| Entries |
| Document | Title | Date |
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| 20080210531 | Micro-switching device and manufacturing method for the same - A micro-switching device includes a base substrate, a fixing member on the substrate, a movable part having an end fixed to the fixing member and extending along the substrate, a movable contact electrode provided on the movable part and facing away from the substrate, a pair of stationary contact electrodes bonded to the fixing member and including a region facing the movable contact electrode, a movable driver electrode between the movable contact electrode and the stationary end on the movable part at a surface facing away from the substrate, and a stationary driver electrode bonded to the fixing member and including an elevated portion having a region facing the movable driver electrode. The elevated portion is provided with steps facing the movable driver electrode, where the steps are closer to the substrate as they are farther from the movable contact electrode. | 09-04-2008 |
| 20080217149 | INTEGRATED ARRANGEMENT AND METHOD FOR PRODUCTION - An integrated arrangement with a circuit and a MEMS switch element is provided, in which the circuit has a plurality of semiconductor components that are connected to form the circuit by metallic traces in several metallization levels located one over the other, in which the metallization levels are located between the MEMS switch element and the semiconductor components, so that the MEMS switch element is located over the topmost metallization level, in which the MEMS switch element is designed to be movable, the MEMS switch element is positioned with respect to a dielectric, so that the movable MEMS switch element and the dielectric produce a variable impedance (for a high-frequency signal), and in which a drive electrode, which is positioned with respect to the MEMS switch element and is for producing an electrostatic force to move the MEMS switch element, is constructed in the topmost metallization level. | 09-11-2008 |
| 20080223699 | MEMS ACTUATORS AND SWITCHES - Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation. | 09-18-2008 |
| 20080223700 | ELECTROSTATIC ACTUATOR - An actuator comprising a movable electrode and a static electrode is disclosed. An exemplary actuator is actuateable using an electrical potential difference that is applied between the movable electrode and the static electrode. The actuator comprises static bridge contacts with conductive surfaces, and a contact area with a conductive surface facing said bridge contacts located on the movable electrode. An electrically conductive contact is established between the bridge contacts, when the movable electrode contacts the static electrode. The movable electrode comprises at least two elements, a first element and a second element. The second element is movable with respect to the first element. | 09-18-2008 |
| 20080230357 | GOLD-METAL OXIDE THIN FILMS FOR WEAR-RESISTANT MICROELECTROMECHANICAL SYSTEMS ("MEMS") - Provided herein are new methods for the fabrication of gold (Au) alloys and films containing metal or semimetal oxides such as oxides of vanadium (V), for example, Au—V | 09-25-2008 |
| 20080237005 | SWITCHING ELEMENT, METHOD FOR MANUFACTURING THE SAME, AND DISPLAY DEVICE INCLUDING SWITCHING ELEMENT - A method for manufacturing a switching element which has enough resistance to repeat switching operations and which can be miniaturized and have low power consumption, and a display device including the switching element are provided. The switching element includes a first electrode to which a constant potential is applied, a second electrode adjacent to the first electrode, and a third electrode over the first electrode with a spacer layer formed of a piezoelectric material interposed therebetween and provided across the second electrode such that there is a gap between the second electrode and the third electrode. A potential which is different from or approximately the same as a potential of the first electrode is applied to the third electrode to expand and contract the spacer layer, so that a contact state or a noncontact state between the second electrode and the third electrode can be selected. | 10-02-2008 |
| 20080277252 | Mechanical switch - Apparatus including a substrate and a mechanical switch, the mechanical switch located over the substrate, the mechanical switch including: a first electrical contact over the substrate; a support over the substrate, the support including a region moveable relative to the first electrical contact, the moveable region having a second electrical contact, the second electrical contact located over the first electrical contact; and a self-assembled molecular layer between the substrate and the second electrical contact. Method including placing into operation an apparatus, and applying a coulomb force causing the second electrical contact to move relative to the first electrical contact such that the switch is opened or closed. | 11-13-2008 |
| 20080283373 | Assembly of a Microswitch and of an Acoustic Resonator - The invention relates to a device consisting of an electromechanical microswitch comprising mobile beam ( | 11-20-2008 |
| 20080283374 | ELECTROMECHANICAL ELEMENT, DRIVING METHOD OF THE ELECTROMECHANICAL ELEMENT AND ELECTRONIC EQUIPMENT PROVIDED WITH THE SAME - An electromechanical element includes a first electrode which is provided on a substrate, and a second electrode and a third electrode which are provided via a gap with respect to the first electrode. The first electrode contacts with the second electrode when an attracting force is applied between the first electrode and the third electrode. The first electrode has a bending portion. | 11-20-2008 |
| 20080308394 | MICRO-ELECTROMECHANICAL SYSTEM BASED SWITCHING - A current control device is disclosed. The current control device includes control circuitry integrally arranged with a current path and at least one micro electromechanical system (MEMS) switch disposed in the current path. The current control device further includes a hybrid arcless limiting technology (HALT) circuit connected in parallel with the at least one MEMS switch facilitating arcless opening of the at least one MEMS switch, and a pulse assisted turn on (PATO) circuit connected in parallel with the at least one MEMS switch facilitating arcless closing of the at least one MEMS switch. | 12-18-2008 |
| 20090014295 | ELECTROMECHANICAL SWITCH, FILTER USING THE SAME, AND COMMUNICATION APPARATUS - An electromechanical switch includes a first beam, a second beam arranged in parallel with the first beam and connected to the first beam through a connecting portion, a first electrode formed so as to have a first gap with respect to the first beam, a voltage applying portion which applies a voltage between the first beam and the first electrode, and a second electrode formed so as to have a second gap with respect to the second beam. The second gap is greater than the first gap. The first beam is displaced when the voltage applying portion applies the voltage between the first beam and the first electrode, so that switching between the second beam and the second electrode is performed in a state that the first beam is not electrically connected to the first electrode. | 01-15-2009 |
| 20090014296 | Contact configurations for MEMS relays and MEMS switches and method for making same - Micro-electromechanical (MEMS) contact configuration is disclosed, comprising a static contact with at least one contact surface and a movable contact with at least one corresponding contact surface. Particularly flat contact surfaces and correspondingly low contact resistance can be achieved, if at least one contact surface plane is formed by a crystal plane of the wafer. Furthermore a method for manufacturing such a contact configuration is proposed, wherein the contact surfaces are obtained by wet anisotropic etching of a silicon wafer, if need be preceded by appropriate masking to expose the to be edged regions only, if need be followed by coating with an electrically conductive layer, e.g., a metal layer. | 01-15-2009 |
| 20090020399 | Electromechanical switch and method of manufacturing the same - Provided is an electromechanical switch and a method of manufacturing the same. The electromechanical switch includes an elastic conductive layer that moves by the application of an electric field, wherein the elastic conductive layer includes at least one layer of graphene. | 01-22-2009 |
| 20090071807 | MEMS SWITCH AND METHOD OF FABRICATING THE SAME - A MEMS switch includes a field generator which generates an electric field in a predetermined space, a beam located in the space and made of an electrically conductive material, the beam being flexed downward when subjected to an electrostatic force due to the electric field, the beam being deformed so as to return upward by an elastic restoring force upon extinction of the electrostatic force, a signal line electrically connected to the beam when the beam is flexed downward, and a protective cap covering the field generator, the beam, and the signal line, thereby sealing the field generator, the beam, and the signal line. | 03-19-2009 |
| 20090107812 | ELECTRICAL CONNECTION THROUGH A SUBSTRATE TO A MICROELECTROMECHANICAL DEVICE - An electrical through-connection, or via, that passes through a substrate to a bus on a first surface of the substrate. The via may be configured with an interlock such that the electrically conductive core of the via is constrained to thermally expand towards the second surface, away from the bus, thus preventing damage to the bus. The interlock may be a local constriction or enlargement of the via near the first surface of the substrate. The via may be greater in length along the bus than a unit spacing of beams in a parallel microswitch array actuated in unison along the bus. The via may be narrower in width than in length, and may form a trapezoidal geometry that is larger at the second surface of the substrate than at the first surface. | 04-30-2009 |
| 20090107813 | SYSTEM AND METHOD FOR AVOIDING CONTACT STICTION IN MICRO-ELECTROMECHANICAL SYSTEM BASED SWITCH - A system that includes micro-electromechanical system switching circuitry, such as may be made up of a plurality of micro-electromechanical switches, is provided. The plurality of micro-electromechanical switches may generally operate in a closed switching condition during system operation. A controller is coupled to the electromechanical switching circuitry. The controller may be configured to actuate at least one of the micro-electromechanical switches to a temporary open switching condition while a remainder of micro-electromechanical switches remains in the closed switching condition to conduct a load current and avoid interrupting system operation. The temporary open switching condition of the switch is useful to avoid a tendency of switch contacts to stick to one another. | 04-30-2009 |
| 20090114513 | MICRO ELECTROMECHANICAL SYSTEM (MEMS) SWITCH - A Micro ElectroMechanical System (MEMS) switch is provided. The MEMS switch includes a ground, a moving unit moveable according to a driving signal, for connecting the input to the output or disconnecting the input from the output, and an electrode unit arranged in the configuration of a protrusion formed on a portion of the round, to induce a leakage signal generated between the input and the output to move toward the ground. | 05-07-2009 |
| 20090120772 | ACTIVE-MATRIX DEVICE, ELECTRO-OPTICAL DISPLAY DEVICE, AND ELECTRONIC APPARATUS - An active-matrix device includes a substrate; a plurality of pixel electrodes provided on a first surface of the substrate; a plurality of switching elements provided to correspond to each of the pixel electrodes, each of the switching elements including a fixed electrode connected to the each pixel electrode, a movable electrode displaceably provided to contact with and separate from the fixed electrode, a driving electrode provided to oppose the movable electrode via an electrostatic gap, and an adhesion-preventing mechanism that prevents adhesion between the movable electrode and the driving electrode; a first wiring connected to the movable electrode; and a second wiring connected to the driving electrode, in which a voltage is applied between the movable electrode and the driving electrode to generate an electrostatic attraction between the movable electrode and the driving electrode so as to displace the movable electrode such that the movable electrode contacts with the fixed electrode to electrically connect the first wiring to the pixel electrode. | 05-14-2009 |
| 20090127081 | MEMS SWITCH - An object is that contact between an upper switch electrode and a lower switch electrode is not hindered. The present invention relates to a MEMS switch including a substrate; a structural layer with a beam structure in which at least one end is fixed to the substrate; a lower drive electrode layer and a lower switch electrode layer which are provided below the structural layer and on a surface of the substrate; and an upper drive electrode layer and an upper switch electrode layer which are provided on a surface of the structural layer, which is opposite to the substrate, so as to face the lower drive electrode layer and the lower switch electrode layer, respectively, in which the upper switch electrode layer is larger than the lower switch electrode layer. | 05-21-2009 |
| 20090127082 | MICROFABRICATED CANTILEVER SLIDER WITH ASYMMETRIC SPRING CONSTANT - Mechanical springs and sliders as used in microfabricated actuators to provide an asymmetric spring constant are described. The asymmetric spring constant provides a propensity for deflection towards one direction, and a propensity for separation (i.e. restoration) towards the other direction. The asymmetry and slider system provides a passive mechanical means to achieve faster switching times and higher switch restoring forces. | 05-21-2009 |
| 20090159409 | MEMS MICROSWITCH HAVING A DUAL ACTUATOR AND SHARED GATE - In accordance with one aspect of the present invention, a MEMS switch is provided. The MEMS switch includes a substrate, a first and a second actuating element electrically coupled together, an anchor mechanically coupled to the substrate and supporting at least one of the first and second actuating elements, and a gate driver configured to actuate the first and second actuating elements. | 06-25-2009 |
