Class / Patent application number | Description | Number of patent applications / Date published |
206711000 | Having plural grooves for retaining wafers | 69 |
20080230438 | SEMICONDUCTOR WAFER STORAGE CASE AND SEMICONDUCTOR WAFER STORING METHOD - A semiconductor wafer storage case is disclosed that includes plural support members that are spaced at predetermined intervals with respect to each other and are each configured to come into contact with a peripheral edge region of a first face of a semiconductor wafer, and an elastic member that elastically supports the support members with respect to each other and is configured to elastically deform to come into contact with a second face of the semiconductor wafer and press the semiconductor wafer onto a corresponding support member. | 09-25-2008 |
20080302700 | TRANSPORT MODULE - A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting wafers. Additionally, the side walls of the shell have recessed portions with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to lock into place in the recesses on the side walls of the carrier. Attachment of the handles to the side walls is accomplished without breaks between the interior and exterior of the module and without separate fastners. | 12-11-2008 |
20090026109 | STORAGE CONTAINER - To provide a storage container which can inhibit and prevent generation of dust due to the motions of an advancing and retracting element, whose door element can be formed with a reduced space and thickness and which can prevent contamination of the articles accommodated therein, the storage container includes a container body | 01-29-2009 |
20090032433 | WAFER CONTAINER WITH RESTRAINER - A wafer container includes a container body that having a plurality of slots therein for placing a plurality of wafers; an opening is formed on a sidewall of the container body for importing or exporting the wafers; and a door having an inner surface and an outer surface, in which the inner surface of the door is joined with the opening of the container body for protecting the plurality of wafers therein, the characteristic in that: a recess is disposed in the central portion of the inner surface of the door to divide the inner surface into two platforms, and each restraint module is located on two platforms. | 02-05-2009 |
20090184028 | WAFER CASSETTE - A wafer cassette. At least one support bar includes a composite curved holding portion. Multiple separation plates are connected to the composite curved holding portion and are parallel to and separated from each other. | 07-23-2009 |
20090194456 | WAFER CASSETTE - A front opening wafer container including an enclosure portion and a door. A wafer support system is provided including a pair of spaced apart cantilever wafer shelves, each wafer shelf including a pair of opposing inclined ramp portions. The ramp portions are cooperatively positioned and configured so that when the wafer is received on the shelves, the wafer is supported on the ramps at a lower peripheral corner of the wafer, all other portions of the wafer being free from contact with the wafer support system. Each wafer shelf may have a generally concave upper surface and the incline of the ramps is continuous with the concave upper surfaces of the wafer shelves. | 08-06-2009 |
20090206001 | SUBSTRATE CONTAINER - A container includes: a container body for storing substrates of semiconductor wafers; a door element detachably fitted to an open front portion of the container body; and a compressively deformable gasket for sealing between the container body and the door element. While a sealing surface for the gasket is formed on an inner periphery of an open front portion of the container body so that the difference between the maximum and minimum of a flatness is less than 0.50 mm, a fitting portion for the gasket is formed in a frame shape. The gasket is formed of a base fitted to the fitting portion; a flexible sealing part extended from the base toward the sealing surface; and a contact portion that is curvedly formed at a distal end of the sealing part and put in press-contact with the sealing surface. | 08-20-2009 |
20090230019 | Substrate cassette having electrode array - A substrate cassette having an electrode array includes a base frame, a plurality of first electrode plates, a plurality of second electrode plates, and a plurality of struts. The base frame includes at least one conductive member located at a bottom side thereof and each having a plurality of first channels and second channels parallel to the first channels. The first and second channels are alternately arranged. The base frame includes a plurality of fixtures located at a top side thereof. An insulator is mounted in each of the second channels. Each of the struts is mounted to two opposite sides of a bottom edge of each of the corresponding first and second electrode plates. The struts and the corresponding fixtures are vertically opposite to each other to jointly define a limited space for receiving substrates, wherein the struts carry the substrates. Therefore, the substrate cassette is applicable to the CVD process. | 09-17-2009 |
