Entries |
Document | Title | Date |
20080216581 | GAS TURBINE PRESSURE SENSING SYSTEMS AND METHODS OF ASSEMBLY - Methods and apparatus for sensing pressure in a hostile environment are described. In one example embodiment, a microwave radar based sensor is provided. The sensor is coupled to a signal conditioning unit. The signal conditioning unit includes at least one of a processor configured to determine a sensor value and a memory having pre-stored values therein, the pre-stored values representing possible sensor values. Each pre-stored value is assigned a respective pressure. The method includes operating the signal conditioning unit to sample a signal generated by the sensor, operating the signal conditioning unit to correlate a characteristic of the sampled signal to a pre-stored value having an assigned pressure, and operating the signal conditioning unit to generate a signal representative of the assigned pressure of the pre-stored value that is correlated to the sampled signal. | 09-11-2008 |
20080223139 | Combustion pressure sensor - A combustion pressure sensor for detecting a pressure in the combustion chamber of an internal combustion engine includes a seal member sealing a clearance between a housing and a pressure transmitting member slidably inserted through an axial hole of the housing. The seal member is fixed to the housing at a position forward of a load detecting section disposed between the housing and the pressure transmitting member. The seal member is not fixed to the pressure transmitting member. | 09-18-2008 |
20080236290 | SENSOR AND MANUFACTURING METHOD OF SENSOR | 10-02-2008 |
20080236291 | PRESSURE SENSOR AND SUBSTRATE PROCESSING APPARATUS - A pressure sensor comprises a thin disk-shaped diaphragm, a laser displacement meter for detecting an amount of deformation of the diaphragm, and an operation part connected to the laser displacement meter. In the pressure sensor, an amount of deformation of the diaphragm due to pressure of fluid flowing into the pressure sensor is detected by the laser displacement meter, and pressure of the fluid is obtained on the basis of the amount of deformation and conversion information stored in the operation part in advance. The base part of the diaphragm of the pressure sensor is made of graphite (or silicon substrate), and a thin film of silicon carbide which is in contact with fluid is formed on a surface of the base part. This improves chemical resistance to the pressure sensor and extends the lifetime of the pressure sensor while preventing metal elution. | 10-02-2008 |
20080257053 | Pressure sensor and attachment structure of pressure sensor - A pressure sensor comprises: a case; a detection unit attached to one end of the case; a housing member coupled with the one end of the case, the housing member including a first connection member, a second connection member, a passage and a pressure introduction hole; and a diaphragm fixed to the housing member so as to cover the detection unit, wherein the passage connects the first connection member with the second connection member, the pressure introduction hole introduces a pressure of the cooling medium to the diaphragm, and the detection unit is capable of detecting the pressure of the cooling medium. | 10-23-2008 |
20080276712 | Pressure transducer employing a micro-filter and emulating an infinite tube pressure transducer - A pressure transducer for measuring pressures in high temperature environments employs a tube which is terminated at one end by an acoustic micro-filter. The acoustic filter or micro-filter has a plurality of apertures extending from one end to the other end, each aperture is of a small diameter as compared to the diameter of the transducer and the damper operates to absorb acoustic waves impinging on it with limited or no reflection. Mounted to the tube is a pressure transducer with a diaphragm flush with the inner wall of the tube. The tube is mounted in an aperture in a casing of a gas turbine operating at a high temperature. The hot gases propagate through the tube where the pressure of the gases are measured by the transducer coupled to the tube and where the acoustic filter operates to absorb acoustic waves impinging on it with little or no reflection, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation. | 11-13-2008 |
20080307890 | Vacuum Measuring Cell with Membrane - A vacuum measuring cell with a membrane between two planar housing parts has a first housing part forming a reference vacuum volume and the second housing part forming a measuring vacuum volume with a connection for the medium to be measured and a mechanism for measuring the membrane deflection. The membrane surface exposed to the medium to be measured is a structured surface. | 12-18-2008 |
20090007679 | WIRELESS PRESSURE SENSOR AND METHOD FOR FABRICATING WIRELESS PRESSURE SENSOR FOR INTEGRATION WITH AN IMPLANTABLE DEVICE - A method for fabricating a wireless pressure sensor includes providing a first substrate. A portion of the first substrate is controllably displaced to form a cavity. A conducting material is patterned on the first substrate to form a first capacitor plate and a first inductor. A second substrate is provided. A conducting material is patterned on the second substrate to form a second capacitor plate. The second substrate is attached to the first substrate to seal the cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition. A hermetically sealed capacitive pressure sensor may reside in the cavity between the first substrate and second substrate. | 01-08-2009 |
20090090188 | Pressure measuring manometer with alignment spur - A measuring device for detecting and indicating changes in fluid pressure of a test environment relative to ambient fluid conditions, wherein the measuring device includes a linear gear rack having an alignment spur, an indicator needle associated pinion gear, calibrated indicia for visual measure of a pressure change event, and a deflectable diaphragm element. The alignment spur acts upon the pinion gear by maintaining close relationship of the linear gear rack and the needle associated pinion gear and counteracts torque and off-center forces created by the linear rack gear upon deflection of the deflectable diaphragm, thus providing improved resolution of small pressure changes and increased accuracy of measurement as the measuring device operates through a cycling period. | 04-09-2009 |
