| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 118713000 | With means for visual observation | 29 |
| 20080196665 | BATTER APPLICATOR WITH ADJUSTABLE TILT CONTROL FOR SUBMERGER OR COATING MECHANISM - A batter applicator with an adjustable coating mechanism is disclosed which includes a frame, a main batter tank, a structure comprising at least one of a submerger and an overflow structure that is adapted to be positioned proximate the main batter tank and actuatable means for tilting the structure relative to a reference horizontal surface. | 08-21-2008 |
| 20080236486 | DETACHABLE DETECTION WINDOW AND DETECTING SYSTEM - A detachable detection window suitable for being disposed on a sidewall of a plasma chamber is disclosed. The detachable detection window includes a base and a cannular tube. The base herein has a first linking-up part and a second linking-up part is formed at an end of the cannular tube. The base and the cannular tube are assembled to form the detachable detection window. | 10-02-2008 |
| 20090101068 | Roll Coater Assembly System - A roll coater assembly system for application of a fluid material having a transport system with a part loading system, an application system, and a curing system for curing the material applied. The transport system is a continuous conveyor having a plurality of work stations movably supporting and transporting items to be processed to the application systems and curing systems, with the conveyors of the transport and loading systems having a single drive mechanism which operates both of the conveyors, such that the cylindrical items are provided to circumferentially located stations within and surrounding a cylindrical drum of the part loading system which rotates to engage and move the cylindrical items into and out of the stations of the cylindrical drum about a central axis of the cylindrical drum and into the transport system conveyor by movement of the drive mechanism and respective conveyor synchronized by a control system. | 04-23-2009 |
| 20090133626 | APPARATUS FOR PECVD DEPOSITION OF AN INTERNAL BARRIER LAYER ON A RECEPTACLE, THE APPARATUS INCLUDING AN OPTICAL PLASMA ANALYSIS DEVICE - An apparatus ( | 05-28-2009 |
| 20090205569 | METHOD AND APPARATUS FOR PLACING SUBSTRATE SUPPORT COMPONENTS - An apparatus for depositing viscous material on an electronic substrate includes a frame, a unit coupled to the frame, the unit being configured to deposit material on the electronic substrate, and a substrate support assembly coupled to the frame. The substrate support assembly is configured to support the electronic substrate. The substrate support assembly includes a plurality of support elements, a table coupled to the frame, the table having a support surface to support at least one support element of the plurality of support elements, a placement head configured to releasably secure the at least one support element, and a transport device coupled to the frame and the placement head. The transport device is configured to move the placement head relative to the table in both X and Y directions to place the at least one support element on the support surface of the table in a predetermined position. The apparatus further includes an imaging system coupled to the frame and a controller coupled to the imaging system. The imaging system is configured to capture images of the support surface of the table. The controller is configured to verify whether the at least one support element is placed on the predetermined position on the support surface of the table based on images captured by the imaging system. Other embodiments of the apparatus and related methods are further disclosed. | 08-20-2009 |
| 20090314205 | SEMICONDUCTOR PROCESS CHAMBER VISION AND MONITORING SYSTEM - A system for monitoring a process inside a high temperature semiconductor process chamber by capturing images is disclosed. Images are captured through a borescope by a camera. The borescope is protected from high temperatures by a reflective sheath and an Infrared (IR) cur-off filter. Images can be viewed on a monitor and can be recorded by a video recording device. Images can also be processed by a machine vision system. The system can monitor the susceptor and a substrate on the susceptor and surrounding structures. Deviations from preferred geometries of the substrate and deviations from preferred positions of susceptor and the substrate can be detected. Actions based on the detections of deviations can be taken to improve the performance of the process. Illumination of a substrate by a laser for detecting deviations in substrate geometry and position is also disclosed. | 12-24-2009 |
| 20100083899 | Immersion Lithography Apparatus and Tank Thereof - A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly. | 04-08-2010 |
