ENTEGRIS, INC. Patent applications |
Patent application number | Title | Published |
20160141194 | FRONT OPENING WAFER CONTAINER WITH WEIGHT BALLAST - Apparatuses and methods providing a ballast system for adjusting the center of gravity of a standardized front opening wafer container. Various embodiments of the disclosure present ballast systems that are low profile, do not require modifications to the shell of the wafer container, and can be retrofit to existing wafer carriers. In some embodiments, these capabilities are accomplished by a ballast that mounts to a kinematic coupling plate of the wafer container. In one embodiment, the ballasting can also provide sufficient counter force to the lifting forces associated with purging of the wafer container, thereby preventing “lift off” of the wafer container during purging operations. The ballasts can be removed for shipping of the wafer container, thereby decreasing shipping costs. | 05-19-2016 |
20160107136 | APPARATUS AND METHOD FOR PREPARATION OF COMPOUNDS OR INTERMEDIATES THEREOF FROM A SOLID MATERIAL, AND USING SUCH COMPOUNDS AND INTERMEDIATES - An apparatus is described, as including a reaction region for contacting a reactant gas with a reactive solid under conditions effective to form an intermediate product, and an opening for allowing an unreacted portion of the gaseous reagent and the intermediate product to exit the reaction region. The apparatus can be beneficially employed to form a final product as a reaction product of the intermediate product and the reactant gas. The reaction of the reactant gas and reactive solid can be conducted in a first reaction zone, with the reaction of the reactant gas and intermediate product conducted in a second reaction zone. In a specific implementation, the reaction of the reactant gas and intermediate product is reversible, and the reactant gas and intermediate product are flowed to the second reaction zone at a controlled rate or in a controlled manner, to suppress back reaction forming the reactive solid. | 04-21-2016 |
20160089655 | PVDF PYROLYZATE ADSORBENT AND GAS STORAGE AND DISPENSING SYSTEM UTILIZING SAME - A polyvinylidene fluoride (PVDF) pyrolyzate adsorbent is described, having utility for storing gases in an adsorbed state, and from which adsorbed gas may be desorbed to supply same for use. The PVDF pyrolyzate adsorbent can be of monolithic unitary form, or in a bead, powder, film, particulate or other finely divided form. The adsorbent is particularly suited for storage and supply of fluorine-containing gases, such as fluorine gas, nitrogen trifluoride, carbo-fluoride gases, and the like. The adsorbent may be utilized in a gas storage and dispensing system, in which the adsorbent is contained in a supply vessel, from which sorbate gas can be selectively dispensed. | 03-31-2016 |
20160046849 | ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES FOR UTILIZING SAME - Isotopically enriched silicon precursor compositions are disclosed, as useful in ion implantation to enhance performance of the ion implantation system, in relation to corresponding ion implantation lacking such isotopic enrichment of the silicon precursor composition. The silicon dopant composition includes at least one silicon compound that is isotopically enriched above natural abundance in at least one of | 02-18-2016 |
20160041136 | FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITORING OF FLUID STORAGE AND DISPENSING VESSEL - A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests. | 02-11-2016 |
20160030879 | CARBON PYROLYZATE ADSORBENT HAVING UTILITY FOR CO2 CAPTURE AND METHODS OF MAKING AND USING THE SAME - A particulate form carbon pyrolyzate adsorbent, having the following characteristics: (a) CO | 02-04-2016 |
20160020102 | CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERFORMANCE IMPROVEMENT - Ion implantation processes and systems are described, in which carbon dopant source materials are utilized to effect carbon doping. Various gas mixtures are described, including a carbon dopant source material, as well as co-flow combinations of gases for such carbon doping. Provision of in situ cleaning agents in the carbon dopant source material is described, as well as specific combinations of carbon dopant source gases, hydride gases, fluoride gases, noble gases, oxide gases and other gases. | 01-21-2016 |
20160020087 | POST-CMP REMOVAL USING COMPOSITIONS AND METHOD OF USE - An amine-free composition and process for cleaning post-chemical mechanical polishing (CMP) residue and contaminants from a microelectronic device having said residue and contaminants thereon. The amine-free composition preferably includes at least one oxidizing agent, at least one complexing agent, at least one basic compound, and water and has a pH in the range from about 2.5 to about 11.5. The composition achieves highly efficacious cleaning of the post-CMP residue and contaminant material from the surface of the microelectronic device without compromising the low-k dielectric material or the copper interconnect material. | 01-21-2016 |
20160003651 | FLUID MONITORING APPARATUS - A fluid monitoring apparatus, including a circuitry housing containing circuitry for processing fluid sensing signals and responsively transmitting an output, with a sensor assembly adapted for mechanical and electrical coupling to the circuitry housing. The sensor assembly includes at least one sensing member arranged to respond to a fluid species of interest in the monitored fluid, for generation of an output. The apparatus includes at least one of (A) a printed circuit board adapted to engage the circuitry housing and to mechanically couple to the sensor assembly, (B) the sensor assembly including a base and sensing element removably connected to the base by press-fit coupling elements, and (C) the sensor assembly including a base and a sensing filament connected thereto, and a filament guard to protectively circumscribe the sensing filament. | 01-07-2016 |
20150380212 | ION IMPLANTATION COMPOSITIONS, SYSTEMS, AND METHODS - Ion implantation compositions, systems and methods are described, for implantation of dopant species. Specific selenium dopant source compositions are described, as well as the use of co-flow gases to achieve advantages in implant system characteristics such as recipe transition, beam stability, source life, beam uniformity, beam current, and cost of ownership. | 12-31-2015 |
20150364537 | ALD PROCESSES FOR LOW LEAKAGE CURRENT AND LOW EQUIVALENT OXIDE THICKNESS BiTaO FILMS - A high dielectric constant (k≧40), low leakage current (≦10 | 12-17-2015 |
20150360164 | ADSORBENT HAVING UTILITY FOR CO2 CAPTURE FROM GAS MIXTURES - A carbon pyrolyzate adsorbent is described that is selective for carbon dioxide in contact with gas mixtures including carbon dioxide and methane. The adsorbent has a carbon dioxide adsorbent capacity at 1 bar pressure of greater than 50 cm | 12-17-2015 |
20150357152 | ION IMPLANTATION SYSTEM AND METHOD - An ion implantation system and method, providing cooling of dopant gas in the dopant gas feed line, to combat heating and decomposition of the dopant gas by arc chamber heat generation, e.g., using boron source materials such as B | 12-10-2015 |
20150337436 | METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL - Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer. | 11-26-2015 |
20150318108 | IN-SITU OXIDIZED NiO AS ELECTRODE SURFACE FOR HIGH k MIM DEVICE - A high dielectric constant metal-insulator structure, including an electrode comprising NiO | 11-05-2015 |
