an Object to be Measured - An optical measuring device for measuring a plurality of surfaces of an object to be measured using a system of optical elements. For example, the first surface to be measured can be the inner wall of a narrow guide bore, while the second surface to be measured is formed by a valve-seat section that is conical and positioned at one end of the guide bore. As optical elements of measuring device, at least one beam splitter and one lens system are disposed in such a way that a first portion of the light beams incident on the beam splitter is directed perpendicularly onto the first surface of the object to be measured, and a second portion of the light beams incident on the beam splitter strikes the lens system downstream of the beam splitter and is directed via the lens system perpendicularly onto the second surface. | 10-23-2008 |
20090079992 | Method And System for Measuring a Surface of an Object - Methods and systems for measuring a surface of an object are provided, wherein portions of the surface of the object are interferometrically measured and data representing a shape of the surface of the object are obtained by stitching the measurement data corresponding to each portion together. For measuring the individual portions of the surface of the object a variable light shaping member is utilized preferably constructed by arranging two diffraction gratings in a beam path of measuring light and appropriately displacing the two diffraction gratings relative to each other depending on a target shape of a particular portion of the surface of the object. | 03-26-2009 |
20090103101 | OVEN WIDTH MEASUREMENT INSTRUMENT AND PUSH-OUT RAM PROVIDED WITH THE INSTRUMENT - An oven width measuring instrument capable of measuring the oven width continuously while being subject to no restrictions of measurement area or measuring time has: a sensor unit SU composed of an integrated combination of laser displacement sensors | 04-23-2009 |
20090122321 | Method of Measuring Deep Trenches with Model-Based Optical Spectroscopy - The invention represents an improved method of measuring trenches on semiconductor wafers with optical spectroscopy. According to the described method, it is possible to characterize not only depth but also shape of the trench. The advancement is achieved by improved Effective Medium Approximation-based modeling of the optical response of trench structures. | 05-14-2009 |
20090168071 | METHOD AND SYSTEM FOR PRODUCING TOMOGRAPHIC IMAGE BY OPTICAL TOMOGRAPHY - When reflection light, reflected from a measurement target that has been irradiated with measurement light in such a manner to scan the measurement target, and reference light are combined in each wavelength sweep, interference light is detected as interference signals. When a thinning region in which the interference signals obtained by detecting the interference light in each wavelength sweep are thinned so that the interference signals that are used to produce the tomographic image remain is set, thinning is performed on the plurality of interference signals in the thinning region. Light intensity information about the measurement target in the thinning region is obtained, based on the interference signals for the respective wavelength sweeps, the interference signals remaining after thinning. The tomographic image in the thinning region is produced based on the obtained light intensity information. | 07-02-2009 |
20090190137 | Method and Apparatus for Testing Conic Optical Surfaces - According to one aspect, a part has two reflective surfaces, one being a conic surface portion having an axis with a focus thereon, and the other being part of a spherical surface with a centerpoint at the focus. According to a different aspect, a method includes fabricating a part with first and second reflective surfaces, the first being a conic surface portion with an axis and a focus on the axis, and the second being a spherical surface portion with a centerpoint at the focus. The second surface is used to position the part so that the focus coincides with the centerpoint of a spherical wave from an interferometer. Then, a reflective further spherical surface portion on a member is used with the interferometer to position a centerpoint of the further surface at the focus. The interferometer then evaluates the first surface for accuracy. | 07-30-2009 |
20090213387 | OPTICAL PROBE AND OPTICAL TOMOGRAPHIC IMAGE PRODUCTION APPARATUS USING THE PROBE - An optical tomographic image production apparatus includes an optical probe, in which a light-transmitting area that transmits measurement light and a light-blocking area that blocks the measurement light are formed. The light-blocking area is provided at a start position and an end position of the light-transmitting area. A tomographic image processing means detects an interference signal or tomographic information when the light-blocking area is irradiated with the measurement light. Further, the tomographic image processing means detects, based on the detected interference signal or tomographic information, interference signals or tomographic information obtained when the light-transmitting area is irradiated with the measurement light to produce a tomographic image in the light-transmitting area. | 08-27-2009 |