| 20090159410 | MEMS MICROSWITCH HAVING A CONDUCTIVE MECHANICAL STOP - A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact. | 06-25-2009 |
| 20090200144 | MICROELECTROMECHANICAL ELEMENT AND ELECTROMECHANICAL SWITCH USING THE SAME - A microelectromechanical element of a hydrophobic surface structure with a long life and high reliability and an electromechanical switch using the microelectromechanical element are provided. The surface of an electrode has a composite surface structure of a first area made of a first material forming the electrode and a second area made of a second material at least having hydrophobicity. The surface structure is the composite surface structure of the electrode material and a monolayer, whereby physical compression of the monolayer is avoided. A structure wherein the monolayer is not formed on the propagation path of a radio frequency signal is adopted, so that an increase in an insertion loss and electric field damage are avoided. | 08-13-2009 |
| 20090211884 | Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material - The device improved according to the invention comprises a micro-electromechanical switch (MEMS) with a piezoelectric element connected to a mechanical support on both sides at the edges. The electrode design of this piezoelectric element is characterized by two electrodes mounted on at least one of the surfaces. | 08-27-2009 |
| 20090211885 | ELECTRONIC DEVICE - The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate ( | 08-27-2009 |
| 20090260960 | SWITCH FOR USE IN MICROELECTROMECHANICAL SYSTEMS (MEMS) AND MEMS DEVICES INCORPORATING SAME - Embodiments of the present invention provide microelectromechanical systems (MEMS) switching methods and apparatus having improved performance and lifetime as compared to conventional MEMS switches. In some embodiments, a MEMS switch may include a resilient contact element comprising a beam and a tip configured to wipe a contact surface; and a MEMS actuator having an open position that maintains the tip and the contact surface in a spaced apart relation and a closed position that brings the tip into contact with the contact surface, wherein the resilient contact element and the MEMS actuator are disposed on a substrate and are movable in a plane substantially parallel to the substrate. In some embodiments, various contact elements are provided for the MEMS switch. In some embodiments, various actuators are provided for control of the operation of the MEMS switch. | 10-22-2009 |
| 20090260961 | Mems Switches With Reduced Switching Voltage and Methods of Manufacture - MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode. | 10-22-2009 |
| 20090266688 | COLLAPSIBLE CONTACT SWITCH - Embodiments of the invention describe a contact switch, which may include a bottom electrode structure including a bottom actuation electrode and a top electrode structure including a top actuation electrode and one or more stoppers able to maintain a predetermined gap between the top electrode and the bottom electrode when the switch is in a collapsed state. | 10-29-2009 |
| 20090272634 | POWER DIVERTER HAVING A MEMS SWITCH AND A MEMS PROTECTION SWITCH - A power diverter has a first terminal for interposition between a signal input and a signal output. A MEMS switch is coupled to the first terminal and has a MEMS switch control input. A MEMS protection switch is coupled to the MEMS switch and has a protection switch control input. The switch control inputs are configured to receive control signals for selectively placing the power diverter in i) an ON state in which signal power at the signal input is diverted from the signal output via the MEMS switch and the MEMS protection switch, ii) an OFF state in which signal power at the signal input is not diverted from the signal output, and in which the MEMS switch mitigates an insertion loss and distortion imparted by the MEMS protection switch to a signal path between the signal input and the signal output, and iii) an intermediary state in which the MEMS protection switch reduces current flow through the MEMS switch. | 11-05-2009 |
| 20090272635 | MEMS SWITCH PROVIDED WITH MOVABLE ELECTRODE MEMBER SUPPORTED THROUGH SPRINGS ON SUBSTRATE HAVING BUMP - In a MEMS switch including a movable electrode member, a substrate, a transmission line electrode, and a fixed electrode, the substrate includes a bump formed at a predetermined position to support the movable electrode member at application of a driving voltage. The transmission line electrode is formed on the substrate, and the fixed electrode is formed on the substrate. The movable electrode member includes a movable electrode opposed to the fixed electrode, a first contact opposed to the transmission line electrode, and a second contact opposed to the bump. The movable electrode member is supported between the fixed electrode and the movable electrode at a predetermined initial gap. At application of a predetermined driving voltage to the fixed electrode, the movable electrode member moves in a direction of the substrate by an electrostatic force generated between the fixed electrode and the movable electrode. | 11-05-2009 |
| 20090283391 | ELECTROMECHANICAL DEVICE AND ELECTRICAL DEVICE WITH THE ELECTROMECHANICAL DEVICE - When a high power signal is input to an electromechanical device, electrostatic force can automatically and unintentionally drive the movable electrode. A high reliability electromechanical device that prevents this is achieved. The electromechanical device of the invention is an electromechanical device formed on a substrate, and having a signal electrode and a drive electrode formed across a gap from a movable electrode. Applying an attraction force between the movable electrode and the drive electrode enables the movable electrode to contact the signal electrode. A high electrostatic capacitance is formed by disposing the movable electrode and drive electrode in opposition with a dielectric layer therebetween on the RF signal input port side. As a result, the potential difference between the movable electrode and drive electrode is reduced even when a high power signal is input, and a high reliability electromechanical device can be achieved. | 11-19-2009 |
| 20090294263 | Piezoelectric module for a switch, integrated in a housing - The invention relates to a piezoelectric module for a switch, comprising a substantially flat piezoelectric element arranged for emitting an electrical signal on mechanical deformation, electrical connecting means, positioning means and activating means wherein the positioning means comprise two elongated support elements extending substantially parallel, such support elements being positioned at a distance from the middle of the piezoelectric element and wherein the activating means comprise at least one projection moveable in the transverse direction of the piezoelectric element, such a projection engaging with the second side of the piezoelectric element between the support elements on the piezoelectric element. As a result of these measures, deformation only occurs in one direction, so that the element is not subjected to such a heavy load and the life of the piezoelectric element is expected to increase. | 12-03-2009 |
| 20090314616 | Swtich, Method and System For Switching The State of a Signal Path - The invention relates to a method, a system and a multi stable arranged to switch the configuration of the signal path for electrical signals comprising a first moving element ( | 12-24-2009 |
| 20090321232 | ELECTROMECHANICAL ELEMENT AND ELECTRONIC EQUIPMENT USING THE SAME - A quick response/low voltage driven electromechanical switch equipped with a mechanism for adjusting a spring constant of a movable electrode is provided. The electromechanical element includes a first electrode formed on a substrate, a second electrode formed at a predetermined interval to the first electrode so that the interval is changed, and supporting portions for supporting the second electrode, wherein the supporting portions of the second electrode are able to be displaced. | 12-31-2009 |
| 20100012471 | Micro-Machined Relay - An improved micro-machined relay is disclosed. The relay includes a micro-machined beam capable of carrying an electric signal and having a contact point on a closure side of the beam. The beam is electrically coupled to a first electrical transmission path and suspended above a second electrical transmission path. An insulation layer resides on a portion of the closure side of the beam and an electrical conductor is coupled to a least a portion of the insulation layer. A potential creator creates a potential between the electrical conductor and the potential creator that is capable of deflecting the beam, so that the contact point comes into contact with the second electrical transmission path. In such an embodiment, the potential creator need not account for the possible signal in the transmission path because the potential creator, which may be a voltage source, is decoupled from the transmission path. | 01-21-2010 |
| 20100018843 | LOW WORK FUNCTION ELECTRICAL COMPONENT - An electrical component is disclosed. The electrical component includes at least two electrical contacts movable relative to each other between an open position and a closed position, wherein at least one of the electrical contacts includes a material having a work function that is less than about 3.5 eV, and wherein the distance between the electrical contacts, in the closed position, is greater than 0 nm and up to about 30 nm. A device including a plurality of electrical switches is also disclosed. | 01-28-2010 |
| 20100025206 | MEMS DEVICE WITH CONTROLLED ELECTRODE OFF-STATE POSITION - The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The MEMS device further comprises at least one deformation electrode. The second electrode or the suspension structure or both are plastically deformable upon application of an electrostatic deformation force via the deformation electrode. This way, variations in the off-state position of the second electrode that occur during fabrication of different devices or during operation of a single device can be eliminated. | 02-04-2010 |
| 20100032268 | Stacked MEMS Device - A MEMS apparatus has a MEMS device sandwiched between a base and a circuit chip. The movable member of the MEMS device is attached at the side up against the circuit chip. The movable member may be mounted on a substrate of the MEMS device or formed directly on a passivation layer on the circuit chip. The circuit chip provides control signals to the MEMS device through wire bonds, vias through the MEMS device or a conductive path such as solder balls external to the MEMS device. | 02-11-2010 |
| 20100051428 | SWITCH AND ESD PROTECTION DEVICE - A switch includes a first electrode provided on a substrate, an anchor provided on the substrate, a movable structure which is supported by the anchor, provided above the first electrode to be extended from the anchor in a direction, formed of a conductor, and moves downwards, and a contact member which is attached to an edge of the movable structure, formed of a conductor, and warps toward the first electrode. | 03-04-2010 |
| 20100059346 | RF NANOSWITCH - An RF nanoswitch which can reduce a loss in RF signal. The RF nanoswitch includes a first electrode unit connected to one terminal of a driving power supply, a second electrode connected to the other terminal of the driving power supply, and a dielectric material selectively coming into contact with at least one of the first electrode unit and the second electrode, depending on whether or not power is applied from the driving power supply. | 03-11-2010 |
| 20100072042 | MEMORY ELEMENTS AND CROSS POINT SWITCHES AND ARRAYS OF SAME USING NONVOLATILE NANOTUBE BLOCKS - Under one aspect, a covered nanotube switch includes: (a) a nanotube element including an unaligned plurality of nanotubes, the nanotube element having a top surface, a bottom surface, and side surfaces; (b) first and second terminals in contact with the nanotube element, wherein the first terminal is disposed on and substantially covers the entire top surface of the nanotube element, and wherein the second terminal contacts at least a portion of the bottom surface of the nanotube element; and (c) control circuitry capable of applying electrical stimulus to the first and second terminals. The nanotube element can switch between a plurality of electronic states in response to a corresponding plurality of electrical stimuli applied by the control circuitry to the first and second terminals. For each different electronic state, the nanotube element provides an electrical pathway of different resistance between the first and second terminals. | 03-25-2010 |
| 20100072043 | ELECTROMECHANICAL SWITCH WITH PARTIALLY RIGIDIFIED ELECTRODE - An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure. The contact is mounted to the suspended electrode. The signal line is positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode. | 03-25-2010 |
| 20100108479 | CROSSBAR DEVICE CONSTRUCTED WITH MEMS SWITCHES - Embodiments of crossbar devices constructed with Micro-Electro-Mechanical Systems (MEMS) switches are disclosed herein. A crossbar device may comprise m input terminals, n output terminals, n control lines and m×n MEMS switches coupled to the n control lines to selectively couple the m input terminals to the n output terminal. Each of the MEMS switches may comprise a contact node coupled to one of the m input terminals, a cantilever coupled to one of the n output terminals, a control node coupled to one of the n control lines to electrostatically control the cantilever to contact the contact node or be away from the contact node using electrostatic attractive or repulsive force respectively. The cantilever and the contact node are configured to remain in contact by molecular adhesion force, after the cantilever has been electrostatically controlled to contact the contact node, and the electrostatic attractive force has been removed. Other embodiments may be described and claimed. | 05-06-2010 |