| 20110247556 | Tapered Horizontal Growth Chamber - A system and techniques for performing deposition having a tapered horizontal growth chamber which includes a susceptor and a tapered channel flow block. A tapered chamber is formed between the susceptor and the tapered channel flow block. Gaseous species introduced are forced by the tapered channel block to flow toward the susceptor to enhance the efficiency of reactions between the gases species and a wafer on the susceptor. | 10-13-2011 |
| 20110290181 | METHOD AND DEVICE FOR CLEANING AN OPTICAL POSITION MEASUREMENT SYSTEM FOR SUBSTRATES IN A COATING INSTALLATION - A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation. | 12-01-2011 |
| 20120006264 | FILM FORMATION APPARATUS - Provided is a film formation apparatus capable of reducing vibration and deformation that may be transmitted to an alignment mechanism and thereby suppressing misalignment between a substrate and a mask in a surface direction. The film formation apparatus includes: a film forming chamber; a supporting member; and an alignment mechanism provided on the supporting member in which: the supporting member includes a supporting plate for placing the alignment mechanism, and a leg portion; the supporting plate is provided so as to be spaced apart from a top board of the film forming chamber via the leg portion; and at least a part of the supporting plate is formed of a damping material capable of converting vibration transmitted to the supporting plate into thermal energy, thereby suppressing the vibration. | 01-12-2012 |
| 20120111269 | VIEW PORT DEVICE FOR PLASMA PROCESS AND PROCESS OBSERVATION DEVICE OF PLASMA APPARATUS - A view port device for a plasma process and a process observation device of a plasma apparatus are provided. The view port device for a plasma process comprises a first substrate portion, a second substrate portion, and a connecting portion. The first substrate portion has a first through hole. The second substrate portion has a second through hole and a second diffusion space. A cross-sectional area of the second diffusion space is larger than that of the second through hole. The connecting portion is disposed between the first substrate portion and the second substrate portion. | 05-10-2012 |
| 20120186520 | PORTABLE CONTAINMENT DEVICE - The invention provides a housing defining a chamber, within which chamber an operator can perform a procedure on an object, the housing comprising a forward edge portion which in use, is located adjacent the object; viewing means for allowing the operator to see into the chamber; at least one input port through which a tool can access the chamber; and at least one evacuation port through which any waste material produced is removed from within the chamber; such that the procedure is performed in a contained environment. | 07-26-2012 |
| 20130220222 | Gas Distribution Apparatus with Heat Exchanging Channels - The invention provides a gas distribution apparatus comprising a main frame and a cover. The main frame includes a plurality of walls having a plurality of second gas channels therein, a plurality of first plenums defined by the walls, a plurality of heat exchange channels, a plurality of first gas channels under the first plenums, a plurality of heat exchange channel covers on the heat exchange channel, and a plurality of first plenum covers on the first plenums. Each first plenum and two adjacent walls defining the first plenum form a trunk with a plurality of branches extending from the trunk, and the branches of adjacent trunks are arranged in an interlaced manner. Each heat exchange channel is between two adjacent trunks. The cover on the main frame encloses a second plenum thereon. | 08-29-2013 |
| 20130298829 | THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME - A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus inclues a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit. | 11-14-2013 |
| 20130305987 | VISUALIZATION AND ENHANCEMENT OF LATENT FINGERPRINTS USING LOW PRESSURE DYE VAPOR DEPOSITION - Methods and apparatus for the recovery, visualization and enhancement of latent fingerprints using Low Pressure Dye Vapor Deposition (LPDVD) are described. The LPDVD methods of the present invention provide for fine control over the deposition of a precursor in combination with a fluorescent dye, combination of dyes or a premixed dry solid compound of the precursor and dyestuffs, to make the latent fingerprints visible. The LPDVD process makes use of a heated carrier gas to dilute and carry the vapors into a vacuum chamber where they condense onto the exposed surfaces of the article being developed. The LPDVD process can be used to develop latent fingerprints on a wide variety of substrates, including metal, plastic, glass and thermal paper and has been shown to perform as well or better than conventional fingerprint development techniques on these surfaces. | 11-21-2013 |
