| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 331156000 | Vibrating reed or string type (e.g., tuning fork) | 73 |
| 20090153258 | MEMS resonator array structure and method of operating and using same - Each one of resonators arranged in an N×M MEMS array structure includes substantially straight elongated beam sections connected by curved/rounded sections and is mechanically coupled to at least one adjacent resonator of the array via a coupling section, each elongated beam section connected to another elongated beam section at a distal end via the curved/rounded sections forming a geometric shape (e.g., a rounded square), and the coupling sections disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at substantially the same frequency, in combined elongating/breathing and bending modes, i.e., beam sections exhibiting elongating/breathing-like and bending-like motions. One or more of the array structure's resonators may include one or more nodal points (i.e., that are substantially stationary and/or experience little movement), which are suitable and/or preferable locations to anchor the resonator/array to the substrate, in one or more areas of the structure's curved sections. | 06-18-2009 |
| 20090167450 | Oscillating current converter - [Problem] To provide an oscillating current converter fabricated by utilizing the MEMS technology making it possible to further decrease the size yet improving the conversion efficiency. | 07-02-2009 |
| 20100219898 | RESONATOR ELEMENT AND OSCILLATOR - A resonator element includes: a resonating body having a first region and a second region, the first region receiving a compression stress or an extension stress by a vibration, the second region receiving an extension stress responding to the compression stress in the first region, or a compression stress responding to the extension stress of the first region; and at least one film layer, on a surface of the resonating body between the first and the second regions, having thermal conductivity higher than thermal conductivity of the resonating body. In the element, the film layer includes a recessed section in which at least one film layer is removed between the first and the second regions. | 09-02-2010 |
| 20110063040 | Method of manufacturing piezoelectric resonator, piezoelectric resonator, and electronic component - To provide a piezoelectric resonator in which a casing houses a tuning-fork piezoelectric resonator element and whose failure occurrence caused when shavings of adjustment films scatter and adhere to excitation electrodes is prevented. In a method of manufacturing a quartz-crystal resonator in which a casing | 03-17-2011 |
| 20110084776 | VIBRATING REED, VIBRATOR, OSCILLATOR, AND ELECTRONIC DEVICE - A vibrating reed includes: a base; and a vibrating arm which is extended from one end portion of the base, the vibrating arm having an arm portion which is disposed on the base side, a weight portion which is disposed on a tip side of the arm portion and has a larger width than the arm portion, main surfaces which are respectively disposed on front and back sides of the vibrating arm, side surfaces each of which extends in a longitudinal direction of the vibrating arm to connect the main surfaces on the front and back sides and which are formed so as to face each other, a first groove portion which is a bottomed groove formed at least one of the main surfaces along the longitudinal direction of the vibrating arm, a first excitation electrode which is formed on groove side surfaces each connecting a bottom of the first groove portion with the one main surface, a second excitation electrode which is formed on the both side surfaces, and a projection-in-groove which is disposed on the tip side of a bisector bisecting the vibrating arm in the longitudinal direction and is formed so as to be along the groove side surface with a part of the first groove portion interposed between the projection-in-groove and the groove side surface. | 04-14-2011 |
| 20110128083 | MICROELECTROMECHANICAL RESONANT STRUCTURE HAVING IMPROVED ELECTRICAL CHARACTERISTICS - The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface. | 06-02-2011 |
| 20110133847 | PACKAGE AND VIBRATING DEVICE USING THE SAME - A vibrating device includes: a package having an internal space; and a vibrating reed housed in the internal space of the package, wherein the package has a porous portion formed of a communication hole communicating between the internal space and the outside and a porous body buried in the communication hole, and a metal film closing the internal space is arranged on the outside side of the porous portion. | 06-09-2011 |