20090251708 | FAST THREE-DIMENSIONAL SHAPE MEASURING APPARATUS AND METHOD - Disclosed herein is an apparatus for measuring the shape of a 3D object using an interferometer. The apparatus includes a light source unit, a beam splitter, a reference mirror, an actuator, an image pickup device, and a control unit. The light source unit emits light. The beam splitter divides the light from the light source unit. The reference mirror reflects light as a reference beam. The actuator moves the reference mirror. The image pickup device acquires a plurality of interference patterns by causing the reflected beam and the reference beam to interfere with each other. The control unit measures the shape of the object from the acquired interference patterns, outputs reference mirror drive signals to the actuator, and issues an image capture command at the end of image capture time that is shorter than settling time. | 10-08-2009 |
20100039653 | POSITION DETECTION SYSTEM FOR THE CONTACTLESS INTERFEROMETRIC DETECTION OF A LOCATION OF A TARGER OBJECT AND SCANNING SYSTEM EQUIPPED WITH THE SAME - The invention relates to a position detection system for the contactless interferometric detection of the location of a target object. A target object unit comprises a reference light transmitter, which is configured such that it transmits a reference light beam having curved light wave fronts. The target object unit comprises at least one detector array having a plurality of detector pixels, which is fixed to the target object unit such that the reference light beam of the reference light transmitter impinges on the same. | 02-18-2010 |
20100091295 | System and Method for Optical Coherence Tomography - The invention relates to a system and to a corresponding method for optical coherence tomography having an interferometer ( | 04-15-2010 |
20100103430 | METHOD FOR ANALYZING MUCOSA SAMPLES WITH OPTICAL COHERENCE TOMOGRAPHY - A method for analyzing mucosa structure with optical coherence tomography (OCT) is provided, and includes: (a) scanning a mucosa sample with optical coherence tomography; (b) choosing a lateral range from a two- or three-dimensional OCT image and analyzing all the A-scan intensity profiles in the lateral range; (c) calculating three indicators in each A-scan intensity profile, including the standard deviation for a certain depth range below the sample surface, the exponential decay constant of the spatial-frequency spectrum and the epithelium thickness under the condition that the basement membrane is identifiable; and (d) using the three indicators of each A-scan intensity profile within the lateral range to analyze the mucosa structure. | 04-29-2010 |
20100157311 | OPTICAL IMAGE MEASUREMENT DEVICE - Such an optical image measurement device is provided that is capable of acquiring a clear image even when the intensity of an interference light is low. A fundus oculi observation device | 06-24-2010 |
20100231922 | THREE-DIMENSIONAL INTERFEROMETRIC MICROSCOPY - A statistically sparse subset of switchable optical sources in a sample is activated, and the activated switchable optical sources are excited such that optical beams are emitted from the activated switchable optical sources along at least two optical paths. A first wavefront modification in a first optical beam emitted from the activated switchable optical sources along a first optical path is introduced and a second wavefront modification in a second optical beam emitted from the activated switchable optical sources along a second optical path is introduced, the second wavefront modification being distinct from the first wavefront modification. The first and second optical beams are interfered with each other to produce a plurality of output beams, and three-dimensional position information of the optical sources is determined based on an intensity of each output beam from the plurality of output beams. | 09-16-2010 |
20100259760 | Device for position detection - An apparatus for position finding, including a light source to produce a wave field in a measurement section, a wave field variation device to generate a variation of a wavelength of the wave field over time, an interferometer to produce an interference pattern for the wave field which is dependent on the length of the measurement section, a detector to produce a measurement signal on the basis of the detected interference pattern, and an evaluation circuit to evaluate the measurement signal on the basis of the variation over time. | 10-14-2010 |
20110037987 | OPTICAL SENSOR DEVICE - An optical sensor device ( | 02-17-2011 |