20090250374 | SEMICONDUCTOR WAFER CONTAINER - A wafer-retaining unit ( | 10-08-2009 |
20100025287 | Wafer Container with Constraints - A wafer container includes a container body that having an open front on sidewall, a plurality of slots disposed in the container body for support wafers, and a door is assembled with opening of the container body for protecting the wafer therein, the characteristic in that: an recess is disposed in the inner surface, and a wafer restraint modules on the sides of the recess. The wafer restraint module includes a base portion for fixing the wafer restraint module on the platform, and a plurality of curve portions is formed on the side of the platform, in which each curve portion and the free ends constructed the protruding portion, thereby, the guiding notch of the protruding portion contacted the wafer to restrict the wafer from moving. | 02-04-2010 |
20100025288 | Wafer container with constraints - A wafer container includes a container body with an opening on one side, and the inside with slots for placing the wafers. The door joined with the opening of the container body to protect the wafer therein, the characteristic in that: two rows of the plurality of wafer restraint components with a spaced at interval is located on the inner surface of the door and adjacent to the central of the door, in which the each wafer restraint component includes a base portion, which one end is fixed on the inner surface of the door, and another end is joined with a bent arm. The bent arm includes a first contact head and a second contact head to restrict the wafer moving toward the opening of the door. | 02-04-2010 |
20100038282 | Front Opening Unified Pod with latch structure - A wafer container includes a container body, which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and exporting the plurality of wafers, and a door with an outer surface and an inner surface, which is assembled with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: at least one latch component is disposed in the door, which includes an oval cam, a pair of moving bars contacting two ends of the oval cam, at least one roller disposed in the door and fixed in a slide groove of the moving bars, and at least one locating spring being an integral part of the moving bars. | 02-18-2010 |
20100038283 | Wafer container having the latch and inflatable seal element - A wafer container includes a container body that having an open front on sidewall, a plurality of slots disposed in the container body for support wafers, and a door is assembled with opening of the container body for protecting the wafer therein, the characteristic in that: at least one latch is disposed in the door and an inflatable seal element is located at the rim of the inner side of the door. | 02-18-2010 |
20100051503 | Wafer container with inflatable supporting module - A wafer container includes a container body, composed of a pair of side walls, a top surface, and a bottom surface, on one sidewall of which is formed with an opening and on the other sidewall opposite to the opening is formed with a back wall, a supporting module being disposed on each of said sidewall for supporting a plurality of wafers; and a door joining with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: an inflatable supporting module is respectively disposed between each side wall of the container body and the back wall, a long slot is further disposed on the side of inflatable supporting module facing the opening, and an air inlet is further disposed on one end of the inflatable supporting module for being connected to an gas valve, wherein the inflatable supporting module is composed of a plurality of supporting ribs vertically arranged at intervals. | 03-04-2010 |
20100051504 | Wafer Container with Integrated Wafer Restraint Module - A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an outer surface and an inner surface, which is joined with opening of the container body with its inner surface for protecting the plurality of wafers in the container body, the characteristic in that: a recess is integrated with the inner surface of the door for separating the inner surface into two platforms, a restraint module is formed respectively on each of two platforms, and each restraint module includes a base which is disposed with a plurality of notches arranged at interval for contacting said plurality of wafers. | 03-04-2010 |
20100065468 | Wafer Container with roller - A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an outer surface and an inner surface, which is joined with opening of the container body with its inner surface for protecting the plurality of wafers within the container, the characteristic in that: a plurality of pairs of rollers are disposed on the inner rim of the opening of container body. | 03-18-2010 |
