TAIWAN MEMORY CORPORATION
TAIWAN MEMORY CORPORATION Patent applications | ||
Patent application number | Title | Published |
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20110101435 | BURIED BIT LINE PROCESS AND SCHEME - The embodiment provides a buried bit line process and scheme. The buried bit line is disposed in a trench formed in a substrate. The buried bit line includes a diffusion region formed in a portion of the substrate adjacent the trench. A blocking layer is formed on a portion sidewall of the trench. A conductive plug is formed in the trench, covering sidewalls of the diffusion region and the blocking layer. | 05-05-2011 |