| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 356316000 | By high frequency field (e.g., plasma discharge) | 37 |
| 20080239309 | System and Method For Measuring Air Quality Using A Micro-Optical Mechanical Gas Sensor - A system and method for measuring air quality using a micro-optical mechanical gas sensor is disclosed. According to one embodiment of the present invention, the system includes an emission source that includes a conduit gap for receiving a gas; a plurality of electrodes for applying an electric field to at least a portion of the conduit gap, the application of the electric field creating a plasma in the conduit gap; and a detector that detects an emission from the plasma. The emission source and the detector may be micro-optical mechanical devices. A method for measuring air quality is discloses. According to one embodiment, the method includes the steps of (1) placing a chip containing an emission source and a detector in a gas flow; (2) applying an electric field to at least a portion of a conduit gap within the emission source, the electric field creating a plasma; (3) detecting an emission from the plasma; and (4) processing data related to the detected emission to determine at least one constituent of the gas flow. | 10-02-2008 |
| 20090059221 | Plasma spectroscopy system with a gas supply - A spectroscopy system for spectro-chemical analysis of a sample includes a plasma torch ( | 03-05-2009 |
| 20090201500 | Hydrogen sensor - A hydrogen sensor for detecting/quantitating hydrogen and hydrogen isotopes includes a sampling line and a microplasma generator that excites hydrogen from a gas sample and produces light emission from excited hydrogen. A power supply provides power to the microplasma generator, and a spectrometer generates an emission spectrum from the light emission. A programmable computer is adapted for determining whether or not the gas sample includes hydrogen, and for quantitating the amount of hydrogen and/or hydrogen isotopes are present in the gas sample. | 08-13-2009 |
| 20100201978 | LIGHT SOURCE - To provide a light source which realizes accurate determination of the particle density of a plasma atmosphere without disturbing the state of the plasma atmosphere. | 08-12-2010 |
| 20100225909 | SPECTROCHEMICAL PLASMA TORCH AND METHOD OF MANUFACTURE - The present invention describes a torch for producing a plasma for a spectrochemical analysis comprising: an alumina ceramic injector, a vitreous material inner tube concentric with the injector, and an annular joint between the injector and the inner tube. The joint fixedly attaches the injector and the inner tube together and comprises of an adhesive compatible with vitreous material and alumina ceramic. A method of manufacturing the torch is also described. | 09-09-2010 |
| 20100277724 | SYSTEM FOR ANALYZING A LOW-PRESSURE GAS BY OPTICAL EMISSION SPECTROSCOPY - The object of the invention is a system ( | 11-04-2010 |
| 20100296087 | METHOD FOR ASSESSING TRACE ELEMENT RELATED DISORDERS IN BLOOD PLASMA - The present invention provides for spectrometric methods of analyzing blood plasma or serum for metal distribution in metalloproteins by subjecting the sample to size-exclusion chromatography (SEC) and determining the metal content of the separated protein fractions by inductively-coupled plasma atomic emission spectrometry (ICP-AES). The methods can be used to assess such conditions as toxicity and disease in subjects. | 11-25-2010 |
| 20110134424 | METHOD OF MEASURING GADOLINIA CONTENT USING INDUCTIVELY COUPLED PLASMA-ATOMIC EMISSION SPECTROMETRY - A method of measuring a gadolinia content using inductively coupled plasma-atomic emission spectrometry is provided. The method can include grinding sintered gadolinium using a percussion mortar to obtain a ground sample; warming the ground sample and then dissolving it with an acid solution to obtain dissolved gadolinia; diluting the dissolved gadolinia with distilled water to obtain a diluted gadolinia solution; measuring mass of each of a uranium element and a gadolinium element in the diluted gadolinia solution by a unit of ppm using the inductively coupled plasma-atomic emission spectrometry; and calculating a molar fraction of gadolinium from the diluted gadolinia solution and then calculating the gadolinia content using the molar fraction of gadolinium. | 06-09-2011 |
