| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 250305000 | ELECTRON ENERGY ANALYSIS | 59 |
| 20080197277 | METHOD AND INSTRUMENT FOR CHEMICAL DEFECT CHARACTERIZATION IN HIGH VACUUM - A method and the instrument for characterization of the defects on a surface with Auger electron spectroscopy in a high vacuum environment are disclosed. Defects on the surface of a sample may be characterized with Auger electron spectroscopy in a high vacuum environment at a pressure of about 10 | 08-21-2008 |
| 20080210863 | Device For Obtaining the Image and/or Spectra of Electron Energy Loss - The inventive device for obtaining the electron energy loss image and/or spectra comprises an image sensor ( | 09-04-2008 |
| 20080265156 | Measuring momentum for charged particle tomography - Methods, apparatus and systems for detecting charged particles and obtaining tomography of a volume by measuring charged particles including measuring the momentum of a charged particle passing through a charged particle detector. Sets of position sensitive detectors measure scattering of the charged particle. The position sensitive detectors having sufficient mass to cause the charged particle passing through the position sensitive detectors to scatter in the position sensitive detectors. A controller can be adapted and arranged to receive scattering measurements of the charged particle from the charged particle detector, determine at least one trajectory of the charged particle from the measured scattering; and determine at least one momentum measurement of the charged particle from the at least one trajectory. The charged particle can be a cosmic ray-produced charged particle, such as a cosmic ray-produced muon. The position sensitive detectors can be drift cells, such as gas-filled drift tubes. | 10-30-2008 |
| 20080283743 | Method and system for non-destructive distribution profiling of an element in a film - A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra. | 11-20-2008 |
| 20080290273 | Monochromator and radiation source with monochromator - A monochromator ( | 11-27-2008 |
| 20090072137 | NANOWIRE ELECTRON SCATTERING SPECTROSCOPY - Methods and devices for spectroscopic identification of molecules using nanoscale wires are disclosed. According to one of the methods, nanoscale wires are provided, electrons are injected into the nanoscale wire; and inelastic electron scattering is measured via excitation of low-lying vibrational energy levels of molecules bound to the nanoscale wire. | 03-19-2009 |
| 20090173881 | Method And Apparatus For Detecting X-Rays Having Improved Noise Discrimination - A method and apparatus, such as a spectrometer, are provided for facilitating the detection of an x-ray signal in a manner that effectively discriminates the x-ray signal from noise. A spectrometer may be provided which includes an x-ray converter for converting x-ray signals which impinge thereupon into corresponding pairs of electrons and positrons. The spectrometer also includes a deflector for separately deflecting the electrons and the positrons as well as electron and positron detectors for separately detecting the deflected electrons and positrons, respectively. As such, an x-ray signal can be identified in instances in which the deflected electrons and positrons are detected in coincidence. | 07-09-2009 |
| 20090278044 | In-Situ Differential Spectroscopy - A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array, and extracts a differential signal that represents a difference between the signals that are received from the first position and the signals that are received from the second position. | 11-12-2009 |
| 20100032562 | Slit Disk for Modified Faraday Cup Diagnostic for Determing Power Density of Electron and Ion Beams - A diagnostic system for characterization of an electron beam or an ion beam includes an electrical conducting disk of refractory material having a circumference, a center, and a Faraday cup assembly positioned to receive the electron beam or ion beam. At least one slit in the disk provides diagnostic characterization of the electron beam or ion beam. The at least one slit is located between the circumference and the center of the disk and includes a radial portion that is in radial alignment with the center and a portion that deviates from radial alignment with the center. The electron beam or ion beam is directed onto the disk and translated to the at least one slit wherein the electron beam or ion beam enters the at least one slit for providing diagnostic characterization of the electron beam or ion beam. | 02-11-2010 |
