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Sequential work treating receptacles or stations with means to transfer work or fluid-applying devices

Subclass of:

134 - Cleaning and liquid contact with solids

134000000 - APPARATUS

Patent class list (only not empty are listed)

Deeper subclasses:

Class / Patent application numberDescriptionNumber of patent applications / Date published
134061000 Sequential work treating receptacles or stations with means to transfer work or fluid-applying devices 48
20090065032Apparatus and method for removing photoresist from a substrate - An apparatus and method for removing photoresist from a substrate, which includes treating the photoresist with a first reactant to cause swelling, cracking or delamination of the photoresist, treating the photoresist with a second reactant to chemically alter the photoresist, and subsequently removing the chemically altered photoresist with a third reactant. In one example, the first reactant is supercritical carbon dioxide (SCCO03-12-2009
20090084415CLEANING/DRYING APPARATUS AND CLEANING/DRYING METHOD - A cleaning/drying apparatus including a vapor area where vapor of an organic solvent inside the cleaning/drying apparatus is generated, an ejecting part configured to eject the organic solvent onto a cleaning/drying target, a first detecting part configured to determine whether the temperature of the cleaning/drying target is a first temperature equivalent to a temperature of the vapor in the vapor area, a second detecting part configured to determine whether the temperature of the cleaning/drying target is a second temperature enabling the organic solvent to condense on a surface of the cleaning/drying target, and a cleaning/drying control part configured to drive the ejecting part to eject the organic solvent when the first detecting part detects that the temperature of the cleaning/drying target is the first temperature and stop the ejection when the second detecting part detects that the temperature of the cleaning/drying target is the second temperature.04-02-2009
20090101180Substrate treating apparatus and method of manufacturing the same - Provided are a substrate treating apparatus and a method of manufacturing the substrate treating apparatus. Processing units of a process equipment are modularized, and the modularized processing units are detachably disposed in a main frame. According to this characteristic, work time and work effort required for manufacturing the process equipment can be reduced. In addition, maintenance/repair of each of the processing units can be further easily performed.04-23-2009
20100024849TUNNEL WASHER SYSTEM WITH IMPROVED CLEANING EFFICIENCY - A tunnel washer that includes fluid exhaust paths that are optimized to minimize fluid transfer between chambers of the washer and minimize heat loss from each chamber of the washer. The fluid exhaust paths also facilitate uniform vapor evacuation from each chamber of the washer. The tunnel washer also includes spaced-apart double wall curtains for isolating chambers of the tunnel washer to prevent fluid and heat transfer therebetween, and to the exterior of the tunnel washer. The double wall curtains include surfaces that inhibit the curtains from sticking together during operation of the tunnel washer. The tunnel washer also includes an air manifold that provides uniform drying efficiency for articles of varying dimensions.02-04-2010
20100037921PROBE WASHING CUPS AND METHODS - The invention provides probe washing cups and methods. A probe washing cup has a washing well and a waste cup. A drying section is disposed between an open end of the probe washing cup and an inlet plane of the washing well. The drying section has a channel that is aligned with the washing well. The channel has an opening for receiving the probe therethrough.02-18-2010
20100252078Apparatus for Recycling Noble Metals - The present invention provides an apparatus for recycling noble metals, which comprises one or more conveyers, one or more carriers, an immersion device, one or more dissolution devices, and one or more rinse devices. The carriers, the immersion device, the dissolution devices, and the rinse devices are arranged in U-shape. Thereby, adding an object containing noble metals or pouring the object containing noble metals can be performed on the same side of the apparatus for recycling noble metals. Hence, a user needs not to operate on both sides of the apparatus for recycling noble metals, enhancing ease of operation. The carriers carry objects containing noble metals. The conveyer is used for conveying the carriers to the immersion device, the dissolution devices, and the rinse devices sequentially for recycling noble metals from the objects containing noble metals. The apparatus according to the present invention can recycle noble metals continuously. Thereby, the speed of recycling is enhanced, and the amount of recycled noble metals is increased as well.10-07-2010