| 20100108480 | SWITCHING DEVICE AND COMMUNICATION APPARATUS AND METHOD RELATED THERETO - A switching device includes a stationary portion, a movable portion having a movable land portion, and a first beam portion and a second beam portion that couple the movable land portion and the stationary portion with each other. A first signal line extends over the movable land portion, the first beam portion, and the stationary portion, and has a movable contact portion on the movable land portion, a second signal line faces the movable contact portion, a first driving line extends over the movable land portion, the second beam portion, and the stationary portion, and has a movable driving electrode portion on the movable land portion, and a second driving line having a stationary driving electrode portion faces the movable driving electrode portion. | 05-06-2010 |
| 20100116630 | NANOELECTROMECHANICAL TUNNELING CURRENT SWITCH SYSTEMS - A nanoelectromechanical tunneling current switch includes a cantilevered nanofilament including a secured end and an unsecured end and a conductor with a surface substantially perpendicular to a longitudinal axis of the nanofilament when the nanofilament is undeflected. The nanofilament is positioned with respect to the conductor to define a gap between the unsecured end of the nanofilament and the surface of the conductor substantially perpendicular to the longitudinal axis of the nanofilament. The nanofilament and the conductor are electrically connected by a circuit, and a tunneling current is configured to flow from the nanofilament to the surface of the conductor substantially perpendicular to the longitudinal axis of the nanofilament. In other embodiments of the nanoelectromechanical tunneling current switch, an electrically conductive membrane can be utilized in place of, or in addition to, the cantilevered nanofilament. | 05-13-2010 |
| 20100116631 | BISTABLE NANOSWITCH - A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state. | 05-13-2010 |
| 20100116632 | METHOD OF USING A PLURALITY OF SMALLER MEMS DEVICES TO REPLACE A LARGER MEMS DEVICE - Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor. | 05-13-2010 |
| 20100126834 | SWITCH AND ESD PROTECTION ELEMENT - The switch of an aspect of the present invention including first and second electrodes provided on a substrate, an anchor provided on the first electrode, a movable structure of which a first end is supported by the anchor, extending from the anchor to a position above the second electrode, using a conductor, and configured to move in a vertical direction with respect to the second electrode, a contact portion provided at a second end of the movable structure and disposed above the second electrode, a film having a different stress value with respect to the stress value of the movable structure, and warping the contact portion toward the second electrode, and a cap provided on the substrate to cover the movable structure, configured to be in contact with the film, and functioning as a driving electrode. | 05-27-2010 |
| 20100133077 | MEMS RF-SWITCH USING SEMICONDUCTOR - A MEMS RF-switch is provided for controlling switching on/off of transmission of AC signals. The MEMS RF-switch of the present invention includes: a first electrode coupled to one terminal of the power source; a semiconductor layer combined with an upper surface of the first electrode, and forming a potential barrier to become insulated when a bias signal is applied from the power source; and a second electrode disposed at a predetermined distance away from the semiconductor layer, and being coupled to the other terminal of the power source, wherein the second electrode contacts the semiconductor layer when a bias signal is applied from the power source. Therefore, although the bias signal may not be cut off, free electrons and holes are recombined in the semiconductor layer, whereby charge buildup and sticking can be prevented. | 06-03-2010 |
| 20100140066 | VERY LOW VOLTAGE, ULTRAFAST NANOELECTROMECHANICAL SWITCHES AND RESONANT SWITCHES - The invention provides lateral nanoelectromechanical switches useful for integration into circuitry fabricated using standard semiconductor processing methods, or using techniques compatible with the mainstream semiconductor processing technologies. Methods of fabricating the switches are described. Some exemplary designs for two and three terminal switches are provided. Descriptions of structural features and the operating parameters for some exemplary switches are given. The switches are expected to be compatible with circuitry that is operable in computer-based systems. | 06-10-2010 |
| 20100147657 | NANOTUBE ESD PROTECTIVE DEVICES AND CORRESPONDING NONVOLATILE AND VOLATILE NANOTUBE SWITCHES - Device design methods for use with non-volatile nanotube switches are disclosed. In a first aspect of the present disclosure, a plurality of nonconductive nanoparticles is adhered to a nanotube element such as to provide an isolation barrier from a control electrode and further provide a switching gap above that element. In a second aspect of the present disclosure, conductive nanoparticles are dispersed and adhered to either a control electrode or to a nanotube element positioned over said electrode element such that the interface area (that is, the area of the nanotube element which comes into contact with the control electrode) is minimized. In a third aspect of the present disclosure, a monolayer network of nonconductive nanotubes is used to provide an isolation barrier between a control electrode and a nanotube element. Voids or spaces in said monolayer network further provides switching gaps. | 06-17-2010 |
| 20100155202 | MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING - Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges. | 06-24-2010 |
| 20100155203 | MICRO-ELECTROMECHANICAL SYSTEM SWITCH - A micro electromechanical system switch having an electrical pathway is presented. The switch includes a first portion and a second portion. The second portion is offset to a zero overlap position with respect to the first portion when the switch is in open position (or in the closed position depending on the switch architecture). The switch further includes an actuator for moving the first portion and the second portion into contact. | 06-24-2010 |
| 20100155204 | MULTI-STABLE MICRO ELECTROMECHANICAL SWITCHES AND METHODS OF FABRICATING SAME - A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy. | 06-24-2010 |
| 20100163376 | Electrostatic Actuator - The present invention relates to a micro-electromechnical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof. | 07-01-2010 |
| 20100181172 | SWITCH DEVICE - The invention relates to a switch device ( | 07-22-2010 |
| 20100181173 | ELECTROSTATICALLY ACTUATED NON-LATCHING AND LATCHING RF-MEMS SWITCH - An RF MEMS switch apparatus includes a planar substrate and an electrostatic actuator formed thereon. The electrostatic actuator includes two sets of interdigitated comb which is capable of moving an armature and a shunt contact head. The armature can be connected to the substrate through a main return spring and one or more contact head support springs. The shunt contact head includes a primary shunt contact and one or more spring-loaded sacrificial contacts. The shunt contact head can serve as a primary contact to bridge a stationary input electrode and an output electrode. The switch is off in a relaxed position and when actuated the primary shunt contact comes into direct mechanical contact with the stationary input electrode and the stationary output electrode. The switch remains closed as long as the actuator is powered and the springs return the armature to the relaxed position when the power is removed. | 07-22-2010 |
| 20100213039 | MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME - A MEMS element of an aspect of the present invention including a first electrode provided on a substrate, a second electrode which is provided above the first electrode and which is driven toward the first electrode, an anchor provided on the substrate, a beam which supports the second electrode in midair, one end of the beam being connected to the anchor and the beam including a sidewall part provided at its end in the width direction, the sidewall part having a downward-facing protrusion. | 08-26-2010 |
| 20100243414 | Horizontal Micro-Electro-Mechanical-System Switch - A first dielectric material layer and a second dielectric material layer are formed on a substrate. Three conductive portions are formed within the second dielectric material layer. An optional third dielectric material layer and an optional dielectric capping layer may be formed over the three conductive portions. Portions of the second dielectric material layer and the first dielectric material layer are removed from within an area of a hole in a masking layer. The first dielectric material layer is laterally undercut to provide a micro-electro-mechanical-system (MEMS) switch comprising a conductive cantilever, a conductive plate, and a conductive actuator from the three conductive portions as portions of the first and second dielectric material layers are removed. The MEMS switch may be employed to provide mechanical switchable contact between the conductive cantilever and the conductive plate through an electrical signal on the conductive actuator. | 09-30-2010 |
| 20100252403 | HIGH VOLTAGE SWITCH AND METHOD OF MAKING - Electrostatic devices, systems and methods are presented. One embodiment is an electrostatic device including a substrate, a first electrode disposed on the substrate, a movable element having a second electrode and a control electrode. The control electrode is disposed in electrostatic communication with the movable element. The control electrode includes a protection layer having resistivity in a range of from about 1 ohm-cm to about 10 kohm-cm. | 10-07-2010 |
| 20100263997 | SELF-LOCKING MICRO ELECTRO MECHANICAL DEVICE - The proposed invention application describes a novel configuration of an extremely small self-locking switching component, based on micro-electromechanical systems (MEMS) technology. Conventional MEMS switches need a continual control signal in order to obtain the wanted active (switching) state. The proposed invention needs only a short control signal (non-locking key) such as e.g. a pulse in order to switch the component on and/or off. RF-noise (ripples) on the de-control signal or bouncing effects can be neglected according to the proposed extension of the MEMS devices. This contributes to an easier and especially more robust design of electronic circuitries and allows for enhanced functionalities. | 10-21-2010 |
| 20100263998 | VERTICAL INTEGRATED CIRCUIT SWITCHES, DESIGN STRUCTURE AND METHODS OF FABRICATING SAME - Vertical integrated MEMS switches, design structures and methods of fabricating such vertical switches is provided herein. The method of manufacturing a MEMS switch, includes forming at least two vertically extending vias in a wafer and filling the at least two vertically extending vias with a metal to form at least two vertically extending wires. The method further includes opening a void in the wafer from a bottom side such that at least one of the vertically extending wires is moveable within the void. | 10-21-2010 |
| 20100263999 | LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH - A radio frequency (RF) micro-electro-mechanical systems (MEMS) switch and high yield manufacturing method. The switch can be fabricated with very high yield despite the high variability of the manufacturing process parameters. The switch is fabricated with monocrystalline material, e.g., silicon, as the moving portion. The switch fabrication process is compatible with CMOS electronics fabricated on Silicon-on-Insulator (SOI) substrates. The switch comprises a movable portion having conductive portion selectively positioned with a bias voltage to conductively bridge a gap in a signal line. | 10-21-2010 |
| 20100294633 | ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME - An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space. | 11-25-2010 |
| 20110024273 | SHUNT SWITCH, SEMICONDUCTOR DEVICE, MODULE AND ELECTRONIC DEVICE - A shunt switch allowed to improve isolation, a semiconductor device, a module and an electronic device each of which includes the shunt switch are provided. The shunt switch includes: a transmission line, a ground; and a shunt line electrically coupling the transmission line and the ground, in which two or more of the shunt lines are arranged in parallel to one another, and an impedance between the two or more shunt lines is higher than an impedance of the transmission line. | 02-03-2011 |
| 20110024274 | MEMS SWITCH AND METHOD OF MANUFACTURING THE MEMS SWITCH - The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate. | 02-03-2011 |
| 20110036690 | SWITCH STRUCTURES - A device, such as a switch structure, is provided, the device including a contact and a conductive element. The conductive element can be configured to be selectively moveable between a non-contacting position, in which the conductive element is separated from the contact (in some cases by a distance less than or equal to about 4 μm, and in others by less than or equal to about 1 μm), and a contacting position, in which the conductive element contacts and establishes electrical communication with the contact. When the conductive element is disposed in the non-contacting position, the contact and the conductive element can be configured to support an electric field therebetween with a magnitude of greater than 320 V μm | 02-17-2011 |
| 20110056812 | NANO-ELECTRO-MECHANICAL SWITCHES USING THREE-DIMENSIONAL SIDEWALL-CONDUCTIVE CARBON NANOFIBERS AND METHOD FOR MAKING THE SAME - The present disclosure describes a method for fabricating three-dimensional sidewall-conductive carbon nanofibers (CNFs) on selective substrates. In particular, fabrication of three-dimensional sidewall-conductive CNFs on niobium titanium nitride (NbTiN) layer is described. The present disclosure also describes a nano-electro-mechanical switch using one or more three-dimensional sidewall-conductive CNFs. | 03-10-2011 |
| 20110067982 | MEMS-BASED SWITCHING - A MEMS-based switching device may be used to implement an interconnect switch in a programmable integrated circuit device. Such a MEMS-based device may include a deformable cantilever that may form a closed or open circuit to thereby implement switching functionality. | 03-24-2011 |