20100072107 | SUBSTRATE STORAGE CONTAINER - A substrate storage container includes a container body capable of storing a plurality of substrates in array, a lidding body, and a retainer for retaining substrates therebetween. The retainer includes a plurality of flexible and elastic pieces that are extended from the interior side of the lidding body in the direction of substrates stored in the container body and arranged in the direction of the array of the plurality of substrates, and holding groove pieces each formed with the elastic piece for touching and holding the rim of the substrate. The elastic piece with holding groove piece is gradually curved outwardly with respect to the width direction of the substrate from the interior side of the lidding body toward the substrate, so as to reduce the contact-holding area of the holding groove piece with the rim of the substrate. | 03-25-2010 |
20100108565 | Wafer container having the snap-fitting restraint module - A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an inner surface, which is joined with opening of the container body with the inner surface for protecting the plurality of wafers in the container body, the characteristic in that: at least one restraint module is disposed on the inner surface of the door, the restraint module including a base which is disposed with a plurality of restraints arranged at intervals and an opening, and a snap-fitting piece is disposed on the inner surface of the door for snap-fitting the restraint module by passing the snap-fitting piece through the opening of the base of restraint module and rotating the restraint to an angle. | 05-06-2010 |
20100163452 | Wafer container having the purging valve - A wafer container includes a container body, a door, and a purging valve, wherein the purging valve is disposed in the through hole of the container body. The purging valve includes a fixed sleeve body, a purging head, an elastic component, and a valve lid. The fixed sleeve body comprises a base, and a lower opening is formed at the center of the base for the purging head to be disposed therein. The purging head comprises a bottom portion and a hollow sleeve portion protruding upward from the bottom portion, wherein the hollow sleeve portion is surroundingly disposed with elastic component and with vent disposed on its circumference wall. The valve lid is disposed on top of the hollow sleeve portion so that the purging head can move from the first position to the second position inside the fixed sleeve body when being propped up by an upward force. | 07-01-2010 |
20100236977 | WAFER CONTAINER WITH ADJUSTABLE INSIDE DIAMETER - Improvements in a semiconductor wafer container for reducing movement of semiconductor wafers within a wafer carrier using flexible wall segments, panels or flexible inserts in the base member's main inner containment diameter. These walls allow a vertical containment surface to move and capture the entire stack of wafers rather than a few wafers. The surface that contacts the wafers moves uniformly inward. The wafer stack is secured by reducing or eliminating the gap between the wafer container and the wafer stack. Further improvements include the addition of a ramped engagement surfaces in the top and/or bottom cover that provides mechanical advantage for easier assembly of the top and bottom cover. This design also allows for automated loading and unloading of the wafer stack because once the top cover is removed, the flexible walls spring back outward. Thus providing a small gap in which to freely remove the wafers. | 09-23-2010 |
20100258475 | RETAINER AND SUBSTRATE STORAGE CONTAINER - A retainer includes a frame, a pair of first elastic parts projected from a pair of opposing parts of the frame so as to approach to each other, and a second elastic part that is supported at the bent free ends of the paired first elastic parts to hold a substrate. The outside end of the second elastic part is positioned outside the free end of the first elastic part and closer to the opposing part of the frame. Also, first and second holds for holding the rim of the substrate are formed apart from each other. The second hold is positioned on the outer end side of the second elastic part from the first hold. | 10-14-2010 |
20100307957 | REUSABLE RESILIENT CUSHION FOR WAFER CONTAINER - A container for holding a plurality of substrates includes an enclosure portion defining an interior space. The enclosure has a plurality of slots for receiving the substrates, and a door ( | 12-09-2010 |
20110005966 | FOUP AND ROBOTIC FLANGE THEREOF - A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body. | 01-13-2011 |
20110005967 | METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING - A front opening semiconductor wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features. | 01-13-2011 |