20110023916PICKLE LINE ASSEMBLY WITH INCLINED EXPANSION SEAL - A pickle line assembly is provided having a roll tank, a pickle tank, and an expansion seal. The roll tank includes a front and rear face that are angled towards one another at the upper end. The pickle tank includes front and rear openings, which can be brought into registration with an opening in the front face and rear face of the roll tank. Expansion seals are configured to surround a perimeter of the pickle tank substantially near the front and rear openings, and are angled at approximately the same angle as the front and rear face of the roll tank. The expansion seal encloses the path between the pickle tank and roll tank, and the tilt angle of the front and rear face of the roll tank allow the pickle tank to be vertically raised and lowered into position without interference.02-03-2011
20110023917FLOOR MAT WASHER WITH FRAGRANCE - A combination automotive floor mat cleaning and fragrance applying system comprising an elongate conveyor, an infeed station made up of opposed rollers, a wet scrubber station, a hot air drying station downstream of the wet scrubber station and a fragrance applying station for applying one of several selectable fragrances to the floor mats after they are cleaned and dried.02-03-2011
20120067382WASHER/DRYER FOR CONVEYOR BELT - A conveyor belt washer/dryer includes a housing that encloses a washing station separated by one or more spray barriers from a drying station. The housing has a passage that is sized and configured to allow the conveyor belt to successively pass through washing station and the drying station. The washing station includes one or more washing heads, a splash plate and a reservoir. The washing heads discharge a wash liquid onto the top surface of the conveyor belt the splash plate redirects the wash liquid onto the bottom surface. The reservoir collects the spent wash liquid. The drying station includes one or more air knife/knives that discharge(s) pressurized air onto the conveyor belt to dry the belt.03-22-2012
20120318306APPARATUS FOR CLEANING SUBSTRATE - An apparatus for cleaning a substrate is disclosed. The apparatus includes a first chamber through which a substrate is conveyed, a second chamber where an oxide film formed on the substrate conveyed from the first chamber is removed; and a third chamber that discharges the substrate conveyed from the second chamber to the outside after rinsing the substrate, wherein the first chamber and the third chamber are disposed on top and on bottom.12-20-2012
20130125930SURFACE TREATMENT APPARATUS - A surface treatment apparatus, disposed around a conveying device conveying a substrate in a predetermined conveying direction, includes: first and second liquid nozzles, disposed at an adjustable angle above the conveying device, each having an axial direction perpendicular to an axial direction of the conveying device, in which the second liquid nozzle is spaced apart from the first liquid nozzle by a first predetermined distance in the predetermined conveying direction, and the first and second liquid nozzles incline at a first angle facing each other; and first and second liquid level baffles, disposed on two sides of the conveying device respectively and spaced apart from the conveying device by a gap, in which the first and second liquid level baffles are located within the first predetermined distance spaced apart between the first and second liquid nozzles.05-23-2013
20130180551Substrate Processing Apparatus - A substrate processing apparatus is composed of an indexer block, a first processing block and a second processing block that are provided in parallel with one another. The indexer block is provided with an indexer robot. The first processing block is provided with a plurality of back surface cleaning units and a first main robot. The second processing block is provided with a plurality of end surface cleaning units, a plurality of top surface cleaning units and a second main robot.07-18-2013