| 20110148538 | Crystal device - An object is to provide a crystal device in which an influence due to an electroconductive adhesive is reduced, and vibration characteristics of a crystal piece are favourably maintained. A configuration is such that in a crystal device including: a container main body having a concavity, with a crystal retention terminal formed in a bottom face of the concavity, and with a mounting terminal that is electrically connected to the crystal retention terminal formed on an outer bottom face; a crystal piece accommodated in the concavity, with an excitation electrode formed on both main faces, and with a support electrode that is electrically connected to the excitation electrode using a connecting electrode, formed on both sides of one end portion, and with the support electrode bonded to the crystal retention terminal with an electroconductive adhesive; and a cover that is connected to an open end face of the container main body and hermetically seals the crystal piece, there is provided a jetty being a main face of the crystal piece, and that protrudes on a periphery of the support electrode, and the jetty is formed integral with the crystal piece. | 06-23-2011 |
| 20110169583 | OSCILLATOR HAVING REDUCED SENSITIVITY TO ACCELERATION - An oscillator includes resonator portions each mounted to a substrate via one or more mountings at one end and having an active resonance region defined between a set of electrodes. Each resonator portion has a longitudinal axis directed along the resonator portion from the mounted end to a free end. The resonator portions are mounted such that their longitudinal axes are directed in different directions, e.g. an anti-parallel arrangement, so that acceleration sensitivity vector components aligned with the longitudinal axis cancel each other out. | 07-14-2011 |
| 20110204985 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, AND ELECTRONIC DEVICE - A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference. | 08-25-2011 |
| 20110210800 | MICROMECHANICAL RESONATOR - The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element. | 09-01-2011 |
| 20110210801 | TEMPERATURE MEASUREMENT SYSTEM COMPRISING A RESONANT MEMS DEVICE - A micromechanical resonator device and a method for measuring a temperature are disclosed. In one aspect, the device has a resonator body, an excitation module, a control module, and a frequency detection module. The resonator body is adapted to resonate separately in at least a first and a second predetermined resonance state, selected by applying a different bias, the states being of the same eigenmode but having a different resonance frequency, each resonance frequency having a different temperature dependence. The micromechanical resonator device may have a passive temperature compensated resonance frequency. | 09-01-2011 |
| 20110221536 | MEMS DEVICE AND OSCILLATOR - A MEMS device includes a substrate, a cavity formed above the substrate, a first vibrator contained in the cavity, and a second vibrator contained in the cavity and having a natural frequency different from that of the first vibrator. The first vibrator and the second vibrator are preferably arranged along a long side of the cavity having a rectangular shape in plan view. | 09-15-2011 |
| 20110227657 | VIBRATOR ELEMENT, SENSOR DEVICE, SENSOR, AND ELECTRONIC APPARATUS - A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions. | 09-22-2011 |
| 20110227658 | RESONATOR ELEMENT, PIEZOELECTRIC DEVICE, AND ELECTRONIC DEVICE - A resonator element which can achieve a reduction in size while maintaining vibration characteristics, and a piezoelectric device and an electronic device, are to be provided. A quartz crystal resonator element has a base portion, a pair of arm portions extending from the base portion as a root, and a cut-out portion formed by reducing the width of the base portion in the width direction from each side of the arm portions. The root has a first root portion positioned on a side where the arm portions are opposed to each other, and a second root portion positioned on a side where the arm portions are not opposed to each other, and a relationship between a length A from the first root portion to the second root portion and a length B from the first root portion to an inner end portion of the cut-out portion is A≧B. | 09-22-2011 |
| 20110227659 | VIBRATOR ELEMENT, VIBRATOR, OSCILLATOR, AND ELECTRONIC APPARATUS - A quartz crystal vibrator element having the weight section is provided with the intermediate weight section formed to have an arm width W | 09-22-2011 |