20110062052 | Front Opening Unified Pod disposed with purgeable supporting module - A Front Opening Unified Pod (FOUP) having a purgeable supporting module disposed at the junction of each sidewall and the backwall of the container, the characteristic of the FOUP being in that: the purgeable supporting module has a buffer gas chamber and a gas inlet is disposed at one end of the buffer gas chamber and connected to a gas valve on the bottom surface, an outgassing channel is disposed on the purgeable supporting module facing the opening of the FOUP, and a long slot is disposed on one side of the outgassing channel, an airflow channel being disposed between and thus connecting the outgassing channel and the buffer gas chamber, and a plurality of supporting ribs being vertically disposed on one side of the long slot at intervals. | 03-17-2011 |
20110073521 | Wafer container with at least one oval latch - A wafer container includes a container body and a door joined with opening of the container body for protecting wafers therein. At least one latch component is disposed in the door, and each latch component includes an oval cam and a pair of moving bars, a first end of each moving bar connecting to one of the two opposite sides of the oval cam and a second end of each moving bar having a guiding structure, a pair of moving grooves being disposed between the first end and the second end of each moving bar, at least a pair of rollers being disposed on the door and each roller being embedded in each moving groove of moving bar, and a locating spring being formed as an integral part of the moving bars. | 03-31-2011 |
20110089079 | Chip Carrying Tray - A chip carrying tray comprises plural rectangular flat carrying portions for carrying plural chips. Each of the carrying portions is provided with stopping walls for restricting the slippage of the chip. The stopping walls are defined with through holes for discharging moisture of the chip carrying tray. By such arrangements, the chip carrying tray can stably carry the chips and substantially keep the chips dry. | 04-21-2011 |
20110139675 | Wafer container with at least one purgeable supporting module having a long slot - A Front Opening Unified Pod (FOUP) having a purgeable supporting module disposed at the junction of each sidewall and the backwall of the container, the characteristic of the FOUP being in that: the purgeable supporting module has a buffer gas chamber and a gas inlet is disposed at one end of the buffer gas chamber and connected to a gas valve on the bottom surface, an outgassing channel is disposed on the purgeable supporting module facing the opening of the FOUP, a long slot is disposed on one side of the outgassing channel and a kind of porous material is disposed in the long slot, an airflow channel being disposed between and thus connecting the outgassing channel and the buffer gas chamber, and a plurality of supporting ribs being vertically disposed on one side of the long slot at intervals. | 06-16-2011 |
20110220545 | SUBSTRATE TRANSFER CONTAINER, GAS PURGE MONITORING TOOL, AND SEMICONDUCTOR MANUFACTURING EQUIPMENT WITH THE SAME - A substrate transfer container comprises a housing including a plurality of substrate slots positioned within a gas chamber having an interior environment. Each substrate slot accommodates a substrate undergoing a substrate manufacturing process, the interior environment of the gas chamber being selectively sealed from an exterior environment. A detection unit at the housing is constructed and arranged to detect an environmental property of the interior environment of the gas chamber, and to generate a detection signal in response. A signal transmission module at the housing is configured to wirelessly transmit a detection signal received from the detection unit. | 09-15-2011 |
20110266192 | WAFER CONTAINER WITH OVAL LATCH - A wafer container includes a container body, in which a plurality of slots being disposed for supporting a plurality of wafers and an opening being formed on one sidewall of which for importing and exporting the plurality of wafers, and a door is joined with the opening of the container body for protecting the plurality of wafers therein, wherein the characteristic of the wafer container lies in that: at least one latch component is disposed in the door, the latch component including an oval cam with a pair of V-shape notches and on the surface of oval cam being a groove, a pair of moving bars including respectively an engaging portion, and a guiding element located on the moving bars, the engaging portion being engaged in the groove for the pair of moving bars to be respectively engaged with the oval cam. | 11-03-2011 |
20110266193 | Wafer Container With Purgeable Supporting Module - A wafer container includes a container body, composed of a pair of side walls, a top surface, and a bottom surface, a supporting module being disposed on each of said sidewall for supporting a plurality of wafers; and a door joining with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: a purgeable supporting module is respectively disposed between each sidewall to of the container body and the back wall, a long slit is further disposed on the side of purgeable supporting module facing the opening and a porous material is disposed within the long slit, and an air inlet is further disposed on one end of the purgeable supporting module for being connected to a gas valve, wherein the purgeable supporting module is composed of a plurality of supporting ribs vertically arranged at intervals. | 11-03-2011 |