| 20140014037 | ELECTRODE PLATE PRODUCTION DEVICE - An electrode plate production device includes a drying device and a plurality of surface state detection devices. The drying device is configured to dry a coating film for forming an active material layer that is coated on a surface of a substrate sheet for forming a current collector while the substrate sheet travels in a traveling direction. The coating film includes at least an active material, a bonding agent and a solvent. The surface state detection devices are configured to detect a surface state of the coating film in a noncontact manner. The surface state detection devices are arranged within the drying device in the traveling direction of the substrate sheet with respect to each other. | 01-16-2014 |
| 20140033979 | MONITOR SYSTEM FOR COATING APPARATUS - A spray monitoring device analyzes images obtained from a beam passing through a spray pattern applying a spray to a substrate, and identifies discontinuities in the image as indicative of a discontinuity in a spray pattern. The spray pattern is produced by a plurality of nozzles spaced apart across the substrate for applying a suitable coating thereto. The beam is produced by a laser, that preferably has a collimator for distributing the beam intensity. The beam is imaged by a camera that provides a constant image to a computers where the scattering of beam light by the spray pattern is processed by image processing software and optionally provided to a user interface for analysis. Discontinuities detected by the user or software indicate faulty spray nozzles and may trigger remedial action. | 02-06-2014 |
| 20140174351 | SUBSTRATE POSITION DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS USING SUBSTRATE POSITION DETECTING APPARATUS, AND DEPOSITION APPARATUS - A substrate position detecting apparatus detects a position of a substrate inside a chamber from an image of a target inside the chamber. The apparatus includes an image pickup device to pick up the image of the target inside the chamber through a window, an illumination device to irradiate light upwards, an illumination reflecting plate provided above the illumination device and including a reflecting surface to reflect the light from the illumination device towards the window, and a reflection restricting part provided on the reflecting surface to form a shadow in a predetermined region that includes the target inside the chamber. | 06-26-2014 |
| 20140251215 | EXCHANGEABLE CARTRIDGE SYSTEM FOR PRODUCTION COATER - An exchangeable cartridge system for use with a production coater for coating a material with a solution or a suspension. The exchangeable cartridge system includes an integrated drum and exhaust plenum, the drum is connectable with a motor of the production coater and the exhaust plenum is connectable with an exhaust duct of the production coater. The exchangeable cartridge system provides for simple exchange of drums having a wide range of production capacities. | 09-11-2014 |
| 20140299057 | APPLICATOR MACHINE - A pipeline field joint coating applicator machine. The machine having a first frame arranged to be mounted on a pipeline, the frame carrying an induction heating coil which encircles the field joint for heating. A second frame mounted on the pipeline and rotatable thereabout, which second frame carries a pipeline field joint coating applicator. A dust extraction hood mounted on the second frame having lateral sides with respective holes therein through which the pipeline may pass. The dust extraction hood is coupled to a vacuum source and a filter such that air may be drawn into the hood via one or both of the holes so that coating material-contaminated air is filtered. | 10-09-2014 |
| 20140345524 | MONITORING APPARATUS AND A PRINTING APPARATUS - A monitoring apparatus is provided to monitor an amount of a liquid discharged from a nozzle. The monitoring apparatus includes a discharge case. The discharge case is configured to receive liquid discharged from a nozzle. The discharge case includes a storage space for storing the liquid. A photographing unit photographs the level of the liquid stored in the storage space. | 11-27-2014 |
| 20140366803 | VAPOR PHASE GROWTH APPARATUS - A vapor phase growth apparatus of an embodiment includes: a reaction chamber; a shower plate disposed in the upper portion of the reaction chamber to supply a gas into the reaction chamber; and a support portion disposed below the shower plate inside the reaction chamber to place a substrate thereon. Then, the shower plate includes a plurality of first and second lateral gas passages disposed within different horizontal planes and first and second gas ejection holes connected to the first and second lateral gas passages. Further, the shower plate includes a center lateral gas passage that passes through a position directly above the rotation center of the support portion and third gas ejection holes connected to the center lateral gas passage. Then, the gases ejected from the first and second gas ejection holes and the center gas ejection holes are independently controllable. | 12-18-2014 |