20090107245 | Pressure gauge with hydraulic pressure transmission - A pressure gauge, or transducer, for high-temperature applications, comprising a sensor module with a sensor body having a measuring cell chamber containing a pressure measuring cell. The pressure measuring cell can be subjected to the action of a pressure via a first hydraulic path filled with a transmission liquid. The pressure gauge also comprises a transmission module for transmitting a pressure to the first hydraulic path. The transmission module has a second hydraulic path, which is filled with a transmission liquid and extends from a process diaphragm, through a transmission body and to a transmission diaphragm. The transmission diaphragm is attached to the transmission body in a pressure-tight manner, and the sensor body is joined to the transmission body in a pressure-tight manner, whereby the transmission diaphragm communicates with the first hydraulic path so that the pressure of the second hydraulic path can be transmitted via the transmission diaphragm to the first hydraulic path. | 04-30-2009 |
20090120194 | SILICON PRESSURE SENSOR - A diaphragm for a pressure sensor includes a central portion having a primary thickness and a surrounding secondary portion having a secondary thickness greater than the primary thickness. The pressure sensor includes the diaphragm, a fluid conduit capped by the diaphragm, and a piezoelectric bridge for each of the primary and secondary portions to generate a signal indicative of the displacement of the portions; and a method of producing the sensor. | 05-14-2009 |
20090151463 | Non-contact pressure switch assembly - A non-contact pressure switch assembly for sensing pressure in, e.g., a vehicle. A piston with integrated magnet in a sensor body is moved under fluid pressure to change a magnetic field in which a Hall sensor is disposed inside the sensor body. The field changes polarity at the Hall sensor at a predetermined piston position. | 06-18-2009 |
20090193903 | METHOD FOR SENSOR FABRICATION AND RELATED SENSOR AND SYSTEM - A method includes forming multiple trenches in a first wafer, forming a sensor structure on a first surface of a second wafer, and bonding the first wafer and the second wafer. The method also includes etching a second surface of the second wafer to form a sensor diaphragm in the second wafer. The method further includes removing a portion of the first wafer by cutting the first wafer in multiple areas of the first wafer associated with the trenches. A sensor includes a substrate and a surface acoustic wave (SAW) resonator on a first surface of the substrate. The sensor also includes a bonding pad electrically coupled to the SAW resonator and a notch formed in a second surface of the substrate. The sensor further includes a cover separated from the first surface of the substrate by a spacer. The SAW resonator is located between the cover and the substrate. | 08-06-2009 |
20090205431 | REINFORCED ELASTOMERIC DIAPHRAGM - A diaphragm is provided that includes a plurality of zonal portions that define reinforced and non-reinforced areas of the diaphragm. A first zonal portion extends from a marginal edge portion toward a central portion and is formed of a fabric material. A second zonal portion extends from the first zonal portion toward the central portion and is formed of an elastomer. A third zonal portion defines the central portion and is formed of a fabric material. The combination of reinforced and non-reinforced portions provides for a decrease in the radial tension (spring rate) of the diaphragm and helps prevent undesired changes to the flow control valve flow setpoint. | 08-20-2009 |
20090241677 | Pressure management arrangement - A pressure measurement arrangement for measuring a line pressure of a product is described wherein product hold-up inside of disposable parts is minimized, comprising: a reusable pressure sensor comprising a measurement diaphragm, a fitting, the fitting comprising: a tubular opening extending through said fitting, for the reception of a disposable elastomeric tube, an aperture extending through an outside wall of the fitting into the tubular opening; and mounting structure, for mounting the pressure sensor on the aperture, such that the measurement diaphragm is exposed to an inside of the tubular opening; wherein the disposable tube is inserted in the tubular opening of the fitting during measurement; and an outside wall of the disposable tube comprises a thin flexible portion, which conforms to the measurement diaphragm when the disposable tube is pressurized by the line pressure. | 10-01-2009 |
20090266170 | PRESSURE SENSOR, MANUFACTURING METHOD THEREOF, AND ELECTRONIC COMPONENT PROVIDED THEREWITH - A pressure sensor which includes: a semiconductor substrate; a first cavity portion that spreads out approximately parallel with one surface of the semiconductor substrate in the interior of a central region thereof; a diaphragm portion of a thin plate shape that is positioned on one side of the first cavity portion; a pressure sensitive element that is disposed on the diaphragm; and a bump that is disposed in an outer edge region of the one surface of the semiconductor substrate that excludes the diaphragm portion and is electrically connected with the pressure sensitive element, wherein a second cavity portion is disposed in at least one portion of the outer edge region in the interior of the semiconductor substrate and is closed with respect to the one surface of the semiconductor substrate. | 10-29-2009 |
20090266171 | PRESSURE SENSOR MODULE AND ELECTRONIC COMPONENT - A pressure sensor module includes a pressure sensor, a bump, and a laminated substrate. The pressure sensor includes a semiconductor substrate; a cavity; a pressure-sensitive element; and a conductive section. The cavity is disposed inside the semiconductor substrate such that a thin-plate region of the semiconductor substrate is provided and the thin-plate region being defined as a diaphragm. The pressure-sensitive element is arranged at the diaphragm. The conductive section is electrically connected to the pressure-sensitive element and disposed on the face of the semiconductor substrate at a region excluding the diaphragm. The bump is electrically connected to the conductive section. The laminated substrate includes a wiring base material electrically connected to the pressure sensor via the bump. The wiring base material is disposed inside the laminated substrate. A face of the wiring base material is electrically connected to the bump and has an exposed area from the laminated substrate. | 10-29-2009 |
20090301209 | Hydraulic pressure intermediary - A hydraulic pressure intermediary includes: a platform, which has a bowl-shaped surface having an annular, platform-surface edge region, a platform-surface central region depressed relative to the platform-surface edge region and surrounded by the platform-surface edge region, and an annular platform-surface transition region, which borders, on its inner side, the platform-surface central region and, on its outer side, the platform-surface edge region; a bowl-shaped, separating membrane having a flat, annular, separating-membrane edge region, a separating-membrane central region depressed relative to the separating-membrane edge region and an annular separating-membrane transition region, which borders, on its inner side, the separating-membrane central region and, on its outer side, the separating-membrane edge region. The separating membrane is connected with the platform-surface edge region within the separating-membrane edge region along a surrounding joint. Further, the separating-membrane transition region includes an annular moat having a moat outer side, a moat inner side, and a moat transition zone, wherein the moat outer side has a first annular inclined surface, which borders on the separating-membrane edge region, the moat inner side includes a second annular inclined surface, which borders on the separating-membrane central region, and the moat transition zone extends between the first and the second inclined surfaces. | 12-10-2009 |
