Class / Patent application number | Description | Number of patent applications / Date published |
073204260 | With substrate carrier (e.g., thin film) | 50 |
20080196494 | Flow sensor - A flow sensor that is designed to overcome problems of conventional flow sensors and can readily obtain high sensitivity without errors due to tilting. A flow sensor includes: a flow channel having a pair of parallel portions; and temperature sensing resistors for heating a fluid to a preset temperature, the temperature sensing resistors being disposed on parts of the parallel portions of the flow channel, to detect a fluid flow rate based on a change in temperature distribution of a flow channel due to a change in flow rate of the fluid flowing through the flow channel, the flow sensor comprising: a first upstream temperature sensing resistor and a first downstream temperature sensing resistor that are disposed in a line on upstream and downstream sides of one of the parallel portions, respectively; and a second upstream temperature sensing resistor and a second downstream temperature sensing resistor that are disposed in a line on upstream and downstream sides of the other parallel portion, respectively. | 08-21-2008 |
20080229818 | THERMAL FLOWMETER - To reduce power consumption by a thermal flowmeter while good flow-rate detection sensitivity is maintained, it is only necessary to reduce power consumption by a heat resistor under predetermined conditions. Specifically, provided that a width Wh of the heat resistor is between 100 micrometers and 400 micrometers inclusive (100≦Wh≦400), it is only necessary that a relationship among the length Lh of the heat resistor, a temperature increase ΔTh for the heat resistor, and a maximum permissible power Phmax to be supplied to the heat resistor be set so as to satisfy a formula 1.4≦ΔTh·Lh/Phmax≦2.8 in order to maintain good flow-rate detection sensitivity. Accordingly, the length of the heat resistor and the temperature increase in the heat resistor are set so that the maximum power consumption can be reduced within a range in which the formula is satisfied. | 09-25-2008 |
20080236274 | Flow measuring device - An airflow measuring device includes a sensing portion provided in a bypass passage, which perpendicularly deflects part of air from a main passage to therethrough bypass the part of air. The sensing portion includes a heating resistor energized and dissipate heat to airflow. The sensing portion is configured to measure airflow in the bypass passage based on the heat radiation. The sensing portion further includes a pair of support members erected in the bypass passage to support the heating resistor. The heating resistor of the sensing portion is inclined at a first inclination angle with respect to a direction, which is perpendicular to a flow direction of air in the bypass passage. The heating resistor is inclined toward downstream at an outer streamline of the airflow in the bypass passage. | 10-02-2008 |
20080245145 | Flow detector device with self check - A thermal flow sensor is equipped with a self-test unit that monitors the device and generates a fault signal in the presence of a malfunction. The self-test unit can e.g. monitor the integrity of a membrane carrying the heater and temperature sensors, or it can monitor various operational parameters of the device, thereby increasing the safety of the device. | 10-09-2008 |
20080250855 | FLUID FLOW SENSOR AND FLUID FLOW MEASUREMENT DEVICE - A thermal-type fluid flow sensor comprises a heating resistor formed on a thin film of a substrate, and plural thermal sensitive resistors configuring a bridge circuit. The thermal sensitive resistors are disposed on the thin film of the substrate so as to be located on an adjacent upstream side and an adjacent downstream side of the heating resistor in a stream direction of fluid to be measured. Resistor traces for the thermal sensitive resistors are formed so that the respective thermal sensitive resistors exhibit substantially equal changes in resistance with each other to distortion caused in the thin film. | 10-16-2008 |
20080250856 | THERMAL TYPE FLOW RATE MEASURING APPARATUS - A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small. | 10-16-2008 |
20080264166 | FLOW SENSOR ELEMENT AND ITS SELF-CLEANING - A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and these elements can form a multiple-part ceramic component. The temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for the temperature measurement and is heated with an additional platinum thin-film resistor. A measurement device, in particular an anemometric measurement device of a flow sensor, contains film resistors mounted in at least one opening of a cover or a hollow body. Two of the film resistors have resistance values differing by one to three orders of magnitude. The anemometric measurement device has a temperature sensor and a heat output sensor set in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor, as platinum thin-film or thick-film resistors, on a ceramic substrate. | 10-30-2008 |
