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With electric circuitry or electric circuit component detail

Subclass of:

073 - Measuring and testing

073230200 - GAS ANALYSIS

073290010 - Moisture content or vapor pressure

073290020 - Hygrometer

Patent class list (only not empty are listed)

Deeper subclasses:

Class / Patent application numberDescriptionNumber of patent applications / Date published
073335020 With electric circuitry or electric circuit component detail 69
20090056439SENSOR FOR HUMIDITY - The present invention provides a sensor for humidity which is optimized as moisture sensitive material in basic properties such as long term stability and the like at the range of high temperature. The sensor for moisture according to the present invention is provided with a moisture sensitive film formed with polymer in which a hydrophilic group binds through at least one hydrophobic group to other hydrophilic groups. Basic properties of the sensor such as long term stability and the like is optimized by forming a moisture sensitive element provided with a moisture sensitive film formed with polymer in which the glass transition temperature is in the range of 240° C. to 500° C.03-05-2009
20090100926Moisture Vapor Probe - One embodiment of the invention comprises a moisture vapor probe comprising a hollow sleeve and a removable electronics module. The probe has a generally cylindrical hollow sleeve having a sidewall with an inner surface and an outer surface. The sleeve comprises a sensor plate having a moisture vapor sensor and forming a water impermeable barrier with the sidewall. The sleeve has an opening such that a volume is defined by the opening, the sidewall and the sensor plate. The probe further comprises an electronics module removably disposable within the sleeve. The electronics module includes an information transfer unit. The information transfer unit in communication with the moisture vapor sensor and adapted to receive relative humidity information from the moisture vapor sensor.04-23-2009
20090211357Humidity Sensing Apparatus - An apparatus (08-27-2009
20090288484INTEGRATED MECHANICAL PACKAGE DESIGN FOR COMBI SENSOR APPARATUS - An integrated mechanical combi sensor apparatus and method for measuring humidity, pressure and temperature. A pressure sensor and an ASIC can be mounted in a first compartment, and a temperature sensor mounted in a second compartment of a housing. Similarly, a humidity sensor can be mounted in a third compartment such that the pressure sensor, temperature sensor, and humidity sensor are isolated from each other. The sensor element associated with the sensors and the ASIC can be connected to a lead frame terminal by wire bonding for electrical connection. A pressure cover and a humidity cover can be utilized for covering the pressure sensor and the humidity sensor. The humidity sensor can include a hydrophobic filter for preventing moisture-saturated air from reaching the sensing element in order to provide accurate sensor measurements thereof.11-26-2009
20090308155PASSIVE HUMIDITY SENSORS AND METHODS FOR TEMPERATURE ADJUSTED HUMIDITY SENSING - A humidity sensor having temperature sensing includes a substrate and a RLC (damped resonant) circuit formed in or on the substrate. The RLC circuit comprises a capacitor having a first and a second electrically conductive plate and a moisture sensitive dielectric interposed between the first and second plate. An RL network comprising an inductor and a resistor is coupled to the capacitor and comprises a high relative temperature coefficient of resistance (TCR) portion formed from a first material which is coupled to a low relative TCR portion formed from a second material different from the first material. The RLC circuit can be a series RLC circuit. In another embodiment, the RLC circuit can comprises a parallel RLC circuit.12-17-2009
20100005881PROTECTIVE DEVICE FOR A HUMIDITY SENSOR IN AN AGGRESSIVE ATMOSPHERE - A protective device for a humidity sensor protects the sensor from aggressive substances in a fluid to be analyzed. The protective device for the humidity sensor comprises a protective cap having openings that are covered with a membrane in such a manner that mass transfer between a measuring medium present in the environment and the interior of the protective cap can only take place through the membrane, said membrane including a plastic material which is highly permeable to water vapor, has high thermal stability and high corrosive resistance.01-14-2010
20100058857SURFACE ACOUSTIC WAVE BASED HUMIDITY SENSOR APPARATUS WITH INTEGRATED SIGNAL CONDITIONING - A SAW-based humidity sensor apparatus with integrated signal conditioning on the same substrate. A micro-electronic circuit can be processed at a silicon substrate to obtain on-chip signal conditioning internally and the silicon substrate can be covered with a protective layer of, for example, silicon nitride. Surface acoustic wave media (e.g., a ZnO film) can be coated on top of the protective layer. A humidity sensitive film and two sets of interdigital transducers can then be deposited on the surface acoustic wave media. The humidity sensitive film absorbs moisture and changes the receiving frequency at the two sets of interdigital transducers. The output from the two sets of interdigital transducers can be processed by the micro-electronic circuit, which eliminates common mode noise and generates an output signal proportional to the humidity value tested.03-11-2010