20090301210 | PRESSURE MEASURING TRANSDUCER - A dry, front-flush, pressure measuring transducer, which enables reliable measurements over a large temperature range. The transducer includes: a process connection made of a stainless steel and serving for securing the pressure measuring transducer to a measuring site; and a pressure sensor module, including a holder of stainless steel, into which a metal separating diaphragm is set front-flushly by means of a purely metal connection. A pressure to be measured acts on the separating diaphragm during measurement operation. The holder is set front-flushly by means of a purely metal connection into the process connection. The pressure sensor module further includes a titanium disk which is carried by the holder. A sapphire carrier with integrated silicon sensors is secured to the titanium disk. The titanium disk forms the separating diaphragm or it is physically connected with the separating diaphragm in such a manner that a deflection of the separating diaphragm effects a corresponding deflection of the titanium disk. | 12-10-2009 |
20090308165 | Pressure Sensor Unit - Pressure sensor unit, in particular for a vehicle brake system, including a housing ( | 12-17-2009 |
20090308166 | Side collision detecting apparatus for vehicle - A side collision detecting apparatus includes a pressure sensor disposed in a side door of a vehicle and including a diaphragm for detecting a pressure in the side door. The diaphragm has a pressure receiving surface configured to be distorted in accordance with a change in the pressure. The pressure sensor is arranged so as to satisfy one of a first condition where an angle between a line along which the pressure receiving surface extends and a horizontal line extending in a front-rear direction of the vehicle is from 60 degrees to 90 degrees and a second condition where the angle is less than 60 degrees or greater than 90 degrees and the pressure receiving surface is not vertical. | 12-17-2009 |
20100018318 | PRESSURE SENSOR - A pressure sensor includes: a housing; a pressure receiver which seals an opening of the housing and transmits pressure from outside the housing to the inside of the housing; and a pressure sensing element having a pressure sensing portion and a pair of base portions which are respectively coupled to both ends of the pressure sensing portion. In the pressure sensor, a force detecting direction is set to be a detection axis, a line connecting the pair of base portions and a displacement direction of the pressure receiver are arranged in parallel, one of the base portions is coupled to a central region, which is displaced by the pressure, of the pressure receiver, and the other of the base portions is coupled to a marginal region, which is at a fixing side, of the pressure receiver through a connecting member. | 01-28-2010 |
20100037697 | PRESSURE SENSOR - An apparatus for sensing pressure is provided comprising a housing, electronics, a pressure sensor and a secondary seal. The housing comprises an interior bore and a first end, with the interior bore forming an opening at the first end. The electronics may be disposed in the interior bore. The pressure sensor is mounted at the first end of the interior bore. The pressure sensor may be operatively connected to send signals to the electronics in response to external fluid pressure. The pressure sensor may, at least in part, form a primary seal at the first end of the interior bore. The secondary seal may be disposed in the interior bore in between the pressure sensor and the electronics. The secondary seal may be configured to act as a backup seal to the primary seal. The secondary seal provides an added degree of safety from high pressure pipeline contents. The secondary seal also ensures that the important interior electrical components of the apparatus are not damaged upon failure of any component located at the first end. If the pressure sensor or primary seal is damaged, for example, a new pressure sensor or primary seal may be installed without having to replace the entire apparatus. The secondary seal also prevents fluid from a high pressure pipeline that has compromised the primary seal from being ejected from the pipeline. The secondary seal also prevents pipeline media from migrating through the electrical cable to a non-hazardous location. | 02-18-2010 |
20100037698 | PRESSURE-MEASURING DEVICE - A pressure-measuring device is situated in a chamber of an internal combustion engine. The pressure-measuring device has a housing, a force-transmitting element that protrudes partly from the housing at a chamber-side opening of the housing, and a pressure sensor that is situated in an interior space of the housing. The pressure sensor stands in effective connection to the force-transmitting element. In addition, a diaphragm is provided that seals the interior space of the housing, in which the pressure sensor is situated, against the chamber-side opening. The diaphragm, which is preferably fashioned as a metal diaphragm, has a force-transmitting segment that is oriented in an axial direction of the force-transmitting element. Moreover, the pressure sensor stands in effective connection with the force-transmitting element via the force-transmitting segment of the diaphragm. In this way, there takes place at least a partial compensation of thermally caused changes in length of the diaphragm, caused for example by hot combustion gases, and resulting in periodic impairments of the pressure measurement made by the pressure sensor. | 02-18-2010 |
20100058873 | SENSOR ASSEMBLAGE AND METHOD FOR MANUFACTURING A SENSOR ASSEMBLAGE - A sensor assemblage, in particular a high-pressure sensor assemblage, includes a substrate element and a connector element, the substrate element comprising a sensor structure having a pressure-sensitive diaphragm and a cavity disposed in the region of the diaphragm, the substrate element being connected to the connector element in such a way that the cavity is connected to a hollow space of the connector element, the substrate element moreover including at least one further sensor structure having a pressure-sensitive further diaphragm and a further cavity disposed in the region of the further diaphragm, the further cavity being connected to a further hollow space of the at least one connector element or of a further connector element. | 03-11-2010 |