| 20110227660 | RESONATOR ELEMENT, RESONATOR DEVICE AND ELECTRONIC DEVICE - A resonator element includes: a base portion, a first resonating arm that is extended from the base portion along a first direction, and a second resonating arm that is extended from the base portion along a first direction opposite to the first resonating arm, wherein the first resonating arm and the second resonating arm are arranged such that a base end portion of one side resonating arm and a middle portion of the other side resonating arm are arranged in the second direction orthogonal to the first direction. | 09-22-2011 |
| 20110234329 | PACKAGE MARKING METHOD, PACKAGE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE - Provided are a package marking method capable of printing a clean marking without impairing the reliability, a package manufactured by the method, a piezoelectric vibrator, and an oscillator, an electronic device, and a radio-controlled timepiece having the piezoelectric vibrator. A package marking method for printing a marking on the surface of a lid substrate formed of a glass includes a thin film forming step of forming a thin film on the surface of the lid substrate and a marking step of printing a marking on the surface of the lid substrate by irradiating the thin film formed by the thin film forming step with a laser beam to remove the thin film. | 09-29-2011 |
| 20110241790 | Tuning-Fork Type Crystal Vibrating Piece Device and Manufacturing the Same - A method for manufacturing a piezoelectric device comprising steps of preparing a base wafer (S | 10-06-2011 |
| 20110260802 | PARAMETRIC FEEDBACK OSCILLATORS - A parametric feedback oscillator includes a resonator which has at least one transduction element and at least one electromechanical resonating element. The resonator is configured to accept as input a parametric excitation signal at a frequency | 10-27-2011 |
| 20110309891 | MICRO-ELECTROMECHANICAL RESONATOR GEOMETRY - A micro-electromechanical resonator suspended from an anchor. The resonator has: a length; a first width at a first distance from the anchor; and a second width at a second, greater distance from the anchor. The second width is greater than the first width, and the width of the resonator tapers gradually along at least part of its length from the second width to the first width. | 12-22-2011 |
| 20120001700 | RESONATOR - A method of manufacturing a MEMS resonator formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator. The method includes the steps of forming the resonator from the first material; applying the second material to the resonator; and controlling the quantity of the second material applied to the resonator by the geometry of the resonator. | 01-05-2012 |
| 20120007684 | FLEXURAL RESONATOR ELEMENT, RESONATOR, OSCILLATOR, AND ELECTRONIC DEVICE - A crystal resonator element include a pair of resonating arms extending from a base, the resonating arms includes a groove, a slope portion is formed in a connection portion of the resonating arms to the base so that a distance between the groove and the outer edge of each of the resonating arms increases as it approaches the base from the resonating arms, and a non-electrode region which extends over a range of areas from a connection portion connected to a first side surface formed along the longitudinal direction of the groove and a connection portion connected to a second side surface facing the first side surface with a bottom portion disposed there between and in which excitation electrodes are not formed is provided in the groove in at least a part of the bottom portion positioned in the slope portion. | 01-12-2012 |
| 20120007685 | RESONATOR ELEMENT, RESONATOR, AND OSCILLATOR - A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided. | 01-12-2012 |
| 20120013413 | TIMING OSCILLATORS AND RELATED METHODS - Timing oscillators as well as related methods and devices are described. A timing oscillator may include a mechanical resonating structure with major elements and minor elements coupled to the major element. The timing oscillator can generate stable signals with low phase noise at very high frequencies which allows a timing oscillator to be used effectively in a number of devices including computers and mobile phones for time and data synchronization purposes. The signal generated by the timing oscillator can be tuned using a driver circuit and a compensation circuit. | 01-19-2012 |
| 20120025922 | MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) RESONATOR AND MANUFACTURING METHOD THEREOF - A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface. | 02-02-2012 |
| 20120075030 | MEMS ELEMENT, AND MANUFACTURING METHOD OF MEMS ELEMENT - In a MEMS device having a substrate | 03-29-2012 |
| 20120092084 | TUNING-FORK RESONATOR WITH GROOVES ON PRINCIPAL SURFACES - A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface. | 04-19-2012 |
