Class / Patent application number | Description | Number of patent applications / Date published |
310312000 | Adding or subtracting mass | 24 |
20080246367 | TUNED LAMINATED PIEZOELECTRIC ELEMENTS AND METHODS OF TUNING SAME - A piezoelectric element comprises a piezoelectric ceramic wafer bonded to a substrate, with a surface profile of the substrate being non-uniformly configured to affect the spring rate of the piezoelectric element. For example, in one example embodiment the substrate has its profile configured so that its stiffness is modified or non-uniform along at least one axis of the substrate. The nature of the non-uniform surface profile can acquire various configurations or patterns. | 10-09-2008 |
20080284280 | Method of stabilizing a frequency of a piezoelectric vibration element - A piezoelectric vibration element is provided which includes a piezoelectric substrate formed of a thickness slip based piezoelectric material and a metal layer formed on a surface of the piezoelectric substrate. In the piezoelectric vibration element, a surface of the metal layer is covered by a layer formed by chemical absorption with a material having a nonbonding electron pair. | 11-20-2008 |
20090001848 | PIEZOELECTIC RESONATOR AND PIEZOELECTRIC FILTER - A piezoelectric resonator includes a laminated thin film having a first thin film portion supported by a substrate and a second thin film portion spaced apart from a first main surface of the substrate and acoustically isolated from the substrate. The second thin film portion of the laminated thin film includes a piezoelectric thin film, a first electrode disposed on the upper surface of the piezoelectric thin film, and a second electrode disposed on the lower surface of the piezoelectric thin film and being larger and thicker than the first electrode. The piezoelectric resonator further includes a mass adding film disposed around the first electrode and on at least one portion of a region extending outward from the periphery of a piezoelectric vibrating portion at which the first and second electrodes overlap each other with the piezoelectric thin film disposed therebetween. The second electrode arranged so as to extend beyond the piezoelectric vibrating portion to a region at which the mass adding film is disposed. | 01-01-2009 |
20090085428 | Crystal Resonator - A crystal resonator comprises an AT-cut crystal vibrating element that is driven by a thickness-shear mode and is in the shape of a rectangular plate. A pair of excitation electrodes is formed, facing front and rear surfaces of the crystal vibrating element. Each of the excitation electrodes is formed in the shape of a quadrangle as viewed from the top, and mass adjustment portions are formed at least two opposite sides of each of the excitation electrodes formed on the front and rear surfaces. | 04-02-2009 |
20090146527 | PIEZOELECTRIC MICROSPEAKER USING MICROELECTROMECHANICAL SYSTEMS AND METHOD OF MANUFACTURING THE SAME - A piezoelectric microspeaker using microelectromechanical systems (MEMS) and a method of manufacturing the same are provided. The piezoelectric microspeaker includes a piezoelectric layer disposed on an elastic thin layer, and a resonance change unit patterned on one of a bottom surface of the elastic thin layer and a top surface of the piezoelectric layer. | 06-11-2009 |
20100133953 | DRIVING APPARATUS - A driving apparatus ( | 06-03-2010 |
20100156237 | Tuning-Fork Type Piezoelectric Vibrating Piece and Piezoelectric Device - A tuning-fork type piezoelectric vibrating piece ( | 06-24-2010 |
20100201221 | PIEZOELECTRIC DEVICES AND METHODS FOR MANUFACTURING SAME - An exemplary piezoelectric vibrating device includes a piezoelectric frame that supports and surrounds a tuning-fork type piezoelectric vibrating piece having a pair of vibrating arms. The device also includes a lid and a package base that are siloxane-bonded to the frame. The lid defines at least one frequency-adjustment hole extending through the thickness dimension of the lid from an inner major surface thereof (facing the frame) to an outer major surface of the lid. The package base defines at least one through-hole electrode passing via a respective electrode through-hole through the thickness of the base from an inner major surface thereof (facing the frame) to the outer major surface thereof. The electrode is connected to the piezoelectric vibrating piece. The lid and base include external electrodes, made of an electrically conductive material, that cover the through-holes and frequency-adjustment hole(s). | 08-12-2010 |