20100064816 | DIAPHRAGM STRUCTURE AND METHOD OF MANUFACTURING A DIAPHRAGM STRUCTURE - In a particular embodiment, a process transmitter includes a corrosion resistive housing including a flange portion, where the corrosion resistive housing is formed from a first material. The process transmitter also includes an outer ring formed from a second material. The outer ring has an inner diameter and is brazed to the flange portion. The process transmitter further includes a deformable diaphragm formed from a third material, the deformable diaphragm is welded to the outer ring at a weld seam between the diaphragm and the outer ring adjacent to the inner diameter to form a fluid seal. | 03-18-2010 |
20100077862 | Workpiece Composite and Use of the Workpiece Composite - A workpiece composite includes a preform part and a gel accommodated in a recess in the preform, the recess being enclosed by at least one edge which serves as a creep barrier to prevent the gel from spreading. The at least one edge of the recess defines a termination point of at least one surface which is provided with a coating made of an oleophobic material in an area adjacent to the at least one edge. | 04-01-2010 |
20100224002 | Pressure Gage with Magnetically Coupled Diaphragm - A gage having a motion detection mechanism magnetically attached to a pressure sensing diaphragm. The motion detection mechanism is magnetically coupled to a pointer rotation mechanism configured to indicate the position of the diaphragm and the corresponding pressure sensed by the diaphragm. | 09-09-2010 |
20100229651 | COINTEGRATED MEMS SENSOR AND METHOD - Described herein is a method for integrating MEMS with submicron semiconductor electrical circuits such as CMOS to provide more complex signal processing, on-chip calibration and integration with RF technologies. A MEMS sensor is provided having an upper layer, an insulating layer into which a cavity has been formed and a handle layer. The upper layer acts as both the substrate of the semiconductor electrical circuit and as the active MEMS element. The remainder of the circuitry is fabricated either in or on the upper layer. In a preferred method of the present invention a first wafer assembly and a second wafer assembly are fabricated such that a MEMS sensor and the substrate of at least one semiconductive electrical circuit is formed. | 09-16-2010 |
20100275696 | Torque insensitive header assembly - There is disclosed a high pressure sensing header which is relatively insensitive to mounting torque. Essentially the header consists of an outer torque isolating shell which has a “C” shaped cross section with the cylindrical shell surrounding an inner “H” section header. The inner “H” section header has a thick diaphragm and is surrounded by the torque isolating shell which is secured to the “H” section header at a peripheral flange of the “H” section header. In this manner when the header is installed, the installation force is absorbed by the outer shell and there is no installation force or torque exhibited by the inner “H” section which will respond only to stress due to pressure. The torque isolating shell also contains a top surface which has a counterbore which can accommodate a crush ring, and when the unit is installed, the crush ring is forced or crushed against an installation wall to enable the inner header to receive pressure without experiencing any significant installation force. | 11-04-2010 |
20100281990 | Low-Dead Volume Microfluidic Circuit and Methods - A method is described for reducing a dead volume of a microfluidic circuit that includes, in one embodiment, a reservoir, an outlet, and a microfluidic flowpath fluidly connecting the reservoir and the outlet. The method includes providing a microfluidic flow component between the reservoir and the outlet for performing a function and in fluidic communication with the microfluidic flowpath, wherein the microfluidic flow component includes a total volume including a working volume and a dead volume. The working volume is a volume necessary for the microfluidic flow component to perform the function and the dead volume is a volume unnecessary for the microfluidic flow component to perform the function. The method includes configuring at least one of the reservoir, the microfluidic flowpath, and the microfluidic flow component to reduce the dead volume, such that the working volume of the component is substantially the same as the total volume. | 11-11-2010 |
20100319459 | PRESSURE SENSOR WITH A DIAPHRAGM AND DEPTH GAUGE COMPRISING THE SAME - The invention concerns a pressure sensor ( | 12-23-2010 |
20100319460 | SENSOR AND METHOD FOR DETERMINING THE PRESSURE IN A FLUID - A method and an apparatus for determining a pressure (P | 12-23-2010 |
20110113889 | PRESSURE TRANSFER MEANS AND PRESSURE MEASURING DEVICE WITH SUCH PRESSURE TRANSFER MEANS - A pressure transfer device comprises a pressure transfer device body and an isolating diaphragm, wherein, between the surface of the body of the pressure transmitting device and the isolating diaphragm, a pressure chamber is formed, whose volume is dependent on the position of the isolating diaphragm. The isolating diaphragm has a material thickness and a deflectable working region with an area A, wherein the isolating diaphragm has a reference position, in which the pressure chamber contains a reference volume V | 05-19-2011 |
20110132097 | METHOD FOR MANUFACTURING AN ELASTIC BODY OF Al2O3 CERAMIC, MEASURING MEMBRANE FOR A PRESSURE SENSOR AND PRESSURE SENSOR WITH SUCH A MEMBRANE - A method for manufacturing an elastic deformation body made of an Al | 06-09-2011 |
20110265577 | PRESSURE SENSOR - A pressure sensor is provided which is suitable as an airbag sensor of a vehicle. The pressure sensor includes a pressure chamber having a small opening and a large opening, a pressure sensor element having a pressure receiving surface, and a diaphragm. The diaphragm is designed to seal the large opening. The pressure sensor element is designed to seal the small opening at least using the pressure receiving surface. | 11-03-2011 |
20120036936 | PRESSURE SENSOR MODULE AND ELECTRONIC COMPONENT - A pressure sensor module includes a pressure sensor, a bump, and a laminated substrate. The pressure sensor includes a semiconductor substrate; a cavity; a pressure-sensitive element; and a conductive section. The cavity is disposed inside the semiconductor substrate such that a thin-plate region of the semiconductor substrate is provided and the thin-plate region being defined as a diaphragm. The pressure-sensitive element is arranged at the diaphragm. The conductive section is electrically connected to the pressure-sensitive element and disposed on the face of the semiconductor substrate at a region excluding the diaphragm. The bump is electrically connected to the conductive section. The laminated substrate includes a wiring base material electrically connected to the pressure sensor via the bump. The wiring base material is disposed inside the laminated substrate. A face of the wiring base material is electrically connected to the bump and has an exposed area from the laminated substrate. | 02-16-2012 |
