| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 324460000 | For monitoring pressure | 30 |
| 20080224711 | IONIZATION VACUUM GAUGE - An ionization vacuum gauge includes a cathode electrode, a gate electrode, and an ion collector. The gate electrode is disposed adjacent to the cathode electrode with a distance therebetween. The ion collector is disposed adjacent to the gate electrode also with a distance therebetween. The cathode electrode includes a base and a field emission film disposed thereon facing the ion collector. | 09-18-2008 |
| 20080278173 | IONIZATION VACUUM GAUGE - An ionization vacuum gauge includes a linear cathode, an anode, and an ion collector. The linear cathode, the anode, and the ion collector are concentrically aligned and arranged from center to outer, in that order. The linear cathode includes a linear base and a field emission film deposited coating on the linear base. The ionization vacuum gauge with low power consumption can be used in a high vacuum system and/or some special vacuum system that is sensitive to heat and light. Such a gauge can be used to determine, simply yet accurately, pressures at relatively high vacuum levels. | 11-13-2008 |
| 20080315887 | Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments - A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current. | 12-25-2008 |
| 20090015264 | Ionization gauge with a cold electron source - An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge. | 01-15-2009 |
| 20090072836 | PRESSURE SENSOR USING FIELD EMISSION OF CARBON NANO-TUBE - Disclosed is an ion gage using a carbon nano-tube, more specifically a pressure sensor using a field emission of the carbon nano-tube. An array of carbon nano-tubes is formed on a metallic layer. A first grid is disposed on the array of the carbon nano-tubes. A second grid is disposed on the first grid in such a manner as to be spaced apart by a certain desired distance from the first grid. A collector is disposed on the second grid in such a manner as to be spaced apart by a certain desired distance from the second grid. Electrons emitted from the carbon nano-tube are collided with gas molecules to be ionized. The ionized cation is sensed by the collector to be outputted as an electrical signal. | 03-19-2009 |
| 20090146665 | Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments - Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes. | 06-11-2009 |
| 20100164502 | COLD CATHODE IONIZATION VACUUM GAUGE WITH TRIGGER PLATE - To provide a cold cathode ionization vacuum gauge that does not have a complicated structure and can induce discharge in a short time even after the cold cathode ionization vacuum gauge is used for a long time. A cold cathode ionization vacuum gauge has a rod-like anode | 07-01-2010 |
| 20100237874 | IONIZATION VACUUM GAUGE - An ionization vacuum gauge includes a cathode electrode, a gate electrode, and an ion collector. The cathode electrode includes a base and a field emission film disposed thereon. The gate electrode is disposed adjacent to the cathode electrode with a distance therebetween. The ion collector is disposed adjacent to the gate electrode with a distance therebetween. The field emission film of the cathode electrode includes carbon nanotubes, a low-melting-point glass, and conductive particles. | 09-23-2010 |
| 20100259273 | COLD CATHODE IONIZATION VACUUM GAUGE, VACUUM PROCESSING APPARATUS INCLUDING SAME AND DISCHARGE STARTING AUXILIARY ELECTRODE - The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even in the case of use over a long period of time without needing a complicated apparatus. It has the structure in which a rod-like anode is located in an internal part of a measuring element container (cathode) having a discharge space with one end thereof which is sealed, and a discharge starting auxiliary electrode is mounted on this anode. The discharge starting auxiliary electrode triggers the discharge in a short time by the formation of a carbon nanotube layer on a discharge starting auxiliary electrode plate. | 10-14-2010 |
| 20100301869 | COLD CATHODE IONIZATION VACUUM GAUGE, AUXILIARY DISCHARGE STARTING ELECTRODE, AND VACUUM PROCESSING APPARATUS - The present invention provides a cold cathode ionization vacuum gauge, an auxiliary discharge starting electrode plate, and a vacuum processing apparatus which have simple configurations and, even after long-term-use, which allow discharge to be initiated in a short-period of time and also to be performed stably after the start of the discharge. A cold cathode ionization vacuum gauge according to one embodiment of the present invention includes: an anode; a gauge head chamber (cathode) placed in such a manner as to form a discharge space together with the anode; and a protruding configured so that, in voltage-application to the anode and the cathode, an electric field should be concentrated at the protruding portion to a larger extent than an electric field at the gauge head chamber is. The protruding portion is provided inside the discharge space in such a manner that the protruding portion has a floating potential. | 12-02-2010 |