20080289413 | FLOW MEASURING DEVICE - According to a flow measuring device, first ranges formed by a first plurality of resistors form a single continuous value range on a flow direction coordinate axis. Thus, the first plurality of resistors is limited from being thermally insulated from one another in the flow direction, and thereby detectivity is improved. Also, second ranges formed by a second plurality of resistors form an other single continuous value range on a longitudinal direction coordinate axis. The other continuous value range includes a position that corresponds to a half length of a heating element in a longitudinal direction. As a result, detection difference is obtained at the position, at which a temperature is most optimally detected, and thereby detectivity is further improved. | 11-27-2008 |
20080295590 | THERMAL TYPE FLOW METER AND ENGINE CONTROL SYSTEM USING THE SAME - A thermal type flow meter has a first heating resistor, a second heating resistor for blocking heat transfer from the first heating resistor to a console, a temperature measuring resistor interposed between the two heating resistors, and a controller for calculating a flow rate unrelated to temperatures of fluid from temperatures of the resistors and currents supplied to the heating resistors. | 12-04-2008 |
20090049907 | Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor - This invention discloses a mass flow sensor manufactured by applying the micro-electromechanical system (MEMS) process to provide a new and improved mass flow sensor that is a self-calibrated in a time-of-flight manner with configuration to measure the flow velocity directly. The self-calibration of a mass flow rate sensor is achieved by providing an electric pulse to a heater in the flow and determining a temperature variations of the fluid. The method further includes a step of measuring a temperature variation by a temperature sensor disposed at a short distance from the heater. The method further includes a step of correlating the temperature variation measured at the temperature sensor with the temperature variation of the heater to determine a time delay and a corresponding flow velocity. | 02-26-2009 |
20090078040 | FLOW SENSOR AND MANUFACTURING METHOD THEREFOR - A flow sensor may be formed by bonding a sensor chip formed with a flow rate detecting part and a flow path-forming member that is provided on the sensor chip and is formed with a flow path for a fluid flowing in the flow rate detecting part to each other on the upper surface of a substrate. The flow path-forming member may be formed by bonding a transparent first flow path forming member and a second flow path-forming member to each other. The first flow path forming member has a plate shape, and is provided with an inflow port and a outflow port for the fluid to be measured, and the second flow path forming member has a plate shape, and is provided with a through hole that forms the flow path along the flow of the fluid flowing along the flow rate detecting part. | 03-26-2009 |
20090078041 | FLOW SENSOR UNIT - A flow sensor may be formed of a sensor chip in which a flow rate detecting section is formed on an electric insulating film applied to cover at least a part of a concave portion formed on an upper surface of a substrate and may also include a flow path forming member which is provided on the sensor chip and has a flow path of a fluid flowing through the flow rate detecting section formed therein. | 03-26-2009 |
20090188314 | Flow sensor with metal film resistor - There is a need for providing a flow sensor with metal film resistor that improves detection sensitivity using a metal film for a resistance heat detector and a resistance temperature detector. The flow sensor with metal film resistor is structured to form a resistance heat detector, a resistance temperature detector for resistance heat detector for measuring temperature of the resistance heat detector, an upstream resistance temperature detector, a downstream resistance temperature detector, and an air resistance temperature detector on a silicon substrate. Plural floating-island insulators are provided for the resistance heat detector and within wiring thereof. | 07-30-2009 |
20090199632 | Sensor apparatus and method of manufacturing the same - A sensor apparatus and a method of manufacturing the same are disclosed. The sensor apparatus includes: a sensor chip; a housing receiving the sensor chip; an electric conductive member connected with a terminal of the senor chip; and a molded member covering a covered portion including a connection portion where the terminal and the electric conductive member are connected. The senor chip is bonded to a bonding member of the housing via an adhesive member. A surface of the housing, a surface of the adhesive member, and a front surface of the sensor chip are in the same plane at a boundary part of the covered portion. | 08-13-2009 |
20090205417 | Method for Operating Hot-Film Air-Mass Sensors - A method is provided for operating a hot-film air-mass sensor, which can be used especially for measuring air mass flows in the intake tract of an internal combustion engine. The hot-film air-mass sensor has a sensor chip having a sensor frame and a sensor diaphragm having at least one heating element and at least two temperature sensors, a chip carrier for holding the sensor chip and at least one additional heating element. The sensor chip is able to be heated up using the at least one additional heating element. Immediately after shutting down the internal combustion engine, the at least one heating element of the sensor diaphragm is switched off, or is switched to a lower heating power. Furthermore, the at least one additional heating element is switched on for a specified postheating phase. The provided method is particularly suitable for avoiding oil contamination of the hot-film air-mass sensor. | 08-20-2009 |