| 20150075426 | PULSED LASER DEPOSITION SYSTEM - The present invention relates to a pulsed laser deposition system, and particularly relates to a pulsed laser deposition system capable of using several different targets. In the pulsed laser deposition system, a beam-splitting device is provided to split a UV laser beam into several UV laser beams and to introduce these UV laser beams to different targets simultaneously. Therefore, the pulsed laser deposition system can use several different targets and can be used to form doped epitaxial layer (III-V semiconductor film) and ternary or quaternary epitaxial layer (III-V semiconductor film). | 03-19-2015 |
| 20160027675 | Position And Temperature Monitoring Of ALD Platen Susceptor - Apparatus and methods of measuring and controlling the gap between a susceptor assembly and a gas distribution assembly are described. Apparatus and methods for positional control and temperature control for wafer transfer purposes are also described. | 01-28-2016 |
| 20160030970 | PASTE APPLICATION DEVICE - A paste application device includes a substrate holding part that holds a substrate, an application head that applies paste to the substrate, a test-application stage where test-application of the paste is performed, an imaging camera that images the paste applied to the test-application stage by the application head from a lateral direction, and a storage part that stores an image imaged by the imaging camera. | 02-04-2016 |
| 20160096189 | FILM-MARGIN ADJUSTER - A film-margin adjuster, including: four shielding plates, for shielding an area of the peripheral edge-portions of a film-formation substrate respectively; the four shielding plates are oppositely disposed in pairs, and at least one pair of the oppositely disposed shielding plates has a adjustable relative distance therebetween. The film-margin adjuster, by virtue of the at least one pair of the oppositely disposed shielding plates having an adjustable relative distance therebetween, can adjust the area of the peripheral edge-portions of the film-formation substrate shielded by the shielding plates, thus achieving adjustment of the size of film-margin, and improving yield of production line. | 04-07-2016 |
| 20160102393 | APPARATUS FOR THE CONTINUOUS HOT-DIP COATING OF METAL STRIP - The invention relates to an apparatus for the continuous hot-dip coating of metal strip, preferably steel strip, comprising a melting bath vessel, a snout, which opens in the melting bath vessel, for introducing a metal strip, which is heated in a continuous furnace, into the melting bath in protective gas, and a deflecting roller, which is arranged in the melting bath vessel, for deflecting the metal strip, which is entering the melting bath, in a direction pointing out of the melting bath, wherein that end of the snout which is dipped into the melting bath has at least one runoff chamber which is bounded inward by an overflow wall, downward by a floor and outward by the wall of the snout, wherein the overflow edge of the overflow wall lies at least in sections below the melting bath surface, and wherein a suction line with a pump is connected to the runoff chamber, characterized in that the runoff chamber is provided with at least one through opening through which liquid molten metal can flow out of the melting bath into the runoff chamber, wherein the at least one through opening is arranged lower than the overflow edge. | 04-14-2016 |
| 20160128848 | METHOD AND DEVICE FOR LOADING MEDICAL APPLIANCE WITH MEDICAMENTS AND/OR POLYMERS - A method and a device for loading a medical appliance with a medicament and/or polymer includes capturing images of a plurality of grooves or holes of the medical appliance using an image capturing device; performing digital image processing on the image of each of the grooves or holes to obtain a pattern of each of the grooves or holes; calculating a central position of the pattern of each of the grooves or holes, and determining a loading position of each of the grooves or holes based on the central position; and adjusting a relative position between a loading device and the medical appliance to align an outlet of the loading device with the loading position of the medical appliance, and loading each of the grooves or holes with the medicament and/or polymer. The method and device can load the medical appliance with the medicament and/or polymer fast and efficiently. | 05-12-2016 |
| 20160144392 | APPARATUS FOR ORGANIC LAYER DEPOSITION - An apparatus for organic layer deposition is provided that can improve precision of a gap between a substrate and a mask by correcting a position of a mask stage having a mask mounted thereon based on a substrate shape, and that can reduce a measurement error of a mask surface by pre-measuring a position of a mask and determining an initial position of the mask based on the measured position. The apparatus includes a shape measuring sensor, a substrate carrier, a deposition material discharge source, a mask including a plurality of pattern slits, a camera measuring an alignment error between the substrate and the mask, a distance measuring sensor measuring an alignment error between the substrate and the mask, and a mask stage controlling a position of the mask. | 05-26-2016 |
