| Top Inventors for class "Etching a substrate: processes" |
| Rank | Inventor's name | Country | City/State | Last publication | # of patent apps in this class |
|---|
| 1 | Yoshiyuki Kamata | JP | Tokyo | May 12, 2016 / 20160131880 - MEDICAL OBSERVATION APPARATUS, MEDICAL VIDEO MICROSCOPE APPARATUS, AND MEDICAL VIDEO MICROSCOPE SYSTEM | 27 |
| 2 | Masatoshi Sakurai | JP | Tokyo | Nov 20, 2014 / 20140342576 - ULTRAVIOLET-CURABLE RESIN MATERIAL FOR PATTERN TRANSFER AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD USING THE SAME | 21 |
| 3 | Shou-Shan Fan | CN | Beijing | May 26, 2016 / 20160149146 - METHOD FOR MAKING THIN FILM TRANSISTOR | 16 |
| 4 | Yi Zheng | US | San Ramon, CA | Dec 31, 2015 / 20150380018 - METHOD FOR FABRICATING A MAGNETIC WRITER HAVING AN ASYMMETRIC GAP AND SHIELDS | 15 |
| 5 | Hironori Araki | US | Milpitas, CA | Apr 28, 2016 / 20160115612 - METHOD OF MANUFACTURING A THIN-FILM MAGNETIC HEAD INCLUDING A COIL AND A MAGNETIC PATH FORMING SECTION | 14 |
| 6 | Kartik Ramaswamy | US | San Jose, CA | May 19, 2016 / 20160139503 - Process Chamber for Field Guided Exposure and method for Implementing the process chamber | 13 |
| 7 | Rajinder Dhindsa | US | San Jose, CA | May 26, 2016 / 20160148786 - PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION | 13 |
| 8 | Qun-Qing Li | CN | Beijing | May 26, 2016 / 20160149146 - METHOD FOR MAKING THIN FILM TRANSISTOR | 13 |
| 9 | Shigeki Tanemura | US | Milpitas, CA | Feb 25, 2016 / 20160055869 - MAGNETIC HEAD FOR PERPENDICULAR MAGNETIC RECORDING INCLUDING TWO SIDE SHIELDS | 13 |
| 10 | Lee Chen | US | Cedar Creek, TX | Feb 25, 2016 / 20160056018 - ELECTRIC PRESSURE SYSTEMS FOR CONTROL OF PLASMA PROPERTIES AND UNIFORMITY | 12 |
| 11 | Kia Silverbrook | AU | Balmain | Nov 26, 2015 / 20150336384 - INKJET PRINTHEAD ASSEMBLY INCLUDING SLOTTED SHIELD PLATE | 12 |
| 12 | Sidlgata V. Sreenivasan | US | Austin, TX | Apr 28, 2016 / 20160118249 - NANOSHAPE PATTERNING TECHNIQUES THAT ALLOW HIGH-SPEED AND LOW-COST FABRICATION OF NANOSHAPE STRUCTURES | 11 |
| 13 | Sue Siyang Zhang | US | Saratoga, CA | May 07, 2015 / 20150122772 - METHOD AND APPARATUS FOR MAGNETIC RECORDING HEAD HAVING A WAVEGUIDE | 11 |
| 14 | Zhen-Dong Zhu | CN | Beijing | May 26, 2016 / 20160149080 - LIGHT EMITTING DIODE | 10 |
| 15 | Aron Pentek | US | San Jose, CA | Jan 29, 2015 / 20150029611 - STITCHED POLE HAVING A TAPERED TIP | 10 |
| 16 | Li-Hui Zhang | CN | Beijing | Mar 03, 2016 / 20160064612 - LIGHT EMITTING DEVICE AND DISPLAY DEVICE USING THE SAME | 10 |
| 17 | Mo Chen | CN | Beijing | Mar 03, 2016 / 20160064612 - LIGHT EMITTING DEVICE AND DISPLAY DEVICE USING THE SAME | 10 |
| 18 | Shahid Rauf | US | Pleasanton, CA | Mar 03, 2016 / 20160064244 - ATOMIC LAYER ETCH PROCESS USING AN ELECTRON BEAM | 9 |
| 19 | Yoshitaka Sasaki | US | Milpitas, CA | Apr 09, 2015 / 20150098154 - THIN-FILM MAGNETIC HEAD, METHOD OF MANUFACTURING THE SAME, HEAD GIMBAL ASSEMBLY, AND HARD DISK DRIVE | 9 |