20100089150Device for Determining and/or Monitoring at Least One Process Variable - An apparatus for determining and/or monitoring at least one process variable, especially the moisture content or the temperature of a medium, including at least one sensor unit. A supply canal is provided, and the supply canal is embodied, positioned and matched at least to the sensor unit in such a manner that the medium has access through the supply canal essentially only to the sensor unit.04-15-2010
20100192687GAS SENSITIVE MATERIALS FOR GAS DETECTION AND METHOD OF MAKING - A gas sensitive material comprising SnO2 nanocrystals doped with In2O3 and an oxide of a platinum group metal, and a method of making the same. The platinum group metal is preferably Pd, but also may include Pt, Ru, Ir, and combinations thereof. The SnO2 nanocrystals have a specific surface of 7 or greater, preferably about 20 m2/g, and a mean particle size of between about 10 nm and about 100 nm, preferably about 40 nm. A gas detection device made from the gas sensitive material deposited on a substrate, the gas sensitive material configured as a part of a current measuring circuit in communication with a heat source.08-05-2010
20110088466HUMIDITY SENSOR - A humidity sensor has, on a substrate, at least one voltage sensor with a sensor region and at least one control electrode. The control electrode is connected to a signal source which is designed such that a variable control voltage can be applied to the control electrode. A moisture-permeable sensor layer whose dielectric constant depends on humidity is located on the sensor region. The control electrode is adjacent to the sensor layer in such a manner that the measured voltage signal of the voltage sensor depends on the control voltage and the humidity. The voltage sensor is connected to an analysis unit for ascertaining the humidity on the basis of the measured voltage signal. In the vertical projection onto the plane in which the substrate extends, the control electrode is located laterally next to the sensor region.04-21-2011
20110277547MEASURING HUMIDITY OR MOISTURE - An apparatus for measuring humidity or moisture, such as in concrete, is described comprising a sensor module comprising a humidity or moisture sensor in electrical communication with a first set of terminals and a hand-held reader module comprising a controller in electrical communication with a second set of terminals that are mateable with the first set of terminals such that the hand-held reader module is electrically connectable to and electrically disconnectable from the sensor module. The hand-held reader module is configured to read data from the sensor in response to making electrical connection with the sensor module. One set of terminals can comprise plural connector pins and the other set of terminals can comprise plural landing pads, such that the plural connector pins and the plural landing pads make a same electrical connection regardless of the rotational orientation of the hand-held reader module relative to the sensor module.11-17-2011
20110290015GAS-CONCENTRATION/HUMIDITY DETECTION APPARATUS - A sensor control apparatus (12-01-2011
20120103092Temperature and Humidity Measuring Device Deployed on Substrate - The present invention provides a temperature and humidity measuring and recording device deployed on substrate for measuring and recording temperature and humidity of the interior of any station for reticles and of any SMIF POD. The temperature and humidity measuring and recording device comprises a substrate with a first surface and a second surface opposite to the first surface on another side of the substrate, a first measurement unit embedded in and fixed to the first surface of the substrate for measuring the temperature and humidity of the surrounding environment, and a second measurement unit embedded in and fixed to the second surface of the substrate for measuring the temperature and humidity of the interior between the substrate and the pellicle film.05-03-2012
20130233073MOISTURE SENSORS ON CONDUCTIVE SUBSTRATES - A moisture sensor includes a first electrode (a conductive substrate) having a first sensor portion and a first terminal portion as well as a second electrode having a second sensor portion and a second terminal portion. The moisture sensor also includes a layer of porous dielectric material sandwiched between the first sensor portion and the second sensor portion. Further the moisture sensor includes a layer of dense insulating material sandwiched between the first terminal portion and the second terminal portion. Leads are then connected to the two terminal portions.09-12-2013
