VAT HOLDING AG Patent applications |
Patent application number | Title | Published |
20160033061 | DIAPHRAGM BELLOWS - In a diaphragm bellows, diaphragms that follow one another are welded together alternately in region of their inner and outer edges. At least one guide part is provided for guiding on a surface of a rod passing through an inner through-opening in the diaphragm bellows or of a tube surrounding the diaphragm bellows. The at least one guide part is made of sheet metal and has a holding portion which, in the case of guiding on a rod, is located, in a region of an outer edge, between adjacent diaphragms and is welded to the adjacent diaphragms and, in the case of guiding on a tube, is located, in the region of an inner edge, between adjacent diaphragms and is welded to the adjacent diaphragms. The holding portion is connected to a guide portion for guiding on the surface of the rod or of the tube. | 02-04-2016 |
20160003363 | VALVE, IN PARTICULAR A VACUUM VALVE - A valve having a closure member which is pressed against a valve seat in a closed position and closes an opening, and having a first valve drive for moving the closure member along a first movement path back and/or forth between a maximum open position and an intermediate position, and having a second valve drive for moving the closure member along a second movement path back and/or forth between the intermediate position and the closed position. The first movement path and the second movement path are arranged in an angled manner with respect to one another. The valve additionally includes at least one locking device with at least one locking body which interacts with at least one inclined surface and/or comprises at least one inclined surface, wherein the locking body is movable relative to the closure member along a third movement path between a locking position and a releasing position. | 01-07-2016 |
20150345662 | VACUUM VALVE - A vacuum valve including a closure element ( | 12-03-2015 |
20150308584 | VALVE - A valve with an opening surrounded by a seat, and a closure member, which, in a closed position, presses onto the seat and closes the opening and, in an intermediate position, is raised from the seat and overlaps with the opening and, in a maximum opening position, at least partially releases the opening. The valve has a frst valve drive for moving the closure member between the maximum opening position and the intermediate position along a first movement track, and a second valve drive for moving the closure member between the intermediate position and the closed position along a second movement track which is at an angle to the first movement track. The valve has at least one transmission part which is provided for reversible deformation by the second valve drive, and the first valve drive acts on the closure member with the interposition of the transmission part. | 10-29-2015 |
20150285396 | VACUUM VALVE - A vacuum valve with a housing having a valve seat, a closure member which, in a closed position, is pressed against the valve seat, and a manual actuator, by which the closure member is displaceable in a linear manner and which includes a screw transmission, which is actuatable by a rotational element and has a first driving part connected to the rotational element and a second driving part connected to the closure member. The driving parts have mating external and internal threads. A closing spring acts between the valve housing and the closure member. The first driving part is displaceable relative to the valve housing parallel to the closing direction, and with the closure member in the open position, the closure member is held against displacement in the closing direction by a supporting stop against which a stop face of the rotational element or of the first driving part abuts. | 10-08-2015 |
20150285382 | VACUUM VALVE - A vacuum valve includes a valve housing ( | 10-08-2015 |
20150136236 | METHOD OF OPERATING A VALVE - Method of operating a valve ( | 05-21-2015 |
20150028243 | VALVE WITH GROUNDED CLOSURE MEMBER - A valve with a closure member that, in its closed position, seals the through-opening, with the interposition of the seal against the valve seat, and is movable into the closed position by a relative movement between the closure member and the supporting member. The supporting member, in the closed position of the closure member, is supported on the abutment seat. The valve also has at least one grounding element for electrically grounding the closure member in its closed position, fastened on a carrier component of the valve. The carrier component is the closure member, the supporting member, the valve seat, or the abutment seat. The grounding element has a contact element and a supporting element, which is connected to the contact element, and the contact element and the supporting element are formed of mutually different materials or material compositions and the contact element is softer than the supporting element. | 01-29-2015 |
20140183391 | VACUUM SLIDE GATE VALVE - A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position. | 07-03-2014 |
20140158924 | VACUUM VALVE AND CLOSURE MEMBER FOR CLOSING A FLOW PATH IN A GAS-TIGHT MANNER BY MEANS OF A LINEAR MOVEMENT - A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm. | 06-12-2014 |
20140131603 | VACUUM VALVE - A vacuum valve having a valve rod ( | 05-15-2014 |