20120067131 | HIGH PRESSURE SENSOR - A construction concept for high-pressure sensors is provided, enabling simple and economical manufacture of reliable high-pressure sensors even for pressure ranges above 2200 bar. A high-pressure sensor of this kind encompasses a sensor element for pressure sensing and a connector piece for coupling the sensor element to a measured system, a diaphragm being embodied over a blind opening in the base element of the sensor element, a pressure conduit being embodied in the base element of the connector piece, and the sensor element being mounted on the connector piece in such a way that the diaphragm can be impinged upon, through the pressure conduit that opens into the blind opening, by a measured pressure. The blind opening in the base element of the sensor element is embodied, at least in one portion, in a manner tapering conically toward the diaphragm, and that end of the pressure conduit which faces toward the sensor element is tubular in shape. This tubular end of the pressure conduit is pressed into the blind opening so that the tube wall is pressed, at least in a circumferential region, sealingly against the side wall of the blind opening. | 03-22-2012 |
20120067132 | PRESSURE SENSOR ASSEMBLY - The present disclosure relates to pressure sensors. In one illustrative embodiment, the pressure sensor may include a pressure sensor assembly having pressure ports on opposite sides of the pressure sensor assembly. The pressure sensor may include a protective housing including a first housing member and a second housing member defining a cavity for securely housing the pressure sensor assembly. The protective housing may include a first port coupled to one of the pressure ports of the pressure sensor assembly and a second port coupled to the other pressure port of the pressure sensor assembly. In some cases, the protective housing may include one or more aligning features, one or more positioning features, and a boss, which can include two or more bumps, on each side of the cavity around the pressure ports. | 03-22-2012 |
20120073379 | Sensor system for detecting high pressures - A sensor system for detecting high pressures includes a micromechanical sensor element which is situated on a support and is mounted via this support. A diaphragm is formed in the upper surface of the sensor element, the diaphragm spanning a cavern having a rear opening. The support has a passage opening and is connected to the rear side of the sensor element in such a way that the passage opening opens into the rear opening of the cavern. An annular recess is formed in the rear side of the sensor element, the annular recess being situated above the edge area of the passage opening, so that the joining surface between the sensor element and the support does not extend to the edge of the passage opening. | 03-29-2012 |
20120090398 | MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) STRUCTURE - A MEMS structure includes a substrate, a structural dielectric layer, and a diaphragm. A structural dielectric layer is disposed over the substrate. The diaphragm is held by the structural dielectric layer at a peripheral end. The diaphragm includes multiple trench/ridge rings at a peripheral region surrounding a central region of the diaphragm. A corrugated structure is located at the central region of the diaphragm, surrounded by the trench/indent rings. | 04-19-2012 |
20120125112 | PRESSURE TRANSMITTER - A pressure transmitter includes a sensor assembly having a hollow body housing a pressure sensor. The pressure transmitter also includes a support body which is made of a first material, and an interface body which is connected to the support body and which is made of a second material different from the first material. A first isolation diaphragm is fixed onto the interface body and is made of the same material of the interface body. The first isolation diaphragm is in fluid communication with the pressure sensor and is configured for interfacing with a process fluid. | 05-24-2012 |
20120198939 | ISOLATION ELEMENTS INCLUDING ONE OR MORE DIAPHRAGMS, SENSORS INCLUDING ISOLATION ELEMENTS, AND RELATED METHODS - Isolation elements comprise a housing comprising a longitudinal bore formed therein and at least one recess formed in at least one longitudinally extending side of the housing. The at least one recess is in communication with the longitudinal bore. At least one diaphragm is attached proximate a periphery thereof to the housing and seals the at least one recess at the at least one longitudinally extending side of the housing. Sensor assemblies may include an isolation element including a housing and a diaphragm coupled thereto. Methods of forming an isolation element for use with a sensor comprise forming a longitudinal bore in a housing; forming at least one recess in at least one longitudinally extending side of the housing; coupling at least one diaphragm to the housing; and positioning the at least one diaphragm such that a primary direction of displacement of the at least one diaphragm extends into the at least one recess. | 08-09-2012 |
20120216621 | PHYSICAL QUANTITY DETECTOR AND METHOD OF MANUFACTURING THE SAME - A supporting frame section of a diaphragm layer and a fixing section of a pressure sensor are joined using a first joining material. A pair of bases of a pressure sensitive element layer and a pair of supporting sections are joined using a second joining material having a melting point higher than the melting point of the first joining material. | 08-30-2012 |
20120222488 | ROLLING DIAPHRAGM PRESSURE SENSOR - A system for measuring and indicating pressure that uses as its pressure sensing element an outer resilient tube, an inner resilient tube, and a rolling diaphragm connecting the inner and outer tubes, and held inside a protective enshrouding structure where pressure applied to the annulus between the tubes causes the diaphragm to deform and roll to axial extend the outer tube by an amount proportional to the applied pressure. The structure has features that enable visual correlation of the partially rolled tube's unrolled state with the applied pressure. The system can be incorporated into a syringe to create a pressure measuring syringe for inflating endotracheal cuffs while providing a reading of the cuff pressure | 09-06-2012 |
20120266682 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity. | 10-25-2012 |