| 20120146736 | MEMS VIBRATOR, OSCILLATOR, AND METHOD FOR MANUFACTURING MEMS VIBRATOR - A MEMS resonator according to the invention includes: a substrate; a first electrode formed above the substrate; and a second electrode having a supporting portion which is formed above the substrate and a beam portion which is supported by the supporting portion and arranged above the first electrode, wherein the beam portion has, in plan view, a shape in which the width monotonically decreases in a direction from the supporting portion toward a tip of the beam portion in a region overlapping the first electrode. | 06-14-2012 |
| 20120188023 | Optimal Leg Design for MEMS Resonator - A microelectromechanical (MEMS) resonator is disclosed that comprises a substrate and a resonator body suspended above the substrate by means of clamped-clamped beams, where each beam comprises two support legs with a common connection to the resonator body, and the resonator body is configured to resonate at an operating frequency. The MEMS resonator further comprises an excitation component configured to excite the resonator body to resonate at the operating frequency, where each beam is further configured to oscillate in a flexural mode at a flexural wavelength as a result of resonating at the operating frequency, and each leg is acoustically long with respect to the flexural wavelength. | 07-26-2012 |
| 20120194283 | VIBRATOR ELEMENT, VIBRATOR, OSCILLATOR, AND ELECTRONIC APPARATUS - A vibrator element includes a base section, vibration arms, and excitation electrodes provided to the respective vibration arms, the excitation electrodes each include a first electrode disposed on a principal surface side of the vibration arm, a second electrode disposed so as to be opposed to the first electrode, and a piezoelectric body extending between the first electrode and the second electrode, and ITO is used as at least one of the first electrode and the second electrode. | 08-02-2012 |
| 20120229224 | METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATING REED, APPARATUS OF MANUFACTURING PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE - A photoresist film forming process to form a film through a spin coating method is included, a plurality of groove portions and a plurality of wall portions are formed in an upper surface of a flow regulating plate, among the plurality of groove portions, the diameter of the outer side surface of a first groove portion is set to be smaller than the longest distance from the rotation center to the outer edge of the square wafer, and is set to be larger than the shortest distance from the rotation center to the outer edge of the square wafer, and among the plurality of groove portions, the diameter of the outer side surface of a second groove portion is set to be smaller than the shortest distance from the rotation center to the outer edge of the square wafer. | 09-13-2012 |
| 20120249254 | MANUFACTURING METHOD OF PACKAGE - Provided is a manufacturing method of a package where a gas generated between a base substrate forming wafer and a lid substrate forming wafer at the time of bonding these two wafers to each other can be easily discharged to the outside. In the method, the base substrate forming wafer and the lid substrate forming wafer are laminated to each other by sandwiching the base substrate forming wafer and the lid substrate forming wafer from both sides in the laminating direction using a lower jig and an upper jig arranged in a vacuum chamber thus forming a wafer bonded body having a plurality of cavities in each of which a piezoelectric vibrating piece is sealed, and the wafer bonded body is cut for every one of plurality of cavities thus forming a plurality of packages. | 10-04-2012 |
| 20120262243 | OSCILLATOR - An oscillator includes: a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other; an amplifier circuit having an input terminal and an output terminal; a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the one of the MEMS vibrators and the output terminal to each other; a signal reception terminal adapted to receive a switching signal used to switch a state of the connection circuit; and a switching circuit adapted to make the connection circuit switch the MEMS vibrator to be connected to the amplifier circuit based on the switching signal, wherein the MEMS vibrators are housed in an inside of a cavity, and the signal reception terminal is disposed outside the cavity. | 10-18-2012 |