| 20110222058 | PROCESS MONITORING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS INCLUDING THE SAME - Provided are a process monitoring device for monitoring semiconductor device manufacturing processes, a semiconductor process apparatus including the same, and a process monitoring method thereof. The process monitoring device generates plasma from the exhaust gas of the process chamber using DBD-type electrodes and analyzes a spectrum of emission light from the plasma, thereby monitoring the semiconductor manufacturing process performed in the process chamber. | 09-15-2011 |
| 20120044488 | Device for Analysing Materials by Plasma Spectroscopy - A device for analyzing materials by plasma spectroscopy is of the portable and independent type, comprising a housing ( | 02-23-2012 |
| 20120062887 | Plasma Generating Units and Process Monitoring Devices and Semiconductor Process Apparatus Including the Same - A plasma generating unit for a process monitoring device includes a hollow first electrode extending in a length direction and a second electrode extending in the length direction and positioned within and displaced from the first electrode with a distance therebetween. The first electrode has an inner diameter and the second electrode has an outer diameter selected to vary the distance between the electrodes in the length direction so that the plasma generating unit generates a plasma by ionizing a gas flowing between the electrodes at a different position in the length direction based on a pressure of the gas. | 03-15-2012 |
| 20120099103 | METHOD AND APPARATUS TO LASER ABLATION-LASER INDUCED BREAKDOWN SPECTROSCOPY - Embodiments of the invention relate to a method and apparatus for analyzing a target material. Specific embodiments can be referred to as laser ablation laser-induced breakdown spectroscopy (LA-LIBS). Embodiments of the invention relate to the use of a first laser beam pulse incident on a target material to create an ablation event so as to produce an ablation plume of target material. Such ablation events can include, for example, plasma ablation, sub-plasma ablation, and thermal desorption. At least a portion of the ablation plume of target material can then be transported a sufficient distance away from the ablation event that a second laser beam pulse can interact with the at least a portion of the ablation plume of target material to create an analytical plasma such that the analytical plasma is uncoupled from the ablation event. The creation of the analytical plasma results in one or more elements of the at least a portion of the ablation plume of target material undergoing atomic emission, which can, optionally, be collected and analyzed. | 04-26-2012 |
| 20120154802 | METHOD FOR VERIFYING REPRESENTATIVENESS OF SAMPLE COLLECTED IN CONTAMINATED SOIL - Disclosed is a method for verifying representativeness of samples collected in a contaminated soil. The method includes the steps of horizontally and vertically collecting the samples from the contaminated soil on a basis of a stratum of the contaminated soil at a predetermined sampling interval; measuring a total concentration of trace elements by analyzing the collected samples according to the sampling interval; and determining horizontal and vertical sampling intervals and a sample number based on a statistical analysis result for the total concentration of the trace elements. | 06-21-2012 |
| 20120224175 | MICROWAVE PLASMA ATOMIC FLUORESCENCE MERCURY ANALYSIS SYSTEM - A method for the detection of mercury or other heavy metals in a gas stream comprises the steps of: providing a pulsed microwave power supply; | 09-06-2012 |
| 20120229804 | BOROSILICATE GLASSWARE AND SILICA BASED QMA'S IN 18F NUCLEOPHILIC SUBSTITUTION: INFLUENCE OF ALUMINUM, BORON AND SILICON ON THE REACTIVITY OF THE 18F- ION - Aluminum, boron and silicon were identified as potential leachables from borosilicate glassware and a silica based QMA during handling of aqueous | 09-13-2012 |
| 20130057858 | PLASMA EMISSION TRANSFER AND MODIFICATION DEVICE - A Plasma Emission Transfer and Modification Device allowing for alteration of the plasma shape or characteristics for e.g. optimized viewing of relevant Plasma zones or improved coupling of a Plasma to the subsequent spectrometer optics, at the same time avoiding negative effects (e.g. heat transfer from the spectro-chemical source into subsequent system components) is described. | 03-07-2013 |
