| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 073702000 | Vibration type | 42 |
| 20080250861 | Accelerator/Brake Control Using Acoustic Sensing - A pressure sensitive acoustic wave sensor and actuator include an acoustic wave cavity foπned in a substrate, a transducer generating an acoustic wave substantially trapped in the acoustic wave cavity and an acoustic wave absorbing member that absorbs more acoustic wave energy in the acoustic wave cavity in response to increased pressure on the member. The speed and/or braking of an electric vehicle is controlled through operator input of a foot pedal, using the pressure sensitive acoustic wave sensor. | 10-16-2008 |
| 20090151461 | DOUBLE-ENDED TUNING FORK TYPE PIEZOELECTRIC RESONATOR AND PRESSURE SENSOR - To provide a double-ended tuning fork type piezoelectric resonator that includes: a piezoelectric element having two arm portions disposed in parallel, a first supporting portion that support one ends of each of the arm portions, a second supporting portion that support the other ends of each of the arm portions; and an exciting electrode formed on a surface of each of the arm portions, and has a structure suitable for being built into a pressure sensor as a pressure sensitive element. | 06-18-2009 |
| 20090151462 | PRESSURE DETERMINATION DEVICE AND METHOD FOR OPERATING A PRESSURE DETERMINATION DEVICE - The invention relates to a pressure determination device for determining the pressure in a fuel storage arrangement, with a connection element for connecting the pressure determination device to the fuel storage arrangement, a first chamber, a connecting line for communicating connection of the interior of the connection element to the first chamber, a second chamber, a membrane, and a switch, the interior of the connection element, the connecting line and the first chamber being made to accommodate throughflow of a fluid, the first chamber being made separated fluid-tight from the second chamber at least by means of the membrane, and the membrane being made for actuating the switch at least depending on the pressure of the fluid in the first chamber, and the connecting line being provided with a vibration damping element through which a fluid can flow. | 06-18-2009 |
| 20090277274 | POST ASSEMBLY AUTOMATIC ADJUSTMENT OF SAW BASED PRESSURE SENSOR PRELOAD - A method of manufacturing a pressure monitoring package comprises the steps of mounting a plurality of resonators onto a substrate | 11-12-2009 |
| 20090288491 | ATMOSPHERIC PRESSURE MEASURING APPARATUS AND METHOD OF MEASURING ATMOSPHERIC PRESSURE - A receiver receives an acoustic wave in an atmospheric pressure measuring apparatus. Since a variation in the intensity of an acoustic wave reflects a variation in the atmospheric pressure, the atmospheric pressure can be measured based on the intensity of the acoustic wave received at the receiver. The atmospheric pressure can in this manner easily be measured with a simplified structure. | 11-26-2009 |
| 20090308164 | PRESSURE SENSOR - A pressure sensor includes a housing, a pressure input orifice opened on a pipe sleeve formed on the housing, a diaphragm that seals the pressure input orifice and has one face as a pressure receiving face, a force transmitting unit connected to a central area of the other face of the diaphragm in the housing, and a pressure sensitive element whose detection direction of a force is a detection axis. A displacement direction and the detection axis of the force transmitting unit are roughly orthogonal to the pressure receiving face. One end and the other end of the pressure sensitive element are respectively fixed to the housing and the force transmitting unit with an adhesive therebetween, and the adhesive is an inorganic adhesive. | 12-17-2009 |
| 20100024562 | MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE - The invention relates to a sensor element for pressure measurement, having a substrate ( | 02-04-2010 |
| 20100132471 | METHOD AND APPARATUS FOR PRESSURE MEASUREMENT USING QUARTZ CRYSTAL - A pressure sensor includes a sensor which is arranged to couple to a process pressure. A quartz crystal is coupled to the sensor and is configured to measure pressure of fluid in the sensor body. An output from the quartz crystal is related to pressure applied to the sensor body by the process pressure. | 06-03-2010 |
| 20100186514 | Surface acoustic wave pressure sensor - A sensor chip has a substrate and a comb-teeth electrode arranged on the substrate. The sensor chip is fixed to a diaphragm structure to be distorted by receiving pressure, and is fixed to the diaphragm structure only through a predetermined fix area so as to detect the pressure. The fix area is defined on only a part of the sensor chip opposing to the diaphragm structure. The sensor chip is restrained by the diaphragm structure in a direction of transmitting surface acoustic wave. Flexibility of the sensor chip in a perpendicular direction approximately perpendicular to the wave transmitting direction is larger than that in the transmitting direction. | 07-29-2010 |