20110085174 | METHODS AND APPARATUS FOR INVESTIGATION OF VOLUME CHANGE DYNAMICS OF PHYSIOLOGICALLY ACTIVE SAMPLES - A transversal change of the position of a measured sample surface exposed to the influence of visible radiation for example actinic light, is measured interferometrically by a reflecting target, which is in mechanical contact with the measured sample surface, and reflects a measuring beam, generated together with a reference beam by a laser source, and the transversal change of the position of the measured sample surface is detected from the phase difference of harmonic waves in the beam of interfering radiation. The device involves, for example, a special detection connection of photodetectors, a measuring unit and a basic module with a computer, the design of reflecting targets for liquid and solid samples, an optomechanical dimension transmitter and a holder of solid samples. | 04-14-2011 |
20110128551 | INTERFEROMETRIC SYSTEM AND METHOD FOR ADJUSTING A PATH DIFFERENCE - An interferometric system for measuring a measured object, having an arrangement for generating a measuring beam path, measuring beams being directed at the measured object, having an arrangement for generating a reference beam path, reference beams being directed to a reference element, having an adjusting arrangement for adjusting a path difference between the measuring beams and the reference beams, and a having a detector for recording images of the superposition of the reference beams and the measuring beams reflected by the measured object. According to the present system, a synchronization arrangement is used to control the adjusting arrangement so that the path difference between the measuring beams and the reference beams is adjusted in synchronization with the images recorded by the detector. The present system also relates to a method for adjusting a path difference. | 06-02-2011 |
20110128552 | ROTATIONAL AND LINEAR SYSTEM AND METHODS FOR SCANNING OF OBJECTS - A scanning system comprised of a multi-axis drive module comprised of a first linear drive operable along a first axis, a second linear drive joined to the first linear drive and operable along a second axis non-parallel to the first axis, and a first rotary drive mounted on the second linear drive, operable around an axis parallel to the first axis, and comprised of a rotary fixture for holding the object. A first optical probe is provided for scanning the object. The rotary fixture for holding the object may include a central object-receiving port. A first fluid circuit may be provided, which is in communication with the central object-receiving port. In that manner, an internal cavity of the object may be pressurized through a passageway in the portion of the object that is disposed in the central object-receiving port, thereby stabilizing a region of the object to be scanned. | 06-02-2011 |
20110157599 | Uses of Electromagnetic Interference Patterns - Various uses of visible light interference patterns are provided. Suitable interference patterns are those formed by diffraction from patterns of apertures. Typical uses disclosed herein relate to spatial metrology, such as a translational and/or angular position determination system. Further uses include the analysis of properties of the light itself (such as the determination of the wavelength of the electromagnetic radiation). Still further uses include the analysis of one or more properties (e.g. refractive index) of the matter through which the light passes. Part of the interference pattern is captured at a pixellated detector, such as a CCD chip, and the captured pattern compared with a calculated pattern. Very precise measurements of the spacing between maxima is possible, thus allowing very precise measurements of position of the detector in the interference pattern. | 06-30-2011 |
20110181889 | OPTICAL INTERFERENCE MEASURING METHOD AND OPTICAL INTERFERENCE MEASURING APPARATUS - In an optical interference measuring method according to the present invention, light emitted from a light source unit is split into measuring light and reference light, coherent light is detected that is obtained by interference of the reference light and the measuring light reflected from or scattered rearward from a measuring object, an optical-path length adjustment mechanism provided in the optical path of the reference light is driven to change the optical path length of the reference light, it is decided whether an image based on the detected coherent light is a normal image or a folded image based on the coherent light having varied with the change of the optical path length of the reference light, and the measuring object is measured from the detected coherent light based on a result of the decision about whether the image is a normal image or a folded image. | 07-28-2011 |
20110205547 | OBSERVATION DEVICE, AND OBSERVATION METHOD - The observation device | 08-25-2011 |