| 20100090106 | METHOD AND APPARATUS FOR PHOTON-ASSISTED EVALUATION OF A PLASMA - Described are a method and apparatus for evaluating a least one characteristic of a plasma. The described method uses photons to raise the excitation state to or past the point of ionization of atoms which will traverse the plasma to be evaluated. The ionization of the atoms, followed by the measurement of the energy of any resulting secondary ions, facilitates the determining of one or more characteristics of the plasma. In one example, the photons are provided by a laser which directs a beam to intersect, and in some examples to be collinear with, a beam of atoms directed through the plasma. | 04-15-2010 |
| 20100127168 | ELECTROSTATIC ELECTRON SPECTROMETRY APPARATUS - An apparatus for spectrometry that includes a spectrometer configured for second order focusing and capable of 2π azimuthal collection. | 05-27-2010 |
| 20100163725 | CHARGED PARTICLE ANALYSER AND METHOD - A charged particle analyser ( | 07-01-2010 |
| 20100237240 | SAMPLE HOLDER APPARATUS TO REDUCE ENERGY OF ELECTRONS IN AN ANALYZER SYSTEM AND METHOD - A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a sample receiving surface configured to receive a sample and electrically connect the sample to the sample support member (e.g., wherein the sample support member is configured for application of a retarding bias potential). A grounded sample aperture member defining an aperture relative to the sample support member but electrically isolated therefrom is provided such that the aperture is proximate the sample receiving surface to expose at least a portion of a surface of a sample received thereon to be analyzed (e.g., wherein applying a retarding bias potential to the sample support member produces an electrical retarding field about the aperture that reduces the energy of emitted particles from a sample before they enter an annular-acceptance analyzer). | 09-23-2010 |
| 20100237241 | Electrostatic Charge Measurement Method, Focus Adjustment Method, and Scanning Electron Microscope - A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount by scanning the electron beam. An electrostatic charge measurement method, a focus adjustment method, or a scanning electron microscope for measuring an electrostatic charge amount or controlling an application voltage to the sample changes the application voltage to the energy filter while moving the scanning location of the electron beam on the sample. | 09-23-2010 |
| 20110006205 | AMBIENT PRESSURE PHOTOELECTRON MICROSCOPE - An ambient pressure photoelectron microscope which enables in situ chemical processes on a sample surface to be followed at the limit of the spatial resolution of the microscopy technique. | 01-13-2011 |
| 20110006206 | Neutron Detection - In exemplary embodiments, an apparatus, includes a first electrode, a second electrode, a first polygonal channel extending between the electrodes, the first channel having a first side having a center, and a second polygonal channel extending between the electrodes, the second channel having a second side contacting the first side, the second side having a center, wherein the center of the first side and the center of the second side are non-collinear in a direction perpendicular to a surface of the first side, and wherein the first and second channels do not have square cross sections perpendicular to longitudinal axes of the channels. | 01-13-2011 |
| 20110012018 | Magnetic Lens, Method for Focusing Charged Particles and Charged Particle Energy Analyzer - The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system. | 01-20-2011 |
| 20110095182 | ELECTRON MICROSCOPE WITH ELECTRON SPECTROMETER - A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters. | 04-28-2011 |
| 20110168885 | DETERMINING DOPING TYPE AND LEVEL IN SEMICONDUCTING NANOSTRUCTURES - Systems and methods for determining doping type and level in semiconducting nanostructures include generating light from a laser source, directing the light on the device via an extended microscope, collecting electrons emitted from the device in an electron analyzer and calculating the doping type and level of the device. | 07-14-2011 |
| 20110168886 | CHARGED-PARTICLE ENERGY ANALYZER - One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh. | 07-14-2011 |
| 20110210246 | METHOD AND SYSTEM FOR DETERMINING DEPTH PROFILING - The present invention relates to a novel system and method for the determination of depth profiling with improved accuracy and reliability. The method comprises obtaining spectroscopic data from the sample while under at least two different electrical conditions of the sample, the spectroscopic data comprising a signal of charged particles emitted from the sample, and being indicative of a change in amplitude, spectral position and spectral shape of the signal from the sample while under different electrical conditions of the sample, the change being indicative of the compositional profile and spatial distribution for at least one chemical element in the sample along a direction through the sample. | 09-01-2011 |