| 20100186515 | PRESSURE DETECTION UNIT AND PRESSURE SENSOR - A pressure detection unit includes: a first piezoelectric resonator element having a vibrating portion and a pair of base portions connected to both ends of the vibrating portion; a second piezoelectric resonator element having a resonating arm and a base portion integrated with one end of the resonating arm; a diaphragm having a pair of supporting portions to which the base portions of the first piezoelectric resonator element are bonded; and a base disposed to be opposed to the diaphragm. In the pressure detection unit, the base portion of the second piezoelectric resonator element is joined to one of the base portions of the first piezoelectric resonator element in an identical plane. | 07-29-2010 |
| 20100242615 | PRESSURE TRANSDUCER - A pressure transducer comprising a housing and a piezoelectric resonator in the housing, wherein the resonator is made of a piezoelectric crystal having Curie temperature greater than 1000° C. or having no Curie temperature up to its melting point greater than 1000° C., and the piezoelectric crystal has a piezoelectric constant more than two times greater than that of quartz. | 09-30-2010 |
| 20110107838 | MEMS PRESSURE SENSOR - A MEMS pressure sensor for sensing the pressure in a sealed cavity of a MEMS device, comprises a resonant MEMS device having a pressure sensor resonator element which comprises an array of openings. The resonant frequency of the resonant MEMS device is a function of the pressure in the cavity, with resonant frequency increasing with pressure. Over the pressure range 0 to 0.1 kPa, the average change in frequency is at least 10 | 05-12-2011 |
| 20110209552 | RELATIVE PRESSURE SENSOR - A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane facing away from the platform, and wherein the platform has a reference air opening, through which surrounding atmospheric pressure can act on a second side of the measuring membrane facing the platform. A support body, through which a reference air duct extends between a first surface section and a second surface section of the support body is provided, wherein the pressure measuring cell is affixed to the support body with a pressure resistant, bonded adhesive. The reference air opening communicates with the reference air duct, in order to form a reference air path to the measuring membrane, wherein the bonded adhesive surrounds the reference air path, and the relative pressure sensor further includes a shield element, which protects the bonded adhesive from direct contact with reference air. | 09-01-2011 |
| 20110232387 | PRESSURE DETECTING DEVICE - A pressure detecting device includes: a resonator whose oscillation frequency varies depending on a pressure; a first oscillation circuit that oscillates the resonator and outputs a signal of a frequency corresponding to the pressure; an AT-cut quartz crystal resonator; a second oscillation circuit that oscillates the AT-cut quartz crystal resonator and outputs a reference clock signal; a measuring unit that measures the reference clock signal by the use of a reciprocal counting method; a temperature detecting unit that detects a temperature of the resonator; and a storage unit that stores coefficients of a first approximating polynomial for calculating a first correction value used to compensate for a frequency-temperature characteristic of the measuring unit, wherein the frequency-temperature characteristic of the value measured by the measuring unit includes a frequency-temperature characteristic of the AT-cut quartz crystal resonator and a frequency-temperature characteristic of the resonator. | 09-29-2011 |
| 20110283801 | LOW COST RESONATOR-BASED PRESSURE TRANSDUCER - An improved manufacturing process for resonator-based pressure transducers is described. The process is a batch process in which several resonators are shaped simultaneously, using an etching process such as plasma etching. The end pieces are also shaped, if required, for several transducers. The end pieces and resonators are sandwiched together prior to separating the individual transducer units. The individual transducer units are then separated using a cutting process. The described process can be used to manufacture pressure transducers having a substantially smaller size, for example 5-6 mm outer dimensions and 2-3 mm resonators. The outer shape of the transducers can be a non-circular cylindrical shape such as that of a right square prism or an octagonal prism. | 11-24-2011 |
| 20110296924 | PRESSURE TRANSDUCER EMPLOYING A MICRO-FILTER AND EMULATING AN INFINITE TUBE PRESSURE TRANSDUCER - A pressure transducer assembly for measuring pressures in high temperature environments employing an elongated tube which is terminated at one end by an acoustic micro-filter. The micro-filter is operative to absorb acoustic waves impinging on it with limited or no reflection. To improve the absorption of acoustic waves, the elongated tube may be tapered and/or mounted to a support block and further convoluted to reduce the overall size and mass of the device. A pressure transducer with a diaphragm flush may be mounted to the elongated tube and extend through to the inner wall of the tube. Hot gases propagate through the elongated tube and their corresponding pressures are measured by the transducer. The acoustic filter operates to absorb acoustic waves resultant from the hot gases, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation. | 12-08-2011 |