20140053880PALLET WIPING DEVICE, PALLET CLEANING DEVICE, AND PALLET WORK LINE - A pallet wiping device that promotes drying after washing of a pallet includes a pallet placement unit on which a pallet is placed, and a wiping unit including a water-absorbing portion formed of a water-absorbent material, an arm supporting the water-absorbing portion and connected to a cylinder, and a cylinder. The cylinder moves the arm reciprocally along a direction in which a fork insertion hole extends while bringing the water-absorbing portion into contact with the inner wall surface of the fork insertion hole. Accordingly, water left in the fork insertion hole of the pallet after washing can be removed. In addition, the pallet can be dried at low cost because removal of water in the interior of the fork insertion hole is implemented without using heat.02-27-2014
20140090672PALLET DRYING METHOD, PALLET DRYING DEVICE, AND PALLET CLEANING DEVICE - A pallet drying device promotes drying after washing of a pallet including a fork insertion hole into which a fork is inserted on a side surface and an opening communicating with the fork insertion hole on a lower surface. The pallet drying device includes: pallet placing means capable of placing the pallet to be dried so as to mechanically block the opening; and blowing means for blowing air into the inside of the fork insertion hole. The pallet is placed with the opening on the lower surface blocked while air is blown into the fork insertion hole, thus the air blown into the fork insertion hole is not discharged from the opening. This configuration promotes drying the inside of the fork insertion hole.04-03-2014
20140202501SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus has an indexer block and a processing block. One side of the processing block has a vertical stack of a plurality of top surface cleaning units and the other side of the processing block has a vertical stack of a plurality of back surface cleaning units. Reversing units for reversing the substrate W are provided one above the other between the indexer block and the processing block. For example, one reversing unit is used for reversing the substrate before a back surface cleaning processing by the back surface cleaning unit or for other purposes, and the other reversing unit is used for placing the substrate W after a top surface cleaning processing by the top surface cleaning unit or for other purposes.07-24-2014
20150122295SUBSTRATE PROCESSING APPARATUS - Damage to a substrate in a substrate processing apparatus is effectively suppressed. The substrate processing apparatus includes a polishing unit polishing a substrate, a cleaning unit cleaning and drying the substrate polished by the polishing unit, and a conveying unit conveying the substrate in the polishing unit and the cleaning unit. The substrate processing apparatus further includes a measuring section 05-07-2015
20160089699TUNNEL-TYPE MACHINE FOR WASHING OBJECTS - A tunnel-type machine to wash objects comprises a containing structure which internally delimits a work volume and is provided with at least an entrance door to feed the objects in a loading direction. The work volume comprises at least two processing chambers contiguous in the loading direction, a single separation door is provided between the two processing chambers, and is mobile through a passage aperture of the containing structure. At least a front packing is provided between the two processing chambers, and at least an upper packing is provided at the passage aperture, and the separation door is configured to contact, in a closed and separated position of the two chambers, both the front packing and the upper packing.03-31-2016
20180025901Precleaning Apparatus and Substrate Processing System01-25-2018
134062000 With initial work emptying, inverting, orienting or puncturing means 4
20080257388Gaming Chip Washing Machine - A machine for cleaning gaming chips or coins which includes means to convey individual coins or chips to a carrier wheel consisting of a vertically oriented disc having arranged about its periphery a plurality of coin or chip sized open recesses to receive individual coins or chips so that the coins or chips are supported on their edges and both faces of the coins or chips are exposed. The carrier wheel rotates through a washing station, a drying station arranged about said carrier wheel such that a drying air stream passes over and around said coins or chips in said carrier wheel. The coin or chip recesses in the carrier wheel are crenellated to allow washing fluid and the drying air stream to pass over the edges of the coins or chips. A total residence time for each chip that is sufficient to clean and dry the chips will lie in range of 10 to 20 seconds.10-23-2008
