Patent application number | Description | Published |
20120274931 | DEFECT DETECTION METHOD AND DEFECT DETECTION DEVICE AND DEFECT OBSERVATION DEVICE PROVIDED WITH SAME - The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of a smaller scale. The electron microscope ( | 11-01-2012 |
20130277553 | METHOD AND APPARATUS FOR OBSERVING DEFECTS - Disclosed are a method and an apparatus for observing defects by using an SEM, wherein, in order to observe defects on a wafer at high speed and high sensitivity, positional information of defects on a sample, which has been optically inspected and detected by other inspecting apparatus, and information of the conditions of the optical inspection having been performed by other inspecting apparatus are obtained, and optically detecting the defects on the sample placed on a table, on the basis of the thus obtained information, and on the basis of the detected positional information of the defect on the sample placed on the table, the positional information of the defect having been inspected and detected by other inspecting apparatus is corrected, then, the defects on the sample placed on the table are observed by the SEM using the thus corrected positional information of the defects. | 10-24-2013 |
20140170486 | COMPOSITE PARTICLES FOR ELECTROCHEMICAL DEVICE ELECTRODE, MATERIAL FOR ELECTROCHEMICAL DEVICE ELECTRODE, AND ELECTROCHEMICAL DEVICE ELECTRODE - Composite particles for electrochemical device electrode which contain an electrode active material, a non-water soluble particle-shaped polymer, and a water-soluble polymer having a sulfonic acid group are provided. According to the present invention, composite particles for electrochemical device electrode are high in fluidity, exhibit high adhesion with a current collector, and can provide an electrochemical device electrode which is high in initial capacity, low in internal resistance, an excellent in high temperature storage characteristics are provided. | 06-19-2014 |
20140204194 | DEFECT OBSERVATION METHOD AND DEVICE THEREFOR - This invention relates to a method for performing an analysis of defective material and the refractive index, and a three-dimensional analysis of very small pattern shapes including the steps of imaging by a scanning electron microscope to acquire an image of the position of a defect under observation using information of inspection results obtained by an optical inspection device, creating a model of the defect by using the acquired image of the defect under observation, calculating the values detected by the detector when reflected and scattered light emitted from a defect model is received by the detector when light is irradiated onto the defect model thus created, comparing the detection values thus calculated and the values detected by the detector, which has received light actually reflected and scattered from the sample, to obtain information relating to the height of the defect under observation, the material, or the refractive index. | 07-24-2014 |
20140342225 | ELECTRODE FOR ELECTROCHEMICAL DEVICE - An electrode for electrochemical device which is provided with an electrode active material layer containing an electrode active material and a binder, comprising binder-covered parts | 11-20-2014 |
20150116712 | DEFECT DETECTION METHOD AND DEFECT DETECTION DEVICE AND DEFECT OBSERVATION DEVICE PROVIDED WITH SAME - The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of a smaller scale. The electron microscope, which observes defects detected by an optical appearance-inspecting device or by an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a spatial filter and a distribution polarization element are inserted at the pupil plane when making dark-field observations using this optical microscope. The electron microscope, which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a distribution filter is inserted at the pupil plane when making dark-field observations using this optical microscope. | 04-30-2015 |
20150276622 | METHOD AND DEVICE FOR DETECTING DEFECTS AND METHOD AND DEVICE FOR OBSERVING DEFECTS - The present invention is suppressing the elongating phenomenon in the dark field image of defects in detecting a minute defect by using a dark field microscope. Provided is a method for detecting defects in which scattered light generated from the sample, is concentrated to form an image and is captured and processed to extract a defect to find the positional information of the defect, and the positional information is output, wherein an image of the scattered light that suppresses the occurrence of the elongating phenomenon is formed for which partial shielding of a component of the forward scattered light, that passes through a region near the outer edge of the field of view of the objective lens, and the positional information for the defect is found from a luminance signal for a defect that is extracted from a captured scattered light image that suppresses the occurrence of the elongating phenomenon. | 10-01-2015 |
20150361119 | COMPOUND HAVING LYSOPHOSPHATIDYLSERINE RECEPTOR FUNCTION MODULATION ACTIVITY - The object of the present invention is to provide a compound having a lysophosphatidylserine receptor function modulation activity or a salt thereof. | 12-17-2015 |