Class / Patent application number | Description | Number of patent applications / Date published |
211410180 | Semiconductor wafer | 20 |
20080217268 | Frame system for an article storage apparatus - A frame system for an article storage apparatus which defines an article storage space therein, includes a first upper frame extending horizontally, a first lower frame extending horizontally, and at least one first connecting frame extending vertically and interconnecting the first upper frame and the first lower frame. The first upper frame has receiving bores formed therein through which elongate supports extend vertically when the elongate supports are attached to said first lower frame to suspend the first lower frame. | 09-11-2008 |
20080237157 | WAFER TRANSPORT SYSTEM - A wafer transport system is provided including providing a wafer cassette having a slot, and placing a protection insert into the slot. | 10-02-2008 |
20080251473 | APPARATUS FOR STORING CONTAMINATION-SENSITIVE FLAT ARTICLES, IN PARTICULAR FOR STORING SEMICONDUCTOR WAFERS - An apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers, comprises a plurality of box-like compartments stationary arranged on a fixed mounting rack. The compartments are open on a front side and are arranged in rows and columns side by side and one above the other on the fixed mounting rack. The compartments each have a plurality of slotted holders for receiving the flat articles, and they surround a first handling unit configured for automatically inserting and removing the flat articles into and out of the slotted holders. A closed housing forms a clean room where both the plurality of compartments and the first handling unit are arranged. | 10-16-2008 |
20090001032 | HIGHER PERFORMANCE BARRIER MATERIALS FOR CONTAINERS OF ENVIRONMENTALLY SENSITIVE SEMICONDUCTOR FABRICATION DEVICES - Techniques associated with higher performance barrier materials for containers to contain one or more environmentally sensitive devices associated with semiconductor manufacture are generally described. In one example, an apparatus includes an enclosure to contain one or more environmentally sensitive devices associated with semiconductor manufacture, the enclosure comprising a liquid crystal polymer (LCP) to provide a barrier against at least water and oxygen and to reduce purging requirements, and a door coupled with the enclosure. | 01-01-2009 |
20090008346 | Vertical Boat for Heat Treatment and a Method for Heat Treatment - The present invention is a vertical boat | 01-08-2009 |
20090071918 | VERTICAL SEMICONDUCTOR WAFER CARRIER - A vertical semiconductor wafer carrier comprises a circular base, a first wafer support rod mounted at a first position proximate a perimeter of the circular base, a second wafer support rod mounted at a second position proximate the perimeter of the circular base, wherein an angle θ | 03-19-2009 |
20090188874 | Wafer boat - Wafer boat for holding semiconductor wafers in a spaced vertical arrangement during processing, said wafer boat comprising a plurality of vertically spaced holding positions for receiving and supporting said wafers in a substantially horizontal orientation, wherein the holding positions can be accessed from a front side of the wafer boat to allow for insertion and removal of a wafer, wherein at least one holding position comprises a back support for engaging a back side portion of a wafer and two lateral supports for engaging opposite lateral side portions of the wafer, and wherein the back support is disposed at a lower position than said two lateral supports such that sagging of a front side portion of an inserted wafer near the front side of the wafer boat due to gravity is at least partially compensated for. | 07-30-2009 |
20090200251 | CLAMPING MECHANISM FOR SEMICONDUCTOR DEVICE - A clamping mechanism for a semiconductor substrate includes: a C-shaped pickup plate; a susceptor top plate having a periphery adapted to receive and support an inner periphery portion of the C-shaped pickup plate thereon; and a clamp comprising (i) a top ring portion for clamping the substrate by sandwiching a periphery of the substrate between the top ring portion and the susceptor top plate and (ii) a pickup plate supporting portion adapted to support an outer periphery portion of the C-shaped pickup plate, wherein the C-shaped pickup plate is movable between the top ring portion and the pickup plate supporting portion, and the clamp is movable upward together with the C-shaped pickup plate and the susceptor top plate. | 08-13-2009 |
20090321372 | LOW THERMAL MASS SEMICONDUCTOR WAFER SUPPORT - A support for a semiconductor wafer includes a plate having a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality of holes extends from the recessed surface, and the support surface is free of holes to inhibit contamination of the wafer. | 12-31-2009 |
20110100937 | Adjustable Width Cassette for Wafer Film Frames - An expandable width cassette for storing and transporting thin planar objects of different widths is provided. The cassette | 05-05-2011 |
20110259840 | SEMICONDUCTOR PACKAGE MAGAZINE - A magazine rack suitable for holding, carrying, shipping or storing the semiconductor packages is provided. The magazine rack is designed with tiered support bars, so as to help secure the inserted packages in position and provide separation buffer. | 10-27-2011 |
20120074081 | Low Thermal Mass Semiconductor Wafer Plate - A support for a semiconductor wafer includes a plate having a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality of holes extends from the recessed surface, and the support surface is free of holes to inhibit contamination of the wafer. | 03-29-2012 |