| 20 | Ricardo Ruiz | US | Santa Clara, CA | May 19, 2016 / 20160140994 - DIRECTED SELF-ASSEMBLY OF NANOPARTICLES WITH POLYMERIC AND/OR OLIGOMERIC LIGANDS | 9 |
| 21 | Kai-Li Jiang | CN | Beijing | Apr 28, 2016 / 20160117025 - METHOD FOR MAKING TOUCH PANEL | 9 |
| 22 | Hiroyuki Ito | US | Milpitas, CA | Apr 28, 2016 / 20160115612 - METHOD OF MANUFACTURING A THIN-FILM MAGNETIC HEAD INCLUDING A COIL AND A MAGNETIC PATH FORMING SECTION | 9 |
| 23 | Yohei Yamazawa | JP | Nirasaki City | Jan 15, 2015 / 20150014276 - PLASMA PROCESSING METHOD | 8 |
| 24 | Sander Frederik Wuister | NL | Eindhoven | Mar 17, 2016 / 20160078160 - METHOD OF SIMULATING FORMATION OF LITHOGRAPHY FEATURES BY SELF-ASSEMBLY OF BLOCK COPOLYMERS | 8 |
| 25 | Ronald Steven Cok | US | Rochester, NY | May 12, 2016 / 20160133357 - PROVIDING ELECTRICALLY-CONDUCTIVE ARTICLES WITH ELECTRICALLY-CONDUCTIVE METALLIC CONNECTORS | 8 |
| 26 | Shogo Okita | JP | Hyogo | Apr 28, 2016 / 20160118284 - PLASMA PROCESSING APPARATUS | 8 |
| 27 | Nitin K. Ingle | US | San Jose, CA | Apr 28, 2016 / 20160118268 - SELECTIVE ETCH FOR METAL-CONTAINING MATERIALS | 8 |
| 28 | Satoshi Ibe | JP | Yokohama-Shi | Oct 15, 2015 / 20150290939 - METHOD FOR MANUFACTURING LIQUID EJECTION HEAD | 8 |
| 29 | Anchuan Wang | US | San Jose, CA | Mar 31, 2016 / 20160093506 - SILICON OXIDE SELECTIVE REMOVAL | 7 |
| 30 | Valentin N. Todorow | US | Palo Alto, CA | Oct 15, 2015 / 20150294843 - METHODS FOR EXTENDING CHAMBER COMPONENT LIFE FOR PLASMA PROCESSING SEMICONDUCTOR APPLICATIONS | 7 |
| 31 | Tomohiro Okumura | JP | Osaka | Mar 24, 2016 / 20160086774 - PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE | 7 |
| 32 | Frank Y. Xu | US | Round Rock, TX | Feb 18, 2016 / 20160047044 - NANO IMPRINTING WITH REUSABLE POLYMER TEMPLATE WITH METALLIC OR OXIDE COATING | 7 |
| 33 | Naoko Kihara | JP | Kawasaki-Shi | Apr 16, 2015 / 20150102008 - MAGNETIC RECORDING MEDIUM AND METHOD OF FABRICATING THE SAME | 7 |
| 34 | Douglas A. Buchberger, Jr. | US | Livermore, CA | Dec 24, 2015 / 20150371877 - SUBSTRATE SUPPORT WITH SYMMETRICAL FEED STRUCTURE | 7 |
| 35 | Thomas R. Albrecht | US | San Jose, CA | Mar 10, 2016 / 20160071537 - FABRICATION OF BIT PATTERNED MEDIA USING MICROCONTACT PRINTING | 7 |
| 36 | Merritt Funk | US | Austin, TX | Feb 25, 2016 / 20160056018 - ELECTRIC PRESSURE SYSTEMS FOR CONTROL OF PLASMA PROPERTIES AND UNIFORMITY | 7 |
| 37 | Kenneth S. Collins | US | San Jose, CA | Feb 11, 2016 / 20160042961 - ELECTRON BEAM PLASMA SOURCE WITH ROTATING CATHODE, BACKSIDE HELIUMCOOLING AND LIQUID COOLED PEDESTAL FOR UNIFORM PLASMA GENERATION | 7 |
| 38 | Akira Kikitsu | JP | Yokohama-Shi | Apr 16, 2015 / 20150102008 - MAGNETIC RECORDING MEDIUM AND METHOD OF FABRICATING THE SAME | 7 |
| 39 | Satoshi Shirotori | JP | Yokohama-Shi | Jan 29, 2015 / 20150030886 - MAGNETORESISTIVE ELEMENT, MAGNETIC HEAD, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS | 7 |