| 20110067983 | SWITCH STRUCTURE AND METHOD - Provided is a device, such as a switch structure, that includes a contact and a conductive element that is configured to be deformable between a first position in which the conductive element is separated from the contact and a second position in which the conductive element contacts the contact. The conductive element can be formed substantially of metallic material configured to inhibit time-dependent deformation. For example, the metallic material may be configured to exhibit a maximum steady-state plastic strain rate of less than 10 | 03-24-2011 |
| 20110067984 | MICROELECTROMECHANICAL SYSTEM (MEMS) RESONANT SWITCHES AND APPLICATIONS FOR POWER CONVERTERS AND AMPLIFIERS - A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or “resoswitch”, with very high Q's, typically above 10000 in air, and higher in vacuum. Due to periodic constrained contacting of the contacts, the bandwidth of the switch is greatly improved. One or more oscillating elements may be vibrationally interconnected with conductive or nonconductive coupling elements, whereby increased bandwidths of such an overall switching system may be achieved. Using the resoswitch, power amplifiers and converters more closely approaching ideal may be implemented. Integrated circuit fabrication techniques may construct the resoswitch with other integrated CMOS elements for highly compact switching devices. Through introduction of specific geometries within the oscillating elements, displacement gains may be made where modal deflections are greatly increased, thereby reducing device drive voltages to 2.5 V or lower. | 03-24-2011 |
| 20110067985 | CONCEPTION OF AN ELECTRO-MECHANICAL COMPONENT FOR A MICRO- OR NANO-SYSTEM EQUIPPED WITH A BAR FORMING AN AXIS OF ROTATION OF THE COMPONENT AND COATED IN GRAPHENE - Method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of:
| 03-24-2011 |
| 20110073447 | Radiant Energy Imager Using Null Switching - In some aspects, the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array of micro-electro-mechanical sensors with each sensor includes a deflectable micro-cantilever, responsive to absorbed incident radiation and to an applied repulsive electrostatic field. In an aspect, the sensor device also includes a null-sensing circuit coupled to a switch contact on or near the substrate, which senses when the micro-cantilever reaches its null location, by electrical connection with an upper switch contact on the micro-cantilever. Other embodiments are also described. | 03-31-2011 |
| 20110079495 | MICROMECHANICAL DIGITAL CAPACITOR WITH IMPROVED RF HOT SWITCHING PERFORMANCE AND RELIABILITY - The present invention generally relates to RF MEMS devices that are capable of hot switching. The RF MEMS devices, by utilizing one or more spring mechanisms, are capable of hot switching. In certain embodiments, two or more sets of springs may be used that become engaged at specific points in the displacement of the cantilever of the MEMS device. The springs allow for a significant increase in the release voltage for a given pull in landing voltage. | 04-07-2011 |
| 20110094861 | Nano-electro-mechanical systems switches - NEMS (Nano-Electro-Mechanical Systems) apparatuses are described. By applying a static electric field, an arm or beam in a NEMS apparatus is made to bend so that one electrical conductor is made to contact another electrical conductor, thereby closing the NEMS apparatus. Some apparatus embodiments make use of electrostatic coupling to cause the arm or beam to bend, and some apparatus embodiments make use of piezoelectric materials to cause the arm or beam to bend. Other embodiments are described and claimed. | 04-28-2011 |
| 20110108399 | Switching Element - There is provided a switching element which facilitates integration with higher density and lamination in a device, the switching element including: an insulating substrate; a first electrode provided on the insulating substrate; a second electrode provided above the first electrode; and a between-electrode gap section provided between the first electrode and the second electrode and including a nanometer-scale gap for causing a switching phenomenon of a resistor by applying a prescribed voltage between the first electrode and the second electrode. | 05-12-2011 |
| 20110108400 | MEMS SWITCH - A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line. | 05-12-2011 |
| 20110120843 | PIEZOELECTRIC BIMORPH SWITCH - The present invention relates to a piezoelectric bimorph switch, specifically a cantilever (single clamped beam) switch, which can be actively opened and closed. Piezoelectric bimorph switch are known from the prior art. Such a switch may be regarded as an actuator. Actuators are regarded as a subdivision of transducers. They are devices, which transform an input signal (mainly an electrical signal) into motion. Electrical motors, pneumatic actuators, hydraulic pistons, relays, comb drive, piezoelectric actuators, thermal bimorphs, Digital Micromirror Devices and electroactive polymers are some examples of such actuators. The switch of the invention comprises piezoelectric stack layers ( | 05-26-2011 |
| 20110132734 | ELECTRONIC DEVICE - An electronic device includes a substrate including an active layer, a signal electrode formed on a surface of the active layer, a first driving electrode that is formed on the surface of the active layer and is connected to a ground, and a second driving electrode including a first part that is formed on the surface of the active layer and a second part that is connected to the first part and is provided above the first driving electrode. The substrate is provided with a loop-like groove that penetrates through the active layer and encompasses the first part. | 06-09-2011 |
| 20110147177 | STRUCTURE, ELECTRONIC DEVICE, AND METHOD FOR FABRICATING A STRUCTURE - A structure includes a conductive film ( | 06-23-2011 |
| 20110155548 | Dual substrate MEMS plate switch and method of manufacture - Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. A hermetic seal may be made around the device with a larger, secondary enclosure. Electrical access to the deformable plate may be accomplished by an electrical path which is independent of the seal. The electrical path may include a via through the first substrate or the second substrate, or a flash deposited on an external region of the switch. | 06-30-2011 |
| 20110168530 | NEMS SWITCHES, LOGIC DEVICES, AND METHODS OF MAKING SAME - Nanoelectromechanical devices use a cantilevered beam supported by a base. The cantilevered beam is constructed with a nanoscale gap (e.g., less than 10 nm) separating the cantilevered beam from an electrical structure. A low voltage (e.g., less than 2 volts) applied to the cantilevered beam can cause the beam to bend and make contact with the electrical structure. High switching speeds (e.g., less than 10 ns) can be provided. The electrical structure can be a second cantilevered beam or another structure. | 07-14-2011 |
| 20110168531 | DEVICE WITH A MICRO ELECTROMECHANICAL STRUCTURE - A device has a micro electromechanical structure ( | 07-14-2011 |
| 20110186407 | Contact switch - There is provided a contact switch including: a plurality of first contact points arranged in parallel on a substrate; a movable member including a plurality of beams facing the plurality of first contact points, and formed to be slidable along an alignment direction of the first contact points within a face of the substrate; and a plurality of second contact points provided on faces of the beams, opposing the first contact points, respectively. | 08-04-2011 |
| 20110198202 | MEMS-BASED ULTRA-LOW POWER DEVICES - A gap closing actuator (GCA) device ( | 08-18-2011 |
| 20110209970 | SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY - A switch and a relay include a contact with a smooth contacting surface. A side surface of a fixed contact faces a side surface of a movable contact. The fixed contact has an insulating layer and a base layer stacked on a fixed contact substrate, and a first conductive layer formed thereon through electrolytic plating. The side surface of the first conductive layer that faces the movable contact becomes the fixed contact (contacting surface). The movable contact has an insulating layer and a base layer stacked on the movable contact substrate, and a movable contact formed thereon through electrolytic plating. A side surface of a second conductive layer that faces the fixed contact becomes the movable contact (contacting surface). The fixed contact and the movable contact have surfaces that contact the side surfaces of the mold portion when growing the first and second conductive layers through electrolytic plating. | 09-01-2011 |
| 20110220470 | Electromechanical Actuator with Interdigitated Electrodes - A micromachined electromechanical (MEMS) actuator including, for example, an electrostatically actuated electrical switch, is provided, including a first set of conducting plates forming part of the movable element of the switch, interdigitated with a set of conducting plates forming part of the substrate. The plates are, in principle, vertical relative to the surface of the substrate; they are in partial heightwise overlap and a control voltage applied between the two sets of plates exerts a vertical force acting so as to move the movable element closer to the substrate. The conducting plates of the movable element are connected to one another by conducting end crosspieces connecting the ends of these plates so as to surround, laterally, the stationary conducting plates. The distance separating one stationary plate end from the mobile crosspiece is the same at both ends so that the forces exerted in the elongation direction of the plates cancel out. This distance is preferably the same for all the plates. | 09-15-2011 |
| 20110220471 | Micromechanical component and method for manufacturing a micromechanical component - A micromechanical component, e.g., a switch, includes a substrate having at least one recess, at least two electrically conductive contact surfaces provided in the region of the recess, and an actuator. The contact surfaces are able to be brought into contact with one another for electrical conduction with the aid of the actuator. | 09-15-2011 |
| 20110220472 | ELECTROSTATIC RELAY - In an electrostatic relay in which a moving contact and a movable electrode are displaced in parallel with a base substrate, an opening force is increased when the movable electrode is separated from a fixed electrode, and a structure is simplified to enhance a degree of freedom of design. A fixed contact portion and a fixed electrode portion are fixed to the base substrate. The fixed electrode portion and a movable electrode portion constitute an electrostatic actuator that displaces the movable electrode portion and a moving contact portion. A movable spring provided in a spring supporting portion retains the movable electrode portion in a displaceable manner. A cantilever secondary spring is provided in the spring supporting portion, and a projection portion is provided in a front end face of the movable electrode portion. The secondary spring abuts on the projection portion while being not deformed until abutting on the projection portion, before the moving contact of the moving contact portion abuts on the fixed contact of the fixed contact portion when the moving contact portion and the movable electrode portion are displaced. | 09-15-2011 |
| 20110220473 | SWITCH, METHOD OF MANUFACTURING THE SAME, AND RELAY - A switch has a first contact portion in which a plurality of conductive layers is stacked on an upper side of a first substrate, and a second contact portion in which a plurality of conductive layers is stacked on an upper side of a second substrate. Respective end faces of the conductive layers at the first contact portion are contacts of the first contact portion. Respective end faces of the conductive layers at the second contact portion are contacts of the second contact portion. Each contact of the first contact portion and each contact of the second contact portion are faced to each other so that the contacts come into contact with or separate from each other. | 09-15-2011 |
| 20110259717 | SYSTEMS AND METHODS FOR PROVIDING HIGH-CAPACITANCE RF MEMS SWITCHES - Systems and methods for providing high-capacitive RF MEMS switches are provided. In one embodiment, the invention relates to a micro-electro-mechanical switch assembly including a substrate, an electrode disposed on a portion of the substrate, a dielectric layer disposed on at least a portion of the electrode, a metal layer disposed on at least a portion of the dielectric layer, and a flexible membrane having first and second ends supported at spaced locations on the substrate base, where the flexible membrane is configured to move from a default position to an actuated position in response to a preselected switching voltage applied between the flexible membrane and the electrode, and where, in the actuated position, the flexible membrane is in electrical contact with the metal layer. | 10-27-2011 |
| 20110297519 | MEMS SWITCH - A micro electro-mechanical system (MEMS) switch includes an active device, an immovable metal layer and a movable metal layer is provided. The immovable metal layer is disposed on the active device and the movable metal layer is disposed above the immovable metal layer. Accordingly, an insulating cavity is formed between the immovable metal layer and the movable metal layer. Further, the active device is capable of driving the movable metal layer. Compare to thin film transistor, since the operation performance of the MEMS switches would not affected by carrier mobility and on-off current ratio, display performance of the display device can be easily improved. | 12-08-2011 |
| 20110303515 | ELECTROSTATICALLY ACTUATED MICRO-MECHANICAL SWITCHING DEVICE - An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line, respectively. The ground line is formed with a contact bar that leads through the gap of the signal line for forming the Ohmic contact between the contact beam and the ground line. A contact metallization is provided at least on top and on the side walls of the contact beam, of the signal line and of the ground line. | 12-15-2011 |