20110205548 | IMAGE ACQUISITION APPARATUS AND IMAGE ACQUISITION METHOD USING OPTICAL COHERENCE TOMOGRAPHY - An image acquisition apparatus that uses optical coherence tomography includes a scanning unit provided within a light path that guides signal light to be incident on an examination object towards the examination object and configured to scan the signal light in a main scanning direction; and a control unit configured to control the scanning unit such that an integration time of an optical interference signal per pixel in at least one predetermined area other than opposite ends, in the main scanning direction, of an image acquisition region scanned by a plurality of main scan lines is increased relative to that of an area other than the predetermined area. | 08-25-2011 |
20110222069 | LIGHT-INTERFERENCE MEASURING APPARATUS - A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes. | 09-15-2011 |
20110222070 | Optical Tomographic Image Forming Method - An optical tomographic image forming method including: splitting low coherence light emitted from a light source is split into a measuring light and a reference light; forming an optical tomographic image of a measured object by detecting an interference light that is obtained by superposing reflected light, reflected from the measured object when the measuring light is irradiated onto the measured object via a condenser lens, and reflected light, reflected from a reference mirror, which is positioned a predetermined length of optical path away from the splitting position, when the reference light is irradiated onto the reference mirror, wherein the method further includes: inputting a refractive index of the measured object; correcting the tomographic image in accordance with the inputted refractive index of the measured object; and outputting the corrected tomographic image. | 09-15-2011 |
20110242544 | METHOD AND APPARATUS FOR MEASURING STRUCTURES ON PHOTOLITHOGRAPHY MASKS - The invention relates to a method for measuring structures on masks ( | 10-06-2011 |
20110255097 | METHOD AND SYSTEM FOR EVALUATING A HEIGHT OF STRUCTURES - A system and method for measuring a height difference between an extremum portion of a microscopic structure and a background element, the method includes detecting, by a sensor, first and second interference patterns by a sensor; wherein the first and second interference patterns are generated by illuminating an area of a sample by a first light beam and directing towards the sensor a first reference light beam of a first wavelength (w | 10-20-2011 |
20110304854 | INSTANTANEOUS, PHASE MEASURING INTERFEROMETER APPARATUS AND METHOD - The present invention generally relates to measuring and testing in the area of optics, and more specifically to a plurality of interacting coherent light beams to produce a cancellation or reinforcement of wave energy for measuring or testing. The present invention is directed to an improved interferometer system wherein a measurement is derived from phase measurements, wherein measurements include: distance, angular speed, as well as other physical or metrological properties. The present invention includes an interferometer that uses an illumination source comprised a plurality of simultaneously activated laser beams, each possessing a different wavelength contained in a coherent composite laser beam. | 12-15-2011 |
20110317168 | SYSTEM AND METHOD FOR INTERFEROMETRIC AUTOFOCUSING - The present invention includes a camera configured to collect light reflected from the surface of a specimen, a two beam interference optical system including: an illumination source; a reference mirror configured to reflect substantially less light from a center region than from a peripheral region; and a first beam splitter configured to direct a first portion of light from the illumination source along an object path and a second portion of light from the illumination source along a reference path, wherein the camera and reference mirror are arranged such that light reflected from the reference mirror does not impinge on a FOV of the camera; and an autofocusing system disposed along a secondary optical axis, wherein the autofocusing system is configured to analyze one or more interference fringes created by a superposition of light reflected from the specimen surface and the peripheral region of the reference mirror surface. | 12-29-2011 |
20120013916 | MEASUREMENT METHOD FOR MEASURING SHAPE OF TEST SURFACE, MEASUREMENT APPARATUS, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT - Provided is a measurement method or apparatus that can reduce the time for measuring the shape of an entire test surface. Each of a plurality of measurement ranges is set so that one measurement range overlaps a portion of at least another measurement range to form an overlap region, each measurement range being a portion of the test surface. Then, the shape of the test surface is measured at a first resolution in a first measurement range among the plurality of measurement ranges, and is measured at a second resolution in a second measurement range. Pieces of data of the shapes of the test surface in the plurality of measurement ranges are stitched together using the resulting measurement data to calculate the shape of the test surface. | 01-19-2012 |