| 40 | Keisuke Kishimoto | JP | Yokohama-Shi | Mar 24, 2016 / 20160082731 - LIQUID EJECTION HEAD SUBSTRATE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF PROCESSING SILICON SUBSTRATE | 7 |
| 41 | Andrew D. Bailey, Iii | US | Pleasanton, CA | May 26, 2016 / 20160148786 - PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION | 7 |
| 42 | Yoshitaka Sasaki | US | Santa Clara, CA | Apr 28, 2016 / 20160115612 - METHOD OF MANUFACTURING A THIN-FILM MAGNETIC HEAD INCLUDING A COIL AND A MAGNETIC PATH FORMING SECTION | 7 |
| 43 | Hiroto Komiyama | JP | Tokyo | Dec 18, 2014 / 20140368579 - LIQUID EJECTION HEAD AND METHOD FOR MANUFACTURING THE SAME | 7 |
| 44 | Guomin Mao | US | San Jose, CA | Feb 05, 2015 / 20150036244 - SYSTEM AND METHOD OF FORMING SPACER STRUCTURES USING ULTRA NARROW MAGNETIC HEAD FABRICATION | 7 |
| 45 | Junichi Seki | JP | Yokohama-Shi | Jul 09, 2015 / 20150192855 - PROCESS FOR PRODUCING A MEMBER HAVING A PATTERN, A PATTERN TRANSFER APPARATUS, AND A MOLD | 7 |
| 46 | Hirokazu Komuro | JP | Yokohama-Shi | May 21, 2015 / 20150136024 - LIQUID DISCHARGE HEAD | 6 |
| 47 | Chen Feng | CN | Beijing | Apr 07, 2016 / 20160097941 - THERMOCHROMATIC DISPLAY DEVICE | 6 |
| 48 | Akio Ui | JP | Tokyo | Sep 24, 2015 / 20150265740 - GAS PROCESSING APPARATUS | 6 |
| 49 | Jeffrey Dysard | US | St. Charles, IL | Mar 31, 2016 / 20160089763 - COMPOSITION FOR TUNGSTEN CMP | 6 |
| 50 | Kaori Kimura | JP | Yokohama-Shi | Mar 17, 2016 / 20160078892 - MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING THE SAME | 6 |
| 51 | Kallol Bera | US | San Jose, CA | Apr 07, 2016 / 20160097122 - TOP LAMP MODULE FOR CAROUSEL DEPOSITION CHAMBER | 6 |
| 52 | Ken Miyagi | JP | Kawasaki-Shi | Jul 23, 2015 / 20150205207 - METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE, METHOD OF FORMING PATTERN AND METHOD OF FORMING FINE PATTERN | 6 |
| 53 | Masanobu Honda | JP | Nirasaki City | Jan 05, 2012 / 20120000886 - SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | 6 |
| 54 | Hisayoshi Watanabe | JP | Tokyo | May 21, 2015 / 20150140685 - MANUFACTURING METHOD FOR PATTERN MULTILAYER BODY AND MASK SET | 6 |
| 55 | Ajay Kumar | US | Cupertino, CA | May 19, 2016 / 20160141210 - WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH | 6 |
| 56 | Kazuhiro Asai | JP | Kawasaki-Shi | Jul 16, 2015 / 20150197092 - METHOD OF MANUFACTURING STRUCTURE AND METHOD OF MANUFACTURING LIQUID EJECTION HEAD | 6 |
| 57 | Dan B. Millward | US | Boise, ID | Dec 31, 2015 / 20150380260 - SEMICONDUCTOR STRUCTURES INCLUDING SELF-ASSEMBLED POLYMER DOMAINS REGISTERED TO THE UNDERLYING SELF-ASSEMBLED POLYMER DOMAINS, TEMPLATES COMPRISING THE SAME, AND METHODS OF FORMING THE SAME | 6 |
| 58 | Robert J. Greenberg | US | Los Angeles, CA | Nov 26, 2015 / 20150335892 - Visual Prosthetic Apparatus For Retinal Stimulation | 6 |