| 20110308924 | MEMS Switching Array Having a Substrate Arranged to Conduct Switching Current - A micro-electromechanical systems (MEMS) switch or array is provided. A first substrate (e.g., carrier substrate) includes an electrically conductive substrate region. An electrical isolation layer may be disposed over a first surface of the carrier substrate. Movable actuators may be provided. At least one substrate contact is electrically coupled to at least one of the plurality of movable actuators so that a flow of electrical current is established during an electrically-closed condition of the MEMS switch array. A cover substrate may also be provided and includes an electrically conductive substrate region. The electrically conductive region of the carrier substrate is electrically coupled to the electrically conductive region of the cover substrate to define an electrically conductive path for the flow of electrical current during the electrically-closed condition of the switching array. | 12-22-2011 |
| 20110315526 | PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending. | 12-29-2011 |
| 20110315527 | PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Planar cavity Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structure are provided. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity having a planar surface using a reverse damascene process. | 12-29-2011 |
| 20110315528 | PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes forming a beam structure and an electrode on an insulator layer, remote from the beam structure. The method further includes forming at least one sacrificial layer over the beam structure, and remote from the electrode. The method further includes forming a lid structure over the at least one sacrificial layer and the electrode. The method further includes providing simultaneously a vent hole through the lid structure to expose the sacrificial layer and to form a partial via over the electrode. The method further includes venting the sacrificial layer to form a cavity. The method further includes sealing the vent hole with material. The method further includes forming a final via in the lid structure to the electrode, through the partial via. | 12-29-2011 |
| 20110315529 | MEMS STRUCTURE WITH A FLEXIBLE MEMBRANE AND IMPROVED ELECTRIC ACTUATION MEANS - The MEMS structure comprises: a flexible membrane ( | 12-29-2011 |
| 20120031744 | MEMS SWITCH AND COMMUNICATION DEVICE USING THE SAME - A MEMS switch is provided wherein contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the signal transmission contact in “on” state. Provided is a MEMS switch | 02-09-2012 |
| 20120043188 | MEMS DEVICES - A MEMS device comprises first and second opposing electrode arrangements ( | 02-23-2012 |
| 20120055768 | MEMS ELECTROSTATIC ACTUATOR - A MEMS electrostatic actuator comprises first and second opposing electrode arrangements, wherein at least one of the electrode arrangements is movable. A dielectric material ( | 03-08-2012 |
| 20120055769 | MEMS SWITCH AND COMMUNICATION DEVICE USING THE SAME - A MEMS switch is provided, wherein contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the contact where the signal is transmitted in “on” state. Provided is a MEMS switch | 03-08-2012 |
| 20120073940 | ACTUATOR - According to one embodiment, an actuator includes a substrate, a lower electrode disposed on the substrate, an upper electrode, a support and a driving unit. The upper electrode is opposed to the lower electrode. The support supports the upper electrode. The driving unit is connected between the lower electrode and the upper electrode and feeds a driving voltage. The driving voltage at which the lower and upper electrodes start to come into contact with each other is defined as a pull-in voltage. A capacitance between the lower and upper electrodes is defined as a pull-in capacitance. There exist a first region and a second region. In the second region, a change rate of a capacitance ratio changes more slowly than in the first region, when the absolute value of the potential difference is further increased. The driving unit feeds the driving voltage in the second region. | 03-29-2012 |
| 20120103768 | Magnetically Actuated Micro-Electro-Mechanical Capacitor Switches in Laminate - Magnetically actuated micro-electro-mechanical capacitor switches in laminate are disclosed. According to one embodiment, an apparatus comprises a first layer comprising a coil and magnetic element, the magnetic element made from one of nickel and iron; a second layer comprising a flexible member, wherein a permanent magnet is attached to the flexible member; a conductive plate having an insulating dielectric coating, the conductive plate attached to one of the flexible member or a magnet; and a third layer comprising a transmission line and magnetic material, wherein the transmission line comprises one or more of a signal conductor and one or more ground conductors in near proximity. | 05-03-2012 |
| 20120118714 | OPERATION DEVICE AND HEATING COOKER USING OPERATION DEVICE - The present invention provides an operation device which has a stable operation feeling with a simple configuration and has a high reliability and an excellent operability. An electrode terminal portion which is arranged just below an operation region on a top plate made of a material having an electric insulating property, and serves as an electrostatic capacity type touch switch has a detection portion which comes into close contact with a back surface of the operation region, a spring portion which has an elastic force pressing the detection portion to the back surface of the top plate, and a slide portion which is movably retained in the guide holder. | 05-17-2012 |
| 20120125747 | MEMS SWITCH WITH REDUCED DIELECTRIC CHARGING EFFECT - The present disclosure provides in one embodiment, a semiconductor device that includes a MEMS switch having a substrate, a first dielectric layer disposed above the substrate, and a bottom signal electrode, a bump, and a bottom actuation electrode disposed above the first dielectric layer. The MEMS switch further includes a second dielectric layer enclosing the bottom signal electrode, and a movable member including a top signal electrode disposed above the bottom signal electrode and a top actuation electrode disposed above the bottom actuation electrode and the bump, wherein the top actuation electrode is electrically coupled to the bump. A method of fabricating a MEMS switch is also disclosed. | 05-24-2012 |
| 20120138436 | MEMS SWITCHES AND FABRICATION METHODS - MEMS switches and methods of fabricating MEMS switches. The switch has a vertically oriented deflection electrode having a conductive layer supported by a supporting layer, at least one drive electrode, and a stationary electrode. An actuation voltage applied to the drive electrode causes the deflection electrode to be deflect laterally and contact the stationary electrode, which closes the switch. The deflection electrode is restored to a vertical position when the actuation voltage is removed, thereby opening the switch. The method of fabricating the MEMS switch includes depositing a conductive layer on mandrels to define vertical electrodes and then releasing the deflection electrode by removing the mandrel and layer end sections. | 06-07-2012 |
| 20120138437 | Switching device and a method for forming a switching device - Embodiments provide a switching device. The switching device includes a substrate, which includes a contact region. The switching device further includes a vertical layer arrangement extending from the substrate next to the contact region. The vertical layer arrangement includes a control layer. The switching device further includes a freestanding silicon cantilever extending vertically from the contact region. | 06-07-2012 |
| 20120168290 | SWITCH DEVICE AND CIRCUIT INCLUDING SWITCH DEVICE - According to one embodiment, a switch device includes a first switching unit provided on a base substance. The first switching unit includes a first supporting electrode, a first beam, a first contact point electrode, a first floating conductive layer and a first control electrode. The first supporting electrode is fixed to the base. The first beam includes a first holding part and a first movable part. The first holding part is fixed to the base. The first movable part has one end connected to the first holding part. The first contact point electrode is fixed to the base and faces the first movable part. The first floating conductive layer is fixed to the first movable part via a first insulating part and stores a charge. The first control electrode is fixed to the base and faces the first floating conductive layer. | 07-05-2012 |
| 20120175230 | ACTUATION SIGNAL FOR MICROACTUATOR BOUNCE AND RING SUPPRESSION - The present disclosure provides a system and method for controlling positioning of a movable member of a MEMS microactuator to reduce bouncing and ringing. The system includes control circuitry in communication with the MEMS microactuator. The control circuitry is adapted to linearly increase an actuation signal from a first state to a second state to urge the movable member from a first position to a second position and hold the movable member in the second position. The control circuitry is further adapted to linearly decrease the actuation signal from the second state to the first state to release the movable member to the first position. A transition time is not less than the inverse of one quarter of a natural frequency of the movable member as the movable member moves to the first position. | 07-12-2012 |
| 20120222944 | RF MEMS SWITCH USING CHANGE IN SHAPE OF FINE LIQUID METAL DROPLET - An RF MEMS switch using a fine liquid metal droplet is provided. The RF MEMS switch using a fine liquid metal droplet includes: a first layer member having a signal transmission line; a second layer member disposed on the first layer member, and having a chamber formed corresponding to the signal transmission line so as to induce a change in the shape of the fine liquid metal droplet and a through hole formed at one side of the chamber so as to bring the fine liquid metal droplet, whose shape is to be changed in the chamber, into contact or non-contact with the signal transmission line; an operating member disposed on the second layer member, and provided at an open side of the chamber so as to provide deformability to the fine liquid metal droplet through the open side of the chamber; and a third layer member for defining the position of the operating member, and coupled to the first layer member and the second layer member. | 09-06-2012 |
| 20120255841 | RF MEMS SWITCH DEVICE AND MANUFACTURING METHOD THEREOF - The present invention relates to an RF MEMS switch device comprising: a substrate; a bias electrode positioned on the substrate and supplying bias voltage; a pair of signal electrodes positioned to be spaced-apart each other on the substrate and transmitting an RF signal from one side to the other side; a dielectric layer formed on upper part of the pair of signal electrodes to be overlapped with the pair of signal electrodes; a membrane electrode formed on the dielectric layer to be overlapped with the pair of signal electrodes and the dielectric layer; a bias line connecting between the membrane electrode and the bias electrode; at least one pooling electrode formed to be overlapped with the membrane electrode and having the dielectric layer be interposed therebetween; and a pooling line connecting any one of the pair of signal electrodes and the pooling electrode, and manufacturing method thereof. | 10-11-2012 |
| 20120267223 | BISTABLE NANOSWITCH - A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state. | 10-25-2012 |
| 20120273331 | Electronic Ohmic Shunt RF MEMS Switch and Method of Manufacture - An electrostatic ohmic shunt radio frequency (RF) microeleetromechanical system (MEMS) switch and method of manufacturing includes a co-planar waveguide (CPW) transmission line comprising a plurality of slots and a plurality of pillars, wherein a space between successive ones of the plurality of pillars is defined by one of the plurality of slots; a plurality of electrodes positioned in the slots; a conductive contact beam elevated over the CPW transmission line and the plurality of electrodes; and a plurality of conductive contact dimples positioned between the conductive contact beam and the CPW transmission line, wherein the plurality of pillars are adapted to prevent physical contact between the plurality of electrodes and the conductive contact beam. | 11-01-2012 |
| 20120279837 | METHOD FOR REDUCING SUBSTRATE CHARGING - An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate. | 11-08-2012 |
| 20120279838 | CMOS-MEMS SWITCH STRUCTURE - A CMOS-MEMS switch structure is disclosed. The CMOS-MEMS switch structure includes a first substrate, a second substrate, a first cantilever beam, and a second cantilever beam. The first and second substrates are positioned opposite each other. The first cantilever beam is provided on the first substrate, extends from the first substrate toward the second substrate, and bends downward. Likewise, the second cantilever beam is provided on the second substrate, extends from the second substrate toward the first substrate, and bends downward. The first and second substrates are movable toward each other to connect a first top surface of the first cantilever beam and a second top surface of the second cantilever beam, and away from each other so that the first top surface of the first cantilever beam and the second top surface of the second cantilever beam are disconnected, thereby closing or opening the CMOS-MEMS switch structure. | 11-08-2012 |
| 20120292162 | ELECTRONIC DEVICE, METHOD FOR MANUFACTURING THE SAME AND TOUCH PANEL INCLUDING THE SAME - Provided are an electronic device, a method of manufacturing the same, and a touch panel including the device. The electronic device includes a nanostructure having a plurality of metal oxide nanorods vertically aligned at predetermined intervals in intersection regions between bottom electrodes and top electrodes that perpendicularly cross each other. The nanorods are formed to the same diameter and the same height so that the electronic device can exhibit uniform performance. Also, a method of manufacturing an electronic device includes selectively vertically growing the same number of metal oxide nanostructures with a uniform size only on the bottom electrodes using a nano-template with a plurality of vertical holes. Furthermore, a touch panel includes a nanostructure having a plurality of piezoelectric nanorods disposed in a plurality of touch cells arranged in a matrix. | 11-22-2012 |