20120006363COMPACT AND MODULAR ROBOTIC WASH SYSTEM - A compact robotic wash system is provided for cleaning a work piece. The robotic wash system includes an enclosed wash chamber. A robot is fully disposed inside the wash chamber. The robot has a maximum horizontal reach that is at least 40% of the maximum horizontal linear dimension of the wash chamber. The robot may hold a work piece and move the work piece around a plurality of spray devices. Alternately, the robot may hold one or more spray devices, while a work piece is supported on a movable table.01-12-2012
20130112229Pallet Washing Apparatus - A pallet washing apparatus and its associated methodology, wherein all of the pallets in a vertical stack of pallets are cleaned simultaneously, the stack being vertically expanded to provide a separation distance between each pallet, with each pallet then being delivered onto individual conveyors passing through washing, rinsing and drying stations, such that cleaning spray may be directed against all surfaces of each pallet, all of the pallets then being restacked for removal in a single stack.05-09-2013
20130206185Substrate Processing Apparatus - A substrate processing apparatus is composed of an indexer block, a first processing block and a second processing block that are provided in parallel with one another. The indexer block is provided with an indexer robot. The first processing block is provided with a plurality of back surface cleaning units and a first main robot. The second processing block is provided with a plurality of end surface cleaning units, a plurality of top surface cleaning units and a second main robot.08-15-2013
134063000 With means for treating work other than with fluids, draining or heating 5
20090095329METHOD AND APPARATUS FOR CLEANING PARTS - The present invention includes embodiments that generally relate to a parts washer and methods for making and using the same. According to some embodiments a parts washer can include a plurality of cleaning stations arranged in series and adapted to automatically wash and transfer parts to the next cleaning station. Furthermore, in some embodiments the parts washer is adapted to minimize contact between a plurality of parts being washed. Some embodiments can include a rotatable cleaning station divided into substations and can include an aperture for transferring a part from the cleaning station to an adjacent cleaning station.04-16-2009
20090133722APPARATUS AND METHOD FOR CLEANING A SUBSTRATE - Provided is an apparatus for cleaning a substrate. The substrate cleaning apparatus includes a spin head for supporting the substrate, a first cleaning unit for cleaning the substrate by a polishing process, and a second cleaning unit for cleaning the substrate by injecting a treating solution. Initially, the polishing pad is in contact with the substrate to polish the substrate and then the polishing pad is removed from contact with the substrate so that the treating solution can be supplied to the substrate to clean the substrate.05-28-2009
20090188534Apparatus And Method For Cleaning Glass Substrates Using A Cool Hydrogen Flame - Contaminants from surfaces of temperature sensitive substrates, such as glass substrates are removed by exposing the surfaces to a hydrogen Surface-mixed diffusion flame for a predetermined duration of time. The predetermined duration of time being insufficient to heat up the surfaces substantially thereby causing damage to the temperature sensitive substrates.07-30-2009
20130104941Vertical Dish Washing Machine05-02-2013
20130306114IN-LINE PRETREATMENT SYSTEM FOR MACHINE PARTS - An in-line parts washing system comprising concatenated modules of two discrete lengths where certain of the modules have a self-contained tank of parts cleaning chemical along with a motor-driven pump for forcing the cleaning chemical through spray heads enclosed in a shroud through which the parts to be cleaned are transported via a conveyor. Other modules disposed in-line with the wash modules provide zones where the cleaning chemical dripping from the parts is collected and redirected back into the tanks from which it originated. The ability to swap modules of differing length allows a user to easily alter the cleaning process.11-21-2013
134064000 For sheet, web, strand or bar form work, longitudinally traveling 2
20080196752Apparatus and method for cleaning a glass substrate before photoresist coating - A method for cleaning a glass substrate before photoresist coating, which method can remove oxide compounds and organic residues from the surface of a metal layer of the glass substrate, comprises the steps of firstly providing an alkaline developer in a concentration of between 0.35% and 0.45%; later immersing the metal film of the glass substrate in the alkaline developer; then rinsing the metal film of the glass substrate after immersed with clean water; and lastly having the surface of the metal film of the glass substrate in a dry treatment.08-21-2008