20120279309 | CLOG RESISTANT WING UNION PRESSURE SENSOR - a clog resistant wing union pressure sensor is provided that includes a transmitter housing and a flange section. The flange section is coupled to the transmitter housing and has a pressure port formed therein that includes an open first end, a closed second end, and an inner surface that defines a bore between the open first end and the closed second end. The closed second end is defined by a pressure sensitive diaphragm and has a diameter. The pressure port has a depth defined between the open first end and the closed second end, the bore is tapered between the open first end and the closed second end, and is further defined by a rounded transition between the inner surface and the closed second end, and the diameter of the closed second end is greater than twice the depth of the pressure port. | 11-08-2012 |
20120325007 | Pressure Gage with Removable Seal Member and Diaphragm - A gage having a motion detection mechanism magnetically attached to a pressure sensing diaphragm. The motion detection mechanism is magnetically coupled to a pointer rotation mechanism configured to indicate the position of the diaphragm and the corresponding pressure sensed by the diaphragm. | 12-27-2012 |
20120325008 | Pressure Gage with Flexible Beam and Clamping Member - A gage having a motion detection mechanism magnetically attached to a pressure sensing diaphragm. The motion detection mechanism is magnetically coupled to a pointer rotation mechanism configured to indicate the position of the diaphragm and the corresponding pressure sensed by the diaphragm. | 12-27-2012 |
20130118263 | PHYSICAL QUANTITY DETECTOR - A physical quantity detector includes a diaphragm including a displacement part that is displaced under external pressure, a ring-shaped fixing part that holds an outer circumferential part of the diaphragm, a holding member having a projection part that projects from an inner circumference of the fixing part toward a center at one surface side of the diaphragm, a support fixed to the projection part, and a pressure-sensitive device having a first base part fixed to the displacement part, a second base part fixed to the support, and a pressure-sensitive part provided between the base parts. | 05-16-2013 |
20130186205 | LIQUID PRESSURE SENSING STRUCTURE - A liquid pressure sensing structure includes an air pressure sensing member to sense liquid, such as oil or water. A transferring unit is fitted on a sensing end of the air pressure sensing member. The transferring unit includes a diaphragm therein. The diaphragm divides the inside of the transferring unit into a first space and a second space. The first space communicates with the sensing end of the pressure sensing member and is in a seal state. An oil or water pressure source communicates with the second space of the transferring unit. The pressure is able to influence the position of the diaphragm to change the pressure of the first space so that the air pressure sensing member will get the pressure value. The present invention uses the cost-effective air pressure sensing member to sense the pressure of oil or water so as to control and lower the cost. | 07-25-2013 |
20130192377 | SENSOR OVER-MOLD SHAPE - An implantable sensor module includes a housing having an inner shell and an outer layer formed to extend over and enclose the inner shell to form an outer wall of the housing, the inner shell having a thickness extending between an inner wall of the inner shell and an outer wall of the inner shell, the outer layer having an inner side engaged against the outer wall of the inner shell and having a thickness extending between the inner side and the outer wall of the housing, wherein the inner shell and the outer layer form a substantially flat portion. A flexible diaphragm is formed within the inner shell and extends between a first edge and a second edge, and a shoulder extends adjacent to the first edge to extend the outer layer laterally away from a central medial line extending between the first and second edges of the diaphragm. | 08-01-2013 |
20130205907 | PRESSURE DETECTOR - The present invention relates to a pressure detector. In a body that constitutes part of the pressure detector, a through hole is formed, which is directed upwardly from a substantially central portion of a flow passage through which a pressure fluid flows. The through hole communicates with a sensor chamber in which a pressure sensor is disposed, and a rod-shaped member is disposed displaceably in the through hole. In addition, an end of the rod-shaped member, which is exposed to the flow passage, is pressed by the pressure fluid and displaced upwardly thereby, and pressure is detected as a result of the pressure sensor being pressed by a head of the rod-shaped member. | 08-15-2013 |
20130276544 | STRESS ISOLATED MEMS STRUCTURES AND METHODS OF MANUFACTURE - A MEMS pressure sensor may be manufactured to include a backing substrate having a diaphragm backing portion and a pedestal portion. A diaphragm substrate may be manufactured to include a pedestal portion and a diaphragm that is mounted to the diaphragm backing portion of the backing substrate to form a stress isolated MEMS die. The pedestal portions of the backing and diaphragm substrates form a pedestal of the stress isolated MEMS die. The pedestal is configured for isolating the diaphragm from stresses including packaging and mounting stress imparted on the stress isolated MEMS die. | 10-24-2013 |
20130312531 | PRESSURE TRANSMITTER WITH HYDROGEN GETTER - A process variable transmitter for measuring a pressure of a process fluid includes a sensor module, a pressure inlet formed in the sensor module, an isolation diaphragm positioned in the pressure inlet, a pressure sensor and an isolation tube containing a fill fluid to convey a process fluid related pressure from the isolation diaphragm to the pressure sensor. A hydrogen getter material is positioned in contact with the fill fluid between the isolation diaphragm and the pressure sensor to remove hydrogen from the fill fluid. | 11-28-2013 |
20130333479 | FLANGE FOR PRESSURE MEASUREMENT CELLS OR PRESSURE TRANSFER MEANS AND METHOD FOR MANUFACTURE OF SUCH FLANGES - A flange for a corrosion resistant and nevertheless low cost flange for pressure measurement cells, or pressure transfer means, is composed essentially of a metal foundation of a standard material and is protected on the side facing a process medium by a there applied layer of a highly alloyed, special material. | 12-19-2013 |
