| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 073755000 | Pirani type | 6 |
| 20090056464 | PIRANI PRESSURE GAUGE - A Pirani pressure gauge comprises a heated, coiled sensing element formed from an alloy comprising platinum and iridium, for example, 90/10 Pt/Ir. This enables the gauge to be deployed in a corrosive environment and reliably measure pressures as low as 10 | 03-05-2009 |
| 20090199649 | PIRANI VACUUM GAUGE - A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore. | 08-13-2009 |
| 20100132475 | PIRANI VACUUM GAUGE - A pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore. | 06-03-2010 |
| 20100154554 | MICRO-THERMISTOR GAS PRESSURE SENSOR - An apparatus and method precisely measure gas pressure over a large dynamic range and with good immunity to temperature fluctuations, encompassing applications such as gas sensing, bolometer imaging and industrial process monitoring. The micro-thermistor gas pressure sensor assembly includes a suspended platform micro-thermistor sensor device exposed to the gas pressure of a given atmospheric environment, an electrical readout circuit connected to the suspended platform micro-thermistor sensor device, wherein the suspended platform micro-thermistor sensor device acts as a variable electrical resistance in the readout electrical circuit, a binary-wave voltage source connected to the suspended platform micro-thermistor sensor device, and an ohmmeter. | 06-24-2010 |
| 20150377735 | PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME - Disclosed is a method for manufacturing a sensor module that generates heat through an electric resistor adapted to be exposed to a gas, and outputs a temperature change caused in the electric resistor according to a pressure of the gas, as a resistance change of the electric resistor. The method includes: forming an insulation layer on a substrate in which the insulation layer is an oxide film or a nitride film; and forming a conductor layer on the insulation layer under a temperature condition of 300° C. to 600° C., in which the conductor layer serves as the electric resistor. | 12-31-2015 |
| 20160116360 | Portable Graphing Vacuum Pressure Gauge - A portable vacuum pressure graphing gauge enabling users of vacuum systems the ability to see trends of vacuum systems through real time plotting of a pressure vs. time curve on a hand held instrument, enabling them to understand what is going on in their system, or the like. Additional features may include several graphical modes designed to even more easily interpret vacuum data, and packaging that is rugged and versatile including a magnet, kickstand, wireless connectivity, visual and audible set points, automatic sensor fault detection, and several vacuum pressure measurement units to choose from, or the like. | 04-28-2016 |