20150315215 | COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF SILICON-CONTAINING FILMS INCLUDING SILICON CARBONITRIDE AND SILICON OXYCARBONITRIDE FILMS - Silicon precursors for forming silicon-containing films in the manufacture of semiconductor devices, such as films including silicon carbonitride, silicon oxycarbonitride, and silicon nitride (Si | 11-05-2015 |
20150308626 | ENDPOINT DETERMINATION FOR CAPILLARY-ASSISTED FLOW CONTROL - Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters. | 10-29-2015 |
20150306537 | RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL - A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character. | 10-29-2015 |
20150298960 | SINGLE USE DISPENSE HEAD WITH KEY CODE - A two-part key coded device that can be added to existing container and dispense stations. The key coded device includes a female key ring that is retrofitted to an existing bung and a compatible male key ring that is retrofitted to an existing or new dispense head. The key code system can enable only a specific or compatible type of chemical to be connected to the dispense head, and provides a measure of safety against inadvertently connecting the wrong type of chemical. | 10-22-2015 |
20150298040 | Gas Purification Filter Unit - This gas purification filter unit ( | 10-22-2015 |
20150294891 | Electrostatic Chuck With Photo-Patternable Soft Protrusion Contact Surface - In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer. | 10-15-2015 |
20150294887 | WAFER CONTAINER WITH PARTICLE SHIELD - Particulate shields above the top wafer in wafer containers such as FOUPS prevent accumulation of particulates on wafers. The shields may be formed of materials that are compatible to maintaining less than 5% RH, particularly materials that will not absorb meaningful amounts of water, and that will not bring absorbed moisture into the container, for example cyclic olefin polymers, cyclic olefin copolymers, liquid crystal polymers. A FOUP may be provided with an additional slot above industry standard 25 slots to receive a dedicated barrier. In embodiments, the barrier may be a shape corresponding to a wafer. The barrier may have inherent charge properties opposite to the particulates in the containers to attract the particulates. The barrier may have apertures to facilitate charge development. The barrier may be retrofitted to existing wafer containers. The shield may conform to FOUP configuration. | 10-15-2015 |
20150283495 | APPARATUS FOR PREVENTING MICROPARTICLE AND DUST MIGRATION IN LAYERED BED PURIFICATION DEVICES - The invention relates to an expandable media-retaining ring comprising an expandable ring and a gas permeable media-retaining membrane. The invention further relates to a gas purifier device comprising two or more beds of purification media and an expandable media-retaining ring. The expandable media-retaining ring is secured by radial force in the device, and prevents migration of purification media into adjacent beds, thereby improving the performance of the purifier device, and also enabling the device to be used in any orientation. | 10-08-2015 |
20150280115 | DOUBLE SELF-ALIGNED PHASE CHANGE MEMORY DEVICE STRUCTURE - A double self-aligned phase change memory device structure, comprising transversely spaced-apart facing phase change memory film members symmetrically arranged with respect to one another, each of the phase change memory film members at an upper portion thereof being in contact with a separate conductive element, and each of the phase change memory film members being in a range of from 5 nm to 25 nm in thickness. Also described are various methods of making such phase change memory device structure. | 10-01-2015 |
20150276619 | OPTO-ELECTRONIC INSPECTION QUALITY ASSURANCE SYSTEM FOR FLUID DISPENSING VALVES - An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assurance determinations, are described. The optoelectronic inspection is applicable to flow control valves used on fluid storage and dispensing packages including physical adsorbent-based and/or pressure-regulated vessels, such as are used for supply of processing fluids used in the manufacture of semiconductor products, flat panel displays, and solar panels. | 10-01-2015 |
20150266660 | RETICLE POD WITH COVER TO BASEPLATE ALIGNMENT SYSTEM - An alignment system for aligning the cover and base of an inner pod of a reticle carrier. The cover and base can each be provided with hard planar surface seal zones on the bottom surface and the top surface, respectively. The cover of the inner pod may be provided with a through hole or a blind hole into which an alignment pin is disposed. The base is provided with a guide recess to receive the distal end of the alignment pin. The alignment pin operates to limit contact surface area between the cover and the base during that is in sliding contact, thus inhibiting particulate generation. Low particulate-generating materials, such as stainless steel or polyamide-imide, can also be utilized to further reduce particulate generation. Furthermore, the cover and base can each be unitary without need for fastening components thereto, thereby eliminating clamped surfaces that can entrap and subsequently shed particulates. | 09-24-2015 |
20150251920 | FLUORINE FREE TUNGSTEN ALD/CVD PROCESS - A tungsten precursor useful for forming tungsten-containing material on a substrate, e.g., in the manufacture of microelectronic devices. The tungsten precursor is devoid of fluorine content, and may be utilized in a solid delivery process or other vapor deposition technique, to form films such as elemental tungsten for metallization of integrated circuits, or tungsten nitride films or other tungsten compound films that are useful as base layers for subsequent elemental tungsten metallization. | 09-10-2015 |
20150246941 | COBALT PRECURSORS FOR LOW TEMPERATURE ALD OR CVD OF COBALT-BASED THIN FILMS - Cobalt silylamide and cobalt carbonyl precursors are described, which are usefully employed in vapor deposition processes, such as chemical vapor deposition and atomic layer deposition, to deposit cobalt and to form high purity cobalt-containing films at temperatures below 400° C. These precursors and processes can be utilized in the manufacture of integrated circuitry and production of devices such as microprocessors, and logic and memory chips. | 09-03-2015 |
20150228486 | METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION SOURCE IN AN ION IMPLANTATION SYSTEM - An ion implantation system and process, in which the performance and lifetime of the ion source of the ion implantation system are enhanced, by utilizing isotopically enriched dopant materials, or by utilizing dopant materials with supplemental gas(es) effective to provide such enhancement. | 08-13-2015 |
20150218696 | METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL - Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer. | 08-06-2015 |
20150210430 | ULTRA-HIGH PURITY STORAGE AND DISPENSING OF LIQUID REAGENTS - A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels. | 07-30-2015 |
20150202593 | CARBON PYROLYZATE ADSORBENT HAVING UTILITY FOR CO2 CAPTURE AND METHODS OF MAKING AND USING THE SAME - A particulate form carbon pyrolyzate adsorbent, having the following characteristics: (a) CO | 07-23-2015 |