20090211355 | Heated Hot-Film Air-Mass Sensor - To determine air mass flows, especially for controlling internal combustion engines, a hot-film air-mass sensor is provided, which may be used especially for sensing air mass flows in the intake tract of an internal combustion engine. The hot-film air-mass sensor has a sensor chip having a sensor frame and a sensor diaphragm having at least one heating element and at least two temperature sensors. Furthermore, the hot-film air-mass sensor has a chip carrier for mounting the sensor chip, as well as at least one additional heating element. The sensor chip is able to be heated up using the at least one additional heating element, which is inserted into the chip carrier. Compared to the usual devices, the hot-film air-mass sensor has a lower susceptibility to contamination, especially by oil films. | 08-27-2009 |
20090241660 | THERMAL TYPE FLOWMETER - In the thermal type flowmeter for measuring the flow rate by a measuring element with an exothermic resistor and a temperature measuring resistor being shaped in the side of the surface of a substrate, a facing wall facing the surface of the measuring element is arranged, cantilever plate parts protruding from the facing wall toward the measuring element side are arranged, a gap is provided between the tip of the cantilever plate parts and the measuring element, and the cantilever plate parts are extended from the upper stream to the down stream of the measuring element. | 10-01-2009 |
20090282909 | Film Resistor in Exhaust-gas Pipe - A measurement device, in particular anemometric measurement device of a flow sensor, contains film resistors in one or more opening(s) of a cover or a hollow body. The film resistors are fastened according to the invention in the opening(s). Two film resistors differ with respect to their resistance by one to three orders of magnitude. | 11-19-2009 |
20090314079 | HOT-FILM AIR MASS METER HAVING FREQUENCY-MODULATED SIGNAL DETECTION - A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ω. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ω. | 12-24-2009 |
20100005877 | Semiconductor sensor having heater on insulation film and manufacturing method of the same - A sensor includes: a silicon substrate having a hollow portion, which is arranged on a backside of the substrate; an insulation film disposed on a front side of the substrate and covering the hollow portion; a heater disposed on the insulation film, made of a semiconductor layer, and configured to generate heat; and an anti-stripping film for protecting the insulation film from being removed from the silicon substrate. The silicon substrate, the insulation film and the. semiconductor layer provide a SOI substrate. The hollow portion has a sidewall and a bottom. The anti-stripping film covers at least a boundary between the sidewall and the bottom of the hollow portion. | 01-14-2010 |
20100031742 | 300.degree.C Flow Sensor - A measurement device, particularly an anemometric measurement device, is provided for mounting in an exhaust-gas pipe, particularly an exhaust-gas recirculation pipe. The device includes a ceramic carrier embedded in an injection-molded housing made of plastic, with at least one film resistor mounted on the ceramic carrier on an end opposite the embedding. Electrical connections lead out from the film resistor to the embedded end of the ceramic carrier, and the electrical connections are passed through the injection molding, sealed and mounted within the injection-molded part. Additional components can be used for the sealing and mounting. | 02-11-2010 |
20100077851 | Air Flow Meter - In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires. | 04-01-2010 |
20100089146 | FLOW SENSOR - A package is configured by stacking a flat board whereupon a rectangular hole for storing a sensor chip is formed, a flat board whereupon a hole section to be a package inner channel for introducing a measurement target gas into the sensor chip is formed, and a flat board whereupon hole sections which communicate with the package inner channel as an inlet and an outlet of the measurement target gas on the same end surface of the package are formed. | 04-15-2010 |
20100132452 | THERMAL TYPE FLUID FLOW SENSOR AND MANUFACTURING METHOD THEREOF - A thermal-type fluid flow sensor technology for measuring more precisely the temperature of the heater for an improved sensibility of detecting flow measurements. The thermal-type fluid flow sensor for measuring the air flow rate includes a heating resistive element formed on the semiconductor substrate through a first insulating layer, temperature-measuring resistive elements for heating resistive element for measuring the temperature of the heating resistive element, upstream and downstream temperature-measuring resistive elements for detecting the temperature of air on the upstream side and the downstream side of the air heated by the heating resistive element, and an air temperature measuring resistive element for measuring the temperature of the air heated by the heating resistive element, and at least the temperature-measuring resistive element for the heating resistive element is disposed in the upper layer or lower layer of the heating resistive element. | 06-03-2010 |