20130276905 | VALVE HOUSING FOR A VACUUM VALVE - A valve housing for a vacuum valve has opposed valve openings ( | 10-24-2013 |
20130199628 | ARRANGEMENT HAVING AT LEAST ONE VALVE - An arrangement having at least one valve, in particular a vacuum valve, with a closure member of the valve for closing a through-opening of the valve and a drive for adjusting the closure member between a closed position, in which the closure member closes the through-opening, and at least one open position, in which the closure member opens the through-opening at least in regions. For the application of heat to the closure member, the valve has a chamber for a heat transfer fluid, connected in a thermally conducting manner to the closure member and closed off, preferably permanently, in relation to the through-opening. A supply line of the arrangement opens into the chamber, supplying heat transfer fluid for the application of heat to the closure member to the chamber. At least one heat exchanger for the application of heat to the heat transfer fluid is arranged in the supply line. | 08-08-2013 |
20130126772 | GAS METERING DEVICE WITH SPRING LOADING DEVICE HAVING SERIALLY ARRANGED SPRINGS - A gas metering valve ( | 05-23-2013 |
20130025704 | VALVE FOR THE SUBSTANTIALLY GAS-TIGHT INTERRUPTION OF A FLOW PATH - A valve for the gastight interruption of a flow path is disclosed. A valve housing includes a first opening and a valve seat. A valve disk includes an inner disk portion, which is linearly movable relative to an outer disk portion so that, in a closed setting, a pressure differential acts substantially upon the movable inner disk portion, which is supported on the valve housing. The valve seat has a radially inward pointing first inner face and the outer disk portion has a radially outward pointing first outer face, wherein in the closed setting there exists a radial sealing contact with the first inner face. The outer disk portion has a radially inward pointing second inner face and the inner disk portion has a radially outward pointing second outer face, having a radially sealing contact with the second inner face. | 01-31-2013 |
20120317887 | DEVICE FOR CLOSING AN OPENING IN A CHAMBER WALL - Device for closing an opening in a chamber wall of a low-pressure chamber or vacuum chamber, which has at least one movably mounted closure element ( | 12-20-2012 |
20120298904 | VACUUM VALVE - A vacuum valve, including a valve housing, which has a passage having an axis, a seat that surrounds the passage and that lies in a first plane, and a counter seat that surrounds the passage and that lies in a second plane that forms a wedge shape with the first plane, and including a closure device, which can be moved between an open position in which the passage is released and a closed position in which the passage is sealed and which has a closure plate parallel to the first plane and a counter plate parallel to the second plane, and including a valve rod, which has a longitudinal axis and which carries the closure device and which can be moved in a straight line. In order to spread apart the closure plate and the counter plate, the closure device includes a spreading unit, which lies between the closure plate and the counter plate and which can be moved in the closing direction of the valve rod relative to the closure plate and the counter plate, and a support part, which is movably guided relative to the spreading unit and which is connected to the closure plate and/or the counter plate. | 11-29-2012 |
20120298899 | DOOR FOR SEALING AN OPENIING - A door for sealing an opening ( | 11-29-2012 |
20120280153 | VALVE WITH AT LEAST ONE CLOSING BODY - A valve, particularly a vacuum valve, with at least one closing body to close at least one penetrating opening of the valve and a drive to adjust the closing body between a closed position, in which the closing body closes the penetrating opening, and at least one opened position, in which the closing body at least partially releases the penetrating opening. The drive includes a first volume, which can be impinged with pressure, to adjust the closing body into its closed position and for adjusting it to an opened position, with the valve additionally having an elastic element, which pre-stresses the closing body in a direction of its closed position or its opened position. | 11-08-2012 |
20120205570 | VALVE FOR INTERRUPTING A FLOW PATH IN A SUBSTANTIALLY GAS-TIGHT MANNER - The invention relates to a valve for interrupting a flow path in a gas-tight manner. The valve has a valve housing, a valve plate, and a drive by means of which the valve plate can be shifted between an open position and a closed position. According to the invention, the valve has a seal support which, in a coupling position, can be coupled to and decoupled from a first seat of the valve plate on the latter and, in a parked position, can be coupled to and uncoupled from a second seat of a parking section in said section of the valve housing. A first seal is arranged on the seal support such that the first seal contacts a valve seat in a gas-tight manner in the coupling position and in the closed position, a gas-tight connection being formed between the first seal and a closing surface that lies on the valve plate. The seal support can be detachably coupled to the first seat of the valve plate in the coupling position by means of first coupling means. The seal support can be detachably coupled to the second seat of the parking section in the parked position by means of second coupling means. | 08-16-2012 |