| 20130002363 | OUT-OF-PLANE RESONATOR - A microelectromechanical system (MEMS) device includes a resonator anchored to a substrate. The resonator includes a first strain gradient statically deflecting a released portion of the resonator in an out-of-plane direction with respect to the substrate. The resonator includes a first electrode anchored to the substrate. The first electrode includes a second strain gradient of a released portion of the first electrode. The first electrode is configured to electrostatically drive the resonator in a first mode that varies a relative amount of displacement between the resonator and the first electrode. The resonator may include a resonator anchor anchored to the substrate. The first electrode may include an electrode anchor anchored to the substrate in close proximity to the resonator anchor. The electrode anchor may be positioned relative to the resonator anchor to substantially decouple dynamic displacements of the resonator relative to the electrode from changes to the substrate. | 01-03-2013 |
| 20130002364 | SWITCHABLE ELECTRODE FOR POWER HANDLING - A MEMS oscillator includes a resonator body and primary and secondary drive electrodes to electrostatically drive the resonator body. Primary and secondary sense electrodes sense motion of the resonator body. The primary and secondary drive and sense electrodes are configured to be used together during start-up of the MEMS oscillator. The secondary drive electrode and secondary sense electrode are disabled after start-up, while the primary drive and sense electrodes remain enabled to maintain oscillation. | 01-03-2013 |
| 20130009717 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, AND ELECTRONIC DEVICE - A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference. | 01-10-2013 |
| 20130015921 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, AND ELECTRONIC DEVICE - A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference. | 01-17-2013 |
| 20130027145 | ELECTRONIC DEVICE, OSCILLATOR, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE - An electronic device is provided in which alignment of a lid substrate | 01-31-2013 |
| 20130027146 | MEMS VIBRATOR AND OSCILLATOR - A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion. | 01-31-2013 |
| 20130033334 | MEMS RESONATOR AND ELECTRICAL DEVICE USING THE SAME - A MEMS resonator | 02-07-2013 |
| 20130057354 | DRIVER CIRCUIT, PHYSICAL QUANTITY DETECTION APPARATUS, ANGULAR VELOCITY DETECTION APPARATUS, INTEGRATED CIRCUIT DEVICE, AND ELECTRONIC INSTRUMENT - A driver circuit includes a comparator (drive signal generation section) that generates a drive signal based on a signal obtained by converting an oscillation current of a vibrator that has been input via a first signal line into a voltage using an I/V conversion circuit (current/voltage conversion section), and supplies the drive signal to the vibrator via a second signal line, an oscillation detection circuit (oscillation detection section) that detects whether or not the oscillation current has reached a predetermined value after the vibrator has started to oscillate, a startup oscillation circuit (startup oscillation section) that assists an oscillation operation of the vibrator until the oscillation current reaches the predetermined value, and a switch that separates a capacitor from the second signal line until the oscillation current reaches the predetermined value, and connects the capacitor to the second signal line when the oscillation current has reached the predetermined value. | 03-07-2013 |
| 20130147568 | INTER-DIGITAL BULK ACOUSTIC RESONATOR - An inter-digital bulk acoustic resonator including a resonating structure, one or more input electrodes, one or more output electrodes, a substrate, and a supporting structure disposed on the substrate is provided. The resonating structure includes one or more resonating beams and a coupling beam. The resonating beams are connected at opposite two sides of the coupling beam respectively. The input electrodes and the output electrodes are arranged among the resonating beams in interlace. The input electrodes, the output electrodes, and the resonating beams are parallel to each other. Two ends of the coupling beam are connected to the supporting structure, such that the resonating structure is supported on the substrate. | 06-13-2013 |
| 20130249642 | MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND METHOD FOR CONTROLLING A MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS - A microelectromechanical device includes a body, a movable mass, elastically connected to the body and movable in accordance with a degree of freedom, and a driving device, coupled to the movable mass and configured to maintain the movable mass in oscillation at a steady working frequency in a normal operating mode. The microelectromechanical device moreover includes a start-up device, which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency of a first signal correlated to oscillation of the movable mass with a reference frequency, and for deciding, on the basis of the comparison between the current oscillation frequency and the reference frequency, whether to supply to the movable mass a forcing signal packet so as to transfer energy to the movable mass. | 09-26-2013 |