| 59 | Takuya Hatsui | JP | Tokyo | May 21, 2015 / 20150136024 - LIQUID DISCHARGE HEAD | 6 |
| 60 | Roelof Koole | NL | Eindhoven | Mar 24, 2016 / 20160084476 - ENCAPSULATED QUANTUM DOTS IN POROUS PARTICLES | 6 |
| 61 | Xikun Wang | US | Sunnyvale, CA | Apr 28, 2016 / 20160118268 - SELECTIVE ETCH FOR METAL-CONTAINING MATERIALS | 6 |
| 62 | Chishio Koshimizu | JP | Nirasaki City | Nov 21, 2013 / 20130308681 - METHOD OF MEASURING TEMPERATURE OF COMPONENT IN PROCESSING CHAMBER OF SUBSTRATE PROCESSING APPARATUS | 6 |
| 63 | Ryosuke Yamamoto | JP | Kawasaki-Shi | Mar 19, 2015 / 20150079794 - PATTERN FORMING METHOD | 6 |
| 64 | Steven Grumbine | US | Aurora, IL | Mar 31, 2016 / 20160089763 - COMPOSITION FOR TUNGSTEN CMP | 6 |
| 65 | Kaori Kimura | JP | Kawasaki-Shi | Jan 20, 2011 / 20110014496 - METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM | 6 |
| 66 | Xiao-Yang Lin | CN | Beijing | Mar 03, 2016 / 20160061734 - METHOD AND DEVICE FOR IMAGING 1-D NANOMATERIALS | 6 |
| 67 | Akio Hashizume | JP | Kyoto | Sep 17, 2015 / 20150258582 - SUBSTRATE PROCESSING DEVICE | 6 |
| 68 | Darrell Larue Mcreynolds | AU | Balmain | Mar 03, 2011 / 20110049091 - METHOD OF REMOVING PHOTORESIST AND ETCH-RESIDUES FROM VIAS | 6 |
| 69 | Michael N. Miller | US | Austin, TX | Sep 10, 2015 / 20150255640 - Nanostructured Solar Cell | 5 |
| 70 | Ludovic Godet | US | Sunnyvale, CA | May 26, 2016 / 20160148713 - MATERIAL MODIFICATION BY NEUTRAL BEAM SOURCE WITH SELECTED COLLISION ANGLE | 5 |
| 71 | Shimpei Otaka | JP | Yokohama-Shi | Sep 30, 2010 / 20100248156 - RESIN COMPOSITION, RESIN CURED PRODUCT, AND LIQUID DISCHARGE HEAD | 5 |
| 72 | Jeah-Sheng Wu | TW | Tu-Cheng | Dec 13, 2012 / 20120313885 - TOUCH PANEL | 5 |
| 73 | Jerry Ok | US | Canyon Country, CA | Oct 15, 2015 / 20150296628 - Biocompatible Bonding Method and Electronics Package Suitable for Implantation | 5 |
| 74 | Kwangyeol Lee | KR | Namyangju-Si | Nov 26, 2015 / 20150336798 - DEVICES FOR CARBON NANOTUBE LENGTH CONTROL | 5 |
| 75 | Masanori Naritomi | JP | Tokyo | Dec 24, 2015 / 20150369545 - HEAT EXCHANGER AND METHOD FOR MANUFACTURING SAME | 5 |
| 76 | Shin-Ya Nakafuji | JP | Tokyo | Mar 24, 2016 / 20160085152 - COMPOSITION FOR FILM FORMATION, RESIST UNDERLAYER FILM AND FORMING METHOD THEREOF, PATTERN-FORMING METHOD AND COMPOUND | 5 |
| 77 | Joy Cheng | US | San Jose, CA | Mar 24, 2016 / 20160085896 - METHOD FOR DESIGNING TOPOGRAPHIC PATTERNS FOR DIRECTING THE FORMATION OF SELF-ASSEMBLED DOMAINS AT SPECIFIED LOCATIONS ON SUBSTRATES | 5 |
| 78 | Kaori Kimura | JP | Tokyo | Mar 28, 2013 / 20130075358 - MAGNETIC RECORDING MEDIUM AND METHOD OF MANUFACTURING THE SAME | 5 |
| 79 | Emiel Peeters | NL | Eindhoven | Dec 31, 2015 / 20150380266 - METHODS FOR PROVIDING LITHOGRAPHY FEATURES ON A SUBSTRATE BY SELF-ASSEMBLY OF BLOCK COPOLYMERS | 5 |
