BROOKS AUTOMATION, INC. Patent applications |
Patent application number | Title | Published |
20150274423 | SAMPLE SELECTOR - An apparatus includes a frame configured to hold sample holders in an array, a longitudinal axis of the sample holder extending outward of an array plane; a drive section connected to the frame; at least one transfer arm rotatably connected to the drive section so that each transfer arm rotates about a rotation axis oriented substantially parallel with the longitudinal axis and includes a sample holder gripper; and at least one push member movably connected to the drive section and being distinct from the sample holder gripper and configured for linear movement along the longitudinal axis, the at least one push member being configured so that engagement with at least a bottom or top surface of the sample holder effects longitudinal translation of the sample holder for one or more of capture and release of the sample holder by the respective transfer arm in the longitudinal direction. | 10-01-2015 |
20150249029 | LOAD STATION - A substrate loading station including a frame forming a chamber configured to hold a controlled environment, a transfer robot connected to the frame and one or more substrate cassette holding locations each capable of having a substrate cassette holder disposed within the frame. Each of the one or more substrate cassette holding locations being configured to removably support a respective substrate cassette in a predetermined position for communication with the transfer robot to effect substrate transfer between a respective cassette and the transfer robot where the one or more substrate cassette holding locations are configured to effect the interchangeability of one or more substrate cassette holders with other substrate cassette holders for changing a substrate cassette holding capacity of the substrate loading station. | 09-03-2015 |
20150147148 | SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION - A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station. | 05-28-2015 |
20150040596 | Helium Management Control System - A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply. An appropriate supply of helium is distributed to each cryopump. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function. | 02-12-2015 |
20140341679 | ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM - A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station. | 11-20-2014 |
20140301818 | TRANSPORT APPARATUS - A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction. | 10-09-2014 |
20140271083 | SEMICONDUCTOR WAFER HANDLING AND TRANSPORT - A substrate processing system including at least two vertically stacked transport chambers, each of the vertically stacked transport chambers including a plurality of openings arranged to form vertical stacks of openings configured for coupling to vertically stacked process modules, at least one of the vertically stacked transport chambers includes at least one transport chamber module arranged for coupling to another transport chamber module to form a linear transport chamber and another of the at least two stacked transport chambers including at least one transport chamber module arranged for coupling to another transport chamber module to form another linear transport chamber, and a transport robot disposed in each of the transport chamber modules, where a joint of the transport robot is locationally fixed along a linear path formed by the respective linear transport chamber. | 09-18-2014 |
20140249675 | TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES - A time-optimal trajectory generation method, for a robotic manipulator having a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time-optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories. | 09-04-2014 |
20140201571 | INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE - A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses. | 07-17-2014 |
20140199138 | SEMICONDUCTOR WAFER HANDLING TRANSPORT - Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency. | 07-17-2014 |
20140178157 | LOAD LOCK CHAMBER - A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone. | 06-26-2014 |
20140161570 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes. | 06-12-2014 |
20140152320 | IONIZATION GAUGE WITH OPERATIONAL PARAMETERS AND GEOMETRY DESIGNED FOR HIGH PRESSURE OPERATION - An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions. | 06-05-2014 |
20140147234 | HIGH SPEED SUBSTRATE ALIGNER APPARATUS - A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates. | 05-29-2014 |
20140144165 | Systems and Methods for Warming a Cryogenic Heat Exchanger Array, for Compact and Efficient Refrigeration, and for Adaptive Power Management - In accordance with an embodiment of the invention, there is provided a method of warming a heat exchanger array of a very low temperature refrigeration system, the method comprising diverting at least a portion of refrigerant flow in the refrigeration system away from a refrigerant flow circuit used during very low temperature cooling operation of the refrigeration system, to effect warming of at least a portion of the heat exchanger array; and while diverting the at least a portion of refrigerant flow, preventing excessive refrigerant mass flow through a compressor of the refrigeration system. | 05-29-2014 |
20140130527 | Helium Management Control System - A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted. | 05-15-2014 |
20140126987 | SUBSTRATE TRANSPORT APPARATUS - A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section. | 05-08-2014 |
20140119856 | SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER - In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate. | 05-01-2014 |
20140081581 | MEASUREMENT INSTRUMENT AND METHOD - A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to the processor and are operable to generate respectively first and second measurements of the physical quantity. The processor defines a first measurement range within which the measurement signal is dependent on the first measurement and not the second measurement. The processor defines a second measurement range within which the measurement signal is dependent on the second measurement and not the first measurement. The first and second ranges meet at a predetermined transition. The first and second measurements are different at the transition and the measurement embodied in the measurement signal crosses the transition without an abrupt change. | 03-20-2014 |