20130327141MULTIFUNCTION SENSING SYSTEM FOR USE WITH DEVICES EMPLOYING COMBUSTION OR BURNING - A monitoring system for use with electrically operated devices such as portable combustion heaters and having a carbon monoxide sensor, a relative humidity sensor and a supply voltage sensor and controller in a common enclosure mountable on the heater or alternatively in proximity. A user interface provides an indication of the sensor measurements which is readily discernible to persons in proximity to the system. The user interface may provide digital readouts, analog voltage outputs, serial data or logic level outputs. The system provides an alarm or disable the heater in response to one of the sensors measuring a predetermined level of sensed humidity, carbon monoxide or humidity.12-12-2013
20140283596Humidity Detection Device - To provide a humidity detection device by which good accuracy in measurement is achieved even under severe environmental conditions, in the humidity detection device which includes an electronic circuit board 09-25-2014
20140290359Humidity Measurement Device - A highly sensitive humidity measurement device is provided. The humidity measurement device has: a housing component integrally including a connector for performing input/output to/from the outside and a connector terminal component; an electronic circuit board mounted on the housing component and electrically connected to the connector terminal; and a humidity sensing element provided on the electronic circuit board. When the humidity measurement device is installed in an installation hole that is provided in a part of a main air flow passage through which suction air flows, apart of the housing component is exposed to the suction air flowing through the main air flow passage. The housing component is provided with a bypass passage to suction a part of the suction air. The bypass passage includes a bypass inlet opening that serves as a suction port of the suction air and a bypass outlet opening that discharges the suction air. The bypass outlet opening is exposed to the suction air.10-02-2014
20140366629ELECTRONIC DEVICE WITH TEMPERATURE AND HUMIDITY SENSOR AND METHOD FOR DETERMINING HUMIDITY VALUE - An electronic device includes a temperature and humidity sensor, a timing unit, and a storage unit storing a number of temperature values provided by weather forecast. Each of the temperature values provided by the weather forecast is associated with one time point. The electronic device obtains the temperature value and the humidity value sensed by the temperature and humidity sensor, obtains current time from the timing unit, associates the obtained temperature value and the humidity value with the current time, and stores the associated temperature value, humidity value, and the current time. The electronic device further compares each obtained temperature value with each temperature value provided by the weather forecast to find at which time point there is a match, searches in the storage unit to determine that each determined humidity value associated with one found time point is a humidity value with accuracy.12-18-2014
073335030 Impedance 51
20100192688HUMIDITY SENSOR BASED ON PROGRESSIVE CORROSION OF EXPOSED MATERIAL - A sensor senses a characteristic of an environment, e.g., humidity. The sensor has a substrate with strips of material that is sensitive to corrosion as a result of the characteristic. The strips are configured to respond differently to the characteristic. By means of repeatedly measuring the resistances of the strips, the environment can be monitored in terms of accumulated exposure to the characteristic. The strips are manufactured in a semiconductor technology so as to generate accurate sensors that behave predictably.08-05-2010
20110011179Moister sensor - A moister sensor, for measuring moister in a building without leaving visible scars to the building surface, is provided. The moister sensor includes a flexible carrier carrying an antenna for receiving EM-radiation between 9 kHz and 11 MHz and a resonant circuit including a moister reactive element. The moister reactive element includes a hygroscopic electrolyte arranged between a first and a second electrode, wherein the electrolyte in the presence of moister forms mobile ions and provides a complex impedance at least in response to the alternating voltage, which complex impedance varies with the moister content of the electrolyte.01-20-2011
20110239759DIFFERENTIAL RESONANT SENSOR APPARATUS AND METHOD FOR DETECTING RELATIVE HUMIDITY - A differential resonant sensor apparatus and method for detecting relative humidity in an ambient air. The apparatus generally includes a sensing loop, a reference loop and a mixer. A hydrophilic sensing layer can be deposited on a sensing resonant beam and a corresponding hydrophobic reference layer can be deposited on a reference resonant beam for detecting water vapor concentration in the ambient air. The hydrophobic reference layer possesses similar visco-elastic properties as the hydrophilic sensing layer with no water absorption properties. A differential reading electronic circuit may be interconnected with each resonant beam for signal processing. The absorbed humidity with respect to the sensing resonant beam changes the mechanical resonance frequency, which can be detected as a change in the electric resonance frequency of the associated electronic circuit.10-06-2011