| 20140002202 | VIBRATORY DEVICE AND ELECTRONIC APPARATUS | 01-02-2014 |
| 20140002203 | METHOD AND SYSTEM OF AN ULTRA HIGH Q SILICON CANTILEVER RESONATOR FOR THIN FILM INTERNAL FRICTION AND YOUNG'S MODULUS MEASUREMENTS | 01-02-2014 |
| 20140055206 | RESONATOR ELEMENT HAVING A NOTCHED BASE - A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference. | 02-27-2014 |
| 20140091871 | MEMS ELEMENT AND OSCILLATOR - A MEMS element includes: a substrate; a first electrode formed above the substrate; and a second electrode having a support portion and a beam portion, the support portion being formed above the substrate, the beam portion extending from the support portion, being formed in a state of having a gap between the first electrode and the beam portion, and being capable of vibrating in a thickness direction of the substrate. The width of the beam portion decreases with distance from a base of the beam portion toward a tip of the beam portion. The central length of the beam portion is larger than the lengths of ends of the beam portion. The width of the base of the beam portion is larger than the central length of the beam portion. | 04-03-2014 |
| 20140203883 | RESONATOR, OSCILLATOR, AND METHOD FOR FABRICATING OSCILLATOR - A resonator includes a ring-shaped or disk-shaped resonator main body, a supporting joist, and a securing portion. The supporting joist extends from the resonator main body to support the resonator main body. The securing portion is formed at a distal end of the supporting joist and the securing portion is secured to a base material. The securing portion includes a first rod-shaped portion and a second rod-shaped portion. The first rod-shaped portion is formed in a first direction. The second rod-shaped portion is formed in a second direction different from the first direction. | 07-24-2014 |
| 20140253253 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - A resonator element includes a piezoelectric substrate that includes a vibration portion, and a thick portion which is integrally formed with an outer edge excluding a partial outer edge in an outer edge of the vibration portion and which is thicker than the vibration portion, and a pair of excitation electrodes that are respectively provided on a first main surface and a second main surface of a vibration region which are in front and rear relationships. In addition, the piezoelectric substrate includes first and second beam portions that are provided along a fourth side of the vibration portion. | 09-11-2014 |
| 20140253254 | RESONATOR ELEMENT, RESONATOR, AND OSCILLATOR - A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided. | 09-11-2014 |
| 20140292431 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, SENSOR, AND MOVING OBJECT - A resonator element includes a quartz crystal substrate having a base, a pair of vibration arms extending from the base, and a support arm located between the vibration arms and extending from the base in the direction in which the vibration arms extend. Each of the vibration arms has an arm portion and a hammer head provided at the front end of the arm portion. The arm portion has a pair of principal surfaces and a groove that has a bottom and opens through each of the principal surfaces. In the invention, the width of each of bank-shaped portions of each of the principal surfaces that are disposed side by side on opposite sides of the groove along the width direction of the vibration arm perpendicular to the longitudinal direction thereof is set at 6 μm or smaller. | 10-02-2014 |
| 20140292432 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A resonator includes: a resonator element including a base portion, and a pair of vibrating arms which are integrally provided with the base portion, extend in a first direction from the base portion, and are arranged in a second direction orthogonal to the first direction; a base which supports the resonator element; and a fixing portion which fixes the resonator element with respect to the base, and the resonator element is configured so as to satisfy conditions shown by the following formula (1). | 10-02-2014 |
| 20140292433 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - A resonator element includes a base portion and a pair of vibrating arms that are provided integrally with the base portion and extend in a Y-axis direction from a distal end of the base portion. When the lengths of the vibrating arms are set to L and the lengths of hammerheads are set to H, a relation of 0.183≦H/L≦0.597 is satisfied. When a resonance frequency of a basic vibration mode is set to ω0 and a resonance frequency of a vibration mode different from the basic vibration mode is set to ω1, a relation of (|ω0−ω1|)/ω0≧0.124 is satisfied. | 10-02-2014 |