| 20110215240 | POLYMER ELECTROLYTE MEMBRANE, METHOD FOR PRODUCING THE SAME, AND PROTON CONDUCTIVITY EVALUATION METHOD FOR POLYMER ELECTROLYTE MEMBRANE - The present invention provides a polymer electrolyte membrane with excellent proton conductivity in its thickness direction. Preferably, the polymer electrolyte membrane contains a polymer compound comprising an ionic segment having an ionic functional group and a nonionic segment having substantially no ionic functional group, and the phase containing ionic segments as a main component and the phase containing nonionic segments as a main component are phase-separated, and in the surface region thereof, the change in the amount of the ionic segment from the surface toward the interior substantially decreases monotonically. | 09-08-2011 |
| 20110291006 | Application of a bistable energy system in overcomming uncertainty - A proposed approach to determining both the Energy of an electron in an atom, and time of its existence is presented. The approach utilizes information about the physical system involved to overcome the limitation of the uncertainty principle. | 12-01-2011 |
| 20120012746 | ION SOURCE WITH CORNER CATHODE - An ion source may include first, second, and third electrodes. The first electrode may be a repeller having a V-shaped groove. The second electrode may be an electron emitter filament disposed adjacent the base of the V-shaped groove. The third electrode may be an anode that defines an enclosed volume with an aperture formed therein adjacent the electron emitter filament. A potential of the first electrode may be less than a potential of the second electrode, and the potential of the second electrode may be less than a potential of the third electrode. A fourth electrode that is disposed between the electron emitter filament and the anode may be used to produce a more collimated electron beam. | 01-19-2012 |
| 20120037800 | PERFORMANCE EVALUATION METHOD WITH X-RAY AND ITS USAGE - An aspect of the present invention relates to a method of evaluating performance of a film-forming material for forming a functional film on an eyeglass lens substrate or a functional film formed by the use of the film-forming material. The performance to be evaluated is selected from the group consisting of a sliding sensation of a surface of the functional film and an adhesion of the functional film, and the evaluation is conducted based on a change over time in a quantity of photoelectrons generated by irradiating with an X-ray the film-forming material or the functional film. | 02-16-2012 |
| 20120168623 | OBSERVATION AND ANALYSIS UNIT - An observation and analysis unit that magnifies an image of a sample and further accomplishes the evaluation and analysis thereof. The observation and analysis unit includes a light-microscopic device designed for the magnified imaging and optical evaluation of the sample and a sample analyzer that analyses selected regions of the sample. The sample analyzer includes an electron source from which an electron beam can be directed to a region of the sample selected by use of the light-microscopic device. The sample analyzer further includes an X-ray detector designed to detect X-ray radiation generated by the interaction of the electron beam with the sample material. The unit further includes an actuation and evaluation unit that generates control commands for the light-microscopic device and the electron source and spectrally analyzes the X-ray radiation. | 07-05-2012 |
| 20120217390 | DEVICE AND METHOD FOR ELECTRON BEAM ENERGY VERIFICATION - The present invention is directed to a device and system for verifying the electron beam kinetic energy spectrum and determining changes in kinetic electron beam energy spectrum that comprises a radiation-absorbing mass defined by a top surface, a bottom surface, and side walls, said mass having at least four separate slots containing one or more of dosimeter strips, wherein said slots are located at different depths within the mass as measured from the top surface of the mass, and said slots are positioned substantially parallel to the top surface of the mass. The present invention also relates to a method of determining and comparing changes in a kinetic electron energy spectrum. | 08-30-2012 |