20130319111WATER-CONCENTRATION DETECTION DEVICE - The water-concentration detection device for detecting a water concentration of insulating gas filled in a gas-insulated device includes: porous electrodes having porous properties that are arranged to face each other in the insulating gas; a solid electrolyte membrane that is sandwiched between and fixedly attached to the electrodes and has hydrogen-ion conductivity; a voltage application unit that applies an alternating-current voltage at a frequency of 325 Hz or a frequency of 10 Hz or lower to the electrodes; an impedance measurement unit that measures an alternating-current impedance between the electrodes in a state in which the alternating-current voltage is applied to the electrodes; and a water-concentration detection unit that detects the water concentration of the insulating gas based on the alternating-current impedance measured by the impedance measurement unit.12-05-2013
073335040 Capacitance 30
20080257037Humidity sensor - A capacitive humidity sensor includes: a humidity sensing element with a humidity sensitive film and electrodes; and a processing circuit. The film has a dielectric constant variable in accordance with moisture. The electrodes detect capacitance of the film and outputs a signal corresponding to the capacitance. The processing circuit processes the signal. The film is made of inorganic material having fine pores for adsorbing the moisture. A diameter of the fine pores is set to be a predetermined diameter so that capillary tube aggregation phenomenon occurs at a predetermined relative humidity. The capacitance of the film has a change rate with respect to the relative humidity. The change rate in case of the relative humidity higher than the predetermined relative humidity is larger than that in case of the relative humidity lower than the predetermined relative humidity.10-23-2008
20090095073Impedance sensor - An impedance sensor for detecting a mixing ratio of a liquid or a gas includes a substrate, at least a pair of electrodes, and a protective film. The substrate is configured to be disposed in the liquid or the gas. The pair of electrodes is disposed on the substrate. The protective film is disposed on the substrate so as to cover the pair of electrodes. The protective film is made of a material having a relative permittivity greater than or equal to 6.04-16-2009
20090145220Gas Sensor and Method for Its Production - In a gas sensor with at least two electrodes and with a sensor body which is connected thereto and is composed of a gas-sensitive material, in addition to pores which may already be present, second cavities are provided in the sensor body The second cavities may be suitable on account of their size to facilitate and accelerate the distribution of gas molecules in the sensor body and to thus improve the time response of the gas sensor.06-11-2009
20100031745Nano-porous alumina sensor - A nano-sensor including a substrate including pores formed thereon and a detecting mechanism for detecting changes in capacitance due to the presence of a substance. A method of measuring humidity by sampling air with the nano-sensor, detecting changes in capacitance, and determining the relative humidity of air. A method of detecting the presence of a substance by taking a sample with the nano-sensor, detecting changes in capacitance, and determining the presence of a substance. A method of making the nano-sensor by forming nano-pores on a substrate, and forming, on the surface of the substrate, a detecting mechanism for detecting changes in capacitance due to the presence of a substance.02-11-2010
20100307238HUMIDITY SENSOR AND METHOD OF MANUFACTURING THE SAME - A humidity sensor comprising an insulating substrate, a moisture-sensitive layer, and at least a detection electrode contacting the moisture-sensitive layer, wherein the moisture-sensitive layer is a porous, photocatalytic metal oxide.12-09-2010
20110005313HUMIDITY SENSOR - A humidity sensor that includes a humidity sensitive material. A sensing circuit associated with the humidity sensitive material estimates the ambient humidity based upon the humidity sensitive material. A heating element is associated with the humidity sensitive material. A temperature circuit temporarily increases the temperature proximate the humidity sensitive material and thereafter the sensing circuit estimates the ambient humidity.01-13-2011
20110138908HUMIDITY SENSING CIRCUIT WITH TEMPERATURE COMPENSATION - A humidity sensing circuit with temperature compensation includes a wave producing module, a phase processing module, a sensing module and a detecting module. The wave producing module outputs a wave signal. The phase processing module outputs an oscillatory wave and an invert oscillatory wave according to the wave signal. The sensing module has a temperature sensor and a humidity sensor which are connected in series. The temperature sensor and the humidity sensor respectively receive the oscillatory wave and the invert oscillatory wave. The sensing module outputs a parameter signal according to the oscillatory wave and the invert oscillatory wave. The detecting module outputs a detection signal according to the parameter signal. Hence, the humidity sensing circuit with temperature compensation senses the temperature and humidity by the simple circuit design. Moreover, it is feasible for circuit design and application.06-16-2011