20150186196 | SYSTEMS AND METHODS FOR MANAGING MATERIAL STORAGE VESSELS HAVING INFORMATION STORAGE ELEMENTS - Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture. | 07-02-2015 |
20150144557 | Organic Solvent Purifier And Method Of Using - A purifier for removing metal, such as chromium, from an organic solvent is disclosed. The purifier comprises a housing having a fluid inlet and a fluid outlet in fluid communication with the fluid inlet; a volume of ion-exchange resin disposed within the housing downstream of the fluid inlet; and a filtration member downstream of the volume of ion-exchange resin, the filtration member comprising at least one microporous membrane having a substantially neutral surface and a microporous polytetrafluoroethylene membrane downstream of the at least one microporous membrane. A method for removing metal, including chromium, from an organic solvent using a purifier of the invention is also disclosed. | 05-28-2015 |
20150075570 | METHODS FOR THE SELECTIVE REMOVAL OF ASHED SPIN-ON GLASS - A semi-aqueous removal composition and process for selectively removing spin-on glass relative to a metal gate and/or ILD material from a microelectronic device having said material thereon. The semi-aqueous removal composition can be a fluoride-containing composition or an alkaline composition. | 03-19-2015 |
20150068949 | WAFER SHIPPER - A wafer container for holding a spaced stack of thin wafers, comprising an H-bar carrier, a base portion for receiving same, a base wafer cushion attached at the bottom wall positioned below the H-bar carrier, the cushion having a plurality of ribs defining slots each with a bottom wafer seating region having a curvature and a pair of ends, each of the ends having a flare whereby the seating region flares outwardly at the ends, a cover portion that connects with the base portion to form a closed interior. The cover portion having an uppermost wall a wafer cushion secured thereto. The cover wafer cushion having a row of wafer engaging finger portions, the finger portions Y shaped and having two legs extending from a support portion and alternatingly extending from opposing support portions, the finger portions may be S shaped with a wafer pad flared in two direction. | 03-12-2015 |
20150056113 | Gas Purifier - The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve. | 02-26-2015 |
20150050199 | REMOVAL OF LEAD FROM SOLID MATERIALS - A leaching composition that substantially removes lead from solid materials and a method of using said composition. Preferably, the concentration of lead in the solid materials following processing is low enough that the solid materials can be reused and/or disposed of at minimal cost to the processor. Preferably, the solid materials comprise glass, such as cathode ray tube glass. | 02-19-2015 |
20150045277 | POST-CMP FORMULATION HAVING IMPROVED BARRIER LAYER COMPATIBILITY AND CLEANING PERFORMANCE - A cleaning composition and process for cleaning post-chemical mechanical polishing (CMP) residue and contaminants from a microelectronic device having said residue and contaminants thereon. The cleaning compositions include at least one quaternary base, at least one amine, at least one azole corrosion inhibitor, at least one reducing agent, and at least one solvent. The composition achieves highly efficacious cleaning of the post-CMP residue and contaminant material from the surface of the microelectronic device while being compatible with barrier layers, wherein the barrier layers are substantially devoid of tantalum or titanium. | 02-12-2015 |
20150041359 | SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY - A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure. | 02-12-2015 |
20150041353 | WAFER CARRIER - A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated. | 02-12-2015 |
20140339722 | Multilayer Porous Membrane and Process of Manufacture - A multilayer porous membrane formed of an extrudable polymer is provided. The membrane is formed by co-extruding at least two compositions, each of which comprises a heated porogen and polymer while in contact with each other under conditions to minimize or prevent unstable interfacial flow between extruded layers. In a preferred embodiment, the two compositions are different such that the layers have a different average pore size. | 11-20-2014 |
20140303791 | SYSTEM AND METHOD FOR DETECTING AIR IN A FLUID - Embodiments can detect air in a pumping system. A portion of the system may be isolated from other components located upstream or downstream. The isolated portion may include a chamber, tubing, lines, valves or other components of a pump. In one embodiment, the difference between the starting pressure and an ending pressure taken after a piston has moved a predetermined distance. The pressure difference can be compared with an expected value established for the particular system set up and/or fluid property to detect the presence of air in the system. In some embodiments, a distance between the starting and ending positions of a pump component may be determined after a predetermined pressure difference has been achieved. The distance can be compared with an expected distance to detect the presence of air in the system. | 10-09-2014 |
20140287176 | NANOTUBE AND FINELY MILLED CARBON FIBER POLYMER COMPOSITE COMPOSITIONS AND METHODS OF MAKING - Embodiments of the present invention include composite compositions extrusion compounded together comprising a polymer, an amount of nanotubes, and an amount of finely milled carbon fiber having an aspect ratio greater than 1 and less than about 5. The resulting composite materials allow for high carbon loading levels with improved tribological properties including coefficient of friction and wear rates, provides uniform surface resistance with minimal processing sensitivity, retains rheological properties similar to the base resin, and provides isotropic shrink and a reduced coefficient of thermal expansion leading to minimal warp. In general, various articles can be formed that take advantage of the properties of the composite materials incorporating a polymer, carbon nanotubes and finely milled carbon fiber. | 09-25-2014 |
20140283684 | METHOD AND APPARATUS FOR TREATING FLUIDS TO REDUCE MICROBUBBLES - Versions of the invention include methods for reducing microbubbles in liquids treated by heat or mass exchange devices. The exchange devices may be conditioned by having gases in crevices and surfaces displaced by a liquid. The methods can be used to prepare liquids with reduced numbers of microbubbles. | 09-25-2014 |
20140264999 | SUBSTRATE CARRIERS AND ARTICLES FORMED FROM COMPOSITIONS COMPRISING CARBON NANOTUBES - Substrate containers formed from improved compositions comprise a polymer and carbon nanotubes to provide enhanced characteristics. In some embodiments, the carbon fibers, e.g., nanotubes, can be mechanically blended or incorporated into the polymer, while in some embodiments carbon nanotubes also may be covalently bonded to the polymer to form corresponding covalent materials. In particular, the polymer can be covalently bonded to the side walls of the carbon nanotubes to form a composite with particularly desirable mechanical properties. The processing of the nanotubes can be facilitated by the dispersion of the nanotubes in an aqueous solution comprising a hydrophylic polymer, such as ethyl vinyl acetate. A dispersion of nanotubes can be combined with a polymer in an extrusion process to blend the materials under high shear, such as in an extruder. | 09-18-2014 |