20140056678 | DUAL SCARA ARM - A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm. | 02-27-2014 |
20140044504 | COMPACT SUBSTRATE TRANSPORT SYSTEM - A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths. | 02-13-2014 |
20130345858 | MANIPULATOR AUTO-TEACH AND POSITION CORRECTION SYSTEM - A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals. | 12-26-2013 |
20130343841 | SEMICONDUCTOR MANUFACTURING SYSTEMS - Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps. | 12-26-2013 |
20130336755 | GRIPPER APPARATUS AND METHOD FOR CONTAINERS OF DIFFERENT SIZES - A gripper apparatus for removing and replacing objects such as containers or vials in an array of containers has a gripper head which extends downward from a support arm, a planetary gear assembly mounted in the gripper head including at least three planet gears, and at least one gripping grip extending downward from each planet gear and projecting beyond a lower end of the gripper head. A drive motor drives the planetary gear assembly to rotate the planet gears in opposite directions, moving the grips inward and outward along predetermined paths to grip and carry an object and release the object when in a desired location. | 12-19-2013 |
20130336749 | SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER - A substrate processing apparatus having a station for loading and unloading substrates from the apparatus is provided. The station has a loading and unloading aperture, a magazine door drive for opening a substrate magazine by removing a door of a substrate magazine through the loading and unloading aperture, and a substrate magazine transport having a magazine support, the substrate magazine transport being configured to move the substrate magazine horizontally between a first position and a second position. When in the first position the substrate magazine is seated on the magazine support and communicates with the aperture and when moved to the second position the substrate magazine is offset from the first position, where the substrate magazine remains seated on the magazine support during horizontal transfer between the first and second positions and another substrate magazine is capable of being located at the first position in communication with the aperture. | 12-19-2013 |
20130333174 | TRANSPORT SYSTEM - A semiconductor workpiece processing system including at least one substrate processing tool that has a common housing with a first side having a first substrate holding container interface and a second side having a second substrate holding container interface having a different orientation than the first substrate holding container interface, a first transport section disposed corresponding to the first side of the tool, a second transport section being separate and distinct from the first transport section and interfacing with the first transport section and being configured to transport the substrate holding container between the first transport section and the tool and between the first side and the second side of the tool, the second transport section including at least one overhead gantry disposed above the tool, where the second transfer section is capable of interfacing with at least the second substrate holding container interface. | 12-19-2013 |
20130239593 | CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE - A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump. | 09-19-2013 |
20130230370 | LINEAR VACUUM ROBOT WITH Z MOTION AND ARTICULATED ARM - There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion. | 09-05-2013 |
20130230369 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone. | 09-05-2013 |
20130205805 | MULTI-REFRIGERATOR HIGH SPEED CRYOPUMP - A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators. | 08-15-2013 |
20130089396 | REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM - In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool. | 04-11-2013 |
20130078057 | LOAD LOCK FAST PUMP VENT - A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone. | 03-28-2013 |
20130028700 | ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS - A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section. | 01-31-2013 |
20130019620 | Helium Management Control System - A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function. | 01-24-2013 |
20130011226 | MODULAR SAMPLE STORE - A modular sample storeincluding a storage area; a service area; a transfer area; a motorized robot with a lifting device and at least one platform; and a controller. The sample store service area includes one integrally formed cubic vat module and the sample store storage area includes at least one integrally formed cubic vat module. Each one of the aforementioned vat modules includes an essentially horizontal vat floor and four joining vat walls that are connected to the vat floor and that are leaving an open vat space. The modular sample store also includes upper side walls and a cover plate to close the sample store. Each vat floor and vat wall includes an outside liner and an inside liner, which outside and inside liners in each case are separated by a clearance. This clearance is essentially filled with a polymer foam material that provides fixation of the outside and inside liners to each other as well as thermal insulation of and reinforcement to the thus integrally formed cubic vat module sandwich construction. | 01-10-2013 |