20140076057 | Pressure Sensor - Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a MEMS die for pressure measurement. The MEMS die is attached to a glass pedestal member. The pedestal member is mechanically held in place via a mounting frame that attachable to a pressure port of a fluid-containing enclosure. Techniques herein provide a strong connection of a MEMS die to a pressure sensor while decoupling thermal expansion stress from the MEMS die. With such decoupling techniques, pressure sensing reliability and accuracy can be improved. With thermal expansion stress decoupled from the MEMS die, sensor sealing materials can be selected for their robust chemical properties instead of structural properties. Such techniques provide an accurate, durable, and cost-effective pressure sensor. | 03-20-2014 |
20140102206 | PRESSURE MEASUREMENT DEVICE AND LIQUID TREATMENT DEVICE - A pressure measurement device adapted to measure a pressure of a liquid includes a flow channel having a flow channel resistance, a liquid containing chamber having a predetermined capacity and communicating with the flow channel, a pressure changing section adapted to change a pressure of the liquid containing chamber, a measurement section adapted to measure a period from when a pressure wave of the liquid in the liquid containing chamber becomes a predetermined value to next time the pressure wave becomes the predetermined value, the pressure wave occurring when the pressure changing section is in operation in a state in which the liquid is contained in the flow channel and the liquid containing chamber, and an acquisition section adapted to obtain the pressure based on the period measured by the measurement section. | 04-17-2014 |
20140137652 | PRESSURE SENSOR CHIP - A pressure sensor chip includes a sensor diaphragm and first and second retaining members. In a peripheral edge portion of the first retaining member, of a region facing one face of the sensor diaphragm, a region on an outer peripheral side is a bonded region bonded to the one face of the sensor diaphragm, and a region on an inner peripheral side is a non-bonded region not bonded to the one face of the sensor diaphragm. In the peripheral edge portion of the first retaining member, a ring-shaped groove is formed protruding in a direction of a wall thickness of the first retaining member, continuous with the non-bonded region of the peripheral edge portion. The second retaining member is provided with a recessed portion that prevents excessive dislocation of the sensor diaphragm when an excessively large pressure is applied to the sensor diaphragm. | 05-22-2014 |
20140157905 | PRESSURE SENSOR CHIP - A pressure sensor chip includes a sensor diaphragm, and first and second retaining members. The first and second retaining members face and are bonded to peripheral edge portions of a first face and another face of the sensor diaphragm, and have pressure guiding holes that guide measurement pressures to the sensor diaphragm. The first retaining member has, in an interior thereof, a non-bonded region that is continuous with a peripheral portion of the pressure guiding hole. The non-bonded region in the interior of the first retaining member is provided at a portion of a plane that is parallel to a pressure bearing surface of the sensor diaphragm. The second retaining member is provided with a recessed portion that prevents excessive dislocation of the sensor diaphragm when an excessively large pressure is applied to the sensor diaphragm. | 06-12-2014 |
20140174188 | Device for Measuring a Pressure with at Least One Pressure Sensor Having at Least One Active Sensor Surface - A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided. | 06-26-2014 |
20140230559 | STRUCTURE FOR USE WITH FLUID DIAPHRAGM - A structure comprising: a base; a diaphragm; a peripheral wall member of which one end surface is attached to a circumferential edge part of the diaphragm and the other end surface is attached on the top surface of the base to form an internal space together with the base and the diaphragm; a protruding part that protrudes from the top surface of the base; and a communicatively connecting path that extends from a bottom surface side of the base toward the diaphragm, and communicatively connects the internal space and the outside to each other to flow fluid, wherein on an outer lateral surface of the protruding part, an opening is formed in a part intersecting with an inner lateral surface of the communicatively connecting path, and a part of a fore end inner surface of the communicatively connecting path is formed in the protruding part. | 08-21-2014 |
20140298913 | SENSOR WITH ISOLATED DIAPHRAGM - A sensor assembly includes a first wafer having a cavity formed therein and a second wafer bonded relative to the first wafer to form a diaphragm over the cavity. A trench is formed in the second wafer in or around the diaphragm and the trench may be filled with an isolating material to help thermally and/or electrically isolate the diaphragm. The diaphragm may support one or more sense elements. The sensor assembly may be used a flow sensor, a pressure sensor, a temperature sensor, and/or any other suitable sensor, as desired. | 10-09-2014 |
20140318259 | METHOD OF MANUFACTURING A PRESSURE SENSOR - A method of manufacturing an overheat or fire alarm detection system, comprises the steps of micromachining a pressure sensor and securing a sensor tube in fluid communication with the pressure sensor. The sensor tube may comprise a hollow tube containing a material that evolves gas upon heating. The micromachining step may comprise doping at least a portion of a first layer, forming a cavity at least partially within the doped portion and forming a deformable diaphragm over the cavity. | 10-30-2014 |
20140360277 | SENSOR - A sensor includes: a housing with a terminal; a joint including a projecting portion; a sensor module provided to the projecting portion and including a strain gauge; a conductive member connecting the terminal and the strain gauge; a cap-shaped synthetic resin base provided to the projecting portion, including a top with an opening in which the strain gauge is exposed and lateral portions intersecting the top, and having an inner circumferential surface slidable along an outer circumferential surface of the projecting portion; and an electronic component mounted on the lateral portions. The conductive member includes: a flexible circuit board having a first end connected to the terminal and a second end connected to the base; and a three-dimensional circuit connected to the electronic component, three-dimensionally arranged continuously along the top and the lateral portions of the base, and having one end connected to the flexible circuit board. | 12-11-2014 |
20150013467 | PRESSURE SENSOR - A pressure sensor is provided, which includes a pressure detector that has a pressure receiving surface in contact with a liquid, and detects a pressure of the liquid to a pressure receiving section, and a housing having a housing inner wall that demarcates a liquid chamber, wherein the housing inner wall is provided with an inflow hole, and an outflow hole, at least a part of a connecting portion, which is connected to the pressure receiving surface, of the housing inner wall is formed as an inner wall of the outflow hole, and the housing inner wall at the portion formed as the inner wall of the outflow hole protrudes more outward of the liquid chamber than the other connecting portion adjacent to the portion formed as the inner wall of the outflow hole. | 01-15-2015 |