20140246383 | MODULAR FILTER CASSETTE - The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter element disposed in the filter cavity. The filter element may at least partially overlap the filter inlet on a first side of the filter element. The filter element may comprise a rectangular pleated filter with a set of pleats having a first set of pleat tips on an upstream side of the filter element and a second set of pleat tips on a downstream side of the pleated filter. | 09-04-2014 |
20140238922 | MODULAR FILTRATION SYSTEM - The present disclosure relates to modular filtration systems using removable filter cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filtration system may include a removable filter cassette having a filter inlet port and a filter outlet port, a filter cassette holder configured to receive and retain the filter cassette, and a main assembly. The main assembly can further comprise a filter inlet interface port configured to receive the filter inlet port, and a filter outlet interface port configured to receive the filter outlet port and can define flow paths to direct flow to and from the filter cassette. The filter cassette holder may be movably coupled to the main assembly such that the filter cassette is movable relative to the main assembly from an unmated position to a mated position. | 08-28-2014 |
20140231318 | METHOD AND SYSTEM FOR HIGH VISCOSITY PUMP - Embodiments described herein provide systems and methods for high viscosity pumps including a noncompliant filter. One embodiment can include a multi-stage pump comprising an pump inlet flow path, a pump outlet flow path, a feed stage in fluid communication with the pump inlet flow path, a dispense stage in fluid communication with the feed stage and the pump outlet flow path, a noncompliant disposable filter for high viscosity fluid in a flow path between the feed stage and the dispense stage and a set of valves to selectively allow fluid flow through the multi-stage pump. | 08-21-2014 |
20140222222 | METHOD AND SYSTEM FOR CONTROLLING OPERATION OF A PUMP BASED ON FILTER INFORMATION IN A FILTER INFORMATION TAG - The disclosure describes systems and methods relating generally to filtration. Even more particularly, this disclosure relates to controlling the operation of a pump using filter information. A removable filter can include an electronically readable tag storing filter information. The filter information can be read by a tag reader and rules applied to the filter information to determine whether or how to operate a pump. | 08-07-2014 |
20140183076 | RETICLE POD - A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint. | 07-03-2014 |
20140178679 | AlON Coated Substrate with Optional Yttria Overlayer - A fluorine plasma resistant coating on a ceramic substrate is disclosed. In one embodiment the composition includes an AlON coating that is about 2 microns thick that overlies a substrate, and having an optional yttria coating layer that is about | 06-26-2014 |
20140158156 | MOLDED ROTATABLE BASE FOR A POROUS PAD - A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded from a two piece mold and the openings can have draft angles to facilitate the molding process. | 06-12-2014 |
20140127034 | SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP - Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities. | 05-08-2014 |
20140113532 | CHEMICAL MECHANICAL PLANARIZATION CONDITIONER - A pad conditioner for a CMP polishing pad is disclosed that includes a substrate that has a matrixical arrangement of protrusions that have a layer of poly crystalline diamond on at least their top surfaces. The protrusions may have varying shapes and elevations and may comprise a first set of protrusions and a second set of protrusions, the first set of protrusions have a first average height and the second set of protrusions have a second average height, the first average height different from the second average height, a top of each protrusion in the first set of protrusions has a non-flat surface and a top of each protrusion in the second set of protrusions has a non-flat surface. | 04-24-2014 |
20140091027 | Purifier Cassette - The present disclosure relates to purification cassettes that have reinforcing features. One embodiment relates to a purification cassette with tensions members. A purification system may include a removable cassette defining a media cavity. A set of tension members may span between a first sidewall and second sidewall. The set of tension members can divide the media cavity into a plurality of lanes. | 04-03-2014 |
20140048476 | Atmospheric Pressure Microwave Plasma Treated Porous Membranes - Versions of the invention include compositions and methods for making them that include a polymeric porous membrane with one or more atmospheric pressure microwave plasma modified surfaces. The modified porous membrane is stable, non-dewetting, and retains its mechanical strength. | 02-20-2014 |
20140044570 | SYSTEM AND METHOD FOR A PUMP WITH ONBOARD ELECTRONICS - Embodiments of the present invention provide pumps with features to reduce form factor and increase reliability and serviceability. Additionally, embodiments of the present invention provide features for gentle fluid handling characteristics. Embodiments of the present invention can include a pump having onboard electronics and features to prevent heat from the onboard electronics from degrading process fluid or otherwise negatively impacting pump performance. Embodiments may also include features for reducing the likelihood that fluid will enter an electronics housing. | 02-13-2014 |
20140020712 | METHOD AND MATERIALS FOR MAKING A MONOLITHIC POROUS PAD CAST ONTO A ROTATABLE BASE - The present invention includes methods and materials for cleaning materials, particles, or chemicals from a substrate with a brush or pad. The method comprising: engaging a surface of a rotating wafer with an outer circumferential surface of a rotating cylindrical foam roller, the cylindrical foam roller having a plurality of circumferentially and outwardly extending spaced apart nodules extending from the outer surface, each nodule defining a height extending from the outer surface of the cylindrical foam roller to a substrate engagement surface of the nodule, the substrate engagement surface of one or more of the nodules having a rounded configuration; and positioning the cylindrical foam roller on the substrate such that the one or more nodules are positioned to have only the rounded substrate engagement surface contact the substrate such that no linear surface of the one or more nodules contacts the substrate. | 01-23-2014 |
20130319907 | WAFER CONTAINER WITH DOOR GUIDE AND SEAL - A wafer container that reduces or alleviates one or more of the problems associated with excessive container wall deflection due to loading and excessive particulate generation, particularly as those problems are experienced with containers for 450 mm diameter and larger wafers. The container has an enclosure and door with interlocking features to enable transfer of tension load to the door to minimize deflection of container surfaces. The container may include a gasketing arrangement compatible with the interlock feature. The container may include a removable door guide that improves centering of the door during door installation, and that is made of low particle generating material to reduce particulates. | 12-05-2013 |