| 20110308320 | Inductively Coupled Pressure Sensor - In one embodiment, a pressure sensor assembly for use with an application specific integrated circuit includes a capacitive sensor, a sensor coil within a first sensor compartment and operatively connected to the capacitive sensor to form a sensor L-C tank circuit, a measuring oscillator including a measuring coil located within a second sensor compartment and spaced apart from the sensor coil and a feedback circuit configured to provide a control signal for the measuring oscillator based upon an output of the measuring oscillator, and a low frequency signal source configured to provide a low frequency signal to the measuring oscillator. | 12-22-2011 |
| 20120011936 | COMBINATION STATIC AND DYNAMIC PRESSURE TRANSDUCER EMPLOYING A MICRO-FILTER - A pressure transducer assembly that uses static pressure compensation to capture low-level dynamic pressures in high temperature environments. The pressure transducer assembly combines a static-dynamic pressure transducer with a micro-filter element to achieve a compact system that can be used in extreme temperature applications where low-level, dynamic pressure measurements are required in a high pressure environment. | 01-19-2012 |
| 20130047734 | RESONANT PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME - A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm may include a sensor substrate made of silicon and including one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm, a base substrate made of silicon and including one surface directly bonded with the other surface of the sensor substrate, a concave portion formed in a portion of the base substrate bonding with the sensor substrate, substantially forming the diaphragm in the sensor substrate, and including a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements, one or more conducting holes, and a fluid. | 02-28-2013 |
| 20130086988 | PRESSURE SENSOR USING GAS/LIQUID INTERFACE - A pressure sensor and method of sensing pressure is disclosed. An fluid port is coupled to a substrate. A first microchannel within the substrate is in fluid communication with the fluid port. The first microchannel includes a first compressible fluid, a first incompressible fluid and at least one first meniscus. A second microchannel within the substrate is in fluid communication with the fluid port. The second microchannel includes a second compressible fluid, a second incompressible fluid and at least one second meniscus. A pressure of the first meniscus and/or the second meniscus is determined. | 04-11-2013 |
| 20130152693 | PRESSURE SENSOR - A pressure sensor includes a case, a vibrator, a detector, and a processor. The case includes a tubular section and a flat section. The tubular section has a hollow having an opening and is configured to be filled with a target fluid. The flat section closes the hollow. The flat section has a first surface facing the hollow, and a second surface opposite to the first surface. The vibrator is disposed on the second surface of the flat section of the case. The detector outputs a signal according to a vibration of the vibrator. The processor is operable to detect a frequency of the vibration of the vibrator based on the signal output from the detector, and to detect a pressure of the target fluid based on the detected frequency of the vibrator. This pressure sensor has a high sensitivity and excellent characteristics. | 06-20-2013 |
| 20130205906 | LOW-COST TEMPERATURE AND PRESSURE SENSOR COMPRISING SAW RESONATORS, AND METHOD OF FABRICATION FOR SAME - A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided. | 08-15-2013 |
| 20130213139 | MEMS VACUUM LEVEL MONITOR IN SEALED PACKAGE - A vacuum sensor for sensing vacuum in a sealed enclosure is provided. The sealed enclosure includes active MEMS devices desired to be maintained in vacuum conditions. The vacuum sensor includes a motion beam anchored to an internal surface in the sealed enclosure. A driving electrode is disposed beneath the motion beam and a bias is supplied to cause the motion beam to deflect through electromotive force. A sensing electrode is also provided and detects capacitance between the sensing electrode disposed on the internal surface, and the motion beam. Capacitance changes as the gap between the motion beam and the sensing electrode changes. The amount of deflection is determined by the vacuum level in the sealed enclosure. The vacuum level in the sealed enclosure is thereby sensed by the sensing electrode. | 08-22-2013 |