| 20120241605 | METHOD AND SYSTEM FOR ENHANCING RESOLUTION OF A SCANNING ELECTRON MICROSCOPE - A method for improving the resolution of a scanning electron microscope, the method including: defining an energy band in response to an expected penetration depth of secondary electrons in an object; illuminating the object with a primary electron beam; and generating images from electrons that arrive at a spectrometer having an energy within the energy band. A scanning electron microscope that includes: a stage for supporting an object; a controller, adapted to receive or define an energy band an energy band in response to an expected penetration depth of secondary electrons in an object; illumination optics adapted to illuminate the object with a primary electron beam; a spectrometer; controlled by the controller so as to selectively reject electrons in response to the defined energy band; and a processor that is adapted to generate images from detection signals provided by the spectrometer. | 09-27-2012 |
| 20120261571 | Imaging energy filter for electrically charged particles and spectroscope having same - The present invention concerns an imaging energy filter for electrically charged particles with a toroidal energy analyser, preferably with a hemispherical analyser, with an entrance plane and an exit plane. To provide an imaging energy filter and a spectroscope having such an imaging energy filter, which has a higher degree of position and angle resolution and which can be operated with a greater acceptance angle, it is proposed according to the invention that a mirror element for electrically charged particles is provided and is so arranged that charged particles which leave the toroidal energy analyser by way of the exit plane are reflected back into the toroidal energy analyser by the mirror element so that the charged particles pass through the toroidal energy analyser a further time in the opposite travel direction. | 10-18-2012 |
| 20120280124 | OBTAINING ELEMENTAL CONCENTRATION PROFILE OF SAMPLE - A method of obtaining an elemental concentration profile of a sample using x-ray photon spectroscopy measurements is described. Each measurement relates to a different depth in the sample. The sample is shaped to provide access to different depths thereof. Measurements are obtained at respective positions on a bevelled surface exposing material at each of the depths. The method involves fitting the measurements to a mathematical function, dividing the function into a plurality of equal depth wise slices, determining the elemental concentration for the slice corresponding to the thinnest part of the bevel, and then iteratively determining the contribution of each successive slice to the intensity value as being the intensity value measured for that slice minus the intensity value determined to have been contributed by each preceding slice. According to preferred embodiments, a surface correction factor compensating surface effect phenomena is applied to the concentration value calculated for each slice. | 11-08-2012 |
| 20120298861 | Vector Potential Photoelectron Microscope - A photoelectron microscope uses the vector potential field as a spatial reference. The microscope can be used with a source of photons to image surface chemistry. | 11-29-2012 |
| 20120318974 | METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN ELEMENT IN A FILM - A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra. | 12-20-2012 |
| 20130105687 | CHARGED PARTICLE ENERGY ANALYSERS AND METHODS OF OPERATING CHARGED PARTICLE ENERGY ANALYSERS | 05-02-2013 |
| 20130112870 | HOLLOW CYLINDRICAL ANALYZER - The invention provides constructions of an energy analyzer with entrance angles slightly greater than π/2. The analyzer is capable of collecting electrons in 2π azimuth directions, has a high energy resolution, and a large entrance solid angle. The analyzer is compatible with transmission electron microscopy and other surface analysis techniques. | 05-09-2013 |
| 20130126727 | Time-of-Flight Electron Energy Analyzer - A time-of-flight (TOF) photoemission electron energy analyzer includes a TOF spectrometer for measuring an energy spectrum of a beam of electrons photoemitted from a sample and a 90 degree bend bandpass filter for spatially dispersing and filtering electrons according to energy. An exchange scattering electron spin polarimeter for detecting the spin of electrons includes an entrance aperture for admitting an electron beam, a magnetizable target positionable for receiving the electron beam at an angle relative to a target surface normal vector, a pair of Helmholtz coils positioned about the target for magnetizing the target in a selected direction, and a high-speed multi-channel plate (MCP) detector facing toward the target for receiving electrons reflected from the target surface, the MCP outputting a signal corresponding to the spin dependent intensity and time of electrons' arrivals. | 05-23-2013 |