| 20120305373 | CONTACT STRUCTURE FOR ELECTROMECHANICAL SWITCH - A contact structure for electromechanical switch includes a static contact and a moving contact to allow many kinds of actuations and provide great switch characteristics, such as high isolation and low insertion loss, for using in the applicable range from DC to high frequency microwave. In the contact structure, there is a gap disposed between the static contact and the moving contact so that the static contact and the moving contact are parallel with each other. | 12-06-2012 |
| 20120305374 | MEMS SWITCH - A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. | 12-06-2012 |
| 20120318648 | NORMALLY CLOSED MICROELECTROMECHANICAL SWITCHES (MEMS), METHODS OF MANUFACTURE AND DESIGN STRUCTURES - Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A method of forming a micro-electrical-mechanical structure (MEMS), includes forming a plurality of electrodes on a substrate, forming a beam structure in electrical contact with a first of the electrodes, and bending the beam structure with a thermal process. The method further includes forming a cantilevered electrode extending over an end of the bent beam structure, and returning the beam structure to its original position, which will contact the cantilevered electrode in a normally closed position. | 12-20-2012 |
| 20120318649 | Silicide Micromechanical Device and Methods to Fabricate Same - A method is disclosed to fabricate an electro-mechanical device such as a MEMS or NEMS switch. The method includes providing a silicon layer disposed over an insulating layer that is disposed on a silicon substrate; releasing a portion of the silicon layer from the insulating layer so that it is at least partially suspended over a cavity in the insulating layer; depositing a metal (e.g., Pt) on at least one surface of at least the released portion of the silicon layer and, using a thermal process, fully siliciding at least the released portion of the silicon layer using the deposited metal. The method eliminates silicide-induced stress to the released Si member, as the entire Si member is silicided. Furthermore no conventional wet chemical etch is used after forming the fully silicided material thereby reducing a possibility of causing corrosion of the silicide and an increase in stiction. | 12-20-2012 |
| 20120318650 | LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH - A radio frequency (RF) micro-electro-mechanical systems (MEMS) switch and high yield manufacturing method. The switch can be fabricated with very high yield despite the high variability of the manufacturing process parameters. The switch is fabricated with monocrystalline material, e.g., silicon, as the moving portion. The switch fabrication process is compatible with CMOS electronics fabricated on Silicon-on-Insulator (SOI) substrates. The switch comprises a movable portion having conductive portion selectively positioned with a bias voltage to conductively bridge a gap in a signal line. | 12-20-2012 |
| 20120325630 | Nano/Micro Electro-Mechanical Relay - A nano/micro electro-mechanical relay, comprising an at least one normally open (NO) nano/micro relay switch and an at least one normally closed (NC) nano/micro relay switch. Both the NC nano/micro relay switch and the NO nano/micro relay switch can be switched between their respective normal relay switch positions and their respective actuated relay switch positions. An at least one nano/micro actuator including an at least one piezoelectric stack layer being attached to an at least one elastic layer, wherein the at least one piezoelectric stack layer contracts to deflect the at least one elastic layer, and thereby actuate the at least one nano/micro contact bar to simultaneously switch the NC nano/micro relay switch and the NO nano/micro relay switch between their respective normal relay switch position and their respective actuated relay switch positions. | 12-27-2012 |
| 20130001054 | Micro-Machined Relay - An improved micro-machined relay is disclosed. The relay includes a micro-machined beam capable of carrying an electric signal and having a contact point on a closure side of the beam. The beam is electrically coupled to a first electrical transmission path and suspended above a second electrical transmission path. An insulation layer resides on a portion of the closure side of the beam and an electrical conductor is coupled to a least a portion of the insulation layer. A potential creator creates a potential between the electrical conductor and the potential creator that is capable of deflecting the beam, so that the contact point comes into contact with the second electrical transmission path. In such an embodiment, the potential creator need not account for the possible signal in the transmission path because the potential creator, which may be a voltage source, is decoupled from the transmission path. | 01-03-2013 |
| 20130015045 | INTEGRATED ELECTRO-MECHANICAL ACTUATORAANM Despont; MichelAACI RueschlikonAACO CHAAGP Despont; Michel Rueschlikon CH - The present invention provides an integrated electro-mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic actuator gap between actuator electrodes and an electrical contact gap between contact electrodes. An inclination with an inclination angle is provided between the actuator electrodes and the contact electrodes. The thickness of this electrical contact gap is equal to the thickness of a sacrificial layer which is etched away in a manufacturing process. | 01-17-2013 |
| 20130020183 | Silicide Micromechanical Device and Methods to Fabricate Same - A miniaturized electro-mechanical switch includes a moveable portion having a contact configured to make, when the switch is actuated, an electrical connection between two stationary points. At least the contact is composed of a fully silicided material. A structure includes a silicon layer formed over an insulator layer and a micromechanical switch formed at least partially within the silicon layer. The micromechanical switch has a conductive structure, and where at least electrically contacting portions of the conductive structure are comprised of fully silicided material. | 01-24-2013 |
| 20130032453 | ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR - The present invention generally relates to a MEMS device in which silicon residues from the adhesion promoter material are reduced or even eliminated from the cavity floor. The adhesion promoter is typically used to adhere sacrificial material to material above the substrate. The adhesion promoter is the removed along with then sacrificial material. However, the adhesion promoter leaves silicon based residues within the cavity upon removal. The inventors have discovered that the adhesion promoter can be removed from the cavity area prior to depositing the sacrificial material. The adhesion promoter which remains over the remainder of the substrate is sufficient to adhere the sacrificial material to the substrate without fear of the sacrificial material delaminating. Because no adhesion promoter is used in the cavity area of the device, no silicon residues will be present within the cavity after the switching element of the MEMS device is freed. | 02-07-2013 |
| 20130032454 | MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING - Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges. | 02-07-2013 |
| 20130037395 | SWITCHING APPARATUS AND TEST APPARATUS - A switching apparatus comprising a contact point section including a first contact point; an actuator including a first piezoelectric film that expands and contracts according to a first drive voltage and a second piezoelectric film provided in parallel with the first piezoelectric film and expands and contracts according to a second drive voltage, and a control section that controls the first drive voltage and the second drive voltage is provided. The actuator moves a second contact point to contact or move away from the first contact point according to the contraction and expansion of the first piezoelectric film and the second piezoelectric film. When switching from a contact state to a separated state, the control section stops supplying the first drive voltage and applies the second drive voltage causing the second piezoelectric film to contract to the second piezoelectric film, such that the actuator is biased to return. | 02-14-2013 |
| 20130048479 | Method and Apparatus for Switching Off a Switch - Apparatus and methods provide for the application of a mechanical impulse to the switch at a phase angle before a zero crossing of the current to disconnect a switching contact and mating contact to control electric arcing. According to one aspect, a next zero crossing of an alternating current is detected, and in response, a mechanical impulse with a phase angle of between 5° and 20° is applied before the next zero crossing of the alternating current. The mechanical impulse disconnects the switching contact from the mating contact of the switch. | 02-28-2013 |
| 20130075237 | MEMS ACTUATOR/SENSOR - A device can have an electrostatic MEMS actuator and a capacitive sensor in electrical communication with the electrostatic MEMS actuator. The capacitive sensor can be configured to determine a capacitance of the electrostatic MEMS actuator while a force is being applied to the electrostatic MEMS actuator as the electrostatic MEMS actuator is being actuated. The device can be used to construct a keyboard having tactile feedback, for example. | 03-28-2013 |
| 20130081931 | NANOELECTROMECHANICAL TUNNELING CURRENT SWITCH SYSTEMS - A nanoelectromechanical tunneling current switch includes a cantilevered nanofilament including a secured end and an unsecured end and a conductor with a surface substantially perpendicular to a longitudinal axis of the nanofilament when the nanofilament is undeflected. The nanofilament is positioned with respect to the conductor to define a gap between the unsecured end of the nanofilament and the surface of the conductor substantially perpendicular to the longitudinal axis of the nanofilament. The nanofilament and the conductor are electrically connected by a circuit, and a tunneling current is configured to flow from the nanofilament to the surface of the conductor substantially perpendicular to the longitudinal axis of the nanofilament. In other embodiments of the nanoelectromechanical tunneling current switch, an electrically conductive membrane can be utilized in place of, or in addition to, the cantilevered nanofilament. | 04-04-2013 |
| 20130105286 | ELECTROMECHANICAL SWITCH DEVICE AND METHOD OF OPERATING THE SAME | 05-02-2013 |
| 20130126317 | MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING - Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges. | 05-23-2013 |
| 20130134018 | MICRO-ELECTROMECHANICAL SWITCH AND A RELATED METHOD THEREOF - The switch incudes a beam electrode disposed on a substrate. A beam includes at least one anchor portion coupled to the beam electrode, a first beam portion extending from the at least one anchor portion along a first direction; and a second beam portion extending from the at least one anchor portion along a second direction opposite to the first direction. A first control electrode is disposed on the substrate facing the first beam portion. A first contact electrode is disposed on the substrate facing the first beam portion. A second control electrode is disposed on the substrate facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate. A second contact electrode is disposed on the substrate facing the second beam portion. | 05-30-2013 |
| 20130140155 | MEMS Switch Having Cantilevered Actuation - A MEMS switch comprises a top cantilevered conductor that moves downwardly. At least one first insulator layer is positioned below the top cantilevered conductor. At least one second insulator layer is positioned below the at least one first insulator layer such that at least one gap is formed between the top cantilevered conductor and the at least one second insulator layer. The gap has a thickness in the range 0.5 Å to 100 Å when the top cantilevered conductor is at rest. The thickness of the at least one gap decreases when the top cantilevered conductor is moved downwardly. At least one contact conductor is positioned below the top cantilevered conductor. The second insulator layer has at least one opening that exposes a conducting area of the at least one contact conductor within the second insulator layer. At least one actuation conductor is electrically insulated from the at least one contact conductor such that application of at least one actuation voltage to the at least one actuation conductor moves the top cantilevered conductor downwardly towards the at least one contact conductor for making an electrical connection between the top cantilevered conductor and the at least one contact conductor. | 06-06-2013 |
| 20130140156 | PIEZOELECTRIC ACTUATOR AND METHOD FOR MANUFACTURING SAME - A piezoelectric actuator according to an embodiment of the present invention includes a base substrate provided with cantilevers and a piezoelectric element formed on each cantilever. The piezoelectric element includes: a lower electrode layer; a piezoelectric layer formed on the lower electrode layer; and an upper electrode layer having a conductive oxide layer formed on the piezoelectric layer. Because the conductive oxide layer has covalent bonds or ionic bonds, and therefore produces little plastic deformation, relaxation of the stress is less likely to occur. Thus, even with repetitive motion in the piezoelectric actuator, the as-deposited internal stress (film stress) can be stably maintained for a long period of time. | 06-06-2013 |
| 20130140157 | INTEGRATED ELECTRO-MECHANICAL ACTUATOR - The present invention provides an integrated electro-mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic actuator gap between actuator electrodes and an electrical contact gap between contact electrodes. An inclination with an inclination angle is provided between the actuator electrodes and the contact electrodes. The thickness of this electrical contact gap is equal to the thickness of a sacrificial layer which is etched away in a manufacturing process. | 06-06-2013 |