| 80 | Ankur Agarwal | US | Mountain View, CA | Jun 04, 2015 / 20150155193 - ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD | 5 |
| 81 | Takashi Ota | JP | Kyoto | Feb 18, 2016 / 20160049308 - SUBSTRATE PROCESSING METHOD | 5 |
| 82 | Jia-Shyong Cheng | TW | Tu-Cheng | Mar 07, 2013 / 20130057943 - ELECTRONIC PAPER DISPLAY DEVICE | 5 |
| 83 | Su-Mi Lee | KR | Hwaseong-Si | May 12, 2016 / 20160131811 - WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME | 5 |
| 84 | Andrew Nguyen | US | San Jose, CA | Mar 24, 2016 / 20160081857 - Low Profile Eustachian Tube Dilation System | 5 |
| 85 | Teruo Sasagawa | US | Los Gatos, CA | Mar 31, 2016 / 20160091713 - PASSIVATED MICROELECTROMECHANICAL STRUCTURES AND METHODS | 5 |
| 86 | Koukou Suu | JP | Shizuoka | Feb 26, 2015 / 20150056373 - DEPOSITION METHOD AND DEPOSITION APPARATUS | 5 |
| 87 | Hiroyuki Itoh | US | Milpitas, CA | Sep 13, 2012 / 20120229932 - MAGNETIC HEAD FOR PERPENDICULAR MAGNETIC RECORDING | 5 |
| 88 | Yuan-Hao Jin | CN | Beijing | May 19, 2016 / 20160139511 - METHOD FOR MAKING NANO-PILLAR ARRAY ON SUBSTRATE | 5 |
| 89 | Tadahiro Ohmi | JP | Miyagi | Apr 21, 2016 / 20160109886 - FLOW RATE RANGE VARIABLE TYPE FLOW RATE CONTROL APPARATUS | 5 |
| 90 | Vladimir Nikitin | US | Campbell, CA | Apr 14, 2016 / 20160104544 - METHOD AND SYSTEM FOR DETERMINING TEMPERATURE USING A MAGNETIC JUNCTION | 5 |
| 91 | Alexei Marakhtanov | US | Albany, CA | May 26, 2016 / 20160148786 - PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION | 5 |
| 92 | Yasuhiro Morikawa | JP | Shizuoka | Jul 28, 2011 / 20110180388 - Plasma Processing Method and Plasma Processing Apparatus | 5 |
| 93 | Robert L. Mayfield | US | Jupiter, FL | Feb 18, 2016 / 20160045289 - Deposition of Discrete Nanoparticles on a Nanostructured Surface of an Implant | 5 |
| 94 | Naoki Andoh | JP | Tokyo | Nov 26, 2015 / 20150336355 - ALUMINUM ALLOY COMPOSITE AND METHOD FOR JOINING THEREOF | 5 |
| 95 | Atsunori Terasaki | JP | Kawasaki-Shi | Apr 14, 2016 / 20160101623 - PROCESSING METHOD OF SILICON SUBSTRATE, FABRICATING METHOD OF SUBSTRATE FOR LIQUID EJECTION HEAD, AND FABRICATING METHOD OF LIQUID EJECTION HEAD | 5 |
| 96 | Andreas Fischer | US | Castro Valley, CA | May 12, 2016 / 20160135274 - ADJUSTMENT OF VUV EMISSION OF A PLASMA VIA COLLISIONAL RESONANT ENERGY TRANSFER TO AN ENERGY ABSORBER GAS | 5 |
| 97 | Chad J. Patterson | US | Port Washington, WI | Mar 03, 2016 / 20160058574 - METHODS FOR MANUFACTURING IMPLANTS HAVING INTEGRATION SURFACES | 5 |
| 98 | Hiroyuki Hieda | JP | Yokohama-Shi | Apr 16, 2015 / 20150102008 - MAGNETIC RECORDING MEDIUM AND METHOD OF FABRICATING THE SAME | 5 |
| 99 | Dwayne L. Labrake | US | Cedar Park, TX | Jul 02, 2015 / 20150187590 - Methods for Uniform Imprint Pattern Transfer of Sub-20 nm Features | 5 |
| 100 | Ross W. Towse | US | Palm City, FL | Feb 18, 2016 / 20160045289 - Deposition of Discrete Nanoparticles on a Nanostructured Surface of an Implant | 5 |