20150101413 | MICROELECTROMECHANICAL PRESSURE SENSORS - A pressure sensitive element is provided. In one embodiment the pressure sensitive element comprises: a diaphragm with a gage side and a back side and a rim surrounding the diaphragm; a pair of inner islands on the gage side of the diaphragm wherein the pair of inner islands are spaced to form a first gap between the pair of inner islands; a first freed gage spanning the first gap; at least one bridge to provide an electrical communication path between the rim and the first freed gage; an outer island on the gage side of the diaphragm wherein the outer island and the rim are spaced to form a second gap; and a second freed gage spanning the second gap. | 04-16-2015 |
20150107364 | Pressure Transmitter - A pressure transmitter including tube-like pressure introducing pipes, a sealed-in liquid, the inside of the pressure introducing pipes being filled with the sealed-in liquid, pressure receiving diaphragms for receiving the pressures of measurement fluids, the pressure receiving diaphragms being set up in a state where one-side apertures in the pressure introducing pipes are blocked by the pressure receiving diaphragms, a pressure sensor that is set up in common to the other-side apertures in the pressure introducing pipes in a state where the pressure sensor is exposed to the sealed-in liquid, and hydrogen-permeation prevention layers that are set up on the pressure receiving diaphragms, wherein the pressure transmitter further includes a hydrogen-storage material that is set up inside the pressure introducing pipes. | 04-23-2015 |
20150107365 | Pressure Transmitter - A pressure transmitter including tube-like pressure introducing pipes, a sealed-in liquid, the inside of the pressure introducing pipes being filled with the sealed-in liquid, pressure receiving diaphragms for receiving the pressures of measurement fluids, the pressure receiving diaphragms being set up in a state where one-side apertures in the pressure introducing pipes are blocked by the pressure receiving diaphragms, and a pressure sensor that is set up in common to the other-side apertures in the pressure introducing pipes in a state where the pressure sensor is exposed to the sealed-in liquid, wherein the sealed-in liquid is silicon oil containing phenyl groups, the pressure transmitter further including a hydrogen-storage material that is set up inside the pressure introducing pipes. | 04-23-2015 |
20150122038 | PRESSURE SENSOR - A pressure sensor comprises a first substrate containing a processing circuit integrated thereon and a cap attached to the first substrate. The cap includes a container, a holder, and one or more suspension elements for suspending the container from the holder. The container includes a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. The container is suspended from the holder such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. | 05-07-2015 |
20160054192 | FREEZE PROOF PROTECTION OF PRESSURE SENSORS - A pressure sensor assembly for measuring the pressure of a first fluid. The assembly having a first housing including a pressure sensing device arranged therein. A diaphragm is arranged on a surface of the first housing and is configured to transmit a force exerted on a first side thereof to the pressure sensing device. A second housing is provided and attached to the first housing. The second housing may be arranged generally circumferentially around the diaphragm. A compressible element is provided and arranged within a compressible element space defined within the second housing. The compressible element is configured to transmit a force exerted thereon by the fluid to the first side of the diaphragm. | 02-25-2016 |
20160089484 | Pressure Output Device For Extracorporeal Hemodialysis Machine - A pressure output device (POD) assembly for sensing fluid pressure in a fluid processing system, is provided. This POD assembly includes a shell defining a shell interior, and a movable diaphragm disposed in the shell interior and separating the shell interior into a flow-through chamber and a pressure sensing side. A sensor port is in fluid communication with the pressure sensing side. An inlet port and an outlet port are in fluid communication with the flow-through chamber. The inlet port and the outlet port define an inlet and an outlet, respectively, of a flow-through channel that passes through the flow-through chamber. A boss protrudes from the interior wall of the shell and extends into the flow-through channel to prevent occlusion of flow under different pressure conditions within the flow-through chamber. | 03-31-2016 |
20160091384 | Sensor module for measuring a pressure of a fluid with at least one electronic circuit, particularly an integrated circuit, arranged on a circuit carrier, and at least one pressure measuring chip - In a sensor module for measuring a pressure of a fluid, having at least one supporting element, at least one electronic circuit, particularly an integrated circuit, arranged on at least one circuit carrier, and with at least one pressure measuring chip that has at least one pressure measuring membrane, wherein at least sections of the circuit carrier are surrounded by a protective material to protect it from surrounding fluids, it is provided as essential to the invention that the pressure measuring chip and the circuit carrier are arranged vertically one underneath the other, and that the pressure measuring chip is at least partially mechanically decoupled from the supporting element. | 03-31-2016 |
20160123826 | FLUID-FILLED PRESSURE SENSOR ASSEMBLY CAPABLE OF HIGHER PRESSURE ENVIRONMENTS - This disclosure provides systems and methods for a fluid-filled pressure sensor assembly for higher pressure environments. A fluid-filled pressure sensor assembly may be adapted for coupling to a structure at a mating surface and may include a header; a pressure sensor coupled to the header; a diaphragm coupled to the header and configured for positioning forward of the mating surface so that a fluid region is disposed between the diaphragm and the pressure sensor; a fill hole coupled to the fluid region; a sealing element coupled to the fill hole and configured for positioning forward of the mating surface; and wherein during operation the first pressure applied at the diaphragm is substantially transferred by the fluid in the fluid region and the fill hole to an inner-side of the sealing element and the first pressure is about equivalent to a second pressure applied at an outer-side of the sealing element. | 05-05-2016 |
20190145844 | PRESSURE TRANSDUCER WITH INTEGRAL BLEED VALVE | 05-16-2019 |