20130284219APPARATUS FOR CLEANING A HOT DIP GALVANIZED STEEL SHEET - An apparatus for cleaning a hot dip galvanized steel sheet including: a cleaning liquid spray nozzle which sprays a cleaning liquid to both surfaces of a strip-shaped hot dip galvanized steel sheet which was treated by surface oxidation and which is continuously traveling; and a pure water spray nozzle which sprays pure water to both surfaces of the hot dip galvanized steel sheet a position where the hot dip galvanized steel sheet travels 1 second or more after being sprayed with the cleaning liquid.10-31-2013
134065000 With screw work conveyor 1
20190143380FLOWBACK TANK CLEANING SYSTEM AND METHOD05-16-2019
134066000 With work transfer from one movable carrier to another 3
20090194139Surface Treatment Apparatus - [Object] To provide a surface treatment apparatus capable of carrying out a surface treatment, a water washing process, a drying process, etc. automatically in an assembly line manner and in a space-saving installation area.08-06-2009
134067000 Including endless belt type 1
134068000 With splash, spray or jet applying means 1
20150320287WAREWASHER WASH ARM FILTER ARRANGEMENT - A warewasher includes a liquid recirculation system for spraying wares with wash liquid from a collecting tank. The warewasher includes a filter arrangement for capturing food debris in a wash spray before the wash spray reaches the wares being cleaned.11-12-2015
134069000 Between plural rotary carriers on same axis 1
20080302396Workpiece Surface Treatment System - A workpiece surface treatment system (12-11-2008
134070000 With endless belt work transfer means 11
20090025758WAREWASH MACHINE ARM AND NOZZLE CONSTRUCTION WITH SET SPRAY PATTERN - A warewash machine includes a housing including an area for receiving wares to be washed and a liquid dispensing arm removably positioned within the housing, the liquid dispensing arm including a nozzle receiving opening. Removably positioned in the nozzle opening is a nozzle that is configured to output liquid in a specific output pattern. The nozzle receiving opening and the nozzle are cooperatively shaped and configured such that when the nozzle is inserted in the nozzle receiving opening the nozzle is automatically positioned such that an orientation of the specific output pattern relative to the area is automatically set to a specific orientation.01-29-2009
20100212699APPARATUS FOR CLEANING CONTAINERS - An apparatus for cleaning containers, equipped with a spraying device for cleaning liquid and with a conveying device for transporting the containers in a predetermined conveying direction through a plurality of cleaning stations arranged one after the other, each of the cleaning stations comprising a supply line for supplying cleaning agent to the spraying device and being equipped with a return device with which used cleaning agent can be transferred from a cleaning station succeeding in conveying direction into a preceding cleaning station. To make the apparatus more economical, the return device is provided with a return line terminating in the supply line leading to the spraying device.08-26-2010
20120080060TURRET-TYPE CLEANING APPARATUS - A turret-type cleaning apparatus for using cleaning liquids, and deburring and cleaning a workpiece includes: cleaning tools for spraying one of the liquids onto the workpiece and deburring and/or cleaning it; a turnable turret head where the tools are attached; a turret drive device connected to the head and for turning the head; a cleaning liquid source for supplying the liquids to first and second cleaning liquid supply flow passages; a first cleaning liquid supply flow passage configured to supply the one of the liquids to the cleaning tool; a second cleaning liquid supply flow passage for supplying the other of the liquids to the bath; a cleaning chamber where the head is arranged; a cleaning bath installed in the chamber; and a drain port openably and closably provided below the bath and for draining the liquids in the bath.04-05-2012
20120167925Compressor Cleaner - A compressor cleaner includes a machine body with a tunnel, a transporting unit connected with several conveyors, a driving unit for driving the compressors on the conveyors to rotate dining the cycle. The conveyors are driven by the transporting unit to enter an entry side and to carry compressors. They first enter the cleaning room for cleaning, then the front drying room and the rear drying room for drying. The dried compressor then goes to the exit side.07-05-2012