| 20130291644 | PIEZOELECTRIC VACUUM GAUGE AND MEASURING METHOD THEREOF - A piezoelectric vacuum gauge includes an actuator with a flexible portion, an actuating unit, a sensor unit, a signal input terminal and a signal output terminal, and a fixture unit having a base portion and a cover portion. An external signal is generated by a signal generator. Receive and transmit an external signal to an actuating unit by the signal input terminal so that the actuating unit has a vibration. Prompt a flexible portion by the actuating unit to produce a first resonant motion when the actuating unit having the vibration. The first resonant motion converts into a second resonant motion because the flexible portion is subject to a damping force of ambient air. Prompt a sensor unit by the second resonant motion to cause a shape transformation of the sensor unit to generate a detecting signal. Output the detecting signal to an external instrument by a signal output terminal of sensor unit to calculate a vacuum pressure value. | 11-07-2013 |
| 20140053651 | PRESSURE SENSOR - As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber. | 02-27-2014 |
| 20140109680 | MICRO-ELECTRO-MECHANICAL DEVICE AND METHOD FOR MAKING THE SAME - The invention provides a micro-electro-mechanical device which includes a substrate, an electrode, and a diaphragm. The electrode includes plural vent holes. The diaphragm is disposed above and in parallel to the electrode, to form a capacitive sensor with the electrode. The diaphragm includes plural ribs protruding upward and/or downward from the diaphragm; the ribs are respectively disposed in correspondence to the plural vent holes and do not overlap nor contact the electrode. A method for making the micro-electro-mechanical device is also provided according to the present invention. | 04-24-2014 |
| 20140144242 | METHOD AND SYSTEM FOR USE IN CONDITION MONITORING OF PRESSURE VESSELS - A condition monitoring system for a pressure vessel includes at least one vibration monitoring probe coupled to at least one pressure vessel component. The system also includes at least one computing device that includes a memory device configured to store data associated with the at least one vibration monitoring probe. The computing device also includes at least one input channel configured to receive the data associated with the at least one vibration monitoring probe. The computing device further includes a processor coupled to the memory device and the at least one input channel. The processor is programmed to determine a deterioration of the material condition of the at least one pressure vessel component by comparing at least a portion of the data associated with the at least one vibration monitoring probe with predetermined vibration parameters. | 05-29-2014 |
| 20140208857 | MEMS RESONATOR PRESSURE SENSOR - A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity. | 07-31-2014 |
| 20150027230 | PRESSURE MEASURING DEVICE - A pressure measurement device for enabling non-intrusive pressure measurement of a first fluid present in a volume having at least one wall is provided. The device includes an enclosed space filled with a second fluid, a transmitter provided in the enclosed space and adapted to transmit a standing wave in a direction of the wall, means for varying a pressure of the second fluid in the enclosed space, a detector for measuring data related to a resonance of the wall and a processor for determining a characteristic change in the data. | 01-29-2015 |
| 20150059483 | SENSORS FOR MEASURING AT LEAST ONE OF PRESSURE AND TEMPERATURE, AND RELATED ASSEMBLIES AND METHODS - Thickness shear mode resonator pressure sensors include a housing having an outer dimension that is less than 0.575 inch (14.605 millimeters). Pressure transducers may include a quartz pressure sensor and a quartz reference sensor, wherein an electronics assembly of the pressure transducer is configured to drive at least one of the quartz pressure sensor and the quartz reference sensor at a frequency greater than 10 MHz. Transducer assemblies include an electronics assembly configured to drive at least one quartz sensor of the transducer assembly at a frequency greater than 10 MHz. | 03-05-2015 |
| 20150128712 | ELECTROMAGNETIC RESONATOR PRESSURE SENSOR - The invention relates to a pressure sensor including an electromagnetic resonator with waveguide having a dielectric material with a dielectric permittivity that varies with temperature. There is an excitation circuit configured to propagate an electromagnetic field through the resonator and a device for heating the resonator. There is also a device for detecting the electromagnetic resonant frequency of the resonator and a device for determining the pressure of the gas surrounding the sensor as a function of the detected resonant frequency of the resonator. | 05-14-2015 |
| 20150362394 | PRESSURE-SENSITIVE SENSOR - The present invention achieves a pressure-sensitive sensor which can detect information on a pressure, a sound pressure, acceleration, gas and the like, with high sensitivity. The pressure-sensitive sensor includes: a cantilever ( | 12-17-2015 |