20110146400CAPACITIVE SENSOR - A capacitive sensor for detecting the presence of a substance includes a plurality of upstanding conductive pillars arranged within a first layer of the sensor, a first electrode connected to a first group of the pillars, a second electrode connected to a second, different group of the pillars, and a dielectric material arranged adjacent the pillars, for altering the capacitance of the sensor in response to the presence of said substance.06-23-2011
20110179861CAPACITIVE HUMIDITY DETECTOR WITH NANOPOROUS HYDROPHILIC DIELECTRIC - A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.07-28-2011
20110185810SENSOR HAS COMBINED IN-PLANE AND PARALLEL-PLANE CONFIGURATION - A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.08-04-2011
20110259099CAPACITIVE HUMIDITY SENSOR AND MANUFACTURING METHOD - A capacitive humidity sensor, and more particularly, to a capacitive humidity sensor and a manufacturing method thereof capable of increasing reliability of the sensor by forming a dehumidification layer of a polymer material having a large surface area between a lower electrode layer and an upper electrode layer while miniaturizing the humidity sensor by forming a sensor unit on an ROIC substrate.10-27-2011
20110308313HUMIDITY SENSOR - A humidity sensor having a pair of electrodes spaced adjacent each other and defining an air gap therebetween such that the electrodes provide a capacitor with air as dielectric material, and, circuitry for sensing capacitance connected to the electrodes such that changes in permittivity of the air in the air gap caused by changes in humidity, cause changes in capacitance, wherein, the circuitry generates a signal indicative of humidity in the air in response to sensed capacitance of the electrodes.12-22-2011
20120000284HUMIDITY SENSOR PACKAGE AND MANUFACTURING METHOD THEREOF - A humidity sensor package includes: a humidity sensor that is mounted on a main surface of a package substrate and that have a humidity-sensing area; a control IC that is mounted on the main surface of the package substrate; a sealing resin that seals at least an external connection portion of the humidity sensor; and a partition member that partitions a sealing area of the sealing resin and the humidity-sensing area from each other so as to expose the humidity-sensing area to an external environment. Here, a first distance in the thickness direction from the package substrate to the top surface of the partition member is smaller than a second distance in the thickness direction from the package substrate to the top surface of the sealing resin.01-05-2012
20120000285CAPACITIVE TYPE HUMIDITY SENSOR AND MANUFACTURING METHOD THEREOF - A capacitive type humidity sensor is provided, where a sensor chip substrate, with a sensor section where electrostatic capacitance changes in accordance with humidity, a reference section where electrostatic capacitance does not change, and a plurality of pads which are output terminals of each section, and an IC substrate, which is electrically connected to the pads and which outputs the difference in capacitance between the sections as a voltage, are fixed to the same support substrate, where a protective member, which forms a sealed region surrounding the sensor section and which covers the reference section, is provided on the sensor chip substrate, the support substrate is covered by a sealing resin except for the region which is covered by the protective member, the sensor section is exposed to air at the region which is surrounded by the protective member, and the other constituent elements are covered by the sealing resin.01-05-2012
20120247203RAPID RESPONSE RELATIVE HUMIDITY SENSOR USING ANODIC ALUMINUM OXIDE FILM - A rapid response relative humidity sensor based on nano-structured aluminum oxide thin film is disclosed. The main body of the sensor is an anodic aluminum oxide thin film of about 2-20 μm thick formed from an Al substrate which serves as one electrode. A porous metal layer of about 20-200 nm thick is formed over the anodic aluminum oxide thin film and functions as a second electrode. The alumina thin film contains nano-sized channels of about 10-100 nm in diameter, serving as a capacitive relative humidity sensor having high sensitivity and short response time. Thermal annealing at elevated temperature improves the linearity of the capacitance versus humidity curve, giving a full range humidity sensing range. Hysteresis and degradation are negligible for the humidity sensors.10-04-2012
20120255354HUMIDITY MEASUREMENT DEVICE AND METHOD - A humidity measurement device comprises a capacitance measurement unit (10-11-2012