| 20130146429 | NANO-ELECTROMECHANICAL SWITCH - A nano-electromechanical switch and a method for designing a nano-electromechanical switch. The nano-electromechanical switch includes at least one actuator electrode and a curved cantilever beam. The curved cantilever beam is adapted to flex in response to an activation voltage applied between the actuator electrode and the curved cantilever beam to provide an electrical contact between the curved cantilever beam and an output electrode of the nano-electromechanical switch. Before, during and after the curved cantilever beam flex in response to the activation voltage, a remaining gap between the curved cantilever beam and the actuator electrode is uniform. | 06-13-2013 |
| 20130153378 | HORIZONTAL COPLANAR SWITCHES AND METHODS OF MANUFACTURE - A MEMS structure and methods of manufacture. The method includes forming a sacrificial metal layer at a same level as a wiring layer, in a first dielectric material. The method further includes forming a metal switch at a same level as another wiring layer, in a second dielectric material. The method further includes providing at least one vent to expose the sacrificial metal layer. The method further includes removing the sacrificial metal layer to form a planar cavity, suspending the metal switch. The method further includes capping the at least one vent to hermetically seal the planar cavity. | 06-20-2013 |
| 20130161164 | OPERATION INPUT DEVICE - An operation input device system and method are provided. The operation input device includes a touch pad having an operation plate on a surface of which an operation surface is formed. The touch pad is configured to sense an object in contact with or in proximity to the operation surface to receive input corresponding to a position of the sensed object. A hole portion provided to penetrate through the operation plate and a protrusion member inserted into the hole portion. The operation input device also includes a drive mechanism provided on a back surface side of the operation plate and configured to cause an advancing/retracting operation of the protrusion member along a direction intersecting the operation surface between a first state in which a distal end portion of the protrusion member is above the operation surface and a second state in which the distal end portion is not above the operation surface. | 06-27-2013 |
| 20130175148 | INPUT APPARATUS - An input apparatus includes a touch plate, a film sensor, an electrode portion, and a wire portion. The touch plate has a front side touched by the finger in the finger manipulation. The film sensor is bonded to a rear side of the touch plate. The electrode portion and wire portion are provided on the film sensor and connected to each other. The touch plate is composed of a plurality of different members including at least a first member and a second member. The plurality of different members have respective dielectric constants and being layered and laminated, respectively, in a plate thickness direction of the touch plate. The plurality of different members have different dimension ratios in the plate thickness direction to provide different dielectric constants depending on the electrode portion and the wire portion and provide a uniform plate thickness over a whole of the touch plate. | 07-11-2013 |
| 20130192964 | MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE - MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode. | 08-01-2013 |
| 20130206556 | CONTACTLESS SWITCH STRUCTURE - A contactless switch structure is provided that may turn on and off an electrical signal in a contactless manner, allow a worn operating portion in the structure to be easily replaced, and prevent decrease of the sensitivity caused by foreign material such as dust. A contactless switch structure according to the invention includes a replaceable member to be detachably set to a target portion to which the contactless switch structure is to be set, the replaceable member having an aperture at an end section thereof and a virtual boundary defined by the aperture at the end section; and a detection element and a detector closely opposed across the virtual boundary in the normal state, the detection element and the detector being placed on the replaceable member side and the target portion side of the virtual boundary, respectively. | 08-15-2013 |
| 20130213778 | NANOTUBE BASED NANOELECTROMECHANICAL DEVICE - A nanoelectromechanical device is provided. The nanoelectromechanical device includes a nanotube, a first contact, and a first actuator. The nanotube includes a first end, the first end supported by a first structure, a second end opposite the first end, and a first portion. The first actuator is configured to apply a first force to the nanotube, the first force causing the nanotube to buckle such that the first portion couples to the first contact. | 08-22-2013 |
| 20130220783 | MEMS Switch Having One or More Vacuum Gaps - A MEMS switch comprises a top conductor and at least one first insulator layer having a lateral opening. The at least one first insulator layer hermetically seals the top conductor. At least one second insulator layer is positioned below the at least one first insulator layer such that at least one vacuum gap is formed within the lateral opening between the top conductor and the at least one second insulator layer. The at least one vacuum gap has a thickness in the range 0.5 Å to 100 Å when the top conductor is at rest. The thickness of the at least one vacuum gap varies when the top conductor is moved. The insulator layer has at least one opening that exposes a conducting area of at least one contact conductor within the second insulator layer. At least one actuation conductor that is electrically insulated from the at least one contact conductor such that application of at least one actuation voltage to the at least one actuation conductor moves the at least one contact conductor and the top conductor closer to each other within the at least one vacuum gap. | 08-29-2013 |
| 20130240336 | HYBRID MEMS RF SWITCH AND METHOD OF FABRICATING SAME - Structures having a hybrid MEMS RF switch and method of fabricating such structures using existing wiring layers of a device is provided. The method of manufacturing a MEMS switch includes forming a forcing electrode from a lower wiring layer of a device and forming a lower electrode from an upper wiring layer of the device. The method further includes forming a flexible cantilever arm over the forcing electrode and the lower electrode such that upon application of a voltage to the forcing electrode, the flexible cantilever arm will contact the lower electrode to close the MEMS switch. | 09-19-2013 |
| 20130277186 | TOUCH PANEL - A touch panel includes a first conductive film including conductive patterns each extending in one direction, and a second conductive film facing the first conductive film. Each of the conductive patterns includes plural diamond-shaped parts aligned in the one direction, and a connection part connecting adjacent diamond-shaped parts each other, and each conductive pattern has a uniform resistance value per unit length. | 10-24-2013 |
| 20130284571 | RF MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) CAPACITIVE SWITCH - An RF MEMS capacitive switch aligns holes in one of its electrodes to dielectric posts to reduce trapped charge without affecting the capacitance ratio of the switch. When actuated, the electrode contacts the posts' one or more contact surfaces around the plurality of holes so that each hole overlaps at least a central portion of the post to which it is aligned. By selecting the hole size such that the top electrode appears to be approximately a continuous conductive sheet at the RF frequency, the alignment of the holes to the posts reduces the amount of trapped charge without lowering switch capacitance. In different embodiments, the post diameter may be smaller than the hole diameter so that the overlap is complete, in which case trapped charge is largely eliminated. | 10-31-2013 |
| 20140014480 | Vertical Integrated Circuit Switches, Design Structure and Methods of Fabricating Same - Vertical integrated MEMS switches, design structures and methods of fabricating such vertical switches is provided herein. The method of manufacturing a MEMS switch, includes forming at least two vertically extending vias in a wafer and filling the at least two vertically extending vias with a metal to form at least two vertically extending wires. The method further includes opening a void in the wafer from a bottom side such that at least one of the vertically extending wires is moveable within the void. | 01-16-2014 |
| 20140034465 | SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY - A switch and a relay include a contact with a smooth contacting surface. A side surface of a fixed contact faces a side surface of a movable contact. The fixed contact has an insulating layer and a base layer stacked on a fixed contact substrate, and a first conductive layer formed thereon through electrolytic plating. The side surface of the first conductive layer that faces the movable contact becomes the fixed contact (contacting surface). The movable contact has an insulating layer and a base layer stacked on the movable contact substrate, and a movable contact formed thereon through electrolytic plating. A side surface of a second conductive layer that faces the fixed contact becomes the movable contact (contacting surface). The fixed contact and the movable contact have surfaces that contact the side surfaces of the mold portion when growing the first and second conductive layers through electrolytic plating. | 02-06-2014 |
| 20140048395 | NORMALLY CLOSED MICROMECHANICAL DEVICE COMPRISING A LATERALLY MOVABLE ELEMENT AND METHOD FOR FORMING - A micromechanical device and a method for forming the device is disclosed, wherein the micromechanical device has a laterally movable mechanically active element that has a quiescent position in which it is in physical contact with a second structural element. The device is fabricating by disposing the mechanically active element on a first substrate and disposing the second structural element on a second substrate. After the two substrates are aligned and joined such that both the mechanically active element and the second structural element are in contact and affixed to one of the substrates, the other substrate is removed leaving all structural elements disposed on a single substrate. | 02-20-2014 |
| 20140054143 | SWITCHES FOR USE IN MICROELECTROMECHANICAL AND OTHER SYSTEMS, AND PROCESSES FOR MAKING SAME - Embodiments of switches ( | 02-27-2014 |
| 20140061013 | FOUR TERMINAL NANO-ELECTROMECHANICAL SWITCH WITH A SINGLE MECHANICAL CONTACT - A nano-electro-mechanical switch includes an input electrode, a body electrode, an insulating layer, an actuator electrode, an output electrode, and a cantilever beam adapted to flex in response to an actuation voltage applied between the body electrode and the actuator electrode. The cantilever beam includes the input electrode, the body electrode and the insulating layer, the latter separating the body electrode from the input electrode, the cantilever beam being configured such that, upon flexion of the cantilever beam, the input electrode comes in contact with the output electrode at a single mechanical contact point at the level of an end of the cantilever beam. | 03-06-2014 |
| 20140076697 | MEMS ELECTROSTATIC ACTUATOR - A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member. | 03-20-2014 |
| 20140076698 | SWITCHES FOR USE IN MICROELECTROMECHANICAL AND OTHER SYSTEMS, AND PROCESSES FOR MAKING SAME - Embodiments of switches ( | 03-20-2014 |
| 20140076699 | MEMS SWITCHES AND OTHER MINIATURIZED DEVICES HAVING ENCAPSULATING ENCLOSURES, AND PROCESSES FOR FABRICATING SAME - Miniaturized devices such as MEMS switches ( | 03-20-2014 |
| 20140090964 | Nanoelectromechanical Switch With Localized Nanoscale Conductive Pathway - The present invention is directed to a nanoelectromechanical (NEM) switch comprising two electrodes ( | 04-03-2014 |
| 20140124340 | ELECTRICALLY-CONDUCTIVE MEMBRANE SWITCH - An improved electrically conductive membrane switch, such as, for example, an improved graphene membrane switch. The improved electrically conductive membrane switch can be used in applications requiring in excess of 100 volts. | 05-08-2014 |
| 20140158506 | MECHANICAL SWITCH - Disclosed is a mechanical switch that may include a first electrode; a second electrode spaced apart from the first electrode; a first material electrically connected to the first electrode; and a second material electrically connected to the first electrode. Any one of a hardness, a Young's modulus, a melting point and an insensitivity degree to external contamination of the second material is lower than any corresponding one of a hardness, a Young's modulus a melting point and an insensitivity degree to external contamination of the first material. When the first electrode and the second electrode are electrically connected to each other, after the first material is connected to the second electrode, the second material is connected to the second electrode. | 06-12-2014 |
| 20140183014 | ELECTRIC EQUIPMENT HAVING MOVABLE PORTION, AND ITS MANUFACTURE - On seed metal layer of first metal, pedestal and counter electrode are formed of second metal by plating, adjacent to free space region. The free space region is filled with first sacrificial layer. By using resist pattern, second sacrificial metal layer is formed, extending from the first sacrificial layer to a portion of the pedestal, and lower structure of third metal is formed on the second sacrificial layer, by contiguous plating, exposing a portion of the pedestal not formed with the second sacrificial layer, the third metal having composition and thermal expansion coefficient equivalent to the second metal. Upper structure of fourth metal having composition and thermal expansion coefficient equivalent to the second and third metals is formed on the pedestal and the lower structure by plating. The first and second sacrificial layers are removed, leaving an electric equipment with a movable portion. | 07-03-2014 |