| 20130126728 | METHOD FOR DETERMINING THE PERFORMANCE OF A PHOTOLITHOGRAPHIC MASK - The invention relates to a method for determining a performance of a photolithographic mask at an exposure wavelength with the steps of scanning at least one electron beam across at least one portion of the photolithographic mask, measuring signals generated by the at least one electron beam interacting with the at least one portion of the photolithographic mask, and determining the performance of the at least one portion of the photolithographic mask at the exposure wavelength based on the measured signals. | 05-23-2013 |
| 20130134307 | Inductively Coupled Plasma Source as an Electron Beam Source for Spectroscopic Analysis - A single column inductively coupled plasma source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the ICP to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis. | 05-30-2013 |
| 20130193321 | Systems and Methods for Investigating a Characteristic of a Material Using Electron Microscopy - Various embodiments of the present invention provide systems and methods for determining an characteristic of a material. The characteristics may include, but are not limited to, crystallographic and chemical composition characteristics of a material. | 08-01-2013 |
| 20130240728 | METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANALYTICAL ELECTRON MICROSCOPY - A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping. | 09-19-2013 |
| 20130270434 | MEASURING THE POPULATIONS IN EACH HYPERFINE GROUND STATE OF ALKALI ATOMS IN A VAPOR CELL WHILE LIMITING THE CONTRIBUTION OF THE BACKGROUND VAPOR - A method for measuring the population of atoms in a vapor cell comprises collecting a sample of atoms, applying radio frequency (RF) spectroscopy to the sample such that a first portion of the atoms are in an upper ground state and a second portion of the atoms are in a lower ground state, and applying light to the sample to produce a first fluorescence such that all atoms are left in the lower ground state. The method further comprises measuring a population of the atoms in the upper ground state based on the first fluorescence, applying an RF pulse to the sample to transfer the atoms in the lower ground state to the upper ground state, and applying light to the sample after the RF pulse is applied to produce a second fluorescence. A population of all the atoms in the sample is then measured based on the second fluorescence. | 10-17-2013 |
| 20130341504 | AUGER ELEMENTAL IDENTIFICATION ALGORITHM - System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining statistical correlation between the normalized input spectrum and stored elemental spectral signatures; and characterizing elemental or chemical species in the input spectrum from the statistical correlation, wherein said conditioning the input spectrum includes estimating a background signal of non-Auger electrons in the input spectrum and subtracting the estimated background signal from the input spectrum. | 12-26-2013 |
| 20140070095 | Method of Performing Tomographic Imaging of a Sample in a Charged-Particle Microscope - The invention relates to a method of performing tomographic imaging involving repeatedly directing a charged particle beam through a sample for a series of sample tilts to acquire a corresponding set of images and mathematically combining the images to construct a composite image. The latter of which consists of, at each of a second series of sample tilts, using a spectral detector to accrue a spectral map of said sample, thus acquiring a collection of spectral maps; analyzing said spectral maps to derive compositional data of the sample; and employing said compositional data in constructing said composite image. | 03-13-2014 |
| 20140070096 | METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN ELEMENT IN A FILM - A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra. | 03-13-2014 |
| 20140117229 | MINERAL IDENTIFICATION USING SEQUENTIAL DECOMPOSITION INTO ELEMENTS FROM MINERAL DEFINITIONS - Mineral definitions each include a list of elements, each of the elements having a corresponding standard spectrum. To determine the composition of an unknown mineral sample, the acquired spectrum of the sample is sequentially decomposed into the standard spectra of the elements from the element list of each of the mineral definitions, and a similarity metric computed for each mineral definition. The unknown mineral is identified as the mineral having the best similarity metric. | 05-01-2014 |