20120120409 | Dual Input Interferometer Beamsplitter Tilt Control System and Flexure Mounting - A novel soft beamsplitter mounting system as part of an interferometer to protect the beamsplitter substrate from external stresses and thus preserve optical flatness is introduced. The soft mounting system enables such protection by being more flexible that the beamsplitter substrate so external forces deforms the mount rather than the beamsplitter. Although the soft beamsplitter mounting configurations disclosed herein protects the beamsplitter, the interferometer itself is less stable because the mounts of the present invention allows the beamsplitter to tilt more easily than other components held in the interferometer. The improved tilt control embodiments of the present invention turns this seemingly deleterious effect into a cost saving benefit by using the inexpensive soft mounting system as a flexure to allow an improved active control system to maintain tilt alignment in a system that is more rugged than conventional interferometers. | 05-17-2012 |
20120140240 | LASER-SCANNING INTERSECTING PLANE TOMOGRAPHY SUCH AS FOR HIGH SPEED VOLUMETRIC OPTICAL IMAGING - Laser-Scanning Intersecting Plane Tomography (L-SIPT) can provide a non-contact imaging geometry that can allow high speed volumetric scanning, such as of non-scattering to moderately scattering tissues. The L-SIPT imaging apparatus can include a first lens, located and configured to receive from a sample light received from different depths of the sample. A first light redirector can be located and configured to receive via the first lens and to redirect light received from the different depths of the sample to provide redirected light to a light detector capable of detecting individual measurements of light at different locations along a first direction. A second light redirector can be located and configured to redirect light received from a light source to provide redirected light to the sample, wherein the second light redirector is in a specified spatial relationship to the first light redirector, and wherein the first and second light redirectors are configured to be adjusted during a scan of the sample so as to provide the specified spatial relationship during the scan. | 06-07-2012 |
20120140241 | OPTICAL SYSTEM, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - An optical system, such as a microlithographic projection exposure apparatus, includes a first optical component, a second optical component, and a measurement arrangement for determining the relative position of the first optical component and the second optical component in six degrees of freedom. The measurement arrangement is adapted to determine the relative position of the first optical component and the second optical component over six different length measurement sections. The length measurement sections extend directly between the first optical component and the second optical component. | 06-07-2012 |
20120162662 | Actively Mode Locked Laser Swept Source for OCT Medical Imaging - An optical coherence analysis system uses a laser swept source that is constrained to operate in a mode locked condition. This is accomplished by synchronously changing the laser cavity's gain and/or phase based on the round trip travel time of light in the cavity. This improves high speed tuning by taking advantage of frequency shifting mechanisms within the cavity and avoids chaotic laser behavior. | 06-28-2012 |
20120170049 | Novel method and apparatus for 3-D scanning of translucent samples for radiation - The present invention discloses a device to measure optical properties of a three-dimensional translucent object, and a novel method to use the device to produce a valid, reproducible, and quantitative image of optical properties across the entire volume of the translucent object. The invention provides significant and useful improvements over existing practice. The invention provides a scanning instrument which eliminates the current practice of employing liquid refractive index matching solutions. The invention further provides a new method for reconstructing a three-dimensional image from light transmitted through the entire volume of a three-dimensional translucent object. This is accomplished by accounting explicitly for the bending of the light rays using an alternative method of reconstructing the images known as the Algebraic Reconstruction Technique. | 07-05-2012 |