20120272500 | STORAGE STACKS - A storage stack for storing sample containers in a low temperature sample store. The low temperature sample store is equipped with a robot that acts according to Cartesian X, Y, and Z coordinates for horizontally positioning sample containers in X/Y planes inside of individual storage stacks and for vertically moving individual storage stacks within the low temperature sample store in Z direction. The sample store defines a storage area for accommodating an array of m×n storage stacks that are accomplished to be oriented adjacent to each other and parallel to the vertical Z direction. Each individual storage stack includes first and second rigid lateral support flanges extending in the Z direction and including a multitude of storage webs for supporting sample containers inserted into the storage stack; a rigid back panel, rigidly linking the lateral support flanges to each other; a rigid bottom plate, fixed to lower ends of at least one lateral support flange and/or of the back panel; and a rigid insulation cover, fixed to upper ends of at least one lateral support flange and/or of the back panel. The insulation cover includes a handling plate and an insulation block. A number of m×n insulation covers of all storage stacks of a storage stack array form an essentially continuous insulation layer on a storage area of the low temperature sample store. For all storage stacks, carrying elements are provided. These carrying elements statically connect the bottom plate of each individual storage stack with a bottom structure of the storage area of the low temperature sample store. These carrying elements are accomplished to carry the entire weight of the individual storage stack and all sample containers inserted in this storage stack and to confer this entire weight to a bottom structure of the storage area of the low temperature sample store. | 11-01-2012 |
20120232690 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane. | 09-13-2012 |
20120223597 | MULTIPLE DIMENSION POSITION SENSOR - An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement. | 09-06-2012 |
20120195717 | WORKPIECE HANDLING MODULES - A workpiece handling module including a first housing member and a second housing member pivotally movable relative to the first member forming a housing having an access side and a second side opposite the access side and side walls, a first portion of the side walls is carried by the first member and a second portion of the side walls is carried by the second member, and at least one of the first and second housing members includes at least one sealable opening for allowing ingress and egress of workpieces to and from an interior chamber formed by the first and second housing members in a closed configuration, and the second portion of the side walls adjacent the access side and carried by the second member is greater than the first portion of the side walls adjacent the access side and carried by the first member. | 08-02-2012 |
20120189406 | SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER - In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate. | 07-26-2012 |
20120163945 | DRIVE ASSEMBLY FOR ROBOTIC CONVEYOR SYSTEM - A storage and retrieval system is provided. The storage and retrieval system having a frame and a shuttle movable within the frame, the shuttle having a carriage extending at least partially between a top and bottom of the frame. At least one tension member extends between a first and second ends of the frame and is coupled to the shuttle. At least one drive member extends between the first and second ends of the frame and is coupled to the shuttle. The at least one drive member and the at least one tension member project from opposite sides of the shuttle towards respective first and second ends of the frame and effect stabilization of the carriage against at least rotation relative to the frame. The at least one tension member crosses the at least one drive member and the at least one drive member effects movement of the shuttle. | 06-28-2012 |
20120154822 | WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES - A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances. | 06-21-2012 |
20120148374 | LINEAR SEMICONDUCTOR PROCESSING FACILITIES - Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints. | 06-14-2012 |
20120141235 | DUAL ARM ROBOT - A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm. | 06-07-2012 |
20120136471 | SUBSTRATE APPARATUS CALIBRATION AND SYNCHRONIZATION PROCEDURE - A method for positioning substrates in a substrate processing apparatus having a substrate alignment device, a first substrate transport apparatus and a second substrate transport apparatus, includes calibrating the substrate alignment device with a motion of the first substrate transport apparatus, and calibrating a coordinate system of the second substrate transport apparatus with the substrate alignment device. | 05-31-2012 |
20120128450 | COAXIAL DRIVE VACUUM ROBOT - A robotic transport apparatus including a drive system including at least one harmonic motor assembly, at least one drive shaft coupled to the at least one harmonic motor assembly, at least one robotic arm mounted to the at least one drive shaft, where the robotic arm is located inside a sealed environment, and at least one atmospheric isolation seal seated on an output surface of the drive system and forming an atmospheric barrier disposed so that the at least one drive shaft extends through the atmospheric barrier into the sealed environment and the at least one harmonic motor assembly is located outside the sealed environment, wherein the robotic transport apparatus is a high capacity payload transport apparatus. | 05-24-2012 |
20120103501 | DEVICE AND METHOD FOR REMOVING A PEELABLE SEAL - A container or array of containers that is are sealed with a peelable seal is transported via a conveyor along a processing path toward a desealing station at which an adhesive surface having a width substantially the same as or greater than the width of the seal is pressed against the upper surface of the peelable seal. A collection rod applies a downward pressure on the adhesive surface, pressing it against the seal and keeping the container or container array in position on the conveyor as the plate moves with the conveyor. As the leading edge of the seal passes the collection rod, the adhesive surface is rolled upward, away from the plane of the seal, pulling up on the leading edge of the seal to separate it from the container or container array while the container or container array is held down by the roller. The removed seal is then discarded. | 05-03-2012 |