20130305673 | Porous Metal Body of Sintered Metal Powders and Metal Fibers - A sintered porous body made from a green compact of a flowable air laid mixture of metal particles and metal fibers is disclosed. The green compact is sintered to provide the porous sintered body with an isotropic distribution of metal particles and metal fibers throughout the matrix. The porous sintered body includes metal particles which act as nodes and are sintered to fibers and portions of fibers are sintered to other fibers. | 11-21-2013 |
20130299384 | FRONT OPENING WAFER CONTAINER WITH WAFER CUSHION - A front opening wafer container suitable for 450 mm wafers utilizes a wafer cushion on the front door with varying inclinations on the inside surface of a lower leg of V-shaped wafer cushion engagement portions on the door. Such provides enhanced performance. More specifically, in an embodiment of the invention, a front opening wafer container has, in cross section, horizontal V-shaped groove with the inside surface of the lower leg of the V having with at least two surface portions with different inclinations from horizontal. The surface portion adjacent the apex, where the edge of the wafer seats, having a lesser inclination from horizontal than a surface portion more distal from apex. | 11-14-2013 |
20130277268 | FRONT OPENING WAFER CONTAINER WITH DOOR DEFLECTION MINIMIZATION - A front opening wafer container suitable for 450 mm diameter wafers. The front door has a pair of latch mechanism externally operable on the sides of the door, each latching mechanism having a pair of latch tips extendible from top and bottom peripheries of the door into receivers in the door frame of the front opening of the container portion. The door contains wafer cushions that support horizontally stacked wafers. The cushions have vertically extending support strip regions with arcuate wafer engagement portions therebetween. The arcuate wafer engagement portion is positioned in a vertically extending central recess on the inside surface of the door. The wafer cushion is secured to the inside of the door at the pair of vertically extending support strip portions at a pair of vertically extending loading junctures. The latching tips of each latching mechanism is in a vertical alignment with the vertically extending loading junctures. | 10-24-2013 |
20130270152 | FRONT OPENING WAFER CONTAINER WITH ROBOTIC FLANGE - A front opening wafer container suitable, for large diameter wafers, 300 mm and above, utilizes a removable robotic flange that attaches vertically, without separate fasteners, using detents having resilient bending members that extend vertically to attach to an upwardly extending flange on the top wall of the container portion. A multiplicity of upwardly and outwardly extending strengthening ribs extend upwardly from the top wall of the container portion and extend along the top wall toward the left and right sides and the back side of the container portion, and each of all four sides of the attachment flange. A further locking piece or core may be inserted and retained at the neck of the robotic flange to lock the resilient deflectable portions in their retention position. The locking piece further may be secured in place with a detent mechanism formed by part of the core and flanges. | 10-17-2013 |
20130220452 | Liquid Flow Controller And Precision Dispense Apparatus And System - Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid. | 08-29-2013 |
20130155569 | High Conductivity Electrostatic Chuck - In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 10 | 06-20-2013 |
20130134624 | COMPOSITE SUBSTRATE CARRIER - A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features. | 05-30-2013 |
20130120897 | Electrostatic Chuck with Photo-Patternable Soft Protrusion Contact Surface - In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer. | 05-16-2013 |
20130108863 | Coated Graphite Article And Reactive Ion Etch Manufacturing And Refurbishment Of Graphite Article | 05-02-2013 |
20130101438 | CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER - Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The switching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters. | 04-25-2013 |
20130092263 | Fluid Filter With Polymeric Membrane And Metal Supports - The present invention provides a fluid filter utilizing a polymeric membrane supports by metallic screens contained in a housing. The supports have apertures through which fluid can pass. The metallic supports are created such that they have at least one surface substantially free from burrs, so as not to damage the membrane. This smooth surface is in communication with the polymeric membrane. One or more indexing protrusions can be added along the circumference to restrict the relative movement between the supports, and to align the apertures of the two supports. | 04-18-2013 |
20130070384 | High Surface Resistivity Electrostatic Chuck - In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 10 | 03-21-2013 |
20130056485 | SUBSTRATE TRANSPORT CARRIER - A transport container for substrates such as semiconductor wafers and solar cell substrates includes a cover and a base having a plurality of side walls including movable wall portions with vertically extending hinges or hinges that provide a pivot about a vertical axis. The hinges can be resilient movable polymer portions such as living hinges and can have an unconnected upper edge and an unconnected lower edge to allow the movable wall portions to move inwardly relative to a floor of the base. The cover can include a base engagement portion configured as a cam portion that engages a cover engagement portion on the movable wall portions as the cover is inserted onto the base. As the cam portions of the cover engage the cover engagement portions, the cam portions move the wall inwardly relative to the base to align the substrates. | 03-07-2013 |
20130056389 | THIN WAFER SHIPPER - An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers respectively, and extend the wafer support to approximately the entire circumference of each wafer. | 03-07-2013 |
20130048018 | POST-CMP CLEANING BRUSH - Embodiments of the invention include a CMP brush that has a combination of central nodules at an inner region of the brush and one or more edge nodules at an end region of the brush where the central nodules and edge nodules are in a staggered or matched arrangement with each other and an upper surface of each edge nodule on the brush has the same or a greater contact area than an upper surface of a central nodule. The area of contact of the upper surface of each edge nodule with the substrate edge region is the same or greater than the area of contact of the upper surface of a central nodule with the substrate center region. | 02-28-2013 |
20130020220 | RETICLE POD - A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint. | 01-24-2013 |
20130004340 | SYSTEM AND METHOD FOR MONITORING OPERATION OF A PUMP - Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc. | 01-03-2013 |