| 20140368287 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A resonator element includes a base portion, a pair of vibrating arms that are integrally provided with the base portion and extend in a Y-axis direction from a distal end of the base portion, and a supporting arm that is integrally provided with the base portion, is positioned between the vibrating arms, and extends in the Y-axis direction from the distal end of the base portion. A first fixation portion is provided in one principal surface of the base portion, and a second fixation portion is provided in one principal surface of the supporting arm. The resonator element is fixed to an object through fixation members, by the first fixation portion and the second fixation portion. | 12-18-2014 |
| 20140368288 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A resonator element includes a base portion, a pair of vibrating arms that extend in a first direction from the base portion and are arranged along a second direction perpendicular to the first direction, and a supporting arm that extends in the first direction from the base portion and is disposed between the pair of vibrating arms when seen in a plan view. | 12-18-2014 |
| 20150022274 | PIEZOELECTRIC FILM PRODUCING PROCESS, VIBRATOR ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A piezoelectric film producing process includes depositing a piezoelectric body in a mixed atmosphere of N | 01-22-2015 |
| 20150042409 | SYSTEM FOR CONTINUOUSLY OSCILLATING A CANTILEVERED BEAM - A continuously oscillating cantilevered beam having a velocity transducer that produces a preferably voltage signal as a function of the beam's velocity. An amplifier receives the signal and amplifies accordingly to produce an amplified signal that varies as a function of the beam's velocity. The amplified signal powers an electromagnet that is disposed in close proximity to a magnet on the beam. The resulting apparatus is a system that is driven cyclically by a force that is essentially generated in proportion to, and then amplified, the velocity of the beam itself. This ensures that the timing of applying the driving force is precisely synchronized with the movement of the beam. | 02-12-2015 |
| 20150097632 | VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A MEMS vibrator includes: a base portion; a plurality of vibration reeds which extends from the base portion; a supporting portion which extends from a vibration node portion of the base portion; a fixing portion which is connected with the supporting portion; and a substrate in which the fixing portion is disposed on a main surface. The plurality of vibration reeds is separated from the substrate. | 04-09-2015 |
| 20150102865 | VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extends in a direction that intersects with a normal line of the substrate from the base portion. In a planar view, when a length of the vibration portion in a direction in which the vibration portion extends from the base portion is L, and a length of the vibration portion in a direction that intersects with a direction in which the vibration portion extends from the base portion is W, a dimension ratio (L/W) of the vibration portion satisfies a relationship in which 0.2≦(L/W)≦7.0. | 04-16-2015 |
| 20150102866 | VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extend in directions different from each other from the base portion. The MEMS vibrator has a curved surface between the adjacent vibration portions. | 04-16-2015 |
| 20150116049 | SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC APPARATUS - A surface acoustic wave (SAW) resonator and a SAW oscillator and an electronic apparatus including the resonator are to be provided. A SAW resonator includes: an IDT exciting a SAW using a quartz crystal substrate of Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, 42.79°≦|ψ|≦49.57°); one pair of reflection units arranged so as allow the IDT to be disposed therebetween; and grooves acquired by depressing the quartz crystal substrate located between electrode fingers. When a wavelength of the SAW is λ, and a depth of the grooves is G, “0.01λ≦G” is satisfied. | 04-30-2015 |
| 20150116050 | VIBRATING ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - A vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode. In frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc. | 04-30-2015 |