20120217210 | SUPPORT METHOD, HIGH-TEMPERATURE TREATMENT METHOD USING SAME, AND SUPPORT JIG - A method for supporting a support to which a wafer is attached, by supporting the support against gravitational force by supporting three or more support points of an inner circumference section of a support surface of the support. The support surface of the support is opposite to a side on which the wafer is attached to the support. | 08-30-2012 |
20130082015 | ELASTIC RETENTION WHEELS AND WAFER ADAPTER CONTAINING THE SAME WHEELS - An elastic retention wheel and a wafer adapter containing this wheel are disclosed. The elastic retention wheel comprises: a rim; a retention main body positioned within the rim; and a plurality of spokes. Each spoke is positioned in a space between the rim and the retention main body. One end of each spoke is coupled to the retention main body, and the other end is coupled to the rim. A sliding rail can be provided on an inner side of the rim, and the spoke's other end can slide with the sliding rail. When the elastic retention wheel is stressed by a non-uniform or excessive external force, these spokes provide enhanced support from the rim's inner side, or at least partially disperse the non-uniform external force applied to the elastic retention wheel. Thereby, the elastic retention wheel is largely kept from over-deformation or cracking. | 04-04-2013 |
20130200018 | BALLASTED ROOF AND GROUND MOUNTED SOLAR PANEL RACKING SYSTEM - A light weight ballasted solar racking system has light ballasted weight loads and is easy and fast to install. The racking system may be used in roof or ground mount applications to mount thin film and frameless solar modules. The racking system physically attaches to the solar panel at the manufactured mounting holes with a set of struts that then attach to a ballast tray that holds the system in place. A set of struts may determine the degree of angle from about 5 to about 35 degrees, for example. The front of the ballast tray has an air pass way of about 3-5 inches, while the back of the system has about 8-12 inches of space for an air pass way. Multiple racking systems may be linked together, resulting in the need for less ballast weight for each racking system. | 08-08-2013 |
20130213910 | BOAT FOR LOADING SEMICONDUCTOR SUBSTRATES - Provided is a boat for loading semiconductor substrates that includes a top plate and a bottom plate separated from each other, a rod extending from the bottom plate to the top plate and disposed between the top plate and the bottom plate, a plurality of buffer plates disposed between the top plate and the bottom plate and separated from each other by a first distance along a lengthwise direction of the rod, and a support provided between a first buffer plate and a second buffer plate which neighbor each other and supporting a loaded semiconductor substrate. | 08-22-2013 |
20130284683 | WAFER BOAT - A wafer boat for accommodating semiconductor wafers comprises two side rods and at least one back rod, the rods being vertically oriented and extending between a top member and a bottom member. The rods comprise vertically spaced recesses formed at corresponding heights, recesses at the same height defining a wafer accommodation for receiving and supporting a wafer in a substantially horizontal orientation, the recesses having an improved shape. The upwardly facing surfaces of the recesses comprise a first flat surface in an inward region of the recess which is horizontal or inclined upward in an outward direction of the recess and a second flat surface in an outer region of the recess which is inclined downward in an outward direction of the recess. The intersection of the first and second surface forming an edge for supporting the wafer. The recesses are easy to machine and prevent damage to the wafer. | 10-31-2013 |
20150374122 | ACCOMMODATING DEVICE, SEGMENT, AND METHOD FOR FORMING MULTIPLE-STAGE ACCOMMODATING PORTIONS - This invention provides an accommodating device provided with a plurality of accommodating portions configured to accommodate plate-shaped members to be accommodated by being separated away in a thickness direction thereof, having: at least one wall body constructing the accommodating device; and a plurality of segments having the accommodating portions respectively and arranged adjacently each other along a wall surface of the wall body, wherein each of the plurality of segments has an engagement portion to be engaged with an adjacent segment, and the plurality of segments are connected to each other through engagement between the engagement portions of each segments and are detachably mounted on the wall body. | 12-31-2015 |
20160086828 | MAGAZINE AND PROCESS EQUIPMENT INCLUDING THE SAME - A magazine includes a main body unit having a front side and a rear side, at least one of which is open, a plurality of slots formed inside two sidewalls of the main body unit, and at least one support member extending to the two sidewalls of the main body unit in a first direction. | 03-24-2016 |
20160379859 | WAFER BOAT AND MANUFACTURING METHOD OF THE SAME - A wafer boat supporting a silicon wafer to be processed provides a sufficient anchor effect between a deposit film and a SiC coating film formed on a base material, and suppresses generation of particles due to peeling off of the deposit film. The vertical wafer boat includes a plurality of columns, being made of SiC-based material having a SiC coating film on a surface thereof, which contains shelf plate portions for supporting wafers, and a top plate and a bottom plate for fixing upper and lower ends of the columns, wherein a supporting plane which is in contact with an outer peripheral portion of the wafer is provided on an upper surface of the shelf plate portion, and a surface roughness Ra of a lower surface of the shelf plate increases toward a front side of the shelf plate portion from a rear side. | 12-29-2016 |