20100139391 | THERMAL FLUID FLOW SENSOR AND METHOD OF MANUFACTURING THE SAME - A thermal fluid flow sensor having a diaphragm structure body configured by an insulating film formed by stacking a film having compressive stress and a film having tensile stress on the top and bottom of a temperature-measuring resistive element and a heater resistive element which are processed by microprocessing is provided. The insulating film at a lower layer of the heater resistive element, a temperature-measuring resistive element for heater resistive element, upstream temperature-measuring resistive elements, and downstream temperature-measuring resistive elements, has films having compressive stress (a first insulating film, a third insulating film, and a fifth insulating film) and films having tensile stress (a second insulating film and a fourth insulating film) being alternately arranged, and two layers or more of the films having tensile stress are arranged. | 06-10-2010 |
20100162810 | THERMAL MASS FLOW METER - A heater chip ( | 07-01-2010 |
20100170335 | THERMAL TYPE FLOW SENSOR - A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation. | 07-08-2010 |
20100242591 | Thermal-Type Flowmeter - The present invention provides a highly-sensitive thermal-type flow-rate sensor with enhanced reliability. Provided is a thermal-type flow-rate sensor including: a passage into which a measurement-target fluid is introduced; and a sensor element which is provided in the passage and which measures the flow rate of the measurement-target fluid. The sensor element | 09-30-2010 |
20100242592 | SHEAR STRESS SENSORS - This invention relates to hot film shear stress sensors and their fabrication. We describe a hot film shear stress sensor comprising a silicon substrate supporting a membrane having a cavity underneath, said membrane bearing a film of metal and having electrical contacts for heating said film, and wherein said membrane comprises a silicon oxide membrane, where in said metal comprises aluminium or tungsten, and wherein said membrane has a protective layer of a silicon-based material over said film of metal. In preferred embodiments the sensor is fabricated by a CMOS process and the metal comprises aluminium or tungsten. | 09-30-2010 |
20100313651 | FLOW ELEMENT - Although flow detection accuracy deterioration due to a subject fluid inflow into a gap between a sensor device and an engaging portion is prevented by an underflow inhibitor, the underflow inhibitor overflow to a sensor device surface results in the subject fluid turbulence, causing a flow element output fluctuation risk. One solution is a configuration comprising a sensor device made of a planar semiconductor material with a heating element and an intake air temperature detection element formed thereon, a support member containing an engaging portion the sensor device is engaged to, which is placed at a passage the subject fluid circulates and underflow inhibitor being filled into a void between the sensor device and the support member to prevent the subject fluid from flowing into the void, and a pooling portion being placed to prevent the under flow inhibitor from overflowing out of the void. | 12-16-2010 |
20110030468 | ROBUST MICROMACHINING THERMAL MASS FLOW SENSOR AND METHOD OF MAKING THE SAME - The present invention is generally related to a novel micromachining thermal mass flow sensor and, more particularly, to a device incorporated with high strength and robust characteristics, which therefore is capable of operating under harsh environments. The new disclosed sensor is made of essential material which can provide robust physical structure and superior thermal properties to support the flow measuring operation. The invented thermal mass flow sensor is featuring with the advantages of micro-fabricated devices in terms of compact size, low power consumption, high accuracy and repeatability, wide dynamic range and easiness for mass production, which could avoid the drawbacks of fragility and vulnerability. | 02-10-2011 |
20110041598 | Construction and manufacturing method for a sensor of a thermal flow measuring device - Thermal flow measuring device and method for the manufacture of a thermal flow measuring device with a spacer having a first cavity for accommodating a resistance thermometer, wherein the spacer has at least a first planar area, which faces the first cavity, and a second cavity, through which the resistance thermometer can be pressed by means of a hold-down onto the first planar area of the spacer. | 02-24-2011 |
20110072897 | Heating Resistance Type Air Flow Rate Measuring Device - A temperature of the heating resistor is set at a temperature equal to or higher than a temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Alternatively, when a heating resistance type air flow rate measuring device starts to operate or stops operating, the temperature of the heating resistor may be set at a temperature equal to or higher than the temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Moreover, a water-repellent and oil-repellent protective coating may be provided on the surface of the heating resistor. | 03-31-2011 |