| 20130141720 | PLASMA DIAGNOSTIC APPARATUS AND METHOD - A plasma diagnostic apparatus includes a vacuum chamber unit having at least one electrode and having plasma generated inside. A bias power unit is disposed inside the vacuum chamber unit to apply a radio frequency voltage to an electrode that supports a wafer. A spectrum unit decomposes light emitted from inside the plasma according to wavelengths. A light detection unit detects the light decomposed according to wavelengths. A control unit controls a turn-on and turn-off process of the light detection unit according to a waveform of the radio frequency voltage. | 06-06-2013 |
| 20130208274 | ANALYSIS APPARATUS AND ANALYSIS METHOD - An analysis apparatus includes a plasma generation unit and an optical analysis unit. The plasma generation unit generates initial plasma by momentarily energizing a target substance to be turned into a plasma state, and maintains the target substance in the plasma state by irradiating the initial plasma with an electromagnetic wave for a predetermined period of time. The optical analysis unit identifies the target substance based on information with respect to emission intensity during a period from when the emission intensity reaches a peak due to the initial plasma until when the emission intensity increases and reaches approximately a constant value due to electromagnetic wave plasma maintained by the electromagnetic wave, or information with respect to emission intensity after the electromagnetic wave irradiation is terminated. | 08-15-2013 |
| 20130250293 | Method and Apparatus for Actively Monitoring an Inductively-Coupled Plasma Ion Source using an Optical Spectrometer - A method and apparatus for actively monitoring conditions of a plasma source for adjustment and control of the source and to detect the presence of unwanted contaminant species in a plasma reaction chamber. Preferred embodiments include a spectrometer used to quantify components of the plasma. A system controller is provided that uses feedback loops based on spectral analysis of the plasma to regulate the ion composition of the plasma source. The system also provides endpointing means based on spectral analysis to determine when cleaning of the plasma source is completed. | 09-26-2013 |
| 20130321804 | ELECTRODE-ASSISTED MICROWAVE-INDUCED PLASMA SPECTROSCOPY - Particles of a flow of aerosol are collected and analyzed by passing them through a housing having an inlet area, an outlet area, and a collection and analysis area. A collection electrode has a tip disposed in the flow path in the collection and analysis area. Particles are collected on the tip of the collection electrode. A microwave pulse is applied to the collection and analysis area such that a plasma is created. Atomic emissions produced during at least part of the microwave step are collected for analysis of the ablated particles. | 12-05-2013 |
| 20140071448 | HIGH-FREQUENCY POWER SUPPLY FOR PLASMA AND ICP OPTICAL EMISSION SPECTROMETER USING THE SAME - In a high-frequency power supply for plasma having a housing and a high-frequency circuit substrate placed inside the housing, elements for supplying a high-frequency current to a high-frequency inductive coil are mounted on the high-frequency circuit substrate , a cooling block for cooling the high-frequency circuit substrate is provided, and a coolant path a for allowing a coolant to flow through is formed inside the cooling block so that the coolant is allowed to flow through the coolant path when a high-frequency current is supplied and the coolant is not allowed to flow through the coolant path when a high-frequency current is not supplied. | 03-13-2014 |
| 20140085631 | DEVICE FOR THE HIGH-RESOLUTION MAPPING AND ANALYSIS OF ELEMENTS IN SOLIDS - A device is provided for mapping and for analysis of at least one element of interest included in a solid sample by laser-induced plasma optical emission spectrometry, enabling a high-resolution mapping, notably of elements such as hydrogen and oxygen, and is applicable to the fields of the nuclear industry and of aeronautics, and notably offers the advantage of not requiring costly installations. In one of the embodiments of the invention, a simultaneous mapping of elements such as hydrogen, oxygen and/or lithium is notably achievable. | 03-27-2014 |