20100237739 | PIEZOELECTRIC VIBRATOR MANUFACTURING METHOD, AND PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO CLOCK - A piezoelectric vibrator manufacturing method includes a cavity forming step for forming depressions for a cavities on at least one of two wafers; a bonding electrode film forming step for forming bonding electrode films on bonded surfaces of the both wafers; a mount pattern forming step for forming a pair of mount patterns in the cavity; a through hole forming step for forming a pair of through holes in the cavity; a through electrode forming step for forming a pair of through electrodes electrically connected with the pattern in the cavity; a mount step for electrically connecting the pattern and a piezoelectric vibrating strip, a superimposing step for superimposing the both wafers and storing getter materials; a bonding step for anodically bonding the both wafers to fabricating a wafer member; a gettering step for adjusting the degree of vacuum in the interior of the cavity while measuring a series resonance resistance value; and a cutting step for cutting the wafer member into individual pieces. | 09-23-2010 |
20100237740 | METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO CLOCK - There is provided a method of manufacturing piezoelectric vibrators | 09-23-2010 |
20100277034 | ARRAY OF BAW RESONATORS WITH MASK CONTROLLED RESONANT FREQUENCIES - Methods that create an array of BAW resonators by patterning a mass load layer to control the resonant frequency of the resonators and resonators formed thereby, are disclosed. Patterning the surface of a mass load layer and introducing apertures with dimensions smaller than the acoustic wavelength, or dimpling the mass load layer, modifies the acoustic path length of the resonator, thereby changing the resonant frequency of the device. Patterns of variable density allow for further tuning the resonators and for individualized tuning of a resonator in an array of resonators. Patterning a reflowable material for the mass load layer, thereby providing a variable pattern density and distribution followed by elevating the temperature of the mass load layer above its melting point causes the material to liquefy and fill into the apertures to redistribute the mass load layer, thereby, upon subsequent cooling, providing resonators with a predetermined desired resonant frequency. | 11-04-2010 |
20110018388 | PIEZOELECTRIC VIBRATOR, MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED CLOCK - Provide a highly efficient manufacturing method of a piezoelectric vibrator and to provide a piezoelectric vibrator manufactured by this manufacturing method. A method for manufacturing a piezoelectric vibrator | 01-27-2011 |
20110025166 | PIEZOELECTRIC VIBRATOR, MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE - A piezoelectric vibrator which can be manufactured efficiently and a manufacturing method thereof are provided. The piezoelectric vibrator includes: a tuning-fork-type piezoelectric vibrating piece which has a pair of vibration arm portions, excitation electrodes formed on base end portions of the vibration arm portions, and weight metal films formed on distal end portions of the vibration arm portions; and a package which houses the piezoelectric vibrating piece therein. A gettering film on which a laser radiation flaw is formed is formed on intermediate portions between the base end portions and the distal end portions of the vibration arm portions. A first metal film included in the excitation electrode, a second metal film included in the weight metal film and the gettering film are formed using the same material. | 02-03-2011 |
20110140572 | Crystal device - An object is to provide a crystal device that uses a mesa-structure crystal piece in which frequency adjustment is possible. A configuration is such that in a crystal device having: a crystal piece having a thick portion and a thin portion, with an excitation electrode formed on both main faces of the thick portion, and a lead out electrode electrically connected to the excitation electrode, formed on an end portion; a container main body having a concavity for accommodating the crystal piece; and a cover that is connected to an open end face of the container main body and hermetically seals the crystal piece, a frequency adjustment metal film which is electrically isolated from the excitation electrode and made independent, is formed on the thin portion of the crystal piece. | 06-16-2011 |
20110148249 | METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT AND RADIO-CONTROLLED TIMEPIECE - Provided is method of manufacturing a piezoelectric vibrator, which includes a tuning fork type piezoelectric vibrating reed that includes a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a pair of regulation films that is formed along a longitudinal direction of the vibration arm portions corresponding to the pair of vibration arm portions, the piezoelectric vibrator being capable of improving a degree of vacuum in the package by irradiating the regulation films with a laser to evaporate a part of the regulation films. The method having a frequency measurement process of measuring the frequency of the piezoelectric vibrating reed, and a gettering process of evaporating a part of a regulation film of a position corresponding to a front end side of the vibration arm portion when the measured frequency is higher than a permissible range and evaporating a part of the regulation film of a position of a proximal portion side of the vibration arm portion when the measured frequency is lower than the permissible range. | 06-23-2011 |