20110297579 | Wafer container with elasticity module - A wafer container, comprising: a container body, the container body having a plurality of slot portions on two opposite sidewalls of the interior of the container body for horizontally sustaining a plurality of wafers, each slot portion having a horizontal carrying portion, an opening being formed on one side of the container body for exporting and importing a plurality of wafers; and a door, said door having an inner surface and a outer surface, the inner surface being joined with the opening of the container body for protecting the plurality of wafers therein, the characteristic in that: an elasticity module is disposed on the inner wall of the rear end of the container body opposite to the opening, the elasticity module having a rectangular body and a convex portion bending toward the interior of the container body being respectively formed on two longer opposite sides of the rectangular body. | 12-08-2011 |
20120043254 | SEMICONDUCTOR WAFER CONTAINER - Wafer protecting grooves ( | 02-23-2012 |
20120061288 | COMPOSITE SUBSTRATE CARRIER - A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features. | 03-15-2012 |
20120125808 | WORKPIECE SUPPORT STRUCTURES AND APPARATUS FOR ACCESSING SAME - The present invention comprises a workpiece container for storing at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector according to the present invention may engage these extended portions or “grip zones” of the workpiece. | 05-24-2012 |
20120181215 | PACKAGING SYSTEM FOR PROTECTION OF IC WAFERS DURING FABRICATION, TRANSPORT AND STORAGE - The packaging system includes an enclosure having an interior volume. A wafer stack, comprising plural wafers and separators in contact with the wafers, is located in the interior volume. The separators have raised bumps extending from each side. The bumps create spaces that allow air to flow therethrough. The separator film intercepts and captures airborne molecular contaminants belonging to organic and inorganic chemical families. In addition, the film is dissipative to static discharge. Furthermore, the bumps provided by the separators protect the fragile wafers from damage due to mechanical shock. The separators are also provided with a peripheral ring or embossment, which contacts the wafer edges and further protects the wafers from damage to mechanical shock. Air cushions can be provided in the wafer stack, which cushions are provided with bands to regulate the compression. | 07-19-2012 |
20130032509 | SUBSTRATE STORAGE CONTAINER - A substrate storage container is provided with a container body for aligning and storing a plurality of sheets of semiconductor wafers, and a lid for detachably opening/closing an open front of the container body, in which a robotic flange for conveyance is attached on a substantially center portion of a ceiling of the container body, in which heavy gravity center position adjustment member is provided at a rear portion of the container body such as on a rear wall, a side wall rear portion so that inclination of the substrate container body toward the lid side is regulated with the gravity center position adjustment member. | 02-07-2013 |
20130037444 | Substrate Storage Container - When a lid ( | 02-14-2013 |
20130056388 | Substrate Storage Container - The position of a substrate temporal placement piece ( | 03-07-2013 |
20130056389 | THIN WAFER SHIPPER - An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers respectively, and extend the wafer support to approximately the entire circumference of each wafer. | 03-07-2013 |
20130153462 | COUPLING SYSTEM - In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred into the apparatus together with the coupling chamber, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail. | 06-20-2013 |
20130186803 | WAFER TRANSFER POD FOR REDUCING WAFER PARTICULATE CONTAMINATION - A wafer transport pod for storing or transporting semiconductor wafers during semiconductor wafer processing includes a body having a top panel, a bottom panel, a back panel, two side panels and a front panel. The two side panels are configured for receiving the semiconductor wafers therebetween, The two side panels have a plurality of separately hermetically sealed partitions inside the body, any two of the sealed partitions for sealing a wafer therebetween and for preventing wafer contamination. The front panel provides ingress and egress for the semiconductor wafers to and from the wafer transport pod. | 07-25-2013 |
20130256186 | MAGAZINE FOR LOADING A LEAD FRAME - A strip member loading magazine, which may load strip members such as semiconductor integrated circuit lead frames, for example, may include a bottom plate, a plurality of first slot plates provided at opposite sides of the bottom plate, a top plate fixed to a top portion of the first slot plates to be parallel to the bottom plate, second slot plates disposed to face each other between the first slot plates and be able to be moved, and locking units fastening the second slot plates to at least the top or bottom plate, the second slot plates being fastened parallel to the first slot plates. | 10-03-2013 |