| 20150137899 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE AND MOBILE OBJECT - A resonator element includes a quartz crystal resonator blank provided with a base portion, vibrating arms extending from one end side of the base portion, a connecting portion which is disposed on the other end side of the base portion, and a coupling portion, located between the base portion and the connecting portion, which couples the base portion to the connecting portion. When a thickness of the quartz crystal resonator blank is set to T, a width of the base portion is set to W1, and a width of the coupling portion is set to W2, a relation of 110 μm≦T≦210 μm is satisfied, and a relation of 0.469≦W2/W1≦0.871 is satisfied. | 05-21-2015 |
| 20150137900 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOBILE OBJECT - A resonator element includes a base section, a pair of vibrating arms extending from the base section, and a holding arm extending from the base section between the pair of vibrating arms. The vibrating arms include arm sections extending from the base section and hammerheads provided at the distal end sections of the arm sections. When the mass of the vibrating arms is represented as M1 and the mass of the holding arm is represented as M2, a relation of M1>M2 is satisfied. | 05-21-2015 |
| 20150137901 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOBILE OBJECT - A resonator element includes a base, a quartz crystal resonator blank which is integrally disposed with the base, and has a pair of vibrating arms which are disposed in parallel in an X axial direction, and extend from the base in a Y′ axial direction, the vibrating arms include arms, hammerheads which are positioned on tip end sides of the arms, and are longer than the arms in the X axial direction, a relationship of 0.033×T [μm]| 05-21-2015 | |
| 20150137902 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOBILE OBJECT - Grooves are provided on two main surfaces of a vibration arm. When a thickness of the vibration arm is T, a width of the main surface between an outer edge of the vibration arm and the groove in a plan view along a direction orthogonal to the extending direction of the main surface is W, a sum of depths of the grooves is ta, and ta/T is η, a region that satisfies a relationship of 4.236×10×η | 05-21-2015 |
| 20150295558 | PIEZOELECTRIC FILM PRODUCING PROCESS, VIBRATOR ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A piezoelectric film producing process includes depositing a piezoelectric body in a mixed atmosphere of N | 10-15-2015 |
| 20150381184 | COMPOSITE ELECTRONIC COMPONENT, OSCILLATOR, ELECTRONIC APPARATUS, AND MOBILE OBJECT - A quartz crystal resonator includes a thermistor having electrodes and a quartz crystal resonator body having a package. The quartz crystal resonator body has a plurality of electrode terminals on a second principal surface of the package and the thermistor is placed at the second principal surface side of the package between the electrode terminals in a plan view or within a range surrounded by the electrode terminals. Both the electrode terminals of the quartz crystal resonator body and the electrodes of the thermistor are mounted on a substrate. | 12-31-2015 |
| 20160056790 | RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A quartz crystal resonator element includes: a base portion and a pair of vibrating arms which extend from a first end portion of the base portion along a Y-axis direction. The base portion includes a second end portion provided on the opposite side to a first end portion in the Y-axis direction. The base portion is provided with a protrusion in at least one of a third end portion and a fourth end portion which respectively connect both ends of the first end portion and both ends of the second end portion. | 02-25-2016 |
| 20160072474 | RESONATION ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE AND MOVING OBJECT - A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [μm], and lengths of the resonating arms are set to L [μm], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. | 03-10-2016 |
| 20160087600 | NANOMECHANICAL RESONATOR ARRAY AND PRODUCTION METHOD THEREOF - In the present invention, a nanomechanical resonator array ( | 03-24-2016 |
| 20160126924 | VIBRATING ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A tuning fork-type vibrator element as a vibrating element includes a drive vibrating arm that performs a flexural vibration, and a drive electrode (a first drive electrode and a second drive electrode) provided on the drive vibrating arm. When a direction in which the drive vibrating arm extends is a Y-axis, a direction in which the drive vibrating arm performs a primary vibration is an X-axis, and a direction orthogonal to the Y-axis and the X-axis is a Z-axis, the drive vibrating arm performs the flexural vibration with a displacement ratio of greater than 0% and 20% or less where the displacement ratio is obtained by dividing a displacement amount in the Z-axis direction by a displacement amount in the X-axis direction. | 05-05-2016 |