20130098151CAPACITIVE SENSOR AND METHOD FOR MAKING THE SAME - The present invention relates to capacitive sensors for measuring humidity and moisture and to an improved process for making the same. The fabrication process for a capacitive sensor having a multi-layer electrodes for measuring humidity and moisture comprising disposing the multi-layer interdigitated electrodes in a multi-layer polyimides; providing a plurality of trenches on the surface of the electrode by lift off process; and covering the sensor with photosensitive negative polyimide.04-25-2013
20130139587TUNABLE HUMIDITY SENSOR WITH INTEGRATED HEATER - A capacitive humidity sensor includes a first electrode, a humidity sensitive dielectric layer, and a second electrode. The humidity sensitive dielectric layer is between the first and the second electrodes. The humidity sensitive dielectric layer is etched at selected regions to form hollow regions between the first and second electrodes.06-06-2013
20140026652SENSOR FOR MEASURING HIGH HUMIDITY CONDITIONS AND/OR CONDENSATION - A humidity sensor is provided having humidity levels approaching 100% relative humidity can be measured, as well as condensation measurements which appear as RH values “above 100%”. The humidity sensor is a capacitance based sensor. The capacitor(s) of the sensor is dimensioned so that substantial electric fields of the capacitor extend to the sensor/ambient air interface so that the conditions at the ambient side of the interface provide data for the sensor. In particular, the capacitance effects of moisture formation on the ambient side of the sensor/ambient air interface are utilized as part of the measurements so that relative humidity levels below and above 100% can be detected. The capacitor(s) of the sensor is dimensioned so that substantial electric fields of the capacitor extend to the air interface so that the conditions at ambient side of the interface provide data for the sensor.01-30-2014
20140026653Radiation-Blocking Structures - Stacked layers of non-continuous opaque layer structures are disclosed herein that may be configured to block radiation such as visible light or other forms of light, while at the same time allowing penetration of ambient gases. In one example, such non-continuous opaque layer structures may be configured as stacked non-continuous metal layer structures that together fully block penetration of radiation while at the same provide sufficient open spaces between and/or within the metal layer segments of a given integrated circuit layer to meet maximum metal spacing rules. In another example, such non-continuous opaque layer structures may be configured as capacitive structures.01-30-2014
20140076048Humidity Sensor and Sensor Element Therefor - A humidity sensor element includes a dielectric substrate, a nonporous conductive electrode disposed on the dielectric substrate, a permeable conductive electrode having a thickness in a range of from 4 to 10 nanometers and permeable by water vapor, and a detection layer sandwiched between the nonporous conductive electrode and the permeable conductive electrode. The permeable conductive electrode is parallel to the nonporous electrode. Both conductive electrodes have respective conductive leads attached thereto. The detection layer includes a copolymer having monomeric units comprising wherein M represents H, or an alkali metal. A humidity sensor including the humidity sensor element is also disclosed.03-20-2014
20140216153HUMIDITY SENSOR WITH TEMPERATURE COMPENSATION - A gas sensing device that includes humidity compensation.08-07-2014
20140366630MICROMECHANICAL MOISTURE SENSOR DEVICE, CORRESPONDING MANUFACTURING METHOD, AND MICROMECHANICAL SENSOR SYSTEM - A micromechanical moisture sensor device includes: a substrate having a front side and a rear side; an interdigital printed conductor track arrangement provided above and/or below the front side of the substrate; and a moisture-sensitive polymer layer situated above and in the gaps of the interdigital printed conductor track arrangement. The moisture-sensitive polymer layer extends below the front side into the substrate.12-18-2014
20150047430INTEGRATED HUMIDITY SENSOR AND METHOD FOR THE MANUFACTURE THEREOF - An integrated humidity sensor includes at least one measuring capacitor and one humidity-sensitive polymer as a dielectric that is also suited for use in a dirty, i.e., particle-laden measurement environment. The measuring capacitor of the humidity sensor is in the form of a plate capacitor in the layered structure of the sensor element, the outer of two electrodes being located at the surface of the layered structure. Disposed between the two electrodes of the measuring capacitor is a humidity-sensitive polymer layer that is in direct contact with the measurement environment via humidity-permeable paths in the outer electrode of the measuring capacitor. These humidity-permeable paths extend from the surface of sensor element to the polymer layer, and are so small in lateral extent that they do not significantly affect the electrical conductivity within the outer electrode.02-19-2015