20120224185 | Multi-Point Interferometric Phase Change Detection Method - Provided is a method for measuring multi-point interferometric angle changes beginning with an interferometric device capable of measuring at least one main point and at least one reference point. The method includes recording interferometric intensity changes on two or more spots using the main point and the reference point, and determining a sequence having a plurality of peak, local maximas and a plurality of valley, local minimas. The method includes sampling a first, partial sequence and comparing it to a neighboring, partial sequence using a perturbation analysis and additional calculation(s) to compile all phase angle changes for all measured points. Also provided is a computer implemented method to enable nanometer resolution sensitivity in a noisy signal and for characterization of a material in an interferometric device. | 09-06-2012 |
20120243000 | SHAPE MEASUREMENT METHOD AND SHAPE MEASUREMENT APPARATUS - On each of an optical axis of light entering a measurement object and an optical axis of light entering a reference mirror, compound lens whose achromatic condition, beam diameter condition, and color difference reduction condition are optimized using the focal length and/or the Abbe number of a collimator lens are placed. By correcting the wavefront by using the compound lens, the effect of the wavefront aberration is reduced, and the resolution in the shape measurement based on the optical interferometry is increased. | 09-27-2012 |
20130010304 | OPTICAL TOMOGRAPHY SYSTEM - An optical tomography system is provided. The optical tomography system includes a light source emitting a light beam. A beamsplitter splits the light beam into a first reference light beam and a first sample light beam. The first reference light beam is incident to an optical delay device, and the first sample light beam is incident to a focusing device, focused to a sample. A second reference light beam reflected from the optical delay device and a second sample light beam reflected from the sample are incident through the beamsplitter to a detection device. Different portions of the second reference light beam along a first dimension have different optical path lengths. | 01-10-2013 |
20130176574 | Method and Device for Optical Measurement - The invention proposes an optical method of measurement and an optical apparatus for determining the spatial position of at least one luminous nanoemitter of a sample, the method comprising: the projection of a sequence of at least two compact luminous distributions of different topological families onto the sample, the detection of the light reemitted by said at least one luminous nanoemitter of the sample; the generation of at least one optical image for each luminous distribution, on the basis of the light detected; and the algorithmic analysis of the optical images to obtain information regarding the location of said at least one luminous nanoemitter. The invention further relates to an optical method of measurement and an optical apparatus for determining the spatial position of a plurality of point light sources, the method comprising the detection of the light emitted by the plurality of point light sources; and the separation of the light emitted on a plurality of detectors for simultaneous or sequential detections; the proportion of the light emitted by a point light source, channeled to a specific detector, being dependent on the spatial position of said point light source; and the generation of the optical images on the basis of the light detected; and the algorithmic analysis of the optical images to obtain an item of information regarding the location of the plurality of point light sources. | 07-11-2013 |
20130222814 | LENSLESS IMAGING WITH REDUCED APERTURE - An image of an object can be synthesized either from the Fourier components of the electric field or from the Fourier components of the intensity distribution. Imaging with a lens is equivalent to assembling the Fourier components of the electric field in the image plane. This invention provides a method and a means for lensless imaging by assembling the Fourier components of the intensity distribution and combining them to form the image with the use of amplitude splitting interferometer. The angular spectrum of the electromagnetic radiation consists of wavefronts propagating at different angles. The amplitude of each wavefront is split and interfered with itself to create sinusoidal fringe patterns having different spatial frequencies. The sinusoidal fringe patterns are combined to form an image of the object. This method applies to coherent and incoherent light. | 08-29-2013 |
20140055792 | ESTIMATING MATERIAL PROPERTIES USING SPECKLE STATISTICS - A surface roughness value and a sub-surface scattering property of a material are estimated. The material is illuminated with a light beam with controlled coherence properties at multiple incident angles. Multiple speckle patterns are recorded, each speckle pattern being recorded for a respective one of the multiple incident angles. Both of a surface roughness value and a sub-surface scattering property of the material are estimated by calculations using the multiple speckle patterns and the incident angle for each such speckle pattern. | 02-27-2014 |