| 20140118735 | HIGH-FREQUENCY POWER SUPPLY FOR PLASMA AND ICP OPTICAL EMISSION SPECTROMETER USING THE SAME - In a high-frequency power supply for plasma having a housing and a high-frequency circuit substrate placed inside the housing elements for supplying a high-frequency current to a high-frequency inductive coil are mounted on the high-frequency circuit substrate, a cooling block for cooling the high-frequency circuit substrate, a fan for sending air to the elements on the high-frequency circuit substrate as wind are further provided, and fins for allowing air to flow through so that the air is cooled are formed on the surface of the cooling block. The housing is provided with an air path for supplying the air that has flown through the fins to the absorbing side of the fan. | 05-01-2014 |
| 20140168644 | APPARATUS FOR ANALYZING ELEMENTS IN LIQUID - An elemental analysis apparatus | 06-19-2014 |
| 20140218729 | Means of Introducing an Analyte into Liquid Sampling Atmospheric Pressure Glow Discharge - A liquid sampling, atmospheric pressure, glow discharge (LS-APGD) device as well as systems that incorporate the device and methods for using the device and systems are described. The LS-APGD includes a hollow capillary for delivering an electrolyte solution to a glow discharge space. The device also includes a counter electrode in the form of a second hollow capillary that can deliver the analyte into the glow discharge space. A voltage across the electrolyte solution and the counter electrode creates the microplasma within the glow discharge space that interacts with the analyte to move it to a higher energy state (vaporization, excitation, and/or ionization of the analyte). | 08-07-2014 |
| 20140268133 | Methods and Systems for Analyzing Samples - The disclosure features methods for analyzing a sample, the methods including exposing the sample to plurality of pulses of electromagnetic radiation to convert a portion of the sample into a plasma, recording a spectrum of electromagnetic radiation emitted in response to each of the plurality of pulses to define a sequence of spectra for the sample, and using an electronic processor to determine information about the sample based on the spectra, where exposing the sample to the plurality of pulses of electromagnetic radiation includes directing the pulses to be incident on different spatial regions of the sample, and where a temporal delay between exposing the sample to each successive radiation pulse is constant. | 09-18-2014 |
| 20140362375 | SYSTEM FOR PROVISION OF ANALYSIS RESULTS, ANALYSIS TERMINAL, AND METHOD FOR PROVISION OF ANALYSIS RESULTS - To implement an analysis result provision system that can acquire an analysis result of a target substance without transferring the substance when the substance is analyzed using plasma light information occurred from plasma area where the substance is turned to plasma state, a provision system of analysis result includes an analytical terminal that turns a target substance to plasma state and acquires plasma light information occurred from plasma area, and a host computer. The host computer includes host side communication part that acquires plasma light information via telecommunication line, and information analysis part that analyzes the target substance using plasma light information acquired by the host side communication part. The host side communication part transmits the analysis result of the target substance to the sender of the plasma light information. The analysis result is obtained by the analysis of the information analysis part using plasma light information. | 12-11-2014 |
| 20150009496 | ELEMENTAL ANALYSIS DEVICE IN LIQUID - An elemental analysis device that analyzes an element in a liquid with high sensitivity and with a simple configuration is provided. The elemental analysis device of the present disclosure disposes a part of a first electrode disposed around an insulator having an opening portion, and a part of a second electrode. The elemental analysis device applies a voltage by use of a power supply disposed between the first electrode and the second electrode. The elemental analysis device analyzes the element in the liquid so that a light detection device detects an emission spectrum generated by interaction of plasma generated by applying the voltage with the element in the liquid. | 01-08-2015 |