| 20140202837 | LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH - A MEMS switch includes a semiconductor substrate, a movable cantilever and a cantilever anchor. The semiconductor substrate includes a device layer and a handle. The movable cantilever is formed in the semiconductor substrate, and is disposed over a void in the handle. The cantilever anchor is formed in the semiconductor substrate and defines a side wall of the void. A metal portion is formed on at least a portion of the movable cantilever. A metal contact is formed proximate an end of the movable cantilever. A biasing metal contact is formed adjacent the cantilever. The biasing metal contact is electrically disconnected from the metal contact. | 07-24-2014 |
| 20140202838 | ELECTRONIC COMPONENT - An electronic component has a first member in which an electrostatic actuator is provided, a second member in which a drive integrated circuit for driving the electrostatic actuator is provided, and join parts that joins the first member and the second member while a surface on which the electrostatic actuator is provided in the first member and a surface on which the drive integrated circuit is provided in the second member are opposed to each other. The electrostatic actuator and the drive integrated circuit are disposed in a space surrounded by the first member, the second member, and the join parts. | 07-24-2014 |
| 20140209442 | MEMS SWITCHES AND FABRICATION METHODS - MEMS switches and methods of fabricating MEMS switches. The switch has a vertically oriented deflection electrode having a conductive layer supported by a supporting layer, at least one drive electrode, and a stationary electrode. An actuation voltage applied to the drive electrode causes the deflection electrode to deflect laterally and contact the stationary electrode, which closes the switch. The deflection electrode is restored to a vertical position when the actuation voltage is removed, thereby opening the switch. The method of fabricating the MEMS switch includes depositing a conductive layer on mandrels to define vertical electrodes and then releasing the deflection electrode by removing the mandrel and layer end sections. | 07-31-2014 |
| 20140238828 | MERGED LEGS AND SEMI-FLEXIBLE ANCHORING FOR MEMS DEVICE - The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together. | 08-28-2014 |
| 20140262707 | NANOWIRE-BASED MECHANICAL SWITCHING DEVICE - Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire. | 09-18-2014 |
| 20140284188 | MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a MEMS device comprises a first electrode provided on a support substrate, a second electrode opposed to the first electrode and movable in the direction it is opposed to the first electrode, and beam parts, each connected to those sides of the second electrode, which oppose to each other, and each supporting the second electrode. The second electrode has a slit extending parallel to the sides to which the beam parts are connected and opening at both the front and the back. Further, the second electrode has at least one bridge part extending over the slit, crossing the slit and made of a material different from that of the second electrode. | 09-25-2014 |
| 20140284189 | LAMINATE-TYPE ACTUATOR - A laminate-type actuator including a laminate wherein an electrostrictive material layer is wound and laminated in a form of a tube together with first and second electrodes sandwiching the electrostrictive material layer therebetween is provided with high volume efficiency and high reliability. The tubular laminate includes a pair of flat portions facing each other and a pair of curved portions interconnecting the pair of flat portions circumferentially and specifying spaces inside the curved portions. In a cross-section perpendicular to an axis of the laminate, an outer width formed by the pair of flat portions is smaller than an outer width of each of the curved portions, and a distance between the pair of flat portions is smaller than an inner width of each of the curved portions. | 09-25-2014 |
| 20140305777 | INTEGRATED MICRO-ELECTROMECHANICAL SWITCHES AND A RELATED METHOD THEREOF - A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor portion coupled to the beam electrode. The beam includes a first beam portion extending from the anchor portion along a first direction; and a second beam portion extending from the anchor portion along a second direction opposite to the first direction. A first control electrode and a first contact electrode are disposed on the substrate, facing the first beam portion. A second control electrode and a second contact electrode are disposed on the substrate, facing the second beam portion. The first control electrode and the second control electrode are coupled to form a gate among the plurality of gates. The plurality of micro-electromechanical switches is arranged in at least one of a series arrangement, parallel arrangement. | 10-16-2014 |
| 20140318937 | CONFIGURABLE MULTI-GATE SWITCH CIRCUITRY - Integrated circuits with configurable multi-gate switch circuitry are provided. The switch circuitry may include switch control circuitry and an array of multi-gate switches. Each multi-gate switch may have first and second terminals, first and second gates, and a metal bridge. The metal bridge is attached to the first terminal. The metal bridge may extend over the gates and may hover above the second terminal in the off state. The metal bridge may have a tip that bends down to physically contact the second terminal in the on state. Switch control circuitry may provide row and column control signals to load desired switch states into the switch array. The switch array may be partitioned into groups of switches that form multiplexers. The multiplexers may be used in programmable circuits such as programmable logic device circuits. | 10-30-2014 |
| 20140360851 | Electrically Controllable Integrated Switch - An integrated circuit includes an interconnection part with several metallization levels. An electrically activatable switching device within the interconnection part has an assembly that includes a beam held by a structure. The beam and structure are located within the same metallization level. Locations of fixing of the structure on the beam are arranged so as to define for the beam a pivot point situated between these fixing locations. The structure is substantially symmetric with respect to the beam and to a plane perpendicular to the beam in the absence of a potential difference. The beam is able to pivot in a first direction in the presence of a first potential difference applied between a first part of the structure and to pivot in a second direction in the presence of a second potential difference applied between a second part of the structure. | 12-11-2014 |
| 20150021149 | CONTACT STRUCTURE FOR ELECTROMECHANICAL SWITCH - The present disclosure discloses a contact structure for electromechanical switch. The contact structure is using the design including a PCB and a moving contact to allow the actuations and have great switch characteristics whose range is from DC to high frequency. | 01-22-2015 |
| 20150311003 | MEMS Switch - Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off. | 10-29-2015 |
| 20150311021 | MEMS Swtich with Internal Conductive Path - A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base. | 10-29-2015 |
| 20150325393 | MEMS Switch - A micromachined switch has a cavity with an atmosphere configured to reduce sparking between switch contacts during opening and closing operations. | 11-12-2015 |
| 20150357142 | ELECTROMECHANICAL DEVICE - Electromechanical devices described herein may employ tunneling phenomena to function as low-voltage switches. Opposing electrodes may be separated by an elastically deformable layer which, in some cases, may be made up of a non-electrically conductive material. In some embodiments, the elastically deformable layer is substantially free of electrically conductive material. When a sufficient actuation voltage and/or force is applied, the electrodes are brought toward one another and, accordingly, the elastically deformable layer is compressed. Though, the elastically deformable layer prevents the electrodes from making direct contact with one another. Rather, when the electrodes are close enough to one another, a tunneling current arises therebetween. The elastically deformable layer may exhibit spring-like behavior such that, upon release of the actuation voltage and/or force, the separation distance between electrodes is restored. Thus, the electromechanical device may be actuated between open and closed switch positions. | 12-10-2015 |
| 20160042902 | SOLDER BUMP SEALING METHOD AND DEVICE - A method for forming a cavity in a microfabricated structure, includes the sealing of that cavity with a low temperature solder. The method may include forming a sacrificial layer over a substrate, forming a flexible membrane over the sacrificial layer, forming a release hole through a flexible membrane to the sacrificial layer, introducing an etchant through the release hole to remove the sacrificial layer, and then sealing that release hole with a low temperature solder. | 02-11-2016 |
| 20160056003 | ELECTROMECHANICAL SWITCHING DEVICE WITH ELECTRODES HAVING 2D LAYERED MATERIALS WITH DISTINCT FUNCTIONAL AREAS - An electromechanical switching device includes a first electrode, comprising layers of a first 2D layered material, which layers exhibit a first surface; a second electrode, comprising layers of a second 2D layered material, which layers exhibit a second surface opposite the first surface; and an actuation mechanism; wherein each of the first and second 2D layered materials has an anisotropic electrical conductivity, which is lower transversely to its layers than in-plane with the layers; the first electrode includes two distinct areas alongside the first surface, which areas differ in at least one structural, electrical and/or magnetic property; and at least one of the first and second electrodes is actuatable by the actuation mechanism, such that actuation thereof for modification of an electrical conductance transverse to each of the first surface and the second surface to enable current modulation between the first electrode and the second electrode. | 02-25-2016 |
| 20160099124 | PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES - A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending. | 04-07-2016 |
| 20160126044 | PIEZOELECTRONIC SWITCH DEVICE FOR RF APPLICATIONS - A piezoelectronic switch device for radio frequency (RF) applications includes a piezoelectric (PE) material layer and a piezoresistive (PR) material layer separated from one another by at least one electrode, wherein an electrical resistance of the PR material layer is dependent upon an applied voltage across the PE material layer by way of an applied pressure to the PR material layer by the PE material layer; and a conductive, high yield material (C-HYM) comprising a housing that surrounds the PE material layer, the PR material layer and the at least one electrode, the C-HYM configured to mechanically transmit a displacement of the PE material layer to the PR material layer such that applied voltage across the PE material layer causes an expansion thereof and an increase the applied pressure to the PR material layer, thereby causing a decrease in the electrical resistance of the PR material layer. | 05-05-2016 |
| 20160126045 | MEMS SWITCH AND METHOD OF MANUFACTURING THE SAME - A microelectromechanical systems (MEMS) switch includes: a signal line disposed on a substrate; a dielectric member attached to the substrate; support fixtures disposed on the substrate at opposing sides of the signal line; and a membrane having ends fixed to the support fixtures, and a protrusion-recess pattern having a corrugated structure, the membrane being configured to change a capacitance provided by the membrane and the dielectric member by being positioned adjacent to the dielectric member through a downward movement. | 05-05-2016 |
| 20160148770 | ELECTROMECHANICAL SWITCHING DEVICE WITH ELECTRODES HAVING 2D LAYERED MATERIALS WITH DISTINCT FUNCTIONAL AREAS - An electromechanical switching device includes a first electrode, comprising layers of a first 2D layered material, which layers exhibit a first surface; a second electrode, comprising layers of a second 2D layered material, which layers exhibit a second surface opposite the first surface; and an actuation mechanism; wherein each of the first and second 2D layered materials has an anisotropic electrical conductivity, which is lower transversely to its layers than in-plane with the layers; the first electrode includes two distinct areas alongside the first surface, which areas differ in at least one structural, electrical and/or magnetic property; and at least one of the first and second electrodes is actuatable by the actuation mechanism, such that actuation thereof for modification of an electrical conductance transverse to each of the first surface and the second surface to enable current modulation between the first electrode and the second electrode. | 05-26-2016 |
| 20160155594 | MICROELECTRONIC SWITCH AND ACTIVE MATRIX ORGANIC LIGHT EMITTING DISPLAY DEVICE | 06-02-2016 |
| 20160181040 | MEMS STRUCTURE WITH MULTILAYER MEMBRANE | 06-23-2016 |
| 20160181041 | MEMS STRUCTURE WITH THICK MOVABLE MEMBRANE | 06-23-2016 |
| 20220139656 | MEMS SWITCH WITH MULTIPLE PULL-DOWN ELECTRODES BETWEEN TERMINAL ELECTRODES - The disclosure is directed to microelectromechanical system (MEMS) switches with multiple pull-down electrodes between terminal electrodes to limit off-state capacitance. In exemplary aspects disclosed herein, a plurality of pull-down electrodes are positioned between the input terminal electrode and the output terminal electrode. The plurality of pull-down electrodes are offset from each other to limit off-state capacitance between the input terminal electrode and the output terminal electrode. The separation between the pull-down electrodes disrupts the off-state capacitive path between the input terminal electrode and the output terminal electrode, thereby further insulating the contacts from each other. Limiting off-state capacitance reduces on-state electrical loss and increases off-state electrical isolation for improved performance. | 05-05-2022 |