20140125990 | OPTICAL MEASURING SYSTEM WITH FILTER UNIT FOR EXTRACTING ELECTROMAGNETIC RADIATION - An optical measuring system determines coordinates of points for distance measurement. The measuring system includes a radiation source for emitting electromagnetic radiation and a receiving unit having a filter unit for extracting electromagnetic radiation in a defined wavelength range and having, a detector, such that the radiation extracted by the filter unit is detectable by the detector. The filter unit includes at least two mirror elements which are at least partly reflective and constructed in a multilayered fashion. The mirror elements are substantially parallel to one another. Two adjacent mirror elements in each case enclose a cavity and are arranged at a specific distance from one another. An optical thickness is defined by a refractive index of the cavity and by the distance between the mirror elements. Optical thickness varying means operate to varying the optical thickness, such that an extractable wavelength range of the filter unit is varied. | 05-08-2014 |
20140139847 | DETERMINATION OF A MATERIAL CHARACTERISTICS WITH THE USE OF SECOND-ORDER PHOTON CORRELATIONS - An optical system and method for characterizing an object is provided. The system includes at least one light source configured to direct photons toward an object and an interferometer configured to receive photons from the object. The system also includes at least one detector system adapted to detect an optical signal at an output of the interferometer and to remove, from the detected optical signal, a signal portion representing first order photon correlations, when present. The system also includes a processor configured to receive data relating to second-order correlated photons from said at least one detector system, each photon or photon pair subject to at least two indistinguishable paths to a photon or photon pair, but differing in at least one of time and length. The processor is configured to characterize the object based on a self interference of the second-order correlated photons from a common location within the object. | 05-22-2014 |
20140355002 | ERROR MEASUREMENT METHOD AND MACHINE TOOL - A method for measuring errors in the linear feed shafts of a multi-spindle machine tool having two or more rotating feed shafts in addition to three linear feed shafts, wherein: at least first through third reflecting minors are attached to a table of the machine tool; a laser length-measuring machine is attached to the tip of a principal shaft of the machine tool; the linear feed shafts are driven, and the laser length-measuring machine is moved to prescribed measuring points; the two or more rotating feed shafts are driven at each of the measuring points; the coordinates at each measuring point are calculated by measuring the distances between the first through third reflecting minors and the laser length-measuring machine; and errors in the linear feed shafts of the machine tool are obtained by comparing the machine coordinates of the machine tool. | 12-04-2014 |
20150077760 | Robust One-Shot Interferometer and OCT Method for Material Measurement and Tumor Cell Recognition - Disclosed are methods and an assembly for robust one-shot interferometry, in particular for optical coherence tomography according to the spatial domain approach (SD-OCT) and/or according to the light-field approach. In one embodiment, the method and the assembly may be used for measurements on material and living tissue, for distance measurement, for 2D or 3D measurement with a finely structured light source imaged onto the object in a diffraction-limited way, or with spots thereof. | 03-19-2015 |
20150300811 | APPARATUS FOR MEASURING INNER DIAMETER - There is provided an apparatus for measuring an inner diameter, the apparatus including: an optical unit irradiating light to an object to be measured, and receiving the light therefrom; a measurement auxiliary member inserted into the object to improve measurement precision; and a calculating unit calculating an inner diameter of the object by interference between light reflected and received from an inner peripheral surface of the object and light reflected and received from an outer peripheral surface of the measurement auxiliary member. | 10-22-2015 |