20130001114 | UNIVERSAL DISK SHIPPER - System, methods, and components includes an improved universal disk container for use in transporting, storing and processing data storage disks or other disk-shaped articles; a disk shipping system and method for shipping disks that allows stocking a minimal number of components while still allowing packaging and shipment of different thickness of disks and different capacities of disks in a container, and components that present universality while still minimizing particulate generation, disk damage and providing ease of assembly. A universal disk cassette with slots having a narrowed lower portion configured for handling different disks of the same diameter but different thicknesses while preventing disk to disk contact when the disks are tilted. A universal top cover configured for cassettes loaded with different thicknesses of disks, i.e., a cassette loaded with 0.025 inch disks, or the same cassette loaded with 0.050 inch disks. Also the universal top cover configured for use on different capacity disk cassettes, that is a 65 mm disk cassette with a 25 capacity or a 65 mm cassette with a 35 capacity. The universal top cover can readily accommodate disks that are tilted in the cassette, and with vacuum bagging, more securely fix the disks in place in the container. | 01-03-2013 |
20120297981 | POROUS BARRIER FOR EVENLY DISTRIBUTED PURGE GAS IN A MICROENVIRONMENT - An improved system and method for purging a microenvironment to desired levels of relative humidity, oxygen, or particulates through the implementation of a purge gas delivery apparatus and method that provides even distribution of the purging gas within the microenvironment. A substrate container has a tower therein with a fluid flow passageway extending the length of the tower. Apertures with porous media between the aperture and fluid flow passageway regulate the volume and pressure of air discharging at each aperture. Alternatively, the tower may be formed of a porous tubular polymeric material. A sleeve may direct the discharge purge gas in the interior. | 11-29-2012 |
20120128505 | Method and System for Pump Priming - The disclosure describes systems and methods relating generally to filtration. Even more particularly, embodiments described herein relate to optimizing operating routines of a pump based on filter. Embodiments of priming routines described herein can perform a back pressure step to pressurize the filter from downstream and a back flush step to flush the filter from downstream. | 05-24-2012 |
20120118816 | Non-Dewetting Porous Membranes - Microporous membrane composites that are non-dewetting are disclosed. These microporous membrane composites are wet with solutions of methanol and water and are non-dewetting following autoclave treatment in water. The microporous membrane composites comprise a microporous membrane support that is coated with a crosslinked ionomer comprising hydrophilic groups. Compared to the microporous membrane support, the microporous membrane composite has a flow loss on average in isopropyl alcohol of less than 82%. | 05-17-2012 |
20120091165 | System and Method for Correcting for Pressure Variations Using a Motor - Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber. | 04-19-2012 |
20120090704 | Liquid Flow Controller And Precision Dispense Apparatus And System - Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid. | 04-19-2012 |
20120076945 | MOLDED ROTATABLE BASE FOR A POROUS PAD - A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded form a two piece mold and the openings can have draft angles to facilitate the molding process. | 03-29-2012 |
20120070311 | System and Method for Pressure Compensation in a Pump - Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated. | 03-22-2012 |
20120061288 | COMPOSITE SUBSTRATE CARRIER - A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features. | 03-15-2012 |
20110277789 | METHODS AND MATERIALS FOR MAKING A MONOLITHIC POROUS PAD CAST ONTO A ROTATABLE BASE - The present invention includes methods and materials for making a brush or pad for removing materials, particles, or chemicals from a substrate. The brush or pad includes a rotatable base for supporting a porous pad material. The base include an inner surface and an outer surface and a plurality of channels in the base for interlocking the porous pad material with the base. A porous pad material covers at least a portion of the outer surface of the base and is used for removing material from various substrates. The porous pad material fills one or more of the channels in the base and interlocks the porous pad material with the base. Preferably the channels fluidly connect said inner surface with the outer surface of the base and aid in the alignment of porous pad nodes and the distribution of fluid within the porous pad. | 11-17-2011 |
20110252973 | FILTER APPARATUS CAPABLE OF RELEASING AIR - A filter apparatus capable of releasing air from a filter body, comprising a filter body held by a holder. The filter body includes a fluid inlet and a fluid outlet. The filter body is disposed in the holder so as to rotate around an axis of rotation that passes through the fluid inlet. The holder includes a front panel. The front panel comprises engaging portions, for temporarily engaging the fluid outlet at either an air releasing position or at a filtering position, and a fixing means for fixing the filter body at each position. The filter apparatus further includes means for rotating the filter body. | 10-20-2011 |
20110211976 | METHOD AND SYSTEM FOR OPTIMIZING OPERATION OF A PUMP - The disclosure describes systems and methods relating generally to filtration. Even more particularly, embodiments described herein relate to optimizing operating routines of a pump based on filter information and process fluid information. The filter information can be stored on an electronically readable tag on the filter. | 09-01-2011 |
20110211975 | METHOD AND SYSTEM FOR CONTROLLING OPERATION OF A PUMP BASED ON FILTER INFORMATION IN A FILTER INFORMATION TAG - The disclosure describes systems and methods relating generally to filtration. Even more particularly, this disclosure relates to controlling the operation of a pump using filter information. A removable filter can include an electronically readable tag storing filter information. The filter information can be read by a tag reader and rules applied to the filter information to determine whether or how to operate a pump. | 09-01-2011 |
20110163540 | O-RINGLESS SEAL COUPLINGS - An operative fluid device ( | 07-07-2011 |
20110151755 | CMP RETAINING RING - An improved chemical mechanical polishing retaining ring. A representative embodiment comprises a base portion made from a wear-resistant plastic material, and an upper portion, or backbone portion, made from a stiffer and more wear resistant material. One of the base or backbone portion is preferably overmolded onto the other. The base portion can be generally defined by a flat pad-contacting surface, an outer surface, and an inner surface. The base portion can additionally include channels extending from the outer surface to the inner surface to facilitate transfer of slurry to and from the substrate to be polished during the process. One or both of the base portion or backbone portion further includes a plurality of circular ribs that serve to create additional bonding surface with the overmolded material. The retaining ring may additionally includes a plurality of bosses with threaded insert holes by which the retaining ring is attached to a chemical mechanical polishing system. | 06-23-2011 |
20110131800 | FRONT OPENING WAFER CONTANER WITH PATH TO GROUND EFFECTUATED BY DOOR - A front opening wafer carrier formed principally of plastic and comprising an enclosure portion and door has a path to ground with respect to the wafers, the path to ground effectuated by the door. The base “ground” may be provided at the machine interface upon which the carrier sits, or through the robotic arm that grasps, operates and moves the door. | 06-09-2011 |