20110107832 | Thermal Type Fluid Flow Sensor and Fabricating Method - A thermal type fluid flow sensor includes an air flow detecting portion and a temperature detecting portion formed above the same substrate, capable of correcting a humidity, and having a high measuring accuracy at a low cost, and a heat generating resistor, a temperature measuring resistor for the heat detecting resistor, a temperature measuring resistor for detecting an air flow, and a heat generating resistor for detecting a humidity are arranged in a diaphragm formed above a semiconductor substrate, an air cavity layer, and a protecting film above the air cavity layer are formed above the heat generating resistor for detecting the humidity, and the protecting film is provided with plural holes reaching the air cavity layer. | 05-12-2011 |
20110283787 | THERMAL MASS FLOWMETER WITH A METAL-ENCAPSULATED SENSOR SYSTEM - A thermal mass flowmeter with a metal-encapsulated sensor system is provided. The sensor system included at least one heating resistor having a platelet geometry, and a sensor cap surrounding the at least one heating resistor. At least one distal end area of the sensor cap is formed with a flat rectangular cross section corresponding to the platelet geometry of the heating resistor, such that the distal end area of the sensor cap surrounds the heating resistor closely with an accurate fit (e.g., with a predetermined gap therebetween). | 11-24-2011 |
20120024054 | HIGH ACCURACY BATTERY-OPERATED MEMS MASS FLOW METER - With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management. | 02-02-2012 |
20120103086 | FLOW MEASURING DEVICE - A flow measuring device includes a housing, a support, and a flow measurement element. The housing defines a passage therein and includes a passage narrowing part, which reduces a cross-sectional area of the passage, in a predetermined part of the passage. The support has a platy shape and is disposed along a flow direction of fluid flowing in the passage. The flow measurement element is located inside the passage narrowing part and is disposed on a surface of the support. The flow measurement element detects a flow rate of fluid flowing in the passage. The passage narrowing part has an inner wall surface that gradually reduces a width of the passage from a center side to both end sides of the passage in a height direction of the passage, which is perpendicular to a direction of the width of the passage. | 05-03-2012 |
20120180563 | SENSOR WITH IMPROVED THERMAL STABILITY - Improved sensors are disclosed that include a heater resistor and/or one or more sensor resistors. In some instances, the heater resistor may be configured to have a zero or near-zero temperature coefficient of resistance (TCR), while one or more sensor resistors may be configured to have a non-zero higher TCR. In some instances, the heater resistor may include a polysilicon material that is doped with a first concentration of dopant, and the one or more sensing elements may include a polysilicon material that is doped with a second higher concentration of dopant. In some cases, the first concentration of dopant may be configured to provide a heater resistor that has a zero or near-zero temperature coefficient of resistance (TCR). | 07-19-2012 |
20120192644 | Thermal Flow Sensor - A thermal flow sensor includes a heater temperature controller that realizes stable startup characteristics and prevents degradation of a sensor element and can also accommodate a smaller heater. The sensor also includes a semiconductor substrate; a cavity portion provided in the semiconductor substrate; a dielectric film provided on the semiconductor substrate; a thin layer area formed as a result of the dielectric film covering the cavity portion; a heating resistor provided in the thin layer area on the dielectric film; a first temperature-sensitive resistor provided in the thin layer area on the dielectric film; a heating controller; a second temperature-sensitive resistor provided near the heating resistor; and a flow rate detector that detects a flow rate of a fluid on the basis of temperature of the second temperature-sensitive resistor. The heating controller controls the temperature of the heating resistor on the basis of first and second reference temperatures. | 08-02-2012 |
20130269428 | Measurement Transducer of a Thermal Mass Flow Meter for Determining the Flow of a Medium through a Pipe and Method for Fabricating it - A measurement transducer of a thermal mass flow meter for determining the flow rate of a medium that flows through a pipe, which comprises at least one thin film resistance thermometer, which is arranged in a sheath, wherein the sheath comprises a first open end, out of which at least one cable for electrical contact with the resistance thermometer is led out of the sheath, wherein the cable in the sheath is embedded in a first fill material, at least in sections, and wherein the thin film resistance thermometer is at least partially covered by a second fill material, which is a gaseous, liquid, semi-liquid, powder or solid and in the case cited last, comprises a hardness of at most Shore A 90, and that the first fill material comprises a hardness of at most Shore D 98. | 10-17-2013 |
20140007670 | FLOW SENSOR - A flow sensor includes a base made of glass, a substrate made of glass and disposed on an upper surface of the base, a flow velocity detection unit including an electrical resistance element and disposed on an upper surface of the substrate, and an electrode that penetrates the substrate and is electrically connected to the electrical resistance element. | 01-09-2014 |