20110186762 | FLAP TRANSFER VALVE WITH PIVOTABLE VALVE CLOSURE BEAM - A flap transfer valve is disclosed for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber having an elongated first opening, which is surrounded in the form of a frame by a first sealing surface on a first sealing plane, and an elongated valve closure beam, having a second sealing surface which corresponds to the first sealing surface, can be brought into gas-tight contact with it, and is located on a second sealing plane. A support is arranged on the rear face of the valve closure beam, which is arranged such that it can pivot through a limited pivoting angle about a tilting axis. The support together with the valve closure beam can pivot about a pivoting axis, which lies on the first sealing plane, and the tilting axis lies on the second sealing plane. | 08-04-2011 |
20110175011 | VACUUM VALVE - A vacuum valve including a wall ( | 07-21-2011 |
20110168937 | VACUUM VALVE WITH GAS-TIGHT SHAFT PENETRATION - The invention relates to a vacuum valve for interrupting, releasing or controlling a flowing medium in the interior ( | 07-14-2011 |
20110140019 | VACUUM VALVE - For a vacuum valve comprising a valve housing ( | 06-16-2011 |
20110108750 | MOUNTING OF A VALVE PLATE ON A VALVE ROD - A mounting of a valve plate ( | 05-12-2011 |
20110095220 | FLAP TRANSFER VALVE WITH PIVOTING BEARING - A flap transfer valve is disclosed. An elongated first opening can be closed by an elongated valve closure beam, which can be pivoted via a pivoting bearing between a closed and open position. A shaft can be rotated by a drive and is operatively connected to the valve closure beam such that rotation of the shaft causes the valve closure beam to pivot. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis. First arms are arranged on the shaft to provide a force to the rear face of the valve closure beam to pivot the valve closure beam. According to one development of the invention, the valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing, wherein the shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing. | 04-28-2011 |
20110095219 | FLAP TRANSFER VALVE WITH VALVE COVER - A flap transfer valve is disclosed. An elongated first opening can be closed by an elongated valve closure beam between a closed position and an open position. A shaft can be rotated about a shaft axis by a drive and is operatively connected to the valve closure beam to cause the valve closure beam to pivot. The valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing. The shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis. | 04-28-2011 |
20110095218 | CLOSING UNIT FOR A VACUUM VALVE - A closing unit for a vacuum valve includes a first valve plate ( | 04-28-2011 |
20110057136 | SLIDING VALVE - A sliding valve including a valve body ( | 03-10-2011 |
20100219362 | VACUUM VALVE - For a vacuum valve including a wall ( | 09-02-2010 |
20100116349 | METHOD FOR CONTROLLING OR REGULATING A VACUUM VALVE - A method for controlling or regulating a vacuum valve that includes a valve body ( | 05-13-2010 |
20100108151 | METHOD FOR CONTROLLING OR REGULATING A VACUUM VALVE - A method for controlling or regulating a vacuum valve that includes: a valve body ( | 05-06-2010 |
20100012878 | VACUUM VALVE AND CLOSURE PLATE FOR A VACUUM VALVE - The invention relates to a vacuum valve for gas-tight sealing of a flow path, comprising at least one thrust rod, which has a cylindrical connecting section, and a closure plate which is removably mounted on the thrust rod and has at least one concave, semicircular first rod recess corresponding to the connecting section. A clamping piece, which has a concave, semicircular second rod recess corresponding to the connecting section, is adjustably mounted by means of a mechanical fixing element on the closure plate in such a way that the semicircular first rod recess and the opposite semicircular second rod recess define a cylindrical holding region which is adjustable in width and in which the cylindrical connecting section is detachably held. | 01-21-2010 |
20080302989 | VACUUM GATE VALVE HAVING A LIMB ELEMENT - The invention relates to a vacuum gate valve comprising a closure disk for gas-tight closing of an opening by displacement over the opening and pressing of the closure disk onto the opening. A connecting rod with which the closure disk is coupled is linearly adjustable by means of a linear drive unit and the closure disk is thus displaceable between a position uncovering the opening and an intermediate position in which said disk is pushed over the opening. For pressing the closure disk with its closing side onto the valve seat into the closed position by means of an engagement element, at least two limbs are pivotably mounted at one limb end on the back of the closure disk via a first joint and at the other limb end on a support via a second joint. The limbs, the back and the support form an articulated parallelogram. Each of the limbs forms, with the respective first and second joints, a common integral part which consists of a resilient material, the first joint and the second joint being formed in each case by a thin-walled, flexible section on the limb. | 12-11-2008 |