20110114534 | WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS - A wafer container utilizes a rigid polymer tubular tower with slots and a “getter” therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300 mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion. | 05-19-2011 |
20110114129 | METHODS AND APPARATUSES FOR CONTROLLING CONTAMINATION OF SUBSTRATES - Components, systems, and methods for maintaining an extremely dry environment within substrate containers formed of polymers provides supplemental exterior gas washing of the substrate container to minimize permeation of moisture and oxygen through the polymer walls of the container and to control desorption of water entrapped in the polymer walls of the container. | 05-19-2011 |
20110005967 | METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING - A front opening semiconductor wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features. | 01-13-2011 |
20100308579 | INTEGRAL FACE SEAL - A fluid seal generally comprising a first fitting portion ( | 12-09-2010 |
20100307957 | REUSABLE RESILIENT CUSHION FOR WAFER CONTAINER - A container for holding a plurality of substrates includes an enclosure portion defining an interior space. The enclosure has a plurality of slots for receiving the substrates, and a door ( | 12-09-2010 |
20100294397 | SYSTEM FOR PURGING RETICLE STORAGE - The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be “recharged” during the substantially continual purging of the reticle, a reduced desirable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source connected to the purge system that comprises a source of CDA or extra CDA. The storage housing can comprise a plurality of shelves that each include a plurality of reticle storage receptacles. | 11-25-2010 |
20100276033 | IDENTIFICATION TAG FOR FLUID CONTAINMENT DRUM - A fluid containment and dispensing system having a RHD tag associated therewith. The fluid containment and dispensing system includes a fluid containment drum having an opening defined thereon. The fluid containment and dispensing system further includes a dispensing mechanism operably coupleable with the opening, the dispensing mechanism configured to dispense the contents of the fluid containment drum. An identification tag is coupleable with the dispensing mechanism and includes a first laminate, a second laminate laminated to the first laminate, and a RFID member disposed between the first and second laminates, wherein the RFID member includes information associated with a fluid containment and dispensing system. | 11-04-2010 |
20100236970 | COMPOSITE SUBSTRATE CARRIER - A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features. | 09-23-2010 |
20100041323 | CMP RETAINING RING - An improved chemical mechanical polishing retaining ring. A representative embodiment comprises a base portion made from a wear-resistant plastic material, and an upper portion, or backbone portion, made from a stiffer and more wear resistant material. One of the base or backbone portion is preferably overmolded onto the other. The base portion can be generally defined by a flat pad-contacting surface, an outer surface, and an inner surface. The base portion can additionally include channels extending from the outer surface to the inner surface to facilitate transfer of slurry to and from the substrate to be polished during the process. One or both of the base portion or backbone portion further includes a plurality of circular ribs that serve to create additional bonding surface with the overmolded material. The retaining ring may additionally includes a plurality of bosses with threaded insert holes by which the retaining ring is attached to a chemical mechanical polishing system. | 02-18-2010 |
20100000932 | FILTER APPARATUS CAPABLE OF RELEASING AIR - [Problems] To provide a filter apparatus improved in operability and maintainability during an air releasing operation for a filter apparatus by promoting a reduction in the size of a filter apparatus capable releasing air for a chemical solution. | 01-07-2010 |
20090320681 | Filtering system for a semiconductor processing tool - The present invention provides a filtering system for a semiconductor processing tool. In one embodiment, the filtering system is associated with the semiconductor processing tool. A system of the invention comprises a first and second filter layer in fluid communication with a gas flow path. The flow path is a gas stream comprising volatile silica containing compounds such as hexamethyldisiloxane and trimethylsilanol. The gas flow path passes through the first and second filter layer to fluidly communicate with the semiconductor processing tool. Preferably, the first filter layer of the filtering system is upstream along the gas flow path from the second filter layer. The medias of the first and second filter layers are selected and arranged based on given contaminant concentrations. The invention also provides a method for filtering gas containing hexamethyldisiloxane and trimethylsilanol in communication with a semiconductor processing tool, which employs a system comprising a first and second filter layer. | 12-31-2009 |
20090301917 | RETICLE POD - A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection. | 12-10-2009 |
20090284894 | Electrostatic chuck - In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of protrusions extending to a height above portions of the surface layer surrounding the protrusions to support the substrate upon the protrusions during electrostatic clamping of the substrate. The protrusions are substantially equally spaced across the surface layer as measured by a center to center distance between pairs of neighboring protrusions. | 11-19-2009 |
20090282979 | LOW-PROFILE SURFACE MOUNT FILTER - Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity. | 11-19-2009 |
20090255596 | VALVE MANIFOLD ASSEMBLY - A valve manifold assembly including a manifold body defining a primary flow passage and a secondary flow passage fluidly coupled therewith through an aperture in the wall of the primary flow passage. A valve including a head portion and a stem extending therefrom is disposed through the aperture. The head portion has a valve sealing surface adjacent and extending around the stem, and a valve seat having a seat sealing surface facing into the primary flow passage extends around the aperture. The valve is selectively shiftable between a closed position wherein the valve sealing surface is sealingly engaged with the seat sealing surface to block fluid flow between the secondary flow passage and the primary flow passage, and an open position wherein the valve sealing surface is spaced apart from the seat sealing surface to enable fluid flow between the secondary flow passage and the primary flow passage. | 10-15-2009 |
20090242818 | WELDED DIAPHRAGM VALVE - A diaphragm valve including a valve body, a diaphragm assembly and an actuator assembly having a housing body that isolates the actuator from the ambient atmosphere. The diaphragm assembly is welded to the valve body to reduce and/or eliminate fluid leakage around the diaphragm assembly. Additionally or alternatively, the housing body for the actuator assembly may be welded to the valve body to reduce fluid leakage. The welding may be performed using ultrasonic welding techniques. | 10-01-2009 |