20140007671 | FLOW SENSOR - A flow sensor includes a flow channel body in which a flow channel is formed, and an insertion hole that is communicated with the flow channel is formed from an outer surface, a base made of glass and inserted in the insertion hole of the flow channel body, an elastic gasket disposed between the insertion hole and the base, a substrate made of glass and disposed on an upper surface of the base, a flow velocity detection unit including an electrical resistance element, disposed on an upper surface of the substrate, and positioned in the flow channel, and an electrode that penetrates the substrate and is electrically connected to the electrical resistance element. | 01-09-2014 |
20140069185 | Vacuum-Cavity-Insulated Flow Sensors - A vacuum-cavity-insulated flow sensor and related fabrication method are described. The sensor comprises a porous silicon wall with numerous vacuum-pores which is created in a silicon substrate, a porous silicon membrane with numerous vacuum-pores which is surrounded and supported by the porous silicon wall, and a cavity with a vacuum-space which is disposed beneath the porous silicon membrane and surrounded by the porous silicon wall. The fabrication method includes porous silicon formation and silicon polishing in HF solution. | 03-13-2014 |
20140326064 | Thermal Type Flowmeter - Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element. | 11-06-2014 |
20140366624 | Spacer for a Thermal, Flow Measuring Device - A spacer for a thermal, flow measuring device, wherein the spacer has a planar bearing surface for a thin-film resistance thermometer and an otherwise circularly cylindrical, lateral surface, wherein the bearing surface is inclined relative to a longitudinal axis of the spacer. | 12-18-2014 |
20150107353 | Flow Sensor and Method for Manufacturing the Same - A technique capable of suppressing performance variation of every flow sensor and achieving performance improvement is provided. For example, in an arbitrary cross-sectional surface in parallel to a moving direction of a gas flowing on an exposed flow detecting unit FDU which is formed in a semiconductor chip CHP | 04-23-2015 |
20150308874 | AIRFLOW SENSOR - Provided is a gas flow sensor that includes a heat-sensitive element for measurement disposed inside a duct through which a gas to be measured flows and a support mechanism for supporting the heat-sensitive element for measurement inside the duct. The heat-sensitive element for measurement includes an insulating film; a thin film thermistor portion formed on the surface of the insulating film with a thermistor material; a pair of comb electrodes which have a plurality of comb portions and are pattern-formed on the thin film thermistor portion using a metal so as to face each other; and a pair of pattern electrodes which are pattern-formed on the surface of the insulating film and are connected to the pair of comb electrodes. The support mechanism is disposed such that the planar direction of the insulating film is parallel to the direction of gas flow in the duct. | 10-29-2015 |
20150308875 | Thermal Flowmeter - A thin-film sensor for a thermal flowmeter with at least a first substrate layer made of electrically non-conductive material, a second layer made of electrically conductive material and a cover layer to protect the resistance layer against abrasion, wherein the second layer is designed as two sensor elements, wherein at least a first of the two sensor elements is designed to introduce a heat quantity into a medium, and at least a second of the two sensor elements is designed to determine the ambient temperature, and the thin-film sensor has a gap that isolates the two sensor elements from one another. | 10-29-2015 |
20150323360 | Thermal Airflow Sensor - An object of the present invention is to improve the reliability of a product in which a semiconductor device is partially exposed when sealed with resin. In achieving the above object and according to this invention, there is provided a thermal airflow sensor including: a semiconductor substrate having a thin-wall portion, a heating resistor provided over the thin-wall portion, and resistance temperature detectors installed upstream and downstream of the heating resistor; a protective film provided over the semiconductor substrate; and a resin that seals the semiconductor substrate, the resin further including an exposure portion for partially exposing an area including the thin-wall portion. The protective film is provided in a manner seamlessly enclosing the heating resistor, the protective film having an outer peripheral edge located outside the thin-wall portion and over the exposure portion. | 11-12-2015 |
20220136882 | FLOW SENSING DEVICE - Methods and apparatuses associated with an example flow sensing device are provided. In some examples, the flow sensing device may include a flow cap component and a sensor component. In some examples, the flow cap component may include a heating element disposed in a first layer of the flow cap component. In some examples, the sensor component may include at least one thermal sensing element disposed in a second layer of the sensor component. In some examples, the first layer and the second layer are noncoplanar. In some examples, the flow cap component may be bonded to a first surface of the sensor component to form a flow channel. In some examples, the first layer and the second layer may be noncoplanar and separated by the flow channel. | 05-05-2022 |