20120199166CONVEYOR WAREWASHER HAVING AN AUTOMATIC WASTEWATER REMOVAL SYSTEM - A dishwasher has a wash system with a nozzle system with at least one wash nozzle for spraying wash liquid, a wash tank for collecting at least some of the sprayed wash liquid, and a wash pump by means of which wash liquid collected in the wash tank is fed to the at least one wash nozzle. A dirt-collecting system has at least one tank-covering screen, in order to separate off particles of dirt from the wash liquid which has been sprayed and flowed back into the wash tank under gravitational force. In order for the particles of dirt which are washed off the wash ware during operation of the dishwasher to be separated effectively from the wash liquid, the dirt-collecting system also has a dirt-collecting region which is arranged in the wash system and is intended for collecting the particles of dirt which have been separated off from the wash liquid with the aid of the tank-covering screen, wherein the dirt-collecting region is open at the top, but closed all the way around the sides, and wherein there is also a dirt-discharging pipe system which is connected to the dirt-collecting region and by means of which the particles of dirt collected in the dirt-collecting region are discharged from the wash system.08-09-2012
20140174485ELECTRODE WASHING METHOD AND SYSTEM - Electrodes are conveyed edgewise along a path. The electrodes can be supported by their bottom peripheral edge and can be maintained generally vertically. A plurality of wash nozzles are positioned adjacent to the path on opposing sides thereof. Wash spray from the nozzles is directed to impinge sides of the electrode. The nozzles can be arranged linearly to form a nozzle array angled so that the wash spray impinges an upper portion prior to a bottom portion of the electrode. Separate sections for rinsing or pre-washing can be provided within a washing chamber. Used water can be collected and recycled.06-26-2014
134071000 Horizontal axes 5
134072000 With splash, spray or jet applying means 5
20080216875Conveyor Ware Washer - Conveyor ware washer, comprising of a treatment device (09-11-2008
20080308133Method and apparatus for wet conveyor car wash and detail - A hand wash cash wash system for motor vehicles based on a fully-wet belt conveyor through a plurality of stations including a manual hand-wash station. The conveyor is adapted for continuous operation in a wet environment and indeed relies on the water from the wash stations for lubrication. The adaptations for wet-belt design include a concrete foundation formed with a recessed drainage pit for runoff. A superstructure is seated atop the foundation and this comprises a framework of galvanized steel legs and struts. The continuous conveyor is mounted on the superstructure further comprises a conveyor belt formed of Acetyl™ links and rollers rotatably mounted in the superstructure. Vehicles approach the car wash, wait in a queue, advance to an entry point, drive onto the conveyor and then leave the car in neutral with foot on the brakes. The conveyor belt moves vehicles through the car wash in assembly line format through a plurality of stations, including a pre-wetting station, a hand-washing station, a rinse station, and a drying station. All the water from the various stations lubricates the links and rollers of the conveyor to create a low-friction continuous wet belt conveyer for low-maintenance and longevity. The wash conveyor extends parallely to an adjacent detail conveyor, and the two conveyors move in opposing directions. Upon completion of the wash, the vehicle moves off the wash conveyor and loops back onto the detail conveyor for interior detailing. A semi-automated system arranged in the foregoing format with dual wash conveyors and dual detail conveyors is capable of 1000+ vehicles per day throughput, and since the entire conveyor path uses a low-friction continuous wet belt conveyer, with specific interlinked belt configuration, infrastructure and materials, there is low-maintenance and longevity despite heavy volume.12-18-2008
20090178695LIQUID CLEANING APPARATUS FOR CLEANING PRINTED CIRCUIT BOARDS - A method and apparatus for cleaning printed circuit boards are provided. The method includes providing a cleaning apparatus with a housing having a conveyance mechanism for carrying printed circuit boards through the housing. The cleaning apparatus has at least a prewash station, a wash station and a final rinse station therein. The printed circuit boards are carried on the conveyance mechanism to the prewash station. A plurality of fluidic oscillator nozzles of the prewash station are utilized to direct liquid onto the printed circuit boards. Each fluidic oscillator nozzle outputs a stream of liquid with an instantaneous direction that oscillates back and forth relative to a nozzle axis over time.07-16-2009