20130299384 | FRONT OPENING WAFER CONTAINER WITH WAFER CUSHION - A front opening wafer container suitable for 450 mm wafers utilizes a wafer cushion on the front door with varying inclinations on the inside surface of a lower leg of V-shaped wafer cushion engagement portions on the door. Such provides enhanced performance. More specifically, in an embodiment of the invention, a front opening wafer container has, in cross section, horizontal V-shaped groove with the inside surface of the lower leg of the V having with at least two surface portions with different inclinations from horizontal. The surface portion adjacent the apex, where the edge of the wafer seats, having a lesser inclination from horizontal than a surface portion more distal from apex. | 11-14-2013 |
20130319907 | WAFER CONTAINER WITH DOOR GUIDE AND SEAL - A wafer container that reduces or alleviates one or more of the problems associated with excessive container wall deflection due to loading and excessive particulate generation, particularly as those problems are experienced with containers for 450 mm diameter and larger wafers. The container has an enclosure and door with interlocking features to enable transfer of tension load to the door to minimize deflection of container surfaces. The container may include a gasketing arrangement compatible with the interlock feature. The container may include a removable door guide that improves centering of the door during door installation, and that is made of low particle generating material to reduce particulates. | 12-05-2013 |
20130341239 | ACCOMMODATION CASSETTE - An accommodation cassette including: a plurality of rear accommodating grooves that are formed at least in the laterally central area of the inner surface of a rear wall connecting the rear edges of right and left side walls and extend laterally and parallel to each other at vertical spacings in such a manner as to be associated with right and left accommodating grooves. | 12-26-2013 |
20140076774 | Automated Wafer Container with Equipment Interface - An improved wafer container is provided for use with automated equipment. The container includes a top lid that engages with a bottom base to form a housing having an inner cavity for storing semiconductor wafers. The lid includes a handling member that interfaces with automated equipment for engaging the lid with the base and removing the lid from the base. The container includes latches that can be actuated between a locked position and an unlocked position by automated equipment. The container can hold multiple stacked wafer separator rings, each of which has automation tabs extending outwardly from the ring outer rim. The automation tabs allow for automated equipment to transfer the wafer separators rings between the container and a staging area. | 03-20-2014 |
20140151264 | WAFER CARRIER AND APPLICATIONS THEREOF - A wafer carrier includes a body, a door and a plurality of stages. The body has at least a sidewall and a wafer receiving cavity for receiving at least a wafer, wherein the wafer receiving cavity extends into the body from an opening formed on the sidewall. The door is disposed out of the opening. The stages are in contact with the sidewall for supporting the body, respectively. | 06-05-2014 |
20140197068 | WAFER HOLDING APPARATUS - A wafer holding apparatus including a container body having a space to receive a wafer and a front opening, a door disposed at the front opening, and a first supporting part disposed on an inner wall of the door may be provided. For example, the first supporting part may include a frame coupled to the inner wall of the door, a plurality of elastic ribs protruding from the frame, a support structure coupled to the plurality of elastic ribs and defining a plurality of grooves, which is spaced apart from the door by the elastic ribs and configured to receive a peripheral portion of the wafer. | 07-17-2014 |
20140231305 | CASSETTE ASSEMBLY - A cassette assembly for storing a plurality of platelike workpieces. The cassette assembly includes a first cassette, a second cassette stacked on the first cassette, and a fixing unit for fixing the first cassette and the second cassette to each other in the stacked condition. Both of the cassettes include a first side plate having workpiece supporting grooves, and a second side plate arranged parallel to the first side plate. The second side plate has workpiece supporting grooves respectively opposed to the workpiece supporting grooves of the first side plate, a top plate for connecting the upper ends of the first and second side plates, a bottom plate for connecting the lower ends of the first and second side plates, and a load/unload opening formed near the front ends of the first and second side plates, the top plate, and the bottom plate for loading and unloading the workpieces. | 08-21-2014 |