| 20150015881 | GAS CONCENTRATION ESTIMATION DEVICE - The present invention aims at realizing a gas concentration estimation apparatus with versatility wherein the gas concentration estimation apparatus estimates concentration of a target component in an analyte gas by analyzing a light emitted from plasma of the analyte gas. The present invention is directed to a gas concentration estimation apparatus including: a plasma generation device that turns an analyte gas into a plasma state; and an analysis device that analyzes plasma light emitted from the plasma generated by the plasma generation device and estimates concentration of a target component in the analyte gas wherein the analysis device estimates the concentration of the target component based on luminescence intensity of a wavelength component corresponding to luminescence from a predetermined radical within the plasma light, and the predetermined radical is different in atomic structure from the target component and includes an atom or a molecule separated from the target component. | 01-15-2015 |
| 20150029506 | METHOD FOR DETERMINING SULFUR CONTENT IN FIBERS - The invention concerns methods for measuring sulfur content in a fiber or polymer resin sample comprising: a) contacting the sample with a solution comprising sodium hydroxide to convert sulfur to sodium sulfate, b) combusting the sample of step a) in a furnace to remove essentially all organic materials to produce a residue; c) dissolving the residue in concentrated nitric acid; and d) determining the sulfur content of the sample using ICP Emission Spectrometry. | 01-29-2015 |
| 20150085280 | INDUCTION DEVICE - A device for sustaining a plasma in a torch is provided. In certain examples, the device comprises a first electrode configured to couple to a power source and constructed and arranged to provide a loop current along a radial plane of the torch. In some examples, the radial plane of the torch is substantially perpendicular to a longitudinal axis of the torch. | 03-26-2015 |
| 20150124250 | SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PROCESSING - Disclosed is a method, computer method, system, and apparatus for measuring two-dimensional distributions of optical emissions from a plasma in a semiconductor plasma processing chamber. The acquired two-dimensional distributions of plasma optical emissions can be used to infer the two-dimensional distributions of concentrations of certain chemical species of interest that are present in the plasma, and thus provide a useful tool for process development and also for new and improved processing tool development. The disclosed technique is computationally simple and inexpensive, and involves the use of an expansion of the assumed optical intensity distribution into a sum of basis functions that allow for circumferential variation of optical intensity. An example of suitable basis functions are Zernike polynomials. | 05-07-2015 |
| 20150380864 | CONNECTOR ASSEMBLY FOR AN INDUCTIVELY COUPLED PLASMA SOURCE - A connector assembly configured to join an induction coil to a radio frequency generator to provide together with a plasma torch, an inductively coupled plasma source for a spectrometer is disclosed. The connector assembly includes a radial clamping member associated with the radio frequency generator and a sealing member. The radial clamping member has an internal surface configured to receive an end of an induction coil. The connector assembly is configured to provide a secure connection between the end of the induction coil and the RF generator that is substantially electrically conductive and substantially liquid-tight without causing lasting deformation of the radial clamping member or the induction coil. An inductively coupled plasma spectrometer comprising such a connector assembly and a method for securing a connection between an induction coil and a radio frequency generator are also disclosed. | 12-31-2015 |
| 20160135277 | REDUCTION OF AMBIENT GAS ENTRAINMENT AND ION CURRENT NOISE IN PLASMA BASED SPECTROMETRY - In a plasma source configured for producing sample atoms for analysis, such as by optical emission spectrometry or mass spectrometry, a plasma torch includes a torch exit in a chamber. A baffle is positioned between the torch exit and an opposing boundary. The baffle may be positioned and configured to suppress or eliminate vortex shedding in the chamber. | 05-12-2016 |
| 20160168952 | TAGGED PARAFFIN INHIBITORS AND ASPHALTENE INHIBITORS FOR USE IN SUBTERRANEAN OPERATIONS | 06-16-2016 |
| 20160202187 | Plasma Spectrochemical Analysis Method and Plasma Spectrochemical Analyzer | 07-14-2016 |
| 20180024069 | PLASMA SPECTROSCOPIC ANALYSIS METHOD AND PLASMA SPECTROSCOPIC ANALYZER | 01-25-2018 |