20120089251 | SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION - A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station. | 04-12-2012 |
20120045308 | Dual Arm Robot - A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distalmost link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distal most links of the first limb and the second limb are independently horizontally translatable for extension and retraction. | 02-23-2012 |
20120045300 | HIGH SPEED SUBSTRATE ALIGNER APPARATUS - In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter. | 02-23-2012 |
20120020759 | SEMICONDUCTOR MANUFACTURING SYSTEMS - Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps. | 01-26-2012 |
20120014769 | STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM - Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules. | 01-19-2012 |
20110316370 | SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS - In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate. | 12-29-2011 |
20110280693 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone. | 11-17-2011 |
20110265496 | PROCESS CHAMBER WITH INTEGRATED PUMPING - A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber. | 11-03-2011 |
20110241367 | ROBOT EDGE CONTACT GRIPPER - An apparatus for gripping a substrate on its peripheral edge including a substrate support having proximate and distal ends, at least one distal rest pad disposed at the distal end, the at least one distal rest pad includes a back stop portion and is configured to support the peripheral edge of the substrate, at least one proximate rest pad disposed at the proximate end, the at least one proximate rest pad being configured to support the peripheral edge of the substrate, and an active contact member assembly disposed at the proximate end, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end for urging the substrate against the back stop portion, the contact member being rotatably secured to the pusher member and free to rotate about an axis of the rotatable coupling member. | 10-06-2011 |
20110232844 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes. | 09-29-2011 |
20110224822 | SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENTLY MOVABLE ARTICULATED ARMS - A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms. | 09-15-2011 |
20110173496 | INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE - A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses. | 07-14-2011 |
20110163754 | Ionization Gauge With Emission Current And Bias Potential Control - An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user. | 07-07-2011 |
20110142575 | ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM - A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station. | 06-16-2011 |
20110126554 | Linear Drive Cryogenic Refrigerator - A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration. | 06-02-2011 |
20110118875 | MANIPULATOR AUO-TEACH AND POSITION CORRECTION SYSTEM - A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals. | 05-19-2011 |
20110118855 | SCALABLE MOTION CONTROL SYSTEM - A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes. | 05-19-2011 |
20110093237 | WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES - A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances. | 04-21-2011 |
20110062961 | Ionization Gauge With Operational Parameters And Geometry Designed For High Pressure Operation - An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions. | 03-17-2011 |
20110038692 | SUBSTRATE PROCESSING APPARATUS - A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening. | 02-17-2011 |
20110025310 | POSITION FEEDBACK FOR SELF BEARING MOTOR - A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing. | 02-03-2011 |
20110014016 | Equipment Storage for Substrate Processing Apparatus - A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus. | 01-20-2011 |
20110008136 | REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEM - A load port including a frame defining a load port opening, a substrate carrier interface connected to the frame and configured to removably couple with a substrate carrier shell, a load port door configured to interface with a substrate carrier door, the load port door being movably coupled to frame and having a first position substantially blocking the load port opening, and a second position where the load port opening is substantially unblocked by the load port door, and a door coupling member without moving parts, located on the load port door configured to releasably couple with a corresponding member without moving parts on the substrate carrier door, wherein activation of the door coupling member effects coupling between the load port door and substrate carrier door and a passive release of the substrate carrier door from the substrate carrier shell. | 01-13-2011 |
20100324732 | WAFER CENTER FINDING WITH A KALMAN FILTER - A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer. | 12-23-2010 |
20100313583 | HELIUM MANAGEMENT CONTROL SYSTEM - A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function. | 12-16-2010 |
20100292826 | RETICLE MANIPULATION DEVICE - A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing. | 11-18-2010 |
20100172721 | SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER - A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station, a fluidic magazine door drive for removing a door of a substrate magazine and thus opening the substrate magazine and for operating the aperture closure to open the aperture, and sensor for mapping vertical locations of substrates mounted to the magazine door of the drive. The fluidic magazine door drive may include an encoder different from the sensor, the encoder being configured for determining the vertical location of the sensor. | 07-08-2010 |
20100158643 | ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM - A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station. | 06-24-2010 |
20100147181 | Elevator-based tool loading and buffering system - An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane. | 06-17-2010 |