20140231306 | APPARATUS FOR STORING SUBSTRATES - An apparatus for storing a substrate on which a pattern is formed includes a main body storing the substrate, a first pad located at the bottom of the main body and including a first groove supporting one edge of the substrate, a second pad neighboring the first pad and including a second groove supporting the center of the substrate, and a third pad spaced from the first pad, the second pad being disposed between the first and third pads, the third pad including a third groove supporting the other edge of the substrate. | 08-21-2014 |
20140238896 | SUBSTRATE CONTAINER HAVING LIMIT STRUCTURE - A substrate container having a limit structure includes a box, at least one limit structure and a door. The limit structure is disposed on a side wall of the box and has a plurality of limit grooves. Each limit groove has a first inclined surface and a second inclined surface. The angle of inclination of the second inclined plane relative to a horizontal plane corresponds to a coefficient of friction between materials of the substrate and the limit structure to lower the friction between the substrate and the second inclined plane of the limit groove, so that the substrate can ascend along the second inclined plane to get into the limit groove for the door to be closed smoothly. Through the limit structure to position the substrate, the present invention can prevent the substrate from shaking in the substrate container. | 08-28-2014 |
20140262928 | TRAY FOR ALIGNING SEMICONDUCTOR PACKAGES AND TEST HANDLER USING THE SAME, AND METHOD OF ALIGNING SEMICONDUCTOR PACKAGES AND TEST METHOD USING THE SAME - Disclosed are a tray for aligning semiconductor packages, a test handler using the same, and a method of aligning the semiconductor packages, and a test method using the same. According to the present inventive concept, the tray for aligning the semiconductor packages includes a tray main body comprising a plurality of package pocket portions at which a plurality of semiconductor packages are individually received and an air position-aligning unit coupled to the tray main body. The air position-aligning unit applies air having a preset pressure to the semiconductor package received at the package pocket portion. The semiconductor package is aligned at the package pocket portion. | 09-18-2014 |
20140299508 | ANTI-ELECTROSTATIC SUBSTRATE CASSETTE - The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges. | 10-09-2014 |
20140367307 | WAFER STORING CONTAINER - Wafer support shelves ( | 12-18-2014 |
20150008154 | PACKAGING SYSTEM FOR PROTECTION OF IC WAFERS DURING FABRICATION, TRANSPORT AND STORAGE - The packaging system includes an enclosure having an interior volume. A wafer stack, comprising plural wafers and separators in contact with the wafers, is located in the interior volume. The separators have raised bumps extending from each side. The bumps create spaces that allow air to flow therethrough. The separator film intercepts and captures airborne molecular contaminants belonging to organic and inorganic chemical families. In addition, the film is dissipative to static discharge. Furthermore, the bumps provided by the separators protect the fragile wafers from damage due to mechanical shock. The separators are also provided with a peripheral ring or embossment, which contacts the wafer edges and further protects the wafers from damage to mechanical shock. Air cushions can be provided in the wafer stack, which cushions are provided with bands to regulate the compression. | 01-08-2015 |
20150041359 | SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY - A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure. | 02-12-2015 |
20150041360 | WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS - A wafer container utilizes a rigid polymer tubular tower with slots and a “getter” therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion. | 02-12-2015 |
20150068948 | WAFER LOADERS HAVING BUFFER ZONES - Embodiments of the present inventive concepts provide a wafer loader having one or more buffer zones to prevent damage to a wafer loaded in the wafer loader. The wafer loader may include a plurality of loading sections that protrude from a main body and are configured to be arranged at various locations along an edge of the wafer. Each of the loading sections may include a groove into which the edge of the wafer may be inserted. The loading section may include first and second protrusions having first and second inner sides, respectively, that face each other to define the groove therebetween. At least one of the first and second inner sides may include a recess to define the buffer zone. | 03-12-2015 |