20150369588 | OPTICAL MEASUREMENT APPARATUS AND METHOD OF CONTROLLING THE SAME - According to example embodiments, an optical measurement apparatus may include: a station configured to support a measurement target; an image acquisition unit configured to acquire a one-dimensional (1D) line image of the measurement target; a driver configured to move the station and the image acquisition unit; and a controller. The controller may be configured to control the driver and the image acquisition unit to acquire a plurality of 1D line images of the measurement target while varying a distance between the image acquisition unit and the measurement target to generate a two-dimensional (2D) scan image from combining the plurality of 1D line images; and to detect a pattern of the measurement target based on comparing a plurality of 2D reference images and the 2D scan image. The optical measurement apparatus may measure critical dimensions of non-repeating ultrafine patterns at high speed. | 12-24-2015 |
20160039045 | Methods and Systems for Characterizing Laser Machining Properties by Measuring Keyhole Dynamics Using Interferometry - A method, apparatus, and system are provided to monitor and characterize the dynamics of a phase change region (PCR) created during laser welding, specifically keyhole welding, and other material modification processes, using low-coherence interferometry. By directing a measurement beam to multiple locations within and overlapping with the PCR, the system, apparatus, and method are used to determine, in real time, spatial and temporal characteristics of the weld such as keyhole depth, length, width, shape and whether the keyhole is unstable, closes or collapses. This information is important in determining the quality and material properties of a completed finished weld. It can also be used with feedback to modify the material modification process in real time. | 02-11-2016 |
20160061689 | IN-LINE INSPECTION OF OPHTHALMIC DEVICE WITH AUTO-ALIGNMENT SYSTEM AND INTERFEROMETER - Disclosed are in-line apparatuses, systems and methods for measuring a physical characteristic of a constant supply of an ophthalmic device, the apparatuses including: an interferometer; an automatic alignment system that positions the interferometer or ophthalmic device; and a central processing unit in communication with the automatic alignment system and receiving measurements from the interferometer. The in-line apparatus measures the desired physical dimensions of the ophthalmic device in real time. In-line systems, apparatuses and methods for measuring a physical characteristic of an ophthalmic device can include: a camera imaging an actual position of a feature of the ophthalmic device; a vibration resistant interferometer projecting a surface measurement beam having a wavelength that transmits through a beam splitter onto the ophthalmic device; and an automatic alignment system positioning the interferometer and the camera. | 03-03-2016 |
20160123717 | MULTIPLE BEAM PATH LASER OPTICAL SYSTEM USING MULTIPLE BEAM REFLECTOR - A multiple beam path laser optical system using a multiple beam reflector. The multiple beam path laser optical system includes a light source part to generate a laser beam to be irradiated to a specimen, the multiple beam reflector to split a laser beam incident thereto from the light source part and to provide a plurality of optical paths, a main beam splitter to irradiate the laser beam split by the multiple beam reflector to the specimen, a transducer to excite the specimen for signal detection of the laser beam irradiated to the specimen, and a control part to analyze an interference pattern of a laser beam reflected from the specimen and recombined in the main beam splitter. | 05-05-2016 |
20160131472 | OPTICAL MEASUREMENT SYSTEM AND METHOD FOR MEASURING CRITICAL DIMENSION OF NANOSTRUCTURE - Provided is an optical measurement system. The optical measurement system includes: an optical module which includes an optical system and which is configured to illuminate a sample and register a defocused image of a nanostructured surface of the sample, an optical system parameter control module configured to set optical parameters of the optical system, an optical transfer function (OTF) measurement module configured to measure an OTF, a defocused image calculation module configured to calculate the defocused image based on the measured OTF and the optical parameters, and a critical dimension (CD) evaluation module configured to compare the registered defocused image with the calculated defocused image of the nanostructured surface of the sample and to output a CD value of the nanostructured surface. | 05-12-2016 |
20160169667 | Ultra-Miniature Wide-Angle Lensless CMOS Visual Edge Localizer | 06-16-2016 |
20160187265 | Bore Testing Device - A bore testing device for testing the inner surface of a bore in a workpiece is described. The bore testing device has a measuring head which defines an axial direction, and on which axial direction an optical system is situated which is in image transmission connection with a digital image sensor and a downstream evaluation apparatus. An apparatus for determining surface depth information from the output signals of the digital image sensor is provided. | 06-30-2016 |