20100119349 | SUBSTRATE ALIGNMENT SYSTEM - A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the substrate transport apparatus. The sensor has a sensing path pointed in an outward direction. The sensing path does not intersect the substrate when the substrate is located on the end effector. The controller for moving the substrate transport apparatus moves the substrate transport apparatus, based at least partially upon input from the sensor, to position the end effector at a predetermined position relative to the substrate to pick up the substrate onto the end effector. | 05-13-2010 |
20100054897 | REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM - A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections. | 03-04-2010 |
20090243413 | ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS - A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section. | 10-01-2009 |
20090146665 | Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments - Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes. | 06-11-2009 |
20090133436 | EFFICIENT HEAT EXCHANGER FOR REFRIGERATION PROCESS - Aspects of the invention are found in a heat exchanger. The heat exchanger includes a fluid inlet manifold, a fluid outlet manifold, a plurality of heat transfer channels configured to communicate with the fluid inlet manifold and the fluid outlet manifold, and packing located within the fluid inlet manifold. Further aspects of the invention are found in a refrigeration system. The refrigeration system includes a compressor and at least one heat exchanger coupled to the compressor. The at least one heat exchanger includes a header, packing located in the header, and a heat transfer channel. The heat transfer channel is configured to receive fluid passing through the header and the packing. | 05-28-2009 |
20090129897 | SIDE OPENING UNIFIED POD - A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port. | 05-21-2009 |
20090087288 | SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM - A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration. | 04-02-2009 |
20090033316 | SENSOR FOR POSITION AND GAP MEASUREMENT - An apparatus including a controller, a transport in communication with the controller having a movable portion and a transport path and a multi-dimensional position measurement device in communication with the controller, the multi-dimensional position measurement device including a plurality of transformers and at least one element attached to the movable portion, wherein the multi-dimensional position measurement device is configured so that a circuit is completed in at least one plurality of transformers as the at least one element passes proximate to the at least one of the plurality of transformers and the controller is configured to calculate a multi-dimensional position of the movable object based on an output of the at least one of the plurality of transformers, wherein the multi-dimensional position includes at least a gap between the movable portion and the plurality of transformers. | 02-05-2009 |
20090033173 | MOTOR STATOR WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS - A motor includes a stator and a rotor, equipped to be movable in at least a first direction relative to the stator, the rotor operably interfacing the stator so that a motor force is generated in a first direction, where the stator comprises an anti-cogging element configured to generate anti-cogging forces on the rotor in at least the first direction and a second direction at an angle to the first direction. | 02-05-2009 |
20090022571 | SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS - A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate. | 01-22-2009 |
20090016855 | LOAD LOCK FAST PUMP VENT - A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports. | 01-15-2009 |
20090015248 | POSITION FEEDBACK FOR SELF BEARING MOTOR - A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing. | 01-15-2009 |
20090003976 | COMPACT SUBSTRATE TRANSPORT SYSTEM - A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths. | 01-01-2009 |
20090001917 | REDUCED-COMPLEXITY SELF-BEARING BRUSHLESS DC MOTOR - A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered. | 01-01-2009 |
20090001907 | COMMUTATION OF AN ELECTROMAGNETIC PROPULSION AND GUIDANCE SYSTEM - A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor. | 01-01-2009 |
20080315887 | Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments - A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current. | 12-25-2008 |
20080298944 | SUBSTRATE TRANSPORT APPARATUS - A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms. | 12-04-2008 |
20080270046 | PRESSURE MEASUREMENT INSTRUMENT AND METHOD - A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to the processor and are operable to generate respectively first and second measurements of the physical quantity. The processor defines a first measurement range within which the measurement signal is dependent on the first measurement and not the second measurement. The processor defines a second measurement range within which the measurement signal is dependent on the second measurement and not the first measurement. The first and second ranges meet at a predetermined transition. The first and second measurements are different at the transition and the measurement embodied in the measurement signal crosses the transition without an abrupt change. | 10-30-2008 |
20080267747 | INERTIAL WAFER CENTERING END EFFECTOR AND TRANSPORT APPARATUS - A substrate transport apparatus for a processing tool. The apparatus has a drive section, a movable arm, and an end effector. The arm is operably connected to the drive section. The end effector is connected to the movable arm for holding and transporting the substrate in the processing tool. The apparatus has a substrate inertial capture edge grip connected to the end effector and arranged so that the grip effects capture and centering of the substrate onto the end effector from substrate inertia. | 10-30-2008 |
20080249651 | SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENTLY MOVABLE ARTICULATED ARMS - A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms. | 10-09-2008 |