20090218254 | SHOCK ABSORBING SUBSTRATE CONTAINER - A substrate container is generally comprised of a cover, a base, a latching mechanism, and a substrate retention system. Substrate container has corners with flanges disposed at the corners. Each flange has a hole there through to enhance shock absorption capability by the container, and thus provide greater protection to the substrate. | 09-03-2009 |
20090217981 | FLUID HANDLING DEVICE WITH DIRECTIONALLY-BIASED WETTING SURFACE - A fluid handling device with an anisotropic wetting surface including a substrate with a multiplicity of asymmetric substantially uniformly shaped asperities thereon. Each asperity has a first asperity rise angle and a second asperity rise angle relative to the substrate. The asperities are structured to present a desired retentive force ratio (f | 09-03-2009 |
20090194475 | System and Method for Liquid Filtration with Reduced Hold-Up Volume - In one embodiment according to the invention, there is provided a filter device for liquid filtration, the filter device being in fluid communication with a plurality of liquid pathways, at least one pathway of the plurality of liquid pathways having a smallest equivalent fluid flow diameter of the plurality of liquid pathways. The device comprises a filter membrane ( | 08-06-2009 |
20090194456 | WAFER CASSETTE - A front opening wafer container including an enclosure portion and a door. A wafer support system is provided including a pair of spaced apart cantilever wafer shelves, each wafer shelf including a pair of opposing inclined ramp portions. The ramp portions are cooperatively positioned and configured so that when the wafer is received on the shelves, the wafer is supported on the ramps at a lower peripheral corner of the wafer, all other portions of the wafer being free from contact with the wafer support system. Each wafer shelf may have a generally concave upper surface and the incline of the ramps is continuous with the concave upper surfaces of the wafer shelves. | 08-06-2009 |
20090183630 | APPARATUS AND METHOD FOR REDUCING PARTICLE CONTAMINATION IN A VACUUM CHAMBER - An apparatus and method for maintaining low gas velocity variation across a diffuser membrane during the vent-up of a vacuum chamber is disclosed. The diffuser membrane permeability and the pressure conditions across the membrane are chosen to minimize variation in gas flow velocity through the membrane during the vent-up cycle. This reduces re-distribution of particles from a vacuum chamber onto sensitive substrates in the vacuum chamber during vent-up from sub-atmospheric pressure to atmospheric pressure. | 07-23-2009 |
20090132094 | System and Method for a Variable Home Position Dispense System - Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement. | 05-21-2009 |
20090127483 | FLUID HANDLING DEVICE WITH ISOLATING CHAMBER - A fluid handling device includes a body portion defining a flow passage and an impulse chamber extending from the flow passage. The impulse chamber is fluidly coupled with the flow passage and has a pair of opposing ends defining a length dimension therebetween. The impulse chamber further presents a diameter dimension transverse to the length dimension, wherein the length dimension is at least 3 times and not greater than 10 times the diameter dimension. The device further includes at least one sensor operably coupled with the body portion. The sensor is disposed proximate the end of the impulse chamber opposite the flow passage and presents a sensing face facing into the impulse chamber. | 05-21-2009 |
20090116334 | METHOD FOR CONTROLLED MIXING OF FLUIDS VIA TEMPERATURE - Embodiments of the present invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature. | 05-07-2009 |
20090113985 | FLUID FLOW MEASURING AND PROPORTIONAL FLUID FLOW CONTROL DEVICE - Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored. | 05-07-2009 |
20090057347 | METHOD AND APPARATUS FOR DISPENSING FLUIDS - A bag-in-bag-in-bottle assembly formed by a flexible dispensing container with a dispensing fitment. The dispensing container is positioned adjacent or sandwiched between one or more flexible pressurization containers having a separate inlet/outlet path through a second fitment. The bag-in-bag assembly can then be placed in a containment vessel with the fitments mounted such that it is accessible on the vessel. A liquid can be extracted from the dispensing container by introducing a fluid into the pressurization container(s) with enough pressure to force the liquid out through the dispensing fitment. A contoured dispensing head may be coupled to the bag-in-bag-in-bottle assembly using a earn actuation arrangement for simultaneously locking the pressurization, vent and fluid extraction couplings. | 03-05-2009 |
20090047143 | Method and system for high viscosity pump - Embodiments described herein provide systems and methods for high viscosity pumps including a noncompliant filter. One embodiment can include a multi-stage pump comprising an pump inlet flow path, a pump outlet flow path, a feed stage in fluid communication with the pump inlet flow path, a dispense stage in fluid communication with the feed stage and the pump outlet flow path, a noncompliant disposable filter for high viscosity fluid in a flow path between the feed stage and the dispense stage and a set of valves to selectively allow fluid flow through the multi-stage pump. | 02-19-2009 |
20090044830 | Molded Rotatable Base for a Porous Pad - A rotatable base ( | 02-19-2009 |
20090039019 | POROUS MEMBRANES CONTAINING EXCHANGE RESINS - Articles that include two or more exchange resins in one or more microporous membranes, where the membranes remove oppositely charged impurities from a fluid in contact with the membranes, are disclosed. Methods for using such devices to remove charged impurities from fluid in contact with the membrane are provided. | 02-12-2009 |
20080302712 | Liquid filtration device - The present invention provides a liquid filtration device with internal flow paths that facilitate the purging of air bubbles from the device. The device includes internal channels that collect bubbles from fluid entering the filtration device and more efficiently direct fluid to sweep bubbles from the device during operation. The present invention also provides for an automatic means to minimize fluid loss during a vent process. | 12-11-2008 |
20080275853 | NETWORK INTERFACE DEVICE - A network interface device in a manufacturing system may receive communications from remote users in a database query language. The network interface device may translate or forward commands and queries in a pump-supported language. The network interface device may communicate the commands and queries to pumps and other components on the manufacturing process using the pump-supported language. The results of the command or query may be returned to the network interface device, which may send the information to a database. A GUI allows the remote user to check states of pumps or other functions. | 11-06-2008 |
20080257159 | Air handling and chemical filtration system and method - The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal. | 10-23-2008 |
20080225925 | System and Method for Non-Intrusive Thermal Monitor - Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location. | 09-18-2008 |
20080204680 | PURGE SYSTEM FOR A SUBSTRATE CONTAINER - A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal. | 08-28-2008 |