| 20110062961 | Ionization Gauge With Operational Parameters And Geometry Designed For High Pressure Operation - An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions. | 03-17-2011 |
| 20110101988 | IONISATION VACUUM GAUGES AND GAUGE HEADS - A gauge head ( | 05-05-2011 |
| 20110128010 | MICRODISCHARGE-BASED PRESSURE SENSOR AND METHOD - A microdischarge-based pressure sensor that includes an anode, two cathodes, a drive circuit connected to the electrodes, and a measurement circuit that permits sensing of transient current pulses flowing through at least one of the electrodes. One of the cathodes is interposed between the anode and other cathode, and it includes a central opening which permits a microdischarge to occur between the anode and each cathode in response to applied voltage pulses from the drive circuit. Changes in relative current between the two cathodes are indicative of changes in ambient pressure in the microdischarge chamber. In other embodiments, a sealed chamber can be used with one of the electrodes acting as a diaphragm which deflects based on external pressure and changes its inter-electrode spacing, thereby altering the relative cathode currents. | 06-02-2011 |
| 20110163754 | Ionization Gauge With Emission Current And Bias Potential Control - An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user. | 07-07-2011 |
| 20110234233 | Ionization Gauge Having Electron Multiplier Cold Emission Source - An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade. | 09-29-2011 |
| 20110279127 | COLD CATHODE IONIZATION VACUUM GAUGE, VACUUM PROCESSING APPARATUS HAVING THE SAME, DISCHARGE STARTING AUXILIARY ELECTRODE USED FOR THE SAME, AND METHOD OF MEASURING PRESSURE USING THE SAME - The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode. | 11-17-2011 |
| 20130106431 | IONIZATION VACUUM GAUGE | 05-02-2013 |
| 20130249563 | COLD CATHODE FAST RESPONSE SIGNAL - A fast response output signal circuit ( | 09-26-2013 |
| 20140152320 | IONIZATION GAUGE WITH OPERATIONAL PARAMETERS AND GEOMETRY DESIGNED FOR HIGH PRESSURE OPERATION - An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions. | 06-05-2014 |
| 20140368210 | COLD CATHODE IONIZATION VACUUM GAUGE AND INNER WALL PROTECTION MEMBER - A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode. | 12-18-2014 |
| 20150091579 | COLD CATHODE IONIZATION VACUUM GAUGE - A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode. | 04-02-2015 |
| 20150108993 | Ionization Gauge With Emission Current and Bias Potential Control - An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user. | 04-23-2015 |
| 20150300904 | IONIZATION GAUGE FOR HIGH PRESSURE OPERATION - An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source. | 10-22-2015 |
| 20160131548 | LONG LIFETIME COLD CATHODE IONIZATION VACUUM GAUGE DESIGN - A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode. | 05-12-2016 |
| 324462000 | Using thermionic emissions | 2 |
| 20090096460 | IONIZATION VACUUM GAUGE - An ionization vacuum gauge which has at least three electrodes of a grid ( | 04-16-2009 |
| 20100066380 | ELECTRON SOURCE FOR A VACUUM PRESSURE MEASURING DEVICE - A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device. | 03-18-2010 |
| 324463000 | Using a magnetic field | 4 |
| 20140176150 | IONIZATION VACUUM MEASURING CELL - An ionization vacuum measuring cell has: a) an evacuatable housing ( | 06-26-2014 |
| 20150091580 | COLD CATHODE IONIZATION VACUUM GAUGE - A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode. | 04-02-2015 |
| 20150369654 | METHODS, ALGORITHMS AND SIGNAL PROCESSING MEANS UTILIZING THE HARBINGER WAVE TO FORECAST AND SIGNAL AN IMMINENT SHOCK WAVE AND DETERMINATION OF ITS VELOCITIES, PRESSURES, DENSITY AND EPICENTER - Methods, algorithm and signal processing means utilizing the Harbinger (H) wave to forecast an imminent shock wave and in conjunction with the trailing Main (M) shock wave determination of the H wave velocity and M shock wave velocities, overpressure, dynamic pressure, and density and further the M shock wave epicenter location co-ordinates and beneficial applications are provided herein. These parameter determinations are based on the discovery of the existence of a Harbinger wave launched upon formation of the M shock wave which annunciates the incoming M shock wave before its arrival. These variables are further used to devise methods and systems that utilize the information to deploy just in time personnel and/or equipment protection, determine the wave epicenter for the purpose of identifying enemy combatants and rogue terrorist positions, alert response teams to a deleterious event and its magnitude, signal in real time the location of these deleterious events and determine if a munition, friendly or enemy, has functioned. | 12-24-2015 |
| 20160025587 | IONIZATION VACUUM MEASURING CELL - An ionization vacuum measuring cell comprises an anode ( | 01-28-2016 |