20130019906Agricultural Container Washer and Method - An agricultural seed box washing device and method includes a modular enclosure having a washing area having a stationary first spray array and a second spray array movable transverse to the path of travel of the seed box for washing all six geometric sides of the seed box. The device includes a two-directional conveyor that allows the seed box to cycle back and further through the first spray array for multiple passes through the spray arrays.01-24-2013
20130319479Method for containing a fluid volume in an inline conveyorized cleaner for cleaning low standoff components - In one embodiment, the disclosed apparatus features a conveyor belt though an agitated reservoir of cleaning solution that is pooled by a flood box defined by sidewalls along the sides of the conveyor belt and opposing jets of water dubbed water curtains at the entrance and exit of the conveyor belt to and from the flood box, and, agitated by a plurality of spray nozzles shooting high flows of cleaning solution into the reservoir from above or within the flood box. The conveyor belt may be horizontal or slightly angled from the horizontal relative to the flood box.12-05-2013
134078000 With rotary or swinging work transfer means 1
134079000 Axially rotary 1
134080000 Turntable type 1
20150144163AUTOMATIC TONOMETER TIP DISINFECTION APPARATUS - A tonometer tip disinfection apparatus for disinfecting and rinsing a tonometer tip includes a first basin configured to hold a disinfecting solution, a second basin configured to hold a rinsing solution, a holding platform configured to receive at least one tonometer tip, a tonometer tip support arm configured to support a tonometer tip having a tip end in an orientation allowing the tip end to reside at least in part within the first and second basins, and a transportation assembly configured to automatically move the tonometer tip support arm between the first and second basins and the holding platform.05-28-2015
134082000 With guide rails, rods or beams for work or work holders 3
20120000494WET BENCH APPARATUS AND METHOD - A wet bench system comprising a plurality of sequentially aligned containers. A first rail positioned generally horizontally adjacent a first side of the container and a first arm having a first end moveable on the first rail. A second rail positioned generally horizontally and adjacent a second side of the container and having a second arm having a first end moveable on the second rail. The arms being capable of moving articles to be treated by chemicals in containers by movement in a back and forth leap frog fashion.01-05-2012
20140083468SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus has a cleaning section for cleaning a substrate such as a semiconductor wafer and can be used as a polishing apparatus. The substrate processing apparatus includes a first cleaning chamber which houses at least one first cleaning module and two second cleaning modules arranged in a vertical array, a second cleaning chamber which houses two third cleaning modules arranged in a vertical array, and a first transport robot housed in a first transport chamber disposed between the first cleaning chamber and the second cleaning chamber. The first transport robot is configured to transfer substrates between the first cleaning module, the second cleaning modules, and the third cleaning modules.03-27-2014
134083000 Vertical, inclined, curved or movable or with rollers or work immersion means 1
20130133704SYSTEM AND METHOD FOR REDUCING PARTICLES AND MARKS ON WAFER SURFACE FOLLOWING REACTOR PROCESSING - In one embodiment, a cleaning chamber is provided. The cleaning chamber has a base portion housing a first chuck, a top portion housing a plurality of cups, and a middle portion functioning as a lid for the base portion and a second chuck for the top portion. A rail couples the top portion and the middle portion, wherein the top portion is rigidly mounted to the rail, while the middle portion is slidably mounted to the rail. A support frame is rigidly mounted to the base portion, the support frame being pivotably affixed to the rail, wherein the rail maintains a vertical alignment between the top portion and the middle portion as the rail pivots.05-30-2013

Patent applications in class Sequential work treating receptacles or stations with means to transfer work or fluid-applying devices

Patent applications in all subclasses Sequential work treating receptacles or stations with means to transfer work or fluid-applying devices

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