| 20140158883 | CHARACTERIZATION OF NANOSCALE STRUCTURES USING AN ULTRAFAST ELECTRON MICROSCOPE - The present invention relates to methods and systems for 4D ultrafast electron microscopy (UEM)—in situ imaging with ultrafast time resolution in TEM. Single electron imaging is used as a component of the 4D UEM technique to provide high spatial and temporal resolution unavailable using conventional techniques. Other embodiments of the present invention relate to methods and systems for convergent beam UEM, focusing the electron beams onto the specimen to measure structural characteristics in three dimensions as a function of time. Additionally, embodiments provide not only 4D imaging of specimens, but characterization of electron energy, performing time resolved electron energy loss spectroscopy (EELS). | 06-12-2014 |
| 20140264015 | DYNAMIC PEAK TRACKING IN X-RAY PHOTOELECTRON SPECTROSCOPY MEASUREMENT TOOL - Systems and methods for performing X-ray Photoelectron Spectroscopy (XPS) measurements in a semiconductor environment are disclosed. A reference element peak is selected and tracked as part of the measurement process. Peak shift of the reference element peak, in electron volts (eV) is tracked and applied to other portions of acquired spectrum to compensate for the shift, which results from surface charge fluctuation. | 09-18-2014 |
| 20140361164 | ELECTRON BEAM INSPECTION APPARATUS - An electron beam inspection apparatus includes an electron beam irradiating unit, an electric field generating unit, an energy analyzing unit, and a detection unit. The electron beam irradiating unit irradiates an electron beam on a sample. The electric field generating unit generates an electric field in an irradiation direction of the electron beam. The energy analyzing unit analyzes energy of electrons emitted from the sample caused by emission of the electron beam, where the electrons are accelerated by the electric field. The detection unit detects a depth position of a portion to which the electrons are emitted in the irradiation direction of the electron beam based on a result of the energy analysis. | 12-11-2014 |
| 20150069230 | METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN ELEMENT IN A FILM - A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra. | 03-12-2015 |
| 20150338358 | Mineral Identification Using Sequential Decomposition into Elements from Mineral Definitions - Mineral definitions each include a list of elements, each of the elements having a corresponding standard spectrum. To determine the composition of an unknown mineral sample, the acquired spectrum of the sample is sequentially decomposed into the standard spectra of the elements from the element list of each of the mineral definitions, and a similarity metric computed for each mineral definition. The unknown mineral is identified as the mineral having the best similarity metric. | 11-26-2015 |
| 20150371811 | MONOCHROMATOR AND CHARGED PARTICLE APPARATUS INCLUDING THE SAME - Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator. | 12-24-2015 |
| 20160035533 | Energy Filter for Charged Particle Beam Apparatus - This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes. | 02-04-2016 |
| 20160047760 | Method and Device for Measuring Energy of Electrons Excited by Sunlight - A technique of measuring energy of electrons excited by exposing a semiconductor material to solar ray is proposed. A surface layer having a negative electron affinity is formed on the surface of a semiconductor material. The semiconductor material is placed in a vacuum environment and exposed to solar ray. Photoelectrons emitted from the surface layer having the negative electron affinity are guided to an energy analyzer, and the energy of electrons excited by the solar ray is measured. Since the surface layer having the negative electron affinity is used, the photoelectrons are obtained from the electrons excited by the solar ray, and thereby energy measurement becomes possible. | 02-18-2016 |
| 20160071683 | Electron Microscope and Method of Adjusting Same - An electron microscope is offered which can adjust an energy-selecting slit in a short time by smoothly moving the slit. The electron microscope ( | 03-10-2016 |
| 20160071690 | LEED FOR SEM - A low energy electron diffraction (LEED) detection module ( | 03-10-2016 |
| 20160079030 | Electron Microscope and Method of Adjusting Monochromator - An electron microscope is offered which can facilitate adjusting a monochromator. The electron microscope ( | 03-17-2016 |
| 20160086762 | SPECTROSCOPY IN A TRANSMISSION CHARGED-PARTICLE MICROSCOPE - A Transmission Charged-Particle Microscope includes
| 03-24-2016 |
| 20160097659 | Information Processing Device and Information Processing Method - An information processing device includes a storage section | 04-07-2016 |
| 20160196952 | Electron Microscope | 07-07-2016 |
| 20180025897 | SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANALYSIS USING SECONDARY ION MASS SPECTROMETRY | 01-25-2018 |