20150068949 | WAFER SHIPPER - A wafer container for holding a spaced stack of thin wafers, comprising an H-bar carrier, a base portion for receiving same, a base wafer cushion attached at the bottom wall positioned below the H-bar carrier, the cushion having a plurality of ribs defining slots each with a bottom wafer seating region having a curvature and a pair of ends, each of the ends having a flare whereby the seating region flares outwardly at the ends, a cover portion that connects with the base portion to form a closed interior. The cover portion having an uppermost wall a wafer cushion secured thereto. The cover wafer cushion having a row of wafer engaging finger portions, the finger portions Y shaped and having two legs extending from a support portion and alternatingly extending from opposing support portions, the finger portions may be S shaped with a wafer pad flared in two direction. | 03-12-2015 |
20150083639 | WAFER CONTAINER WITH DOOR MOUNTED SHIPPING CUSHIONS - A cushioned wafer container system having removable wafer cushions for transporting large-diameter wafers. The system includes a wafer container enclosure defining a front opening and comprising a rear wall, and a plurality of wafer supports defining a plurality of slots; a front door configured to attach to the wafer enclosure at the front opening and defining a front side and a rear side; a primary wafer cushion coupled to a rear side of the front door at a central portion of the front door, the primary wafer cushion defining a plurality of wafer grooves, each of the grooves of the primary wafer cushion aligned with a slot of the wafer supports; and a first removable wafer cushion attachable to the rear side of the front door adjacent the primary wafer cushion, the first removable wafer cushion defining a plurality of wafer-receiving grooves in alignment with the grooves and slots. | 03-26-2015 |
20150083640 | METHODS AND APPARATUS FOR LARGE DIAMETER WAFER HANDLING - A front semiconductor opening wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features. | 03-26-2015 |
20150090630 | WAFER POD AND WAFER POSITIONING MECHANISM THEREOF - Embodiments of mechanisms of a wafer pod including a wafer positioning mechanism are provided. The wafer positioning mechanism includes a base including a blocking portion, and a linking bar pivoted on the base and including a resilient portion. The wafer positioning mechanism also includes a pushing element pivoted on the linking shaft. Further, when the pushing element is at a retaining position, the resilient portion abuts against the blocking portion, and a force generated by the linking bar is applied to the pushing element. | 04-02-2015 |
20150122699 | WAFER CONTAINER WITH DOOR INTERFACE SEAL - A wafer container may be a front opening wafer container comprising a container portion and a door, one of the container portion and the door having a radially installed seal with a plurality of opposing lateral projections that deflect from a normal position in a direction away from an install direction when the seal is installed in a groove, the lateral projections resisting removal of the seal after the seal is seated in the groove. A core portion and a cantilevered finger member engages the other of the door and container portion when the door is seated in the container portion. Other lateral projections on the seal effectively seal the path between the seal and groove surfaces. | 05-07-2015 |
20150129459 | REPLACEABLE WAFER SUPPORT BACKSTOP - A wafer container an enclosure portion including a top wall, a bottom wall, a pair of side walls, a back wall, and a door frame opposite the back wall, the door frame defining a front opening, and a wafer support structure including two side wafer supports | 05-14-2015 |
20150294887 | WAFER CONTAINER WITH PARTICLE SHIELD - Particulate shields above the top wafer in wafer containers such as FOUPS prevent accumulation of particulates on wafers. The shields may be formed of materials that are compatible to maintaining less than 5% RH, particularly materials that will not absorb meaningful amounts of water, and that will not bring absorbed moisture into the container, for example cyclic olefin polymers, cyclic olefin copolymers, liquid crystal polymers. A FOUP may be provided with an additional slot above industry standard 25 slots to receive a dedicated barrier. In embodiments, the barrier may be a shape corresponding to a wafer. The barrier may have inherent charge properties opposite to the particulates in the containers to attract the particulates. The barrier may have apertures to facilitate charge development. The barrier may be retrofitted to existing wafer containers. The shield may conform to FOUP configuration. | 10-15-2015 |
20150311098 | WAFER STORAGE CONTAINER - A wafer storage container includes a shell body including a first side body and a second side body that face, an upper body connected with upper parts of the first side body and the second side body, a rear body connected with an end of one side of each of the first side body and the second side body, and a lower body connected with lower parts of the first side body and the second side body, and configured to define an internal space together with the first side body, the second side body, the upper body, and the rear body. | 10-29-2015 |
20160204010 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | 07-14-2016 |
20160254172 | WAFER CARRIER | 09-01-2016 |