| 20150377728 | PASSIVE PRESSURE SENSING - A pressure sensor for sensing pressure of a fluid includes a diaphragm separator and a flexure structure. The diaphragm separator exerts an imparted force on the flexure structure, where the imparted force is proportional to fluid pressure exerted on the flexure structure. The pressure sensor further includes a piezoelectric resonator. A first resonator interface section of the flexure structure is in contact with a first edge of the piezoelectric resonator. A second resonator interface section of the flexure structure is in contact with a second edge of the piezoelectric resonator. The first edge and the second edge are opposite narrow edges of the piezoelectric resonator. The flexure structure exerts a load proportional to the imparted force onto the first edge of the piezoelectric resonator. | 12-31-2015 |
| 20160025580 | PRESSURE SENSOR - An antenna unit having an antenna coil pattern is disposed in a casing. A sensor unit has a surface acoustic wave detecting element including a first sensing electrode that generates and receives a surface acoustic wave and a first reflector that reflects the surface acoustic wave, which are provided on a substrate configured of a piezoelectric material, and a sensor coil pattern electrically connected to the first sensing electrode and coupled to the antenna coil pattern. The sensor unit is disposed in a pressure receiving portion, and a signal is transmitted between the sensor unit and the antenna unit by wireless communication resulting from a coil coupling. | 01-28-2016 |
| 20160123830 | PASS-THROUGHS FOR USE WITH SENSOR ASSEMBLIES, SENSOR ASSEMBLIES INCLUDING AT LEAST ONE PASS-THROUGH AND RELATED METHODS - Transducer assemblies may include a sensor and a housing including a pass-through portion comprising at least one aperture in a portion of the housing extending along a longitudinal axis of the housing and the sensor. Methods of forming transducer assemblies may include welding a first housing section of the transducer assembly to a second housing portion of the transducer assembly and forming at least one aperture in the first housing section extending along a longitudinal axis of the transducer assembly, along a chamber for holding a sensor, and through the weld. | 05-05-2016 |
| 20160153859 | PRESSURE SENSOR HAVING A HELMHOLTZ RESONATOR | 06-02-2016 |
| 073703000 | Ultrasonic | 4 |
| 20080229837 | Ultrasonic Pressure Sensor and Method of Operating the Same - An ultrasonic pressure sensor and a method of detecting ultrasonic pressure. In one embodiment, the ultrasonic pressure sensor includes: (1) an interferometer having a reference arm and a signal arm that includes a probing fiber, the probing fiber having a reflective coating at a distal end thereof and configured to couple to ultrasonic waves proximate the distal end, the interferometer configured to receive laser light and produce two output beams based on the ultrasonic waves and (2) a photodetector coupled to the interferometer and configured to generate electronic signals based on the two output beams. | 09-25-2008 |
| 20080289431 | HIGH PRESSURE SENSOR - A combined pressure and temperature sensor comprising a tubular member | 11-27-2008 |
| 20080307889 | Pressure Transponder With Surface Accoustic Wave Sensor - The invention relates to a pressure sensor, the measuring cell of which is provided with at least one membrane for the protection of the pressure-sensitive element and a measuring chamber, filled with pressure medium, in which the pressure-sensitive element is housed. According to the invention, the membrane is monitored for damage, whereby at least one surface wave sensor is arranged in the chamber filled with pressure medium. On damage to the membrane occurring, process medium is mixed with the pressure medium. A substance change in the sensitive region of the surface wave sensor is thus brought about which results in a differing signal run time. Any change in run time is an indictor of damage to the pressure sensor and may be signaled as such. | 12-18-2008 |
| 20090277275 | APPARATUS FOR MEASURING PRESSURE USING ACOUSTIC IMPEDANCE VARIATION - The present invention relates to an apparatus for measuring pressure inside a predetermined vessel based on the principle that the transmitting efficiency of ultrasonic waves is changed by acoustic impedance variation according to an internal pressure. The apparatus includes an ultrasound exciting unit | 11-12-2009 |
| 073704000 | Vibrating strip or wire | 2 |
| 20120060617 | SENSOR - A resonant sensor is disclosed which may be arranged to measure the pressure of a fluid. The resonant sensor comprises a diaphragm which may be exposed to a fluid; two supports provided on the diaphragm and a resonator having at least two beams with each beam being suspended between the two supports. The ends of each beam are attached to a corresponding support at more than one point. By attaching each end of the beams to a support at more than one point, the moments and reaction forces to which the support is subjected may be balanced so that distortion of the support and diaphragm due to vibration of the resonator beams is reduced. Consequently, the resonant sensor is able to provide more precise measurements. | 03-15-2012 |
| 20150047434 | RESONANT PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR - A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate. | 02-19-2015 |
