| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 073514380 | Including an elastic support for an inertial element (e.g., spring) | 19 |
| 20080196502 | INERTIAL SENSOR AND MANUFACTURING METHOD OF THE SAME - A weight of an inertial sensor if formed from a plurality of divided weights, and the divided weights are connected to each other by elastically deformable beams. A movable range and a mass of each of the divided weights and a rigidity of each of the beams are adjusted and a plurality of deformation modes having different sensitivity ranges with respect to the acceleration are used in combination. By this means, it is possible to improve a detecting sensitivity of an acceleration and widen an acceleration response range. | 08-21-2008 |
| 20100058865 | MEMS Sensor with Movable Z-Axis Sensing Element - A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement. | 03-11-2010 |
| 20100147077 | ACCELERATION SENSOR - An acceleration sensor having a substrate, a first web that is connected to the substrate, and a seismic mass that is fashioned as a frame and is made up of four side frames, the first side frame and the third side frame being situated opposite one another, the second side frame and the fourth side frame being situated opposite one another, the second side frame and the first web being connected via a first spring element, stationary electrodes 50 being provided inside the frame that are connected to the substrate, movable electrodes being provided that are connected to the first side frame and/or to the third side frame, the frame having a first transverse web that is connected to the first side frame and to the third side frame. | 06-17-2010 |
| 20100180682 | Accelerometer Switch and Associated Method - In various embodiments, an accelerometer apparatus includes a center member; a resilient member, enclosing the center member; and, a mass member in contact with the resilient member, enclosing the center member; wherein, ambient motion of the apparatus at or beyond a selected threshold causes the resilient member or the mass member to contact the center member, thereby indicating the selected threshold has been met or exceeded. In one embodiment, the resilient member or the mass member contacting the center member closes an electrical circuit, whereby the accelerometer functions as an electrical switch. | 07-22-2010 |
| 20100242605 | SENSOR COMPONENT - A sensor component having a housing and a sensor chip situated in it. The sensor chip is connected mechanically to the housing via at least one elastomer element. In addition, the sensor chip is also connected electrically to the housing via the at least one elastomer element. | 09-30-2010 |
| 20100242606 | MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE - A MEMS sensor manufactured by processing a multi-layer stacked structure formed on a substrate, includes: a fixed frame portion formed in the substrate; a movable weight portion coupled to the fixed frame portion via an elastic deformable portion and having a hollow portion formed at the periphery; a fixed electrode portion protrudingly formed from the fixed frame portion toward the hollow portion; and a movable electrode portion moving integrally with the movable weight portion and facing the fixed electrode portion, wherein the movable weight portion includes a first movable weight portion formed of the multi-layer stacked structure and a second movable weight portion positioned below the first movable weight portion and formed of the material of the substrate. | 09-30-2010 |
| 20110174076 | Multiaxial micromechanical acceleration sensor - A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane. | 07-21-2011 |
| 20110226060 | IN-PLANE SENSOR AND METHOD FOR MAKING SAME - According to the present invention, an in-plane sensor comprises: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end which is unsupported; and a movable structure including at least one mass body and an extending finger connected to each other; wherein the supported end of the fixed finger is closer to the mass body than the suspended end is. | 09-22-2011 |
| 20110296919 | Micromechanical system - In a micromechanical system having a substrate and an electrode situated over the substrate, the electrode is connected to the substrate via a vertical spring. The vertical spring is sectionally provided in a first conductive layer and sectionally provided in a second conductive layer, the second conductive layer being situated over the first conductive layer and the first conductive layer being situated over the substrate. The electrode is provided in a third conductive layer, which is situated over the second conductive layer. | 12-08-2011 |
| 20120216616 | MEMS Device With Enhanced Resistance to Stiction - A MEMS device ( | 08-30-2012 |
| 20120227495 | METHODS FOR MAKING A SENSITIVE RESONATING BEAM ACCELEROMETER - A method of making a resonating beam accelerometer (RBA). In an example process, a proof mass device and resonators are created from a quartz material. A direct bond is formed between the proof mass and the resonators by applying a predefined amount of pressure at a predefined temperature for a predefined amount of time. One or more damping plates are created from a quartz material. A direct bond is formed between the damping plates and the proof mass device. The proof mass device is created by applying a predefined amount of pressure at pressure at temperature to two bases, two proof mass portions, and a flexure. The proof mass bases are on opposite sides of the flexure. The proof mass portions are on opposite sides of the flexure. A gap is present between the proof mass bases and the proof mass portions. | 09-13-2012 |