20150068302CAPACITIVE HUMIDITY SENSOR - Provided is a capacitive humidity sensor. The capacitive humidity sensor includes an upper electrode disposed on a first plane, a plurality of first electrodes included in the upper electrode, a plurality of second electrodes disposed between the first electrodes, and a humidity sensitive layer surrounding the second electrodes.03-12-2015
20150346132APPARATUS FOR IDENTIFYING A VALUE OF A PROPERTY OF A FLUID WHICH IS TO BE MEASURED, METHOD FOR OPERATING AN APPARATUS FOR IDENTIFYING A VALUE OF A PROPERTY OF A FLUID WHICH IS TO BE MEASURED, AND METHOD FOR MANUFACTURING AN APPARATUS FOR IDENTIFYING A VALUE OF A PROPERTY OF A FLUID WHICH IS TO BE MEASURED - An apparatus is provided for identifying a property value of a fluid which is to be measured, a method for operating such an apparatus, and a method for manufacturing such an apparatus. The apparatus encompasses:12-03-2015
20150355124HUMIDITY SENSING APPARATUS - A humidity sensing portion is mounted in a gap between a first opposite member and a second opposite member.12-10-2015
20160178552HUMIDITY SENSOR06-23-2016
20160178553ELECTRONIC MOISTURE SENSOR06-23-2016
20160202201Humidity Sensor07-14-2016
073335050 Resistance or conductivity 17
20090188316Resistive Hydrogen Sensor - A resistive hydrogen sensor has at least two electrical connections and at least one resistance layer containing at least one suitable material for incorporating hydrogen, via which the electrical connections are connected to each other. The resistance layer adjoins at least one interface on a contact layer, which contains at least one chemical element from the fourth subgroup of the periodic table and/or carbon. The contact layer connected in series between the electrical connections to the resistance layer.07-30-2009
20100071460Signal quality of field effect transistor-based humidity sensors or gas sensors - Humidity or a gas concentration or a solvent concentration in at least one gas is detected by a field effect transistor-based gas sensor whose sensor signal is generated by the change in the work function on a sensitive film. Detection is to be provided in a simple, effective and inexpensive manner. An additional change in potential is impressed at a gate of the field effect transistor and a variable of the resulting change in the sensor signal relative to the additional change in potential is evaluated. For example, each variable, which is e.g. a ratio, can be assigned a relative humidity, a gas concentration, or a solvent concentration. Sensitive films having at least one polymer are particularly advantageous.03-25-2010
20100147070HUMIDITY SENSOR AND METHOD OF MANUFACTURING THE SAME - Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.06-17-2010
20110048127Thermal Humidity Sensor - Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 03-03-2011
20110072899SENSOR FOR DETERMINING HUMIDITY - The invention relates to a sensor (03-31-2011
20110296912INTEGRATED CIRCUIT AND MANUFACTURING METHOD THEREFOR - Disclosed is an integrated circuit comprising an electrode arrangement for detecting the presence of a liquid, said electrode arrangement comprising a first electrode and a second electrode, wherein, prior to exposure of the electrode arrangement to said liquid, a surface of at least one of the first electrode and second electrode is at least partially covered by a compound that is soluble in the liquid; the electrical properties of the electrode arrangement being dependent on the amount of the compound covering said surface. An package and electronic device comprising such an IC and a method of manufacturing such an IC are also disclosed.12-08-2011
20120260732SENSOR10-18-2012
20120272728Hydrogen Sensor - A hydrogen sensor comprising: 11-01-2012
20130133420HUMIDITY SENSOR AND METHOD OF SENSING HUMIDITY - The present invention provides a humidity sensor including a first conductor, a second conductor, a power supply unit, and a current sensing unit. The first and the second conductors are separated from each other for a predetermined distance and are placed at a predetermined place. The power supply unit supplies high voltage to the first conductor, and the current sensing unit senses a change of current in the conductor and generate a signal in association with the change of the current. Therefore, the humidity sensor may operate in any environment, such as high temperature and high pressure.05-30-2013
20140182372SENSING WATER VAPOUR - A water vapour sensor comprises a substrate and a film of carbon nanotubes impregnated with surfactant on the substrate. The substrate is of material which is inert relative to the film. Two or more electrical conductors are in contact with in spaced apart zones of the film, whereby the impedance of the film may be measured. The sensor is housed in housing which protects the sensor but also allows exposure of the film to water vapour.07-03-2014