20110291524 | PIEZOELECTRIC DEVICES INCLUDING FREQUENCY-ADJUSTMENT UNITS - Piezoelectric devices are disclosed that allow outside-in adjustment of vibration frequency produced by the devices. I.e., the vibration frequency can be increased or reduced. An exemplary piezoelectric device includes a tuning-fork type piezoelectric vibrating piece mounted inside a package. The vibrating piece has a base fabricated of a piezoelectric material, a pair of vibrating arms extending parallel from the base in a predetermined direction, and a frequency-adjustment unit situated on the distal ends of the vibrating arms. The package includes first metal films disposed on the inner main surface of the package at a location where a beam from an external laser can be irradiated. The frequency adjustment unit includes a transparent region that extends in a predetermined direction for allowing the laser beam, passing through the lid of the package, to be incident on second metal films by passing through the transparent regions. The laser beam also can be incident on first metal films without also being incident on the second metal films, by passing through the lid but not through the transparent regions. | 12-01-2011 |
20120126664 | VIBRATOR ELEMENT, SENSOR UNIT, ELECTRONIC APPARATUS, MANUFACTURING METHOD OF VIBRATOR ELEMENT, AND MANUFACTURING METHOD OF SENSOR UNIT - A vibration gyro device has a base part and a pair of drive vibrating arms and a pair of detection vibrating arms respectively extended from both ends in a Y-axis direction of the base part. Further, adjustment vibrating arms extended from respective ends of connecting parts respectively extended from both ends in an X-axis direction of the base part in parallel to the drive vibrating arms are provided. At the end sides of the respective adjustment vibrating arms, spindle parts as wider parts are provided. On principal surfaces of the respective adjustment vibrating arms, adjustment electrodes as membranes for adjustment of leakage output of the vibration gyro device are provided. | 05-24-2012 |
20120200195 | ACOUSTIC WAVE DEVICE - An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area. | 08-09-2012 |
20120248932 | METHOD OF ADJUSTING THE RESONANCE FREQUENCY OF A MICRO-MACHINED VIBRATING ELEMENT - The present disclosure relates to a method of adjusting the resonance frequency of a vibrating element, comprising measuring the resonance frequency of the vibrating element, determining, using abacuses and as a function of the resonance frequency measured, a dimension and a position of at least one area of modified thickness to be formed on the vibrating element so that the resonance frequency thereof corresponds to a setpoint frequency, and forming on the vibrating element, an area of modified thickness of the determined dimension and position. | 10-04-2012 |
20130119823 | Tuning-Fork Type Piezoelectric Vibrating Piece and Piezoelectric Device - A tuning-fork type piezoelectric vibrating piece ( | 05-16-2013 |
20130264908 | VIBRATOR ELEMENT, MANUFACTURING METHOD OF VIBRATOR ELEMENT, SENSOR UNIT, AND ELECTRONIC APPARATUS - A vibration gyro-element includes a base portion, an excitation vibrating arm and a detection vibrating arm extending from the base portion, and a first adjustment vibrating arm and a second adjustment vibrating arm extending from the base portion and vibrating along with excitation vibration of the excitation vibrating arm, wherein an output signal of the first adjustment vibrating arm at least is out of phase with respect to an output signal of leakage vibration of the detection vibrating arm, and wherein an amplitude of the output signal of the first adjustment vibrating arm is larger than an amplitude of the output signal of the second adjustment vibrating arm. | 10-10-2013 |
20130328444 | ELECTRONIC DEVICE, ELECTRONIC APPARATUS, MOBILE UNIT, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE - A vibrating element as an element on which a base part, a supporting part extending from the base part, and adjustment electrodes as mass adjustment parts are provided and a semiconductor substrate as a circuit element are provided, and the adjustment electrodes are placed in locations not overlapping with the semiconductor substrate in a plan view, the supporting part and the semiconductor substrate are connected, and thereby, the vibrating element is mounted on the semiconductor substrate. | 12-12-2013 |
20160082476 | VIBRATION GENERATING DEVICE - There is provided a vibration generating device including: a housing of which one side is open to form a frequency adjustment hole; a vibrating member having a fixed end which is fixed to the housing and a free end which is extended from the fixed end to thereby vibrate; a weight body provided on the vibrating member; and a piezoelectric element coupled to one surface of the vibrating member. | 03-24-2016 |
20160197261 | ENERGY HARVESTER | 07-07-2016 |