| 20120318061 | Motion sensing apparatus and mobile terminal - The disclosure discloses a motion sensing apparatus and a mobile terminal. The apparatus includes a sensing module and a processing module, wherein the sensing module includes at least two outputs, the processing module includes at least two signal ports, each signal port of the processing module is connected with one of the outputs of the sensing module respectively, and the sensing module outputs sensing signals from different outputs according to sensed different motions, and the processing module performs corresponding processes according to the sensing signals received from different signal ports. The apparatus simplifies a hardware circuit to some extent, saves the cost, and reduces the consumption of electric energy. By using the apparatus, a mobile terminal with screen shaking function can be produced. Compared with the conventional mobile terminal, the mobile terminal simplifies the hardware circuit to some extent, reduces the production cost of the mobile terminal, and improves the endurance capability and the reliability of the mobile terminal. | 12-20-2012 |
| 20130098155 | PHYSICAL QUANTITY SENSOR AND METHOD OF MAKING THE SAME - A physical quantity sensor includes a sensor portion, a casing, and a vibration isolator. The casing includes a supporting portion with a supporting surface that is located to face an end surface of the sensor portion. The vibration isolator is located between the end surface of the sensor portion and the supporting surface of the casing to join the sensor portion to the casing. The vibration isolator reduces a relative vibration between the sensor portion and the casing. | 04-25-2013 |
| 20130186202 | DEVICE AND METHOD FOR RECORDING AT LEAST ONE ACCELERATION AND A CORRESPONDING COMPUTER PROGRAM AND A CORRESPONDING COMPUTER-READABLE STORAGE MEDIUM AND ALSO USE OF SUCH A DEVICE - A device for measuring acceleration includes a base plate and mass elements connected to the base plate via elastic support elements having measuring points. The support elements of a first and a second mass element are constructed such that the support element of the first and the second mass element have at the measuring points an identical response characteristic for a first acceleration component in a first direction, and mutually different response characteristics for a second acceleration component perpendicular to the first component. The deflection of the measurement points is measured and evaluated. The component in the first and second directions is stepwise eliminated, and the result adjusted for the eliminated component is used for recovering these two components. The result adjusted for the eliminated component is measured as static acceleration and the component acting in the first and the second direction is measured as dynamic acceleration. | 07-25-2013 |
| 20130247669 | Apparatus and Method for Providing an In-Plane Inertial Device with Integrated Clock - An in-plane, monolithically-integrated, inertial device comprising: a support structure and first and second spring mass systems springedly coupled to the support structure. The first spring mass system comprises first and second time domain digital triggers configured to measure rotation and displacement respectively of the support structure about a first axis and along an orthogonal second axis respectively. The second spring mass system comprises third and fourth time domain digital triggers configured to measure acceleration and displacement respectively of the support structure about the second axis and along the first axis respectively. | 09-26-2013 |
| 20140041453 | INERTIAL SENSING DEVICE - An inertial sensing device is provided. The inertial device includes a mass proof, a sensing electrode layer to sense the motion of the mass proof, and a spring coupled and to support the mass proof. Wherein, the single-material mass proof can perform multi degree-of freedom inertial sensing. | 02-13-2014 |
| 20140174183 | DETECTION STRUCTURE FOR A Z-AXIS RESONANT ACCELEROMETER - A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass. | 06-26-2014 |
| 20150309069 | MICRO-ELECTROMECHANICAL DEVICE COMPRISING A MOBILE MASS THAT CAN MOVE OUT-OF-PLANE - The invention relates to a micro-electromechanical device used as a force sensor, comprising a mobile mass connected to at least one securing zone by means of springs or deformable elements, and means for detecting the movement of the mobile mass, the mobile mass having an outer frame and an inner body, the outer frame and the inner body being connected by at least two flexible portions forming integral decoupling springs on two separate sides of the outer frame. | 10-29-2015 |
| 20160097793 | MICRO INERTIAL MEASUREMENT SYSTEM - A micro inertial measurement system includes a housing, a sensing module, and a damper. The sensing module includes a rigid sensing support, a measuring and controlling circuit board mounted on the rigid sensing support and an inertial sensor set on the measuring and controlling circuit board. The inertial sensor includes a gyroscope and an accelerometer. The sensing module is mounted in the housing. The damper is mounted in the housing and set in the gap between the sensing module and the inside wall of the housing. By use of the above-mentioned structure, the noise immunity of the inertial measuring system can be greatly improved, and the volume and weight of the inertial measuring system can be greatly reduced. | 04-07-2016 |