20140283597Sensor Device Having Plural Resistance Change Type Sensors and Method of Using the Same - To detect humidity, used are a first series connection circuit connecting a thermistor and a fixed resistor via a node, a second series connection circuit connecting a resistance change type humidity sensor and the thermistor via the node, and a third series connection circuit connecting the humidity sensor and the fixed resistor via the node. A predetermined voltage is applied across the first circuit to detect a first voltage indicating temperature through the node, and secondly across the second circuit to detect a second voltage indicating a first humidity through the node, and finally across the third circuit to detect a third voltage indicating a second humidity through the node. Then, the first voltage is compared with a reference voltage and judgment is made, based on a comparison result, to determine which of the second voltage and the third voltage is relevant to use as a basis for outputting the humidity as detected.09-25-2014
20140298904HUMIDITY SENSOR, HUMIDITY SENSING METHOD AND TRANSISTOR THEREFOR - Disclosed is a humidity sensor including: a conductive material in which electric charges are charged; a charger which charges the electric charges in the conductive material; and a measurer which measures a change amount of the electric charges charged in the conductive material.10-09-2014
20150059471Sensing - An apparatus including a first sensor including a sensing material that is sensitive to a first parameter and a second parameter, wherein sensitivity to the first parameter changes sensitivity to the second parameter. The sensitivity of the first sensor to one of the first and the second parameters may be controlled by maintaining, as a constant, the other of the first and the second parameters. The apparatus may include a second sensor sensitive to at least one of the first parameter and the second parameter. The first parameter may be deformation and the second parameter may be a concentration of a gaseous analyte such as, for example, humidity. The second sensor may include the sensing material that is sensitive to the first parameter and the second parameter.03-05-2015
20150075280Fast Response Humidity Sensor - A water content sensor is disclosed. The sensor includes a wire filament configured with a Péclet number of 1 or less. The wire filament has an electrically conductive material with an electrical resistance that varies as a function of temperature. The sensor includes a pair of electrically conductive prongs coupled to opposite ends of the wire filament. Electrically conductive stubs may be coupled to the prongs. A structural support may be coupled to the prongs. The structural support structure may be comprised of silicon. The wire filament may be coupled to driving circuitry configured to supply an electric current to the wire filament to maintain the wire filament at one of an approximately constant current, an approximately constant voltage and an approximately constant temperature. The wire filament may be platinum or titanium.03-19-2015
20150293046Salt-Based Device and a Circuit to Monitor and Log the Times a Data Center Air Goes Above a Predefined Limit - A salt-based device and a circuit to monitor and log the time periods a data center air's relative humidity goes above a predefined limit. The choice of the salt is such that its deliquescent relative humidity is equal to the desired limit, so that above the desired limit, the salt gets wet and therefore electrically conductive. An alarm can then give notice that relative humidity levels are above acceptable levels so that remedial action may be taken before problems such as electronic malfunction develop.10-15-2015
20160003757GAS MEASUREMENT DEVICE AND MEASUREMENT METHOD THEREOF - A gas measurement device measures gas using a gas sensor including a sense resistance exposed to the gas and a reference resistance not exposed to the gas. The gas measurement device applies a first current value and a second current value to the sensor. A detector functions to detect a first resistance variation and a second resistance variation of the sense resistance exposed to the gas with respect to the reference resistance as a function of the first current value and the second current value, respectively. The resistance variation dependent on relative humidity is then determined as a function of the first and second resistance variations and a first constant. The resistance variation dependent on gas content is then determined as a function of the first and second resistance variations and a second (different) constant.01-07-2016
20160077028HUMIDITY SENSOR - A humidity sensor may include a first substrate having a recess formed in a first side, a second substrate and an insulating layer supported by the second substrate. The second substrate and the insulating layer may be supported by the first side of the first substrate and extend over the recess to form a diaphragm with the insulating layer facing the recess. The diaphragm may be at least partially thermally isolated from a remainder of the second substrate. A resistive heater element may be supported by the diaphragm. A pair of sensing electrodes are electrically separated from each other and supported by the diaphragm. A sensing material is disposed over the pair of sensing electrodes, wherein an electrical property of the sensing material changes in response to a change in moisture content of the sensing